JPH0684168A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH0684168A
JPH0684168A JP23440392A JP23440392A JPH0684168A JP H0684168 A JPH0684168 A JP H0684168A JP 23440392 A JP23440392 A JP 23440392A JP 23440392 A JP23440392 A JP 23440392A JP H0684168 A JPH0684168 A JP H0684168A
Authority
JP
Japan
Prior art keywords
film
magnetic
recording medium
gas
lubrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23440392A
Other languages
Japanese (ja)
Inventor
Kenji Tomita
健二 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP23440392A priority Critical patent/JPH0684168A/en
Publication of JPH0684168A publication Critical patent/JPH0684168A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To achieve improved wear resistance and lubrication characteristics by forming a carbon lamination protection film consisting of two layers of a wear resistance film and a lubrication film which are formed on a non- magnetic substrate. CONSTITUTION:An intermediate layer 2 such as Cr alloy is provided on a non- magnetic substrate 1 such as Al allay or a glass and then a magnetic layer 3 consisting of Co or its alloy is provided on it and further a carbon lamination protection layer 4 and an organic lubrication layer 5 are provided on it. The protection layer 4 consists of two layers of a wear resistance film 4a containing nitrogen with improved wear resistance and a lubrication film 4b containing hydrogen with improved lubrication characteristics. The wear resistance film 4a is formed in a mixed gas with Ar gas containing 25% nitrogen gas and the lubrication film 4b is formed in Ar gas containing 20% hydrogen gas. Since the carbon lamination protection film consisting of the wear resistance film 4a and the lubrication film 4b is formed on the magnetic layer 3, a magnetic recording medium with improved wear resistance and lubrication characteristics can be mass-produced inexpensively with a high yield.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、コンピュータ,ワープ
ロ等に用いられる磁気ディスク等の磁気記録媒体に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium such as a magnetic disk used in computers, word processors and the like.

【0002】[0002]

【従来の技術】近年、高密度記録用の磁気記録媒体とし
て金属薄膜ディスクが利用されている。このような磁気
記録媒体に記録再生を行う際には、CSS方式(コンタ
クトスタートストップ方式)が一般的に用いられる。上
記方式において、磁気ヘッドと磁気記録媒体は停止時に
は磁気ヘッドと磁気記録媒体が接触した状態にあり、磁
気記録媒体に回転を与えることにより磁気ヘッドと磁気
記録媒体との間に微小な空気層を形成して記録再生を行
う。
2. Description of the Related Art In recent years, a metal thin film disk has been used as a magnetic recording medium for high density recording. When performing recording / reproducing on such a magnetic recording medium, the CSS method (contact start / stop method) is generally used. In the above method, the magnetic head and the magnetic recording medium are in contact with each other when stopped, and a minute air layer is formed between the magnetic head and the magnetic recording medium by applying rotation to the magnetic recording medium. It is formed and recorded and reproduced.

【0003】このようなCSS方式では、磁気ヘッドと
磁気記録媒体の間に生じる摩擦力は、時として磁性層に
まで損傷を与えたり、操作開始時の吸着現象により磁気
記録媒体の回転を妨げたりすることがある。このため耐
摩耗性と潤滑性のある炭素系保護膜をスパッタリング法
にて形成し、その上部に有機系の潤滑剤を塗布すること
により摩擦係数の上昇を防止している。また高密度化に
対して磁気ヘッドの材料もフェライトからセラミック,
Al23TiCと硬質材料が用いられる傾向にあり、磁
気記録媒体に対する耐摩耗性能の向上は不可欠である。
さらに省力化として長時間使用しない場合、電源を自動
的に切る機能が備えられておりCSS回数も増加してい
る。
In such a CSS system, the frictional force generated between the magnetic head and the magnetic recording medium sometimes damages the magnetic layer, or the rotation of the magnetic recording medium is hindered by an adsorption phenomenon at the start of operation. I have something to do. Therefore, a carbon-based protective film having abrasion resistance and lubricity is formed by a sputtering method, and an organic lubricant is applied on the carbon-based protective film to prevent an increase in the friction coefficient. For higher density, the material of magnetic head is ferrite to ceramic,
Since Al 2 O 3 TiC and hard materials tend to be used, it is indispensable to improve wear resistance performance for magnetic recording media.
Furthermore, as a labor-saving measure, it is equipped with a function to automatically turn off the power when it is not used for a long time, and the number of times of CSS is increasing.

【0004】[0004]

【発明が解決しようとする課題】しかしながら上記従来
の磁気記録媒体の構成において、窒素を含有しない炭素
系保護膜では十分な耐摩耗性が得られないという課題が
あった。また窒素ガス中で成膜した炭素系保護膜におい
ては磁気ヘッドとの吸着現象により摩擦係数を増加させ
るという課題があり、このため有機系の潤滑膜を極力薄
くすることが不可欠となってきている。
However, in the structure of the conventional magnetic recording medium described above, there is a problem that a carbon-based protective film containing no nitrogen cannot provide sufficient abrasion resistance. In addition, the carbon-based protective film formed in nitrogen gas has a problem of increasing the friction coefficient due to the phenomenon of adsorption to the magnetic head, and therefore it has become essential to make the organic lubricating film as thin as possible. .

【0005】本発明は上記従来の課題を解決するもので
あり、潤滑性及び耐摩耗性に優れた磁気ディスク等の磁
気記録媒体を提供することを目的とする。
The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a magnetic recording medium such as a magnetic disk excellent in lubricity and wear resistance.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に本発明の磁気記録媒体は、非磁性基板上の磁性層上に
耐摩耗性膜と潤滑性膜の2層に積層された炭素系積層保
護層を備えるものであり、さらに耐摩耗性膜を窒素含有
耐摩耗性膜とし潤滑性膜を水素含有潤滑性膜としたもの
である。
In order to achieve the above object, a magnetic recording medium of the present invention is a carbon-based medium in which two layers of a wear resistant film and a lubricating film are laminated on a magnetic layer on a non-magnetic substrate. A laminated protective layer is provided, and the wear-resistant film is a nitrogen-containing wear-resistant film and the lubricating film is a hydrogen-containing lubricating film.

【0007】[0007]

【作用】したがって本発明によれば、炭素系積層保護層
を2層に分割し、窒素含有耐摩耗性膜と水素含有潤滑性
膜とで構成することにより優れた耐摩耗性及び潤滑性を
得ることができる。
According to the present invention, therefore, excellent wear resistance and lubricity can be obtained by dividing the carbon-based laminated protective layer into two layers and comprising a nitrogen-containing wear resistant film and a hydrogen-containing lubricative film. be able to.

【0008】[0008]

【実施例】以下に本発明の一実施例について図面を参照
しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0009】図1は本発明の一実施例である磁気記録媒
体の断面図である。図において、1はアルミニウム合
金,ガラス等の非磁性基板、2はクロム合金等からなる
中間層、3はコバルトやその合金からなる磁性層、4は
炭素系積層保護膜であり、耐摩耗性に優れた窒素含有の
耐摩耗性膜4aと潤滑特性に優れた水素含有の潤滑性膜
4bとの2層から構成されている。5は有機系の潤滑層
である。
FIG. 1 is a sectional view of a magnetic recording medium according to an embodiment of the present invention. In the figure, 1 is a non-magnetic substrate made of aluminum alloy, glass, etc., 2 is an intermediate layer made of chromium alloy, 3 is a magnetic layer made of cobalt or its alloy, 4 is a carbon-based laminated protective film, and has excellent wear resistance It is composed of two layers, that is, an excellent wear resistant film 4a containing nitrogen and a lubricating film 4b containing hydrogen excellent in lubricating property. Reference numeral 5 is an organic lubricating layer.

【0010】上記構成において、実施例及び比較例の磁
気記録媒体の試料を下記のようにして作成した。
Samples of the magnetic recording mediums of the examples and comparative examples having the above-mentioned constitution were prepared as follows.

【0011】(実施例1)耐摩耗性膜4aを窒素ガスを
25%含有したアルゴンガスとの混合ガス中で成膜し、
その上に水素ガスを20%含有したアルゴンガス中で潤
滑性膜4bを成膜して磁気記録媒体の試料を作成した。
(Example 1) An abrasion resistant film 4a was formed in a mixed gas of argon gas containing 25% of nitrogen gas,
A lubricous film 4b was formed thereon in an argon gas containing 20% hydrogen gas to prepare a sample of a magnetic recording medium.

【0012】(実施例2)耐摩耗性膜4aを混合ガスに
代えて窒素ガス中で成膜した以外は(実施例1)と同様
にして磁気記録媒体の試料を作成した。
Example 2 A magnetic recording medium sample was prepared in the same manner as in Example 1 except that the abrasion resistant film 4a was formed in nitrogen gas instead of mixed gas.

【0013】(比較例1)耐摩耗性膜4aを窒素ガスを
含有しないアルゴンガス中で成膜し、その上に窒素ガス
を含有しないアルゴンガスと水素ガスとの混合ガス中で
潤滑性膜4bを成膜して磁気記録媒体の試料とした。
(Comparative Example 1) A wear-resistant film 4a is formed in an argon gas containing no nitrogen gas, and a lubricating film 4b is formed thereon in a mixed gas of argon gas containing no nitrogen gas and hydrogen gas. Was formed into a film to prepare a magnetic recording medium sample.

【0014】(比較例2)潤滑性膜4bを窒素ガス中で
成膜した以外は(実施例2)と同様にして磁気記録媒体
の試料を作成した(結果的に炭素系積層保護膜4がすべ
て耐摩耗性膜4aで構成されていることを意味する)。
(Comparative Example 2) A sample of a magnetic recording medium was prepared in the same manner as in (Example 2) except that the lubricating film 4b was formed in nitrogen gas. It means that it is composed entirely of the abrasion resistant film 4a).

【0015】以上のように構成された実施例及び比較例
について摺動テスト,吸着テスト及び剥離強度をそれぞ
れ測定した。
A sliding test, an adsorption test and a peel strength were measured for each of the examples and comparative examples configured as described above.

【0016】[0016]

【表1】 [Table 1]

【0017】上記(表1)は上記(実施例1,2)及び
(比較例1,2)について低速摺動テストを行った後の
磁性層への影響を示したものであり、外観検査を50倍
の顕微鏡を用いて行った。摺動条件はディスク回転数1
00rpmで回転させ、その上に磁気ヘッドをのせて6
0min間摺動させることにより行った。ここで使用さ
れる磁気ヘッドのスライダー成分はMn−Zn−Feを
主成分とするモノリシックタイプの磁気ヘッドであり、
ヘッド荷重は9.5gとした。またこのテストに用いた
磁気ディスクは図1の有機系の潤滑層5を有していない
無循環磁気ディスクである。
The above (Table 1) shows the influence on the magnetic layer after the low speed sliding test was conducted on the above (Examples 1 and 2) and (Comparative Examples 1 and 2). It was performed using a 50 × microscope. Sliding condition is disk rotation speed 1
Rotate at 00 rpm and put the magnetic head on it 6
It was performed by sliding for 0 min. The slider component of the magnetic head used here is a monolithic type magnetic head whose main component is Mn-Zn-Fe,
The head load was 9.5 g. The magnetic disk used in this test is a non-circulating magnetic disk having no organic lubricating layer 5 shown in FIG.

【0018】(表1)からも明らかなようにテスト後の
磁気記録媒体の外観検査において、(実施例1,2)は
磁性層3への損傷は全く認められず、(比較例1,2)
は磁気ヘッドスライダーのABS面と磁気ディスクとの
摩擦によって損傷されたと思われる傷が見られる。これ
は磁気ヘッドの硬度と炭素系保護膜との硬度の関係を示
しており、磁気ディスクの硬度が磁気ヘッド材料より硬
いことを示している。
As is clear from Table 1, in the appearance inspection of the magnetic recording medium after the test, in Examples 1 and 2, no damage to the magnetic layer 3 was observed, and in Comparative Examples 1 and 2. )
Shows scratches that are thought to have been damaged by the friction between the ABS of the magnetic head slider and the magnetic disk. This indicates the relationship between the hardness of the magnetic head and the hardness of the carbon-based protective film, and indicates that the hardness of the magnetic disk is harder than the magnetic head material.

【0019】次に(表2)は(実施例1,2)及び(比
較例1,2)の吸着特性について測定した結果を示すも
のである。
Next, (Table 2) shows the results of measuring the adsorption characteristics of (Examples 1 and 2) and (Comparative Examples 1 and 2).

【0020】[0020]

【表2】 [Table 2]

【0021】吸着テストの条件は65℃,80%RHの
恒温恒湿室に24時間磁気ヘッドを接触させ、磁気ディ
スクを回転させずに放置し、さらに24時間常温常湿に
て放置したのち、初期のトルクを測定したのである。
The conditions of the adsorption test are as follows: a magnetic head is kept in contact with a constant temperature and humidity chamber at 65 ° C. and 80% RH for 24 hours, the magnetic disk is left unrotated, and further left at room temperature and normal humidity for 24 hours. The initial torque was measured.

【0022】試験用の磁気ヘッドはチタン酸カルシウム
を主成分とするコンポジットタイプの磁気ヘッドを用い
た。
As the magnetic head for the test, a composite type magnetic head containing calcium titanate as a main component was used.

【0023】(表2)から明らかなように吸着特性にお
いてはアルゴンガス中または水素ガスとの混合ガスを用
いて成膜された潤滑性膜4bを備えた(実施例1,2,
比較例1)が優れており、一方窒素を含有した混合ガス
中で成膜された耐摩耗性膜4aのみからなる(比較例
2)は水との濡れ性に優れているため有機系の潤滑層5
を塗布しても濡れ性が劣化せず、その結果として高湿下
において磁気ヘッドと磁気記録媒体との間に水及び潤滑
剤が均一に存在し吸着現象を生じ、摩擦係数(μs)が
大きくなる。
As is clear from Table 2, the adsorption characteristics include the lubricating film 4b formed by using a mixed gas of argon gas or hydrogen gas (Examples 1, 2, and 3).
Comparative Example 1) is superior, while the abrasion-resistant film 4a formed only in a mixed gas containing nitrogen (Comparative Example 2) is excellent in wettability with water, and is therefore an organic lubricant. Layer 5
The wettability does not deteriorate even when applied with water, and as a result, water and lubricant are evenly present between the magnetic head and the magnetic recording medium under high humidity to cause an adsorption phenomenon, resulting in a large friction coefficient (μs). Become.

【0024】次に(表3)に(実施例1,2)及び(比
較例1,2)とについて剥離強度を測定した結果を示
す。
Next, (Table 3) shows the results of measuring the peel strength of (Examples 1 and 2) and (Comparative Examples 1 and 2).

【0025】[0025]

【表3】 [Table 3]

【0026】剥離強度の測定はダイヤモンド針を用いて
針を左右に振幅させることにより測定を行った。この剥
離強度においては測定の原理より磁性膜と炭素系保護膜
の密着性及び炭素系保護膜の硬度を同時に評価してい
る。
The peel strength was measured by oscillating the needle left and right using a diamond needle. With respect to this peel strength, the adhesion between the magnetic film and the carbon-based protective film and the hardness of the carbon-based protective film are simultaneously evaluated from the principle of measurement.

【0027】(表3)からも明らかなように(実施例
1,2)は(比較例1,2)と比較して1〜3gf剥離
強度が大きくなっている。
As is clear from (Table 3), (Examples 1 and 2) have a peel strength of 1 to 3 gf higher than that of (Comparative Examples 1 and 2).

【0028】このように上記実施例によれば、耐摩耗性
膜4aを窒素ガスとアルゴンガスとの混合ガスまたは窒
素ガス中で成膜し、その上に潤滑性膜4bをアルゴンガ
スと水素ガスの混合ガス中で成膜しているために耐摩耗
性や潤滑性を向上させることができる。なお、耐摩耗性
膜4aと潤滑性膜4bの各膜厚はそれぞれ最低10nm
以上必要であり、炭素系積層保護膜4の総膜厚は40n
m以下とすることが望ましい。
As described above, according to the above embodiment, the abrasion resistant film 4a is formed in a mixed gas of nitrogen gas and argon gas or in nitrogen gas, and the lubricating film 4b is formed thereon with argon gas and hydrogen gas. Since the film is formed in the mixed gas of, wear resistance and lubricity can be improved. The thickness of each of the wear resistant film 4a and the lubricating film 4b is at least 10 nm.
The above is necessary, and the total thickness of the carbon-based laminated protective film 4 is 40 n.
It is desirable that it is m or less.

【0029】[0029]

【発明の効果】上記実施例より明らかなように本発明
は、非磁性基板上に形成された磁性層の上に耐摩耗性膜
及び潤滑性膜の2層よりなる炭素系積層保護膜を形成し
たものであり、耐摩耗特性及び潤滑特性に優れた磁気記
録媒体を高い歩留まりで、かつ低原価で量産することが
できる。
As is apparent from the above embodiments, according to the present invention, a carbon-based laminated protective film consisting of two layers of a wear resistant film and a lubricious film is formed on a magnetic layer formed on a non-magnetic substrate. The magnetic recording medium having excellent wear resistance and lubrication characteristics can be mass-produced with high yield and at low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例である磁気記録媒体の部分断
面図
FIG. 1 is a partial cross-sectional view of a magnetic recording medium that is an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 非磁性基板 2 中間層 3 磁性層 4 炭素系積層保護膜 4a 耐摩耗性膜 4b 潤滑性膜 1 Non-Magnetic Substrate 2 Intermediate Layer 3 Magnetic Layer 4 Carbon-Based Laminated Protective Film 4a Abrasion Resistant Film 4b Lubricating Film

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基板上に中間層及び磁性層、さら
に炭素系潤滑保護層を成膜してなる磁気記録媒体であっ
て、前記炭素系潤滑保護層が耐摩耗性膜と潤滑性膜の2
層に積層された炭素系積層保護層である磁気記録媒体。
1. A magnetic recording medium comprising a non-magnetic substrate, an intermediate layer, a magnetic layer, and a carbon-based lubrication protective layer formed on the non-magnetic substrate, wherein the carbon-based lubrication protective layer is a wear-resistant film and a lubrication film. Of 2
A magnetic recording medium, which is a carbon-based laminated protective layer laminated on a layer.
【請求項2】 耐摩耗性膜がスパッタガスとしてアルゴ
ンガスと窒素ガスの混合ガスまたは窒素ガス中で成膜さ
れた窒素含有耐摩耗性膜である請求項1記載の磁気記録
媒体。
2. The magnetic recording medium according to claim 1, wherein the wear-resistant film is a nitrogen-containing wear-resistant film formed in a mixed gas of argon gas and nitrogen gas or nitrogen gas as a sputtering gas.
【請求項3】 潤滑性膜がスパッタガスとしてアルゴン
ガスと水素ガスの混合ガス中で成膜された水素含有潤滑
性膜である請求項1記載の磁気記録媒体。
3. The magnetic recording medium according to claim 1, wherein the lubricating film is a hydrogen-containing lubricating film formed as a sputtering gas in a mixed gas of argon gas and hydrogen gas.
JP23440392A 1992-09-02 1992-09-02 Magnetic recording medium Pending JPH0684168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23440392A JPH0684168A (en) 1992-09-02 1992-09-02 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23440392A JPH0684168A (en) 1992-09-02 1992-09-02 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0684168A true JPH0684168A (en) 1994-03-25

Family

ID=16970463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23440392A Pending JPH0684168A (en) 1992-09-02 1992-09-02 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0684168A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068941A1 (en) * 1999-05-11 2000-11-16 Hitachi Maxell, Ltd. Magnetic recording medium and its production method, and magnetic recorder
US6403194B1 (en) 1998-09-03 2002-06-11 Hitachi, Ltd. Magnetic recording medium, process for producing same and magnetic disc apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6403194B1 (en) 1998-09-03 2002-06-11 Hitachi, Ltd. Magnetic recording medium, process for producing same and magnetic disc apparatus
US7037607B2 (en) 1998-09-03 2006-05-02 Hitachi Global Storage Technologies Japan, Ltd. Magnetic recording medium, process for producing same and magnetic disc apparatus
WO2000068941A1 (en) * 1999-05-11 2000-11-16 Hitachi Maxell, Ltd. Magnetic recording medium and its production method, and magnetic recorder
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