JPH03238620A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH03238620A JPH03238620A JP3644190A JP3644190A JPH03238620A JP H03238620 A JPH03238620 A JP H03238620A JP 3644190 A JP3644190 A JP 3644190A JP 3644190 A JP3644190 A JP 3644190A JP H03238620 A JPH03238620 A JP H03238620A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- oxygen
- film
- magnetic
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000001301 oxygen Substances 0.000 claims abstract description 21
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 21
- 239000000314 lubricant Substances 0.000 claims abstract description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 229910052786 argon Inorganic materials 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 5
- 239000011241 protective layer Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 abstract description 27
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052804 chromium Inorganic materials 0.000 abstract description 3
- 239000011651 chromium Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気記録装置たとえば磁気ディスク装置に用
いる磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium used in a magnetic recording device, such as a magnetic disk device.
従来の技術
近年、金属磁性膜を用いた磁気ディスクが実用化されて
いる。この磁気記録媒体に磁気ヘッドを通して信号を記
録、再生するとき、磁気ヘッドは起動時に摺動して浮上
し、停止時には浮上状態より摺動して停止する（上記の
動作をコンタクト、スタート、ストップと呼び、以後Ｃ
８Ｓと略す）っこの摺動により磁気ヘッドと磁気ディス
ク間の摩擦が異常に上昇すると、磁気ディスク装置が起
動しても磁気ディスクが回転しない場合が発生したう、
クラッシュが起こったりして磁気ディスク装置が使用不
能になることがある。2. Description of the Related Art In recent years, magnetic disks using metal magnetic films have been put into practical use. When recording and reproducing signals on this magnetic recording medium through a magnetic head, the magnetic head slides and floats when started, and slides from the floating state and stops when stopped (the above operations are referred to as contact, start, and stop). call, hereafter C
(abbreviated as 8S) If the friction between the magnetic head and the magnetic disk increases abnormally due to this sliding, the magnetic disk may not rotate even if the magnetic disk device is started.
A magnetic disk device may become unusable due to a crash.
そこで、ａＳＳの摺動による破壊から、磁気ヘッドやデ
ィスクの磁性面を保護するため、磁気ディスク表面に、
固体として潤滑性のある炭素系保護膜をスパッタリング
などの方法により形成し、その上に有機系の潤滑剤を塗
布して磁気ヘッドとの摩擦を下げ、摩耗を緩和している
。Therefore, in order to protect the magnetic head and the magnetic surface of the disk from damage caused by sliding of the aSS, a
A solid, lubricating carbon-based protective film is formed by a method such as sputtering, and an organic lubricant is applied on top of this to reduce friction with the magnetic head and alleviate wear.
一方、記録された信号の再生出力を大きくするため、保
護膜は耐久性に反して薄いことが望１れる。On the other hand, in order to increase the reproduction output of recorded signals, it is desirable that the protective film be thin, which is detrimental to its durability.
発明が解決しようとする課題
ところが、高密度記録のため、この薄い保護膜に十分な
耐摩耗性をもたせるのは困難である。現在、保護膜とし
て炭素系保護膜を使用している磁気記録媒体が主流であ
るが、十分な耐摩耗性は得られていない。また炭素系保
護膜は環境変化に弱く、低温、低湿などの環境では潤滑
性が失われ、連続起動停止後の摩擦係数が上昇したシ、
クラッシュが発生したりする問題がある（参照：日本潤
滑学会第３３期春季研究発表会予稿集ｐｐ２６５２６８
）。Problem to be Solved by the Invention However, due to high-density recording, it is difficult to provide this thin protective film with sufficient wear resistance. Currently, magnetic recording media that use a carbon-based protective film as a protective film are mainstream, but sufficient wear resistance is not achieved. In addition, carbon-based protective films are sensitive to environmental changes and lose their lubricity in environments such as low temperature and low humidity, resulting in an increase in the coefficient of friction after continuous starting and stopping.
There are problems such as crashes (Reference: Proceedings of the 33rd Spring Research Presentation of the Japanese Society of Lubrication, pp. 265268)
).
本発明は、上記課題を解決するもので、新しい保護膜で
信頼性と性能のよい磁気記録媒体を提供することを目的
としている。The present invention solves the above problems and aims to provide a magnetic recording medium with good reliability and performance using a new protective film.
課題を解決するための手段
本発明は、上記課題を解決するために磁気記録媒体の炭
素系保護膜に酸素を含有させることにより、潤滑性を向
上させ、連続起動停止後の摩擦係数が上昇するのを防止
するものであるっ炭素系保護膜中の酸素の含有は、物理
的には吸着、化学的には酸化カーボンの形態として存在
し、特にその含有率が５− ａ ｏａｔ％において著し
い効果がある。Means for Solving the Problems In order to solve the above problems, the present invention improves lubricity by incorporating oxygen into the carbon-based protective film of a magnetic recording medium, thereby increasing the coefficient of friction after continuous start-up and stop. Oxygen contained in the carbon-based protective film is physically adsorbed and chemically exists in the form of carbon oxide, and has a particularly significant effect when the content is 5-a oat%. There is.
筐た保護膜は、酸素ガスまたは酸素とアルゴンの混合気
体の雰囲気下におけるスパッタリング法で製造してうる
。The casing protective film can be manufactured by sputtering in an atmosphere of oxygen gas or a mixed gas of oxygen and argon.
作用
本発明は上記構成により、炭素系保護膜中に酸素を含有
すると、磁気ヘッドとの激しい摺動摩擦における発熱や
化学反応で、膜中の酸素が露出する金属部を酸化して金
属の凝着や摩耗を防ぐ。また保護膜中の酸素は、磁性膜
とも潤滑剤とも結合力を強くするので、保護膜の耐Ｃ８
Ｓ性が向上するＯ
実施例
第１図は本発明の一実施例の構成を示したものであるっ
図に釦いて、１はアルミニウムなどの非磁性基板で、そ
の上に磁性膜の腐食防止と付着力向上のため、クロム膜
２を設けた後、信号が記録されるコバルト系磁性膜３を
形成する。そしてこの磁性膜３を機械的、化学的に保護
するため、酸素含有の炭素系保護膜４を磁性膜３の上に
設け、潤滑剤５が最上層として塗布されて多層型に構成
される。製法は非磁性基板１の上にクロム膜２と磁性膜
３をスパッタリング法により連続的に作成する。この上
部に酸素含有の炭素系保護膜４をアルゴンと酸素の雰囲
気でスパッタリング法により連続的に作成し、その後、
潤滑剤６を塗布したものである。According to the above-mentioned structure, when oxygen is contained in the carbon-based protective film, the oxygen in the film oxidizes the exposed metal parts due to heat generation and chemical reactions caused by intense sliding friction with the magnetic head, causing metal adhesion. and prevent wear. In addition, oxygen in the protective film strengthens the bonding force with both the magnetic film and the lubricant, so the protective film has a C8 resistance.
Embodiment Figure 1 shows the configuration of an embodiment of the present invention. In the figure, 1 is a non-magnetic substrate such as aluminum, on which a magnetic film is coated to prevent corrosion. After forming a chromium film 2 to improve adhesion, a cobalt-based magnetic film 3 on which signals are recorded is formed. In order to mechanically and chemically protect the magnetic film 3, an oxygen-containing carbon-based protective film 4 is provided on the magnetic film 3, and a lubricant 5 is applied as the top layer to form a multilayer structure. In the manufacturing method, a chromium film 2 and a magnetic film 3 are successively formed on a non-magnetic substrate 1 by sputtering. On top of this, an oxygen-containing carbon-based protective film 4 is continuously created by sputtering in an atmosphere of argon and oxygen, and then
It is coated with lubricant 6.
この実施例の磁気記録媒体についてＣ８Ｓ耐摩耗試、験
をした結果を第２図に示す。この結果は、従来の炭素系
保護膜と比較すると、低湿環境下の摩擦係数値の上昇が
非常に低いことが分かる。ｌた潤滑剤の付着強度をフレ
オンで表面を洗浄する方法で調査した結果、実施例では
潤滑剤が取れに＜＜、極性基を持つ潤滑剤の場合はさら
に付着強度が高いことが判明した。次に、第３図に炭素
膜中への酸素含有率とａＳＳ耐摩耗試験２万回後の埜芹
係数の関係を示す。この結果より酸素の含有率が・５％
から４０優普では低湿での摩擦係数の上昇ばみられない
っこの翠耗持性向上により本発明７つ酸素含有の炭素系
保護膜が優れていることが理解できる。また第４図は元
素分析結果の各サンプルのカーボンと酸素のピーク強度
比を示したもので、それぞれピーク強度が変化している
のが分かるつ
発明の効果
上記実施例から明らかなように本発明による磁気記録媒
体は、炭素系の保護膜に酸素原子を含有させたものであ
り、低温低湿の環境下で十分な耐摩耗性が得られなかっ
た従来の炭素系保護膜を有する磁気記録媒体に比べ、保
護膜自体の潤滑性と潤滑剤との付着強度の強化のため耐
摩耗性に優れており、その信頼性は高いものである。FIG. 2 shows the results of a C8S wear resistance test performed on the magnetic recording medium of this example. This result shows that the increase in the coefficient of friction in a low-humidity environment is extremely low compared to conventional carbon-based protective films. As a result of investigating the adhesion strength of the lubricant by cleaning the surface with Freon, it was found that the lubricant was easily removed in the examples, and that the adhesion strength was even higher in the case of lubricants with polar groups. Next, FIG. 3 shows the relationship between the oxygen content in the carbon film and the Noseri coefficient after 20,000 aSS wear tests. From this result, the oxygen content is ・5%
It can be seen that the oxygen-containing carbon-based protective film of the present invention is superior due to the improvement in the abrasion retention, which does not show an increase in the coefficient of friction at low humidity. Furthermore, Fig. 4 shows the peak intensity ratio of carbon and oxygen for each sample in the elemental analysis results, and it can be seen that the peak intensities vary. The magnetic recording media made by the company contain oxygen atoms in a carbon-based protective film, and are an improvement over conventional magnetic recording media with carbon-based protective films that did not have sufficient wear resistance in low-temperature, low-humidity environments. In comparison, it has excellent wear resistance due to the lubricity of the protective film itself and the strengthened adhesion strength with the lubricant, and its reliability is high.
第１図は本発明による磁気記録媒体の一実施例の拡大断
面図、第２図はＣＢＳテスト２万回後回後擦係数と相対
湿度の関係を示す特性図、第３図は低湿環境下（２３℃
、５％）でのＣ８Ｓテスト２万回後の摩擦係数と炭素膜
中の酸素含有率の関係を示す特性図、第４図は酸素含有
率がム：５１４ａｔ％。
Ｂ ： １３．ｏａｔ％１Ｃ： １．ｅｉａｔ４の各サ
ンプルのカ−ポンと酸素のピーク強度比を示す特性図で
ある。
１・・・・・非磁性基板、３・・・・・コバルト系磁性
膜（磁性層）、４・・・・・・炭素系保護層、５・・・
・・・潤滑剤層。Figure 1 is an enlarged cross-sectional view of one embodiment of the magnetic recording medium according to the present invention, Figure 2 is a characteristic diagram showing the relationship between the friction coefficient and relative humidity after 20,000 CBS tests, and Figure 3 is in a low humidity environment. (23℃
, 5%) is a characteristic diagram showing the relationship between the friction coefficient and the oxygen content in the carbon film after 20,000 cycles of the C8S test. B: 13. oat%1C: 1. It is a characteristic diagram which shows the peak intensity ratio of carbon and oxygen of each sample of eiat4. 1...Nonmagnetic substrate, 3...Cobalt-based magnetic film (magnetic layer), 4...Carbon-based protective layer, 5...
...Lubricant layer.
Claims (3)
剤層を形成した磁気記録媒体において、前記炭素系保護
層に酸素原子を含有させた磁気記録媒体。(1) A magnetic recording medium in which a magnetic layer, a carbon-based protective layer, and a lubricant layer are formed on a non-magnetic substrate, wherein the carbon-based protective layer contains oxygen atoms.
１記載の磁気記録媒体。(2) The magnetic recording medium according to claim 1, wherein the content of oxygen atoms is 5 to 40 at%.
気中でスパッタリング法で形成する請求項１または２記
載の磁気記録媒体の製造方法。(3) The method for manufacturing a magnetic recording medium according to claim 1 or 2, wherein the carbon-based protective layer is formed by sputtering in an atmosphere of a mixed gas of argon and oxygen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3644190A JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3644190A JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03238620A true JPH03238620A (en) | 1991-10-24 |
| JP2870090B2 JP2870090B2 (en) | 1999-03-10 |
Family
ID=12469896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3644190A Expired - Lifetime JP2870090B2 (en) | 1990-02-16 | 1990-02-16 | Magnetic recording medium and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2870090B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7740961B2 (en) | 2005-05-16 | 2010-06-22 | Kabushiki Kaisha Toshiba | Magnetic recording medium |
-
1990
- 1990-02-16 JP JP3644190A patent/JP2870090B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7740961B2 (en) | 2005-05-16 | 2010-06-22 | Kabushiki Kaisha Toshiba | Magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2870090B2 (en) | 1999-03-10 |
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