JPS6326557B2 - - Google Patents

Info

Publication number
JPS6326557B2
JPS6326557B2 JP54151647A JP15164779A JPS6326557B2 JP S6326557 B2 JPS6326557 B2 JP S6326557B2 JP 54151647 A JP54151647 A JP 54151647A JP 15164779 A JP15164779 A JP 15164779A JP S6326557 B2 JPS6326557 B2 JP S6326557B2
Authority
JP
Japan
Prior art keywords
amorphous silicon
silicon film
substrate
manufacturing
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54151647A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5678412A (en
Inventor
Nobuhiko Fujita
Akio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP15164779A priority Critical patent/JPS5678412A/ja
Publication of JPS5678412A publication Critical patent/JPS5678412A/ja
Publication of JPS6326557B2 publication Critical patent/JPS6326557B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP15164779A 1979-11-22 1979-11-22 Preparation of noncrystalline silicone film Granted JPS5678412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15164779A JPS5678412A (en) 1979-11-22 1979-11-22 Preparation of noncrystalline silicone film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15164779A JPS5678412A (en) 1979-11-22 1979-11-22 Preparation of noncrystalline silicone film

Publications (2)

Publication Number Publication Date
JPS5678412A JPS5678412A (en) 1981-06-27
JPS6326557B2 true JPS6326557B2 (enExample) 1988-05-30

Family

ID=15523128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15164779A Granted JPS5678412A (en) 1979-11-22 1979-11-22 Preparation of noncrystalline silicone film

Country Status (1)

Country Link
JP (1) JPS5678412A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364654U (enExample) * 1986-10-17 1988-04-28

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848970A (ja) * 1981-09-18 1983-03-23 Matsushita Electric Ind Co Ltd 光起電力素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364654U (enExample) * 1986-10-17 1988-04-28

Also Published As

Publication number Publication date
JPS5678412A (en) 1981-06-27

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