JP2870090B2 - Magnetic recording medium and method of manufacturing the same - Google Patents
Magnetic recording medium and method of manufacturing the sameInfo
- Publication number
- JP2870090B2 JP2870090B2 JP3644190A JP3644190A JP2870090B2 JP 2870090 B2 JP2870090 B2 JP 2870090B2 JP 3644190 A JP3644190 A JP 3644190A JP 3644190 A JP3644190 A JP 3644190A JP 2870090 B2 JP2870090 B2 JP 2870090B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- magnetic
- recording medium
- magnetic recording
- based protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、磁気記録装置たとえば磁気ディスク装置に
用いる磁気記録媒体に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium used for a magnetic recording device, for example, a magnetic disk device.
従来の技術 近年、金属磁性膜を用いた磁気ディスクが実用化され
ている。この磁気記録媒体に磁気ヘッドを通して信号を
記録，再生するとき、磁気ヘッドは起動時に摺動して浮
上し、停止時には浮上状態より摺動して停止する（上記
の動作をコンタクト、スタート、ストップと呼び、以後
CSSと略す）。2. Description of the Related Art In recent years, magnetic disks using a metal magnetic film have been put to practical use. When recording and reproducing signals on this magnetic recording medium through a magnetic head, the magnetic head slides and floats at the time of starting, and slides and stops from the floating state at the time of stopping (the above operations are performed by contact, start, and stop). Call, afterwards
Abbreviated as CSS).
この摺動により磁気ヘッドと磁気ディスク間の摩擦が
異常に上昇すると、磁気ディスク装置が起動しても磁気
ディスクが回転しない場合が発生したり、クラッシュが
起こったりして磁気ディスク装置が使用不能になること
がある。If the friction between the magnetic head and the magnetic disk rises abnormally due to this sliding, the magnetic disk device may not start even if the magnetic disk device starts up, or a crash may occur, making the magnetic disk device unusable. May be.
そこで、CSSの摺動による破壊から、磁気ヘッドやデ
ィスクの磁性面を保護するため、磁気ディスク表面に、
固体として潤滑性のある炭素系保護膜をスパッタリング
などの方法により形成し、その上に有機系の潤滑剤を塗
布して磁気ヘッドとの摩擦を下げ、摩耗を緩和してい
る。Therefore, to protect the magnetic surface of the magnetic head and disk from destruction due to CSS sliding,
A solid carbon-based protective film having lubricity as a solid is formed by a method such as sputtering, and an organic lubricant is applied thereon to reduce friction with a magnetic head and reduce wear.
一方、記録された信号の再生出力を大きくするため、
保護膜は耐久性に反して薄いことが望まれる。On the other hand, in order to increase the reproduction output of the recorded signal,
It is desired that the protective film is thin against durability.
発明が解決しようとする課題 ところが、高密度記録のため、この薄い保護膜に十分
な耐摩耗性をもたせるのは困難である。現在、保護膜と
して炭素系保護膜を使用している磁気記録媒体が主流で
あるが、十分な耐摩耗性は得られていない。また炭素系
保護膜は環境変化に弱く、低温、低湿などの環境では潤
滑性が失われ、連続起動停止後の摩擦係数が上昇した
り、クラッシュが発生したりする問題がある（参照：日
本潤滑学会第33期春季研究発表会予稿集pp265−268）。Problems to be Solved by the Invention However, because of high-density recording, it is difficult to give this thin protective film sufficient abrasion resistance. At present, magnetic recording media using a carbon-based protective film as a protective film are mainly used, but sufficient wear resistance has not been obtained. In addition, the carbon-based protective film is vulnerable to environmental changes, and loses lubricity in low-temperature, low-humidity environments, and causes problems such as an increase in friction coefficient after continuous start / stop and a crash. Proceedings of the 33rd Spring Meeting of the Society for Spring Meeting, pp265-268).
本発明は、上記課題を解決するもので、新しい保護膜
で信頼性と性能のよい磁気記録媒体を提供することを目
的としている。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to provide a magnetic recording medium having high reliability and performance with a new protective film.
課題を解決するための手段 本発明は、上記課題を解決するために磁気記録媒体の
炭素系保護層全体に酸素原子を含有させることにより、
潤滑性を向上させ、連続起動停止後の摩擦係数が上昇す
るのを防止するものである。Means for Solving the Problems The present invention is to solve the above problems by including oxygen atoms in the entire carbon-based protective layer of the magnetic recording medium,
The purpose is to improve lubricity and prevent the coefficient of friction after continuous start and stop from increasing.
炭素系保護膜中の酸素の含有は、物理的には吸着、化
学的には酸化カーボンの形態として存在し、特に炭素系
保護層全体における酸素原子の平均の含有率が５−40at
％において著しい効果がある。The content of oxygen in the carbon-based protective film is physically adsorbed and chemically present in the form of carbon oxide.
% Has a significant effect.
また保護膜は、炭素ガスまたは酸素とアルゴンの混合
気体の雰囲気下におけるスパッタリング法で製造してう
る。The protective film can be manufactured by a sputtering method in an atmosphere of a carbon gas or a mixed gas of oxygen and argon.
作用 本発明は上記構成により、炭素系保護膜中に酸素を含
有すると、磁気ヘッドとの激しい摺動摩擦における発熱
や化学反応で、膜中の酸素が露出する金属部を酸化して
金属の凝着や摩耗を防ぐ。また保護膜中の酸素は、磁性
膜とも潤滑剤とも結合力を強くするので、保護膜の耐CS
S性が向上する。Effect of the Invention According to the present invention, when oxygen is contained in a carbon-based protective film, the metal portion where oxygen is exposed in the film is oxidized due to heat generation and chemical reaction due to intense sliding friction with a magnetic head, and adhesion of metal is caused. And prevent wear. In addition, oxygen in the protective film strengthens the bonding force of both the magnetic film and the lubricant, so that the protective film has a high CS resistance.
S property is improved.
実施例 第１図は本発明の一実施例の構成を示したものであ
る。図において、１はアルミニウムなどの非磁性基板
で、その上に磁性膜の腐食防止と付着力向上のため、ク
ロム膜２を設けた後、信号が記録されるコバルト系磁性
膜３を形成する。そしてこの磁性膜３を機械的，化学的
に保護するため、酸素を全体に含有した炭素系保護層４
を磁性膜３の上に設け、潤滑剤５が最上層として塗布さ
れて多層型に構成される。製法は非磁性基板１の上にク
ロム膜２と磁性膜３をスパッタリング法により連続的に
作成する。この上部に酸素含有の炭素系保護層４をアル
ゴンと酸素の雰囲気でスパッタリング法により連続的に
作成し、その後、潤滑剤５を塗布したものである。Embodiment FIG. 1 shows the configuration of an embodiment of the present invention. In the figure, reference numeral 1 denotes a non-magnetic substrate such as aluminum, on which a chromium film 2 is provided to prevent corrosion of a magnetic film and improve adhesion, and then a cobalt-based magnetic film 3 on which signals are recorded is formed. In order to protect the magnetic film 3 mechanically and chemically, a carbon-based protective layer 4 containing oxygen as a whole is provided.
Is provided on the magnetic film 3 and the lubricant 5 is applied as an uppermost layer to form a multilayer structure. In the manufacturing method, a chromium film 2 and a magnetic film 3 are continuously formed on a nonmagnetic substrate 1 by a sputtering method. An oxygen-containing carbon-based protective layer 4 is continuously formed thereon by a sputtering method in an atmosphere of argon and oxygen, and then a lubricant 5 is applied.
この実施例の磁気記録媒体についてCSS耐摩耗試験を
した結果を第２図に示す。この結果は、従来の炭素系保
護膜と比較すると、低湿環境下の摩擦係数値の上昇が非
常に低いことが分かる。また潤滑剤の付着強度をフレオ
ンで表面を洗浄する方法で調査した結果、実施例では潤
滑剤が取れにくく、極性基を持つ潤滑剤の場合はさらに
付着強度が高いことが判明した。次に、第３図に炭素膜
中への酸素含有率とCSS耐摩耗試験２万回後の摩擦係数
の関係を示す。この結果より炭素系保護層全体における
酸素原子の平均の含有率が５％から40％までは低湿での
摩擦係数の上昇はみられない。この摩耗特性向上により
本発明の酸素含有の炭素系保護膜が優れていることが理
解できる。また第４図は元素分析結果の各サンプルのカ
ーボンと酸素のピーク強度比を示したもので、それぞれ
ピーク強度が変化しているのが分かる。FIG. 2 shows the results of a CSS wear resistance test performed on the magnetic recording medium of this example. This result indicates that the increase in the coefficient of friction under a low humidity environment is very low as compared with the conventional carbon-based protective film. Further, as a result of investigating the adhesive strength of the lubricant by a method of cleaning the surface with freon, it was found that the lubricant was difficult to remove in the examples, and that the adhesive having a polar group had a higher adhesive strength. Next, FIG. 3 shows the relationship between the oxygen content in the carbon film and the friction coefficient after 20,000 times of the CSS abrasion test. From this result, no increase in the friction coefficient at low humidity is observed when the average content of oxygen atoms in the entire carbon-based protective layer is 5% to 40%. It can be understood that the oxygen-containing carbon-based protective film of the present invention is excellent due to the improved wear characteristics. FIG. 4 shows the peak intensity ratio between carbon and oxygen of each sample as a result of elemental analysis, and it can be seen that the peak intensity changes in each case.
発明の効果 上記実施例から明らかなように本発明による磁気記録
媒体は、炭素系保護層全体に酸素原子を含有させたもの
であり、低温低湿の環境下で十分な耐摩耗性が得られな
かった従来の炭素系保護膜を有する磁気記録媒体に比
べ、保護膜自体の潤滑性と潤滑剤との付着強度の強化の
ため耐摩耗性に優れており、その信頼性は高いものであ
る。Effects of the Invention As is clear from the above examples, the magnetic recording medium according to the present invention contains oxygen atoms in the entire carbon-based protective layer, and does not provide sufficient wear resistance in a low-temperature and low-humidity environment. Compared with a conventional magnetic recording medium having a carbon-based protective film, the protective film itself is excellent in abrasion resistance due to enhancement of lubricity and adhesion strength with a lubricant, and its reliability is high.
第１図は本発明による磁気記録媒体の一実施例の拡大断
面図、第２図はCSSテスト２万回後の摩擦係数と相対湿
度の関係を示す特性図、第３図は低湿環境下（23℃,5
％）でのCSSテスト２万回後の摩擦係数と炭素系保護層
全体における酸素原子の平均含有率の関係を示す特性
図、第４図は酸素含有率がA:31.4at％、B:13.0at％、C:
1.5at％の各サンプルのカーボンと酸素のピーク強度比
を示す特性図である。 １……非磁性基板、３……コバルト系磁性膜（磁性
層）、４……炭素系保護層、５……潤滑剤層。FIG. 1 is an enlarged sectional view of one embodiment of a magnetic recording medium according to the present invention, FIG. 2 is a characteristic diagram showing a relationship between a friction coefficient and a relative humidity after 20,000 times of CSS tests, and FIG. 23 ℃, 5
%) Is a characteristic diagram showing the relationship between the coefficient of friction after 20,000 times of the CSS test and the average content of oxygen atoms in the entire carbon-based protective layer. FIG. 4 shows the case where the oxygen content is A: 31.4 at%, B: 13.0. at%, C:
It is a characteristic view which shows the peak intensity ratio of carbon and oxygen of each sample of 1.5at%. 1 Non-magnetic substrate, 3 Cobalt-based magnetic film (magnetic layer), 4 Carbon-based protective layer, 5 Lubricant layer.
フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) G11B 5/84 G11B 5/72 Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) G11B 5/84 G11B 5/72
Claims (3)
び潤滑剤層を形成した磁気記録媒体において、前記炭素
系保護層全体に酸素原子を含有させた磁気記録媒体。1. A magnetic recording medium having a magnetic layer, a carbon-based protective layer and a lubricant layer formed on a non-magnetic substrate, wherein the carbon-based protective layer entirely contains oxygen atoms.
平均の含有率が５〜40at％である請求項１記載の磁気記
録媒体。2. The magnetic recording medium according to claim 1, wherein the average content of oxygen atoms in the entire carbon-based protective layer is 5 to 40 at%.
の雰囲気中でスパッタリング法で形成する請求項１また
は２記載の磁気記録媒体の製造方法。3. The method for manufacturing a magnetic recording medium according to claim 1, wherein the carbon-based protective layer is formed by a sputtering method in an atmosphere of a mixed gas of argon and oxygen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3644190A JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3644190A JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03238620A JPH03238620A (en) | 1991-10-24 |
| JP2870090B2 true JP2870090B2 (en) | 1999-03-10 |
Family
ID=12469896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3644190A Expired - Lifetime JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2870090B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4008933B2 (en) | 2005-05-16 | 2007-11-14 | 株式会社東芝 | Magnetic recording medium, method for manufacturing the same, and magnetic recording apparatus |
-
1990
- 1990-02-16 JP JP3644190A patent/JP2870090B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03238620A (en) | 1991-10-24 |
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