JPS63274894A - 送り装置 - Google Patents

送り装置

Info

Publication number
JPS63274894A
JPS63274894A JP62109133A JP10913387A JPS63274894A JP S63274894 A JPS63274894 A JP S63274894A JP 62109133 A JP62109133 A JP 62109133A JP 10913387 A JP10913387 A JP 10913387A JP S63274894 A JPS63274894 A JP S63274894A
Authority
JP
Japan
Prior art keywords
leg
drive
fixed base
movable element
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62109133A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381119B2 (enrdf_load_stackoverflow
Inventor
魚住 清彦
圭一 中本
藤岡 景昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP62109133A priority Critical patent/JPS63274894A/ja
Publication of JPS63274894A publication Critical patent/JPS63274894A/ja
Publication of JPH0381119B2 publication Critical patent/JPH0381119B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/50Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step-by-step
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP62109133A 1987-05-01 1987-05-01 送り装置 Granted JPS63274894A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62109133A JPS63274894A (ja) 1987-05-01 1987-05-01 送り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62109133A JPS63274894A (ja) 1987-05-01 1987-05-01 送り装置

Publications (2)

Publication Number Publication Date
JPS63274894A true JPS63274894A (ja) 1988-11-11
JPH0381119B2 JPH0381119B2 (enrdf_load_stackoverflow) 1991-12-27

Family

ID=14502415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62109133A Granted JPS63274894A (ja) 1987-05-01 1987-05-01 送り装置

Country Status (1)

Country Link
JP (1) JPS63274894A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0353192A (ja) * 1989-07-20 1991-03-07 Nec Corp 位置決め装置
US5241235A (en) * 1991-05-31 1993-08-31 Rockwell International Corporation Twisting actuators
JP2002272149A (ja) * 2001-03-15 2002-09-20 Taiheiyo Cement Corp 送り装置および回転装置
JP2015008631A (ja) * 2009-03-31 2015-01-15 株式会社ニコン 圧電アクチュエータ及びレンズ鏡筒

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001293630A (ja) * 2000-04-14 2001-10-23 Japan Science & Technology Corp 送り装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0353192A (ja) * 1989-07-20 1991-03-07 Nec Corp 位置決め装置
US5241235A (en) * 1991-05-31 1993-08-31 Rockwell International Corporation Twisting actuators
JP2002272149A (ja) * 2001-03-15 2002-09-20 Taiheiyo Cement Corp 送り装置および回転装置
JP2015008631A (ja) * 2009-03-31 2015-01-15 株式会社ニコン 圧電アクチュエータ及びレンズ鏡筒
US9154053B2 (en) 2009-03-31 2015-10-06 Nikon Corporation Piezoelectric actuator and lens barrel

Also Published As

Publication number Publication date
JPH0381119B2 (enrdf_load_stackoverflow) 1991-12-27

Similar Documents

Publication Publication Date Title
JP2839543B2 (ja) 変位発生装置
JP3980646B2 (ja) 圧電気アクチュエータまたはモーター、その方法ならびにその製造方法
US5130599A (en) Vibrator-type actuator
US6337532B1 (en) Fine walking actuator
JP2011188739A (ja) ウォーキングアクチュエータ
US4600854A (en) Piezoelectric stepping rotator
Bergander et al. Micropositioners for microscopy applications based on the stick-slip effect
JPS63274894A (ja) 送り装置
JP4841432B2 (ja) 親ねじ用超音波モータ
US6459190B1 (en) Switched actuator control
CN109951101B (zh) 压电驱动的超精密四自由度定位调姿机构及其激励方法
Chu et al. Design and experiments of a miniature piezoelectric actuator using a multilayer PZT bimorph
JPH05175567A (ja) 積層型アクチュエータ
Hu et al. A piezoelectric spherical motor with two degree-of-freedom
JPS61159349A (ja) 微小変位移動装置
JP2839526B2 (ja) 静電形アクチュエータ
JPS6057577A (ja) 磁気ヘッド位置決め機構
JP3173261B2 (ja) 静電アクチュエータ
JP2000022231A (ja) 圧電装置
JPH0477323B2 (enrdf_load_stackoverflow)
Devos et al. A planar piezoelectric drive with a stepping and a resonant operation mode
JP2005102368A (ja) 駆動装置
JPS6271480A (ja) 圧電アクチユエ−タ
JP2004297989A (ja) ローターを磁石により保持した超音波モータ
JPH02139979A (ja) 微小駆動機構

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071227

Year of fee payment: 16