JPS63259831A - Production of thin film type magnetic disk - Google Patents
Production of thin film type magnetic diskInfo
- Publication number
- JPS63259831A JPS63259831A JP9382387A JP9382387A JPS63259831A JP S63259831 A JPS63259831 A JP S63259831A JP 9382387 A JP9382387 A JP 9382387A JP 9382387 A JP9382387 A JP 9382387A JP S63259831 A JPS63259831 A JP S63259831A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- disk
- protective layer
- lubricating
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010410 layer Substances 0.000 claims abstract description 29
- 239000011241 protective layer Substances 0.000 claims abstract description 18
- 230000001050 lubricating effect Effects 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- 239000010702 perfluoropolyether Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 12
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 4
- 239000010408 film Substances 0.000 abstract 1
- 239000000314 lubricant Substances 0.000 description 15
- 239000000758 substrate Substances 0.000 description 7
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 125000000876 trifluoromethoxy group Chemical group FC(F)(F)O* 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は薄膜型磁気ディスクの製造方法に関し、ざらに
詳しくは、基板面に下地層を介し、或は直接設けられた
磁性層の面に、面を覆って順次取付けられる保ＨＦｎお
よび潤滑層の取付は方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for manufacturing a thin-film magnetic disk. , the application of protective HFn and lubricant layers applied sequentially over a surface relates to a method.
磁気ディスク装置は］ンピコータシステムの記憶装置と
してその重要性が年々高まってきており、その記憶量増
大のため、記録密度の向上がはかられ、薄膜型磁気ディ
スクの開発が進められている。The importance of magnetic disk devices as storage devices for pump coater systems is increasing year by year, and in order to increase the storage capacity, efforts are being made to improve recording density, and development of thin-film magnetic disks is progressing.
磁気ディスク（以下ディスクという）は磁気ヘッド（以
下ヘッドという）と組合わせて用いられるが、通常ＣＳ
Ｓ （Ｃｏｎｔａｃｔ ５ｔａｒｔ ５ｔｏｐ）方式
が採用されている。これは、ディスクを回転させると、
それに伴う空気の流れによってヘッドが浮上し、ディス
クの回転を停止するとヘッドがディスク面に着陸する方
式である。したがって、ヘッドとディスク面とは滑り易
く、かつ離れ易く、ヘッドの浮上、着陸が容易で、非使
用時にはヘッドとディスク面とが長期間接触していても
、何等問題を起さないことが要求される。A magnetic disk (hereinafter referred to as a disk) is used in combination with a magnetic head (hereinafter referred to as a head), but usually a CS
The S (Contact 5tart 5top) method is adopted. This means that when you rotate the disk,
The accompanying airflow causes the head to float, and when the disk stops rotating, the head lands on the disk surface. Therefore, it is required that the head and disk surface slip easily and separate easily, that the head can float and land easily, and that no problems will occur even if the head and disk surface are in contact for a long period of time when not in use. be done.
しかし、Ｃ８Ｓ方式を採用した場合、薄膜型ディスクは
、塗布型ディスクに比べて傷つぎ易く、ヘッドとディス
クの間の摩擦係数の上昇が早く、極端な場合にはディス
クの回転が困難となる。また、傷により正確な読み出し
ができなくなり、エラーの原因となることもある。その
ため、通常、最上層にスパッタリングによってカーボン
の保護層を設りているが、上記の問題を解決するに到ら
ず、薄膜型ディスクの耐久性の向上は、重要な課題とな
っており、これを目的とした多くの研究がなされている
。However, when the C8S method is adopted, the thin film type disk is more easily damaged than the coated type disk, and the coefficient of friction between the head and the disk increases quickly, making it difficult to rotate the disk in extreme cases. In addition, scratches may prevent accurate reading and cause errors. For this reason, a carbon protective layer is usually provided on the top layer by sputtering, but this has not solved the above problems, and improving the durability of thin-film disks has become an important issue. Many studies have been conducted for this purpose.
その解決方法の一つに保１１ｉｆｆを覆って、さらに潤
滑層を設ける方法が検討されている。しかし、潤滑層を
設けることによってヘッドがディスク面に吸７４する、
いわゆるスディック現象が発生し易くなり、また、潤滑
性についても、充分な効果が発揮されていないのが現状
である
本発明者らは上記の問題を解決すべく、潤滑剤の塗布方
法について研究を重ねた結果、潤滑剤を塗布する前に、
保護層の表面が空気中の水分や炭化水素等を吸着し、潤
滑剤が均一塗布されなくなったり、潤滑剤の吸着が充分
に行なわないことが、潤滑性に悪影響を与える主原因で
あることを知見した。One method of solving this problem is to cover the insulation 11iff and further provide a lubricating layer. However, by providing a lubricating layer, the head absorbs 74 the disk surface.
The so-called Sudik phenomenon is more likely to occur, and the current situation is that sufficient lubricity is not achieved.In order to solve the above problems, the present inventors conducted research on a lubricant application method. As a result of overlapping, before applying lubricant,
The main cause of adverse effects on lubricity is that the surface of the protective layer adsorbs moisture, hydrocarbons, etc. in the air, making it impossible to apply the lubricant uniformly or not adsorbing the lubricant sufficiently. I found out.
本発明は上記の知見に基づいて達成されたちの′で、ヘ
ッドの浮上、着陸がスムームに行なわれ、長期にわたっ
て使用可能な薄膜型ディスクの製造方法を提供すること
を目的とする。The present invention has been achieved based on the above findings, and an object of the present invention is to provide a method for manufacturing a thin-film type disk in which the head can smoothly float and land and can be used for a long period of time.
本発明は上記の目的を達成すべくなされたもので、その
要旨は、磁性層を被覆して保護層および潤滑層を順次設
ける薄膜型磁気ディスクの製造方法において、保護層と
して、カーボン層をスパッタリングによって形成した後
、これを直ちに、フロン類の蒸気に接触させ、上記カー
ボン層にフロン類を吸着させた後、パーフルオロポリエ
ーテル類を塗布して潤滑層を形成する薄膜型磁気ディス
クの’Ｍ造方法にある。The present invention has been made to achieve the above object, and its gist is a method for manufacturing a thin-film magnetic disk in which a magnetic layer is coated and a protective layer and a lubricant layer are sequentially provided, in which a carbon layer is sputtered as a protective layer. After forming the thin-film magnetic disk, it is immediately brought into contact with fluorocarbon vapor to adsorb the fluorocarbons to the carbon layer, and then a perfluoropolyether is applied to form a lubricating layer. It's in the construction method.
本発明の方法によってつくられた薄膜型ディスクは、最
外面に保護層に強固に含浸、吸着された潤滑層が形成さ
れているので、潤滑性は良好でスティック規象を発生せ
ず、ヘッドの浮上、着陸が容易で、摩擦係数の１胃もほ
とんどない。The thin-film type disk manufactured by the method of the present invention has a lubricating layer strongly impregnated and adsorbed by the protective layer on the outermost surface, so it has good lubricity and does not cause stick problems, and the head It is easy to ascend and land, and there is almost no coefficient of friction.
本発明に用いられる潤滑剤としては、Ｆ−ＣＦ３
（０−０２ｒ ４ ） 、 ” （０−ＣＦ
２ ） 。The lubricant used in the present invention includes F-CF3
(0-02r 4), ” (0-CF
2).
０ＣＦ２−ＯＣＦ３で代表されるパーフルオロポリエー
テル類である。このパーフルオロポリエーテル類の溶媒
として用いられるフロン類としては、フロン１１ （Ｃ
ＣＲｇ Ｆ） 、７Ｄ：／ ７１２（ＣＣ１２Ｆ−ＣＣ
９２Ｆ）、フロン１１３（ｃｃＲ２Ｆ・ＣＣｊＦ２）が
挙げられるが、沸点が４７．３℃で取扱い易く、かつ気
散させ易いことがらフロン１１３が好ましい。These are perfluoropolyethers represented by 0CF2-OCF3. Freon 11 (C
CRg F), 7D:/712 (CC12F-CC
92F) and Freon 113 (ccR2F/CCjF2), but Freon 113 is preferred because it has a boiling point of 47.3°C, is easy to handle, and is easy to diffuse.
また、基板としては、アルミニウム合金版のドーナツ形
円板、或はこの基板に下地層としてＮ１−Ｐメッキを施
したもの等、通常磁気ディスクに用いるものがいずれも
使用できる。Further, as the substrate, any substrate normally used for magnetic disks can be used, such as a donut-shaped aluminum alloy plate or a substrate coated with N1-P plating as an underlayer.
これより薄膜型ディスクを製造するには、上記基板面、
或は下地面に公知の方法によって磁性層を形成し、この
磁性層の面に、公知のスパッタリング法によってカーボ
ンよりなる保護層を形成ずる。この保護層を形成した後
、直ちにこれをフロン蒸気内に入れ、上記保護層にフロ
ン類を含浸、吸着させる。次いで、潤滑剤を塗布する。In order to manufacture a thin film disk from this, the above substrate surface,
Alternatively, a magnetic layer is formed on the underlying surface by a known method, and a protective layer made of carbon is formed on the surface of this magnetic layer by a known sputtering method. Immediately after forming this protective layer, it is placed in fluorocarbon vapor to impregnate and adsorb fluorocarbons into the protective layer. Then apply lubricant.
この塗布の方法は制限ないが、上記溶媒に潤滑剤を溶解
した溶液をスピンコードするのが、均一塗布する上から
好ましい。Although there are no restrictions on the coating method, it is preferable to spin code a solution in which a lubricant is dissolved in the above-mentioned solvent in order to achieve uniform coating.
上記操作によって、潤滑剤は、保護層の面を均一、かつ
強固に覆い、潤滑層／保護層／磁性層／基板、或は潤滑
Ｂ／保護層／Ｉｌ性竹屑下地層／基板よりなる薄膜型デ
ィスクが製造される。By the above operation, the lubricant uniformly and firmly covers the surface of the protective layer, forming a thin film consisting of lubricant layer/protective layer/magnetic layer/substrate or lubricant B/protective layer/Il-based bamboo waste base layer/substrate. A mold disc is manufactured.
実施例１
外径９５＃、内径２５ｍのドーナツ状円板のアルミニウ
ム合金基板にＮＬ−Ｐの無電解メッキを厚さ１５μ７ｎ
施した後、平均表面粗さを５０人に仕上げた。この仕上
げた面に、Ｃｒ２０００人＋Ｃｏ−ＮＬ−Ｃｒ ５００
人、 Ｃ４００人を順次スパッタリング法によってつ（
）、磁性層、保］？４を形成した。Example 1 Electroless plating of NL-P was applied to a thickness of 15μ7n on a donut-shaped disc aluminum alloy substrate with an outer diameter of 95# and an inner diameter of 25m.
After application, the average surface roughness was finished to 50. On this finished surface, 2000 Cr+Co-NL-Cr 500
400 people were sequentially sputtered (
), magnetic layer, retention]? 4 was formed.
このディスクをスパッタ機からとり出し、直ちにフロン
１１３（ＣＣＲ２ＦＣ−ＣＦ２Ｃｊ）（１）Ｋ５気相に
入れ、１０分間保持して降温した。次にパー７ルオロボ
リｉ−フル（例えばＨＯＮＴＥＦＬＵＯ３，Ｆｏｍｂｌ
ｉｎ■ｌ−２５） ０．０５９をフロン１１３１０
０ｄに溶かした液を片面当り１ｍｆ！スピンコードして
ディスクをつくった。これを試料Δとする。This disk was taken out from the sputtering machine and immediately placed in a Freon 113 (CCR2FC-CF2Cj) (1) K5 gas phase and held for 10 minutes to cool down. Next, per7fluorobolii-flu (e.g. HONTEFLUO3, Fombl)
in■l-25) 0.059 Freon 11310
1mf per side of the solution dissolved in 0d! I created a disc by spin-coding it. This is designated as sample Δ.
比較例１
スパッタ機から取出した後、フロン蒸気相に入れず、そ
のまま空気中で３０分間冷却した他は実施例１と同じに
してディスクを作成した。これを試料Ｂとづる。Comparative Example 1 A disk was produced in the same manner as in Example 1, except that after taking it out from the sputtering machine, it was cooled in the air for 30 minutes without being placed in the fluorocarbon vapor phase. This will be referred to as sample B.
上記試料Ａ、Ｂをそれぞれスピンドルにセットし、ヘッ
ドをロードして、ディスクの回転／停止を繰返し、ヘッ
ドとディスク間の摩擦係数μを測定した。その結果、試
料Ｂでは５００回の回転／停止によりμは０．１５〜０
．３０の間で振動し、５０００回では０．２０〜０６０
間で振動した。これは、潤滑剤の塗布が均一でなく、ま
た、保護層に対する密着性も充分でないため、スティッ
ク−スリップを起したものと思われる。−・方試料Ａで
は、１ｏｏｏｏ回の回転／停止の繰返し後のμが０，３
０〜０．４０の値を示し、以降この値を保持し、スティ
ック−スリップが発生しないことを示した。The above samples A and B were each set on a spindle, the head was loaded, the disk was rotated/stopped repeatedly, and the coefficient of friction μ between the head and the disk was measured. As a result, in sample B, μ was 0.15 to 0 after 500 rotations/stops.
．． It vibrates between 30 and 0.20 to 060 at 5000 times.
It vibrated between. This seems to be because the lubricant was not applied uniformly and its adhesion to the protective layer was not sufficient, causing stick-slip. - For sample A, μ after repeating rotation/stopping 100 times is 0.3
It showed a value of 0 to 0.40 and maintained this value thereafter, indicating that no stick-slip occurred.
以上述べたように、本発明の方法によって、保護層面に
極めて強固、かつ均一に潤滑層を形成することが出来る
ので、スティック−スリップが発生せず、ヘッドのディ
スク面に対する浮上、着陸がスムースで、長期にわたっ
て潤滑剤の効果が保持され、耐久性のある薄膜型磁気デ
ィスクをつくることが出来る。As described above, the method of the present invention makes it possible to form an extremely strong and uniform lubricant layer on the surface of the protective layer, so that stick-slip does not occur and the head flies and lands smoothly on the disk surface. , the lubricant's effectiveness is maintained over a long period of time, making it possible to create a durable thin-film magnetic disk.
Claims (1)
型磁気ディスクの製造方法において、保護層として、カ
ーボン層をスパッタリングによって形成した後、これを
直ちに、フロン類の蒸気に接触させ、上記カーボン層に
フロン類を吸着させた後、パーフルオロポリエーテル類
を塗布して潤滑層を形成することを特徴とする薄膜型磁
気ディスクの製造方法。In a method for manufacturing a thin-film magnetic disk in which a protective layer and a lubricating layer are sequentially provided over a magnetic layer, a carbon layer is formed by sputtering as a protective layer, and then immediately brought into contact with fluorocarbon vapor to remove the carbon. A method for producing a thin-film magnetic disk, which comprises adsorbing fluorocarbons onto the layer and then applying perfluoropolyether to form a lubricating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382387A JPS63259831A (en) | 1987-04-16 | 1987-04-16 | Production of thin film type magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382387A JPS63259831A (en) | 1987-04-16 | 1987-04-16 | Production of thin film type magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63259831A true JPS63259831A (en) | 1988-10-26 |
Family
ID=14093119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9382387A Pending JPS63259831A (en) | 1987-04-16 | 1987-04-16 | Production of thin film type magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63259831A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02128321A (en) * | 1988-11-07 | 1990-05-16 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
| JPH03267178A (en) * | 1990-03-16 | 1991-11-28 | Hitachi Ltd | Formation of lubricating film and production of magnetic recording medium |
-
1987
- 1987-04-16 JP JP9382387A patent/JPS63259831A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02128321A (en) * | 1988-11-07 | 1990-05-16 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
| JPH03267178A (en) * | 1990-03-16 | 1991-11-28 | Hitachi Ltd | Formation of lubricating film and production of magnetic recording medium |
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