JPS63261249A - シ−ト状物の真空吸着装置 - Google Patents

シ−ト状物の真空吸着装置

Info

Publication number
JPS63261249A
JPS63261249A JP62095859A JP9585987A JPS63261249A JP S63261249 A JPS63261249 A JP S63261249A JP 62095859 A JP62095859 A JP 62095859A JP 9585987 A JP9585987 A JP 9585987A JP S63261249 A JPS63261249 A JP S63261249A
Authority
JP
Japan
Prior art keywords
suction
ventilation
holes
sheet
mat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62095859A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451814B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kenji Watanabe
渡辺　謙治
Joji Hashimoto
橋本　丈治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP62095859A priority Critical patent/JPS63261249A/ja
Publication of JPS63261249A publication Critical patent/JPS63261249A/ja
Publication of JPH0451814B2 publication Critical patent/JPH0451814B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holders For Sensitive Materials And Originals (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62095859A 1987-04-18 1987-04-18 シ−ト状物の真空吸着装置 Granted JPS63261249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62095859A JPS63261249A (ja) 1987-04-18 1987-04-18 シ−ト状物の真空吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62095859A JPS63261249A (ja) 1987-04-18 1987-04-18 シ−ト状物の真空吸着装置

Publications (2)

Publication Number Publication Date
JPS63261249A true JPS63261249A (ja) 1988-10-27
JPH0451814B2 JPH0451814B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-20

Family

ID=14149088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62095859A Granted JPS63261249A (ja) 1987-04-18 1987-04-18 シ−ト状物の真空吸着装置

Country Status (1)

Country Link
JP (1) JPS63261249A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106551A (ja) * 1990-08-27 1992-04-08 Orc Mfg Co Ltd 自動露光装置および投入ステージ
WO2001016654A1 (fr) * 1999-09-01 2001-03-08 Sanei Giken Co., Ltd. Table de systeme d'exposition supportant un substrat
USRE43736E1 (en) 2002-09-27 2012-10-16 Gerber Scientific International, Inc. Perforated vacuum hold down surface
WO2013121796A1 (ja) * 2012-02-17 2013-08-22 日東電工株式会社 吸着用多孔質シートおよび吸着用多孔質シートに用いる交換用表面層
TWI613449B (zh) * 2016-12-30 2018-02-01 致茂電子股份有限公司 吸附式測試裝置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762816A (en) * 1972-03-31 1973-10-02 Western Blue Print Co Photoreproduction apparatus with auxiliary film holder
JPS56145044U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-03-31 1981-11-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762816A (en) * 1972-03-31 1973-10-02 Western Blue Print Co Photoreproduction apparatus with auxiliary film holder
JPS56145044U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-03-31 1981-11-02

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106551A (ja) * 1990-08-27 1992-04-08 Orc Mfg Co Ltd 自動露光装置および投入ステージ
WO2001016654A1 (fr) * 1999-09-01 2001-03-08 Sanei Giken Co., Ltd. Table de systeme d'exposition supportant un substrat
USRE43736E1 (en) 2002-09-27 2012-10-16 Gerber Scientific International, Inc. Perforated vacuum hold down surface
WO2013121796A1 (ja) * 2012-02-17 2013-08-22 日東電工株式会社 吸着用多孔質シートおよび吸着用多孔質シートに用いる交換用表面層
TWI613449B (zh) * 2016-12-30 2018-02-01 致茂電子股份有限公司 吸附式測試裝置

Also Published As

Publication number Publication date
JPH0451814B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-20

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