JPS632764U - - Google Patents
Info
- Publication number
- JPS632764U JPS632764U JP9557286U JP9557286U JPS632764U JP S632764 U JPS632764 U JP S632764U JP 9557286 U JP9557286 U JP 9557286U JP 9557286 U JP9557286 U JP 9557286U JP S632764 U JPS632764 U JP S632764U
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- vapor deposition
- electrode
- bombarded
- physical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557286U JPS632764U (OSRAM) | 1986-06-23 | 1986-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557286U JPS632764U (OSRAM) | 1986-06-23 | 1986-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS632764U true JPS632764U (OSRAM) | 1988-01-09 |
Family
ID=30960263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9557286U Pending JPS632764U (OSRAM) | 1986-06-23 | 1986-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS632764U (OSRAM) |
-
1986
- 1986-06-23 JP JP9557286U patent/JPS632764U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0285668A4 (en) | Thin film formation apparatus | |
| EP0387904A3 (en) | Method of producing thin film | |
| EP0269112A3 (en) | Method of forming a thin crystalline metal film | |
| JPS632764U (OSRAM) | ||
| JP2570560Y2 (ja) | 電子ビーム蒸発源 | |
| JPS6452061A (en) | Formation of metal film | |
| JPS57189852A (en) | Production of gravure plate | |
| JPS6314859A (ja) | 金属蒸発方法 | |
| JPS58697Y2 (ja) | スパッタ用タ−ゲット | |
| JPS60228672A (ja) | 真空蒸着法 | |
| RU97109128A (ru) | Способ нанесения покрытия на основе нитрида кремния на стеклянную, в том числе кварцевую, поверхность | |
| JP3364692B2 (ja) | 電磁波シールド用成膜方法と装置 | |
| JPH0230442Y2 (OSRAM) | ||
| JPS59101032A (ja) | 磁気記録媒体の製造方法 | |
| JPS6013067B2 (ja) | 真空蒸着装置 | |
| JPS5634150A (en) | Manufacture of magnetic recording medium | |
| JPH057238Y2 (OSRAM) | ||
| JPH0238463U (OSRAM) | ||
| JPS63127975U (OSRAM) | ||
| JPS6043914B2 (ja) | スパツタリング製膜方法 | |
| JPH0397853A (ja) | レーザーを利用したｐｖｄ装置 | |
| JPS6478430A (en) | Magnetic disk and its manufacture | |
| JPS6191357A (ja) | 蒸着装置 | |
| JPS5684471A (en) | Vacuum evaporation | |
| JPS62101860U (OSRAM) |