JPS62250522A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS62250522A JPS62250522A JP9396186A JP9396186A JPS62250522A JP S62250522 A JPS62250522 A JP S62250522A JP 9396186 A JP9396186 A JP 9396186A JP 9396186 A JP9396186 A JP 9396186A JP S62250522 A JPS62250522 A JP S62250522A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- thin film
- film layer
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 28
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 27
- 230000001681 protective effect Effects 0.000 claims abstract description 26
- 238000005260 corrosion Methods 0.000 claims abstract description 14
- 230000007797 corrosion Effects 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000005498 polishing Methods 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims description 55
- 239000010408 film Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 4
- 230000001050 lubricating effect Effects 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 4
- 229910052786 argon Inorganic materials 0.000 abstract description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract description 2
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 5
- 238000005461 lubrication Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、磁気ディスク装置に使用される磁気記録媒
体、特に金属薄膜型磁気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium used in a magnetic disk device, and particularly to a metal thin film type magnetic recording medium.
一般に、磁気ディスク装置に使用されている磁気記録媒
体には１強磁性酸化物粒子と有機樹脂結合剤とを例えば
アルミニタム等の基板に塗布することによって形成され
た塗布型磁気記録媒体と。In general, magnetic recording media used in magnetic disk drives include coated magnetic recording media formed by coating a substrate, such as aluminum, with ferromagnetic oxide particles and an organic resin binder.
強磁性金属をスパッタリング、鍍金等の方法により薄膜
状に積層形成する金属薄膜型磁気記録媒体とがあり、前
者の塗布型が主流であるのに対して、近年、磁気記録媒
体の高密度化の要請に伴って後者の金属薄膜型が急速に
実用化され始めている。There is a metal thin film magnetic recording medium in which ferromagnetic metal is laminated into thin films by sputtering, plating, etc., and while the former coating type is the mainstream, in recent years there has been an increase in the density of magnetic recording media. In response to demand, the latter metal thin film type is rapidly beginning to be put into practical use.
第２因は例えば特公昭５４−３３５２）号公報に開示さ
れた金属薄膜型磁気記録媒体の一例を示す要部断面口で
あり１図において、１はアルミニウム、グラスチック基
体フィルム等より成る基板、２は基板１の平面全体にス
パッタリング等により厚さ３０００Ａ程度で被着された
Ｃｏ−Ｐ鍍金等より成る強磁性薄膜層、３はこの強磁性
薄膜層２の表面側に膜厚３００Ａ程度で被着された炭素
薄膜層である。The second factor is, for example, a cross-sectional opening of a main part showing an example of a metal thin film type magnetic recording medium disclosed in Japanese Patent Publication No. 54-3352. 2 is a ferromagnetic thin film layer made of Co-P plating, etc., deposited on the entire plane of the substrate 1 to a thickness of about 3000 Å by sputtering, etc.; 3 is a ferromagnetic thin film layer coated on the surface side of this ferromagnetic thin film layer 2 to a thickness of about 300 Å; The deposited carbon thin film layer.
上記のような積層構造を有する磁気記録媒体は。A magnetic recording medium having a laminated structure as described above.
磁気ディスク装置に搭載され１表面に浮上ヘッドを浮揚
させて高速回転及び停止動作を繰り返し行われるために
、耐摩耗性と潤滑性とが要求されている。従って強磁性
金属薄膜層２０表面に浮上ヘッドが衝突することにより
強磁性金属薄膜層２が摩耗した９擦過したりするのを防
止する念めに。Since it is mounted on a magnetic disk device and repeatedly performs high-speed rotation and stopping operations with a flying head floating on one surface, it is required to have wear resistance and lubricity. Therefore, it is necessary to prevent the ferromagnetic metal thin film layer 2 from being worn out or scratched due to the collision of the flying head with the surface of the ferromagnetic metal thin film layer 20.
保護膜として炭素薄膜層３が被覆されている。この炭素
薄膜層３は強磁性金属薄膜層２の耐耗を防止することは
勿論のこと、炭素薄膜層３の表面に吸着され北水分の働
きによって浮上ヘッドと磁性記録媒体との間に潤滑性を
もたせる働きをも有している（例えば小宮宗治著「超高
真空がひらく世界」講談社刊９２頁参照）。A carbon thin film layer 3 is coated as a protective film. This carbon thin film layer 3 not only prevents the wear of the ferromagnetic metal thin film layer 2, but also provides lubrication between the flying head and the magnetic recording medium due to the action of moisture that is adsorbed to the surface of the carbon thin film layer 3. (For example, see Muneharu Komiya's ``The World Opened by Ultra-High Vacuum,'' published by Kodansha, p. 92).
〔発明が解決しようとする問題点〕
従来の磁気記録媒体は以上のように構成されているので
、最終工程として炭素薄膜層３ｔ−形成し念後、この炭
素薄膜層３に水分を吸収させる念めの管理された吸湿工
程がない念めに、製造後の保管環境の差や、磁気ディス
ク装置のドライブに組込まれるまでの時間の長短等によ
って、潤滑特性に較差が生じ、その結果として例えば炭
素薄膜層３が形成されてから十分に吸湿されないうちに
磁気ディスク装置に搭載された磁気記録媒体にあっては
、潤滑性の不足から摩擦抵抗が上昇して磁気記録媒体の
表面に疵を生じたり、摩擦抵抗が激しい場合にはへッド
クラツシ、Ｓを生じたりするという問題点があった。[Problems to be Solved by the Invention] Since the conventional magnetic recording medium is constructed as described above, the carbon thin film layer 3t is formed as a final step, and after that, a careful step is taken to make the carbon thin film layer 3 absorb moisture. To be sure, there is no controlled moisture absorption process, differences in the storage environment after manufacture and the length of time required for installation in the drive of a magnetic disk device can cause differences in lubricating properties, resulting in, for example, carbon If a magnetic recording medium is mounted in a magnetic disk drive after the thin film layer 3 is formed but not sufficiently absorbed, frictional resistance may increase due to lack of lubricity, causing scratches on the surface of the magnetic recording medium. However, if the frictional resistance is severe, head crushing or S may occur.
この発明は上記のような問題点を解消するためになされ
たもので、炭素薄膜層への吸湿工程を予め管理して磁気
記録媒体の潤滑性のバラツキを防止し、最適な潤滑特性
ｔ−Ｖする磁気記録媒体の製造方法を得ることを目的と
している。This invention was made to solve the above-mentioned problems, and it prevents variations in the lubricity of magnetic recording media by controlling the moisture absorption process in the carbon thin film layer in advance, and achieves the optimum lubrication characteristic t-V. The purpose of the present invention is to obtain a method for manufacturing a magnetic recording medium.
この発明に係る磁気記録媒体の製造方法は、非磁性Ｆ１
１１層を基板表面に被覆して研摩した後、この研摩面に
一定雰囲気中で強磁性金属薄膜層を形成し、この強磁性
金属薄膜層の表面を炭素薄膜を含む保護膜層により被覆
して、しかる後恒温恒湿の所定吸湿雰囲気中に放置して
炭素薄膜に一定の水分を吸着させて製造するものである
。The method for manufacturing a magnetic recording medium according to the present invention includes a non-magnetic F1
After coating the substrate surface with 11 layers and polishing, a ferromagnetic metal thin film layer is formed on the polished surface in a constant atmosphere, and the surface of this ferromagnetic metal thin film layer is covered with a protective film layer containing a carbon thin film. , and then left in a predetermined hygroscopic atmosphere at constant temperature and humidity to allow the carbon thin film to adsorb a certain amount of moisture.
この発明における磁気記録媒体の製造方法は。 A method of manufacturing a magnetic recording medium according to the present invention is as follows.
恒温恒湿の所定吸湿雰囲気中に放置することにより、最
表面に位置する保護膜層の炭素薄膜が充分に吸湿され、
炭素薄膜の特徴である潤滑特性が充分引き出されること
によって浮上ヘッドと擦れ合っても摩擦係数が増大する
ことがなくなる。By leaving it in a predetermined hygroscopic atmosphere at constant temperature and humidity, the carbon thin film of the protective film layer located on the outermost surface sufficiently absorbs moisture.
By sufficiently bringing out the lubricating properties that characterize the carbon thin film, the coefficient of friction will not increase even when it rubs against the flying head.
さらに、所定の吸湿雰囲気で水分を吸着することに１９
．吸湿された炭素薄膜が強磁性金属薄膜層を腐蝕させる
ことのないように、保護膜層の下層を耐蝕保護膜として
おくことにより１強磁性金属薄膜層は完全に保護される
。Furthermore, 19% of water is absorbed in a predetermined hygroscopic atmosphere.
．． In order to prevent the absorbed carbon thin film from corroding the ferromagnetic metal thin film layer, one ferromagnetic metal thin film layer is completely protected by providing a corrosion-resistant protective film as the lower layer of the protective film layer.
以Ｆ、この発明の一実施例ｔ−ａについて説明する。第
１図において、１はアルミニツム等より成る基板、２は
強磁性薄膜層としてのＣｏ−Ｎｉ等の強磁性金属薄膜層
、３は炭素薄膜であり、この糟層ａａｄ埴２図で示した
従来の磁気記録梯体と実質的な違いはない。５は前記基
板１０表面に被着された金属又は酸化物より成る非磁性
Ｆ地層。Hereinafter, one embodiment ta of the present invention will be described. In Fig. 1, 1 is a substrate made of aluminum or the like, 2 is a ferromagnetic metal thin film layer such as Co-Ni as a ferromagnetic thin film layer, and 3 is a carbon thin film. There is no substantial difference from the magnetic recording ladder of 5 is a non-magnetic F layer made of metal or oxide deposited on the surface of the substrate 10;
６は前記強磁性金属薄膜層２と炭素薄膜３との間に被着
された例えばＡｔ２０．、ＳｉＯ□等より成る耐蝕保護
膜、７は前記炭素薄膜３と耐蝕保護膜６とから成る保護
膜層である。Reference numeral 6 denotes At20.6, for example, At20.6 deposited between the ferromagnetic metal thin film layer 2 and the carbon thin film 3. , SiO□, etc., and 7 is a protective film layer consisting of the carbon thin film 3 and the corrosion-resistant protective film 6.
次に上記積層構造を有する磁気記録媒体を製造する工＠
（ついて説明する。まず、アルミニウム等の合金から成
る基板１０表面を研摩機械等により平滑面に仕上げた後
、非磁性下地層５としてＮ１−Ｐ鍍金１ｋ１５μｍ被覆
してこの下地層５の表面をさらに研摩する。次に、この
非磁性下地層Ｓを備え次基板１に対し、ガス圧「１ ｘ
１０ ＴｏｒｒＪのアルゴンガス（Ａｒ）の雰囲気
中でＣｏ−２０ｗｔ％ＮｔｔＤＣスパッタリングして、
膜厚３０００Ａ根度の強磁性金属薄膜層２を形成し、同
一雰囲気中で１例えばＡｔ２０３．ＳｉＯ□等の耐蝕性
の良好な耐蝕保護膜６をＲＦスパッタリングにエリ膜厚
２００八程度に被着し、さらに同一雰囲気で再度ＤＣス
パッタリングにより膜厚３００Ａ程度の炭累薄膜３を被
着して、この耐蝕保護膜６ど炭素薄膜３とから成る保護
膜層７を形成する。次いで。Next, a process for manufacturing a magnetic recording medium having the above laminated structure@
(This will be explained. First, the surface of the substrate 10 made of an alloy such as aluminum is finished to a smooth surface using a polishing machine, etc., and then N1-P plating is coated with a thickness of 1k15 μm as a non-magnetic underlayer 5, and the surface of this underlayer 5 is further coated. Next, the next substrate 1 provided with this non-magnetic underlayer S is subjected to a gas pressure of 1 x
Co-20wt%NttDC sputtering in an argon gas (Ar) atmosphere of 10 TorrJ,
A ferromagnetic metal thin film layer 2 with a thickness of 3000 Å is formed, and a layer of 1, for example, At203. A corrosion-resistant protective film 6 having good corrosion resistance such as SiO□ was deposited by RF sputtering to a thickness of about 200 mm, and then a thin carbon film 3 having a thickness of about 300 mm was deposited again by DC sputtering in the same atmosphere. Then, a protective film layer 7 consisting of the corrosion-resistant protective film 6 and the carbon thin film 3 is formed. Next.
このような保護膜層Ｔを表面に備え念磁気記録媒体を温
度３０℃、相対湿度８０％の恒温恒湿状態に維持され念
吸湿槽内に２時間放置して保護膜層７の渚表面の炭素薄
膜３′ｔ−一定の湿度を帯びた状態とした後、温度２０
℃、相対湿度４０％の雰囲気中に２時間放置して磁気記
録媒体が完成する。A pneumatic magnetic recording medium having such a protective film layer T on its surface is kept in a constant temperature and humidity state of 30° C. and relative humidity of 80% and left in a moisture absorption tank for 2 hours. Carbon thin film 3't - After being in a constant humidity state, the temperature is 20
℃ and 40% relative humidity for 2 hours to complete the magnetic recording medium.
以上のようにして形成されｔ磁気記録媒体においては、
所定の湿気を吸収して始めて潤滑特性が顕著となる炭素
薄膜に対して、一定の吸湿工程を経由することにエフ所
望の吸湿性を持たせることができ、磁気ディスク装置の
浮上ヘッドが磁気記録媒体との間で頻繁にコノタクト、
スタート、ストップ等の動作（以下、Ｃ８Ｓと略記する
。）を行なっても、適度な湿気により充分な潤滑性が確
保されているので、磁気記録媒体の表面に疵等が付くこ
とはない。In the magnetic recording medium formed as described above,
The carbon thin film, whose lubricating properties only become noticeable after absorbing a certain amount of moisture, can be made to have the desired hygroscopicity by going through a certain hygroscopic process, allowing the flying heads of magnetic disk drives to perform magnetic recording Frequent contact with the media,
Even when operations such as start and stop (hereinafter abbreviated as C8S) are performed, the surface of the magnetic recording medium will not be scratched because sufficient lubricity is ensured by appropriate moisture.
因に、この実施例に係る磁気記録媒体の製造方法の比較
例として、非磁性下地層５を備えた基板１に、強磁性金
属薄膜層２を形成し、この表面に耐蝕保護膜６と炭素薄
膜３とから成る保護膜層金形成し、しかる後上記実施例
と異り１ｍ度２２℃、相対湿度４０チの雰囲気中に４時
間放置して製造した磁気記録媒体と、上記実施例により
製造した磁気記録媒体との間で、以下の実験を行って潤
滑特性の違いを比較した。Incidentally, as a comparative example of the method for manufacturing a magnetic recording medium according to this embodiment, a ferromagnetic metal thin film layer 2 is formed on a substrate 1 provided with a non-magnetic underlayer 5, and a corrosion-resistant protective film 6 and carbon A magnetic recording medium manufactured by forming a protective film layer consisting of a thin film 3 and then leaving it for 4 hours in an atmosphere of 1 m degree and 22 degrees Celsius and 40 degrees relative humidity, unlike the above example, and a magnetic recording medium manufactured according to the above example. The following experiment was conducted to compare the differences in lubrication characteristics between the two magnetic recording media.
実験は、まず、実施例の方法と比較例の方法とで夫々製
造した磁気記鋒媒体ｔｌｏ枚ずつ用意し、これら２つの
グループの磁気記録媒体を磁気ディスク装置に搭載して
同一条件でｃｓｓｔ−各々５０００回ずつ繰返し行なっ
た。In the experiment, first, two groups of magnetic recording media manufactured by the method of the example and the method of the comparative example were prepared, and these two groups of magnetic recording media were loaded into a magnetic disk drive and csst- Each test was repeated 5000 times.
上記実験の結果、この発明の実施例の方法により製造し
念磁気記録媒体の夫々の表面は、光学顕微鏡で観察した
ところ、ＣＳＳによる僅かな擦過痕が個々的に見られ念
が、全てのものについて疵等の発生は見られなかった。As a result of the above experiment, when the surfaces of the magnetic recording media manufactured by the method of the embodiment of the present invention were observed with an optical microscope, slight scratch marks due to CSS were observed individually. No scratches or the like were observed.
これに対して、比較例の方法により製造した磁気記録媒
体の夫々の表面には、上記と同様に観察したところ、実
施例のもののように疵等がついていないものが１０枚中
７枚見られ念が、明瞭な疵が発生してヘッドクラッシュ
の虞れがあるものが残り３枚の磁気記録媒体の中に観察
された。On the other hand, when the surfaces of the magnetic recording media manufactured by the method of the comparative example were observed in the same manner as above, 7 out of 10 were found to have no scratches or the like like those of the example. However, clear flaws that may have caused a head crash were observed in the remaining three magnetic recording media.
なお、上記実施例では、保護膜層７の下層側に耐蝕保護
膜６を形成しているので、吸湿され次水分により強磁性
金属薄膜層に錆等の腐蝕反応を起させる虞れがなく、こ
の点で磁気記録媒体の品質に対する信頼性を確保できる
という実施例個有の効果がある。In the above embodiment, since the corrosion-resistant protective film 6 is formed on the lower side of the protective film layer 7, there is no risk that the ferromagnetic metal thin film layer will absorb moisture and cause corrosion reactions such as rust. In this respect, there is an effect unique to this embodiment in that reliability regarding the quality of the magnetic recording medium can be ensured.
なお、上述したものは、この発明による方法の一実施例
を示すのみであり、この発明の目的、構成、効果全逸脱
しない範囲での如何なる変形、変更も自由である。例え
ば、上記実施例の方法では、保膿膜層７？二層構造に積
層させて強磁性金属薄膜層２の耐蝕効果を図っているが
、保護膜層は膜厚を水分が強磁性金属薄膜層２にまで及
ばない程度の厚みとするか１強磁性薄膜層を錆に強い金
属或いは金属以外の材料により形成する等の方法に工り
磁気記録媒体を製造することにより同様の効果を図るこ
とができる。It should be noted that what has been described above merely shows one embodiment of the method according to the present invention, and any modifications and changes may be made without departing from the objectives, structure, and effects of the present invention. For example, in the method of the above embodiment, the purulent membrane layer 7? The ferromagnetic metal thin film layer 2 is laminated in a two-layer structure to provide corrosion resistance, but the thickness of the protective film layer must be set to such an extent that moisture does not reach the ferromagnetic metal thin film layer 2. A similar effect can be achieved by manufacturing a magnetic recording medium by forming the thin film layer from a rust-resistant metal or a material other than metal.
以上のように、この発明によれば保護膜層として形成し
た炭素薄膜に予め水分を吸収させる吸湿工程を経て磁気
記録媒体を製造するようにしているので、磁気記録媒体
の完成品毎に生じる潤滑特性のバラツキを抑制すること
ができ、安定性及び信頼性のある磁気記録媒体を得るこ
とができる。As described above, according to the present invention, a magnetic recording medium is manufactured through a moisture absorption process in which the carbon thin film formed as a protective film layer absorbs moisture in advance, so lubrication is generated in each finished product of the magnetic recording medium. Variations in characteristics can be suppressed, and a stable and reliable magnetic recording medium can be obtained.
第１図はこの発明の一実施例による磁気記録媒体の製造
方法にニジ製造し念磁気記録媒体を示す要部拡大断面因
、第２図は従来の方法により製造した磁気記録媒体の一
例を示す要部拡大断面図である。
図において、１は基板、２は強磁性（金属）薄膜層、３
は炭素薄膜、５は非磁性Ｆ地層、６は耐蝕保護膜、７は
保護膜層である。
なお、図中同一符号は同−又は相当部分を示す。
特許出願人 三菱電機株式会社
ｔパ）
代理人 弁理士 １） 澤 博 昭 ・
１１．、：、−、、’、＋
（外２名 ＝−、、−１’FIG. 1 shows an enlarged cross-sectional view of a main part of a magnetic recording medium manufactured using a method for manufacturing a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 shows an example of a magnetic recording medium manufactured by a conventional method. FIG. 3 is an enlarged cross-sectional view of main parts. In the figure, 1 is a substrate, 2 is a ferromagnetic (metallic) thin film layer, and 3 is a ferromagnetic (metal) thin film layer.
5 is a carbon thin film, 5 is a non-magnetic F layer, 6 is a corrosion-resistant protective film, and 7 is a protective film layer. Note that the same reference numerals in the figures indicate the same or equivalent parts. Patent applicant Mitsubishi Electric Corporation TPA) Agent Patent attorney 1) Hiroshi Sawa ・
11. ,:,-,,',+ (other 2 people =-,,-1'
Claims (2)
して表面を研摩した後、一定の雰囲気中で前記非磁性下
地層の研摩面に強磁性薄膜層を形成し、次いで同一雰囲
気中で前記強磁性薄膜層表面に炭素薄膜を含む保護膜層
を被覆形成した後、恒温恒湿に維持された所定吸湿雰囲
気中に放置するようにしたことを特徴とする磁気記録媒
体の製造方法。(1) After coating a smooth substrate surface with a nonmagnetic underlayer and polishing the surface, a ferromagnetic thin film layer is formed on the polished surface of the nonmagnetic underlayer in a certain atmosphere, and then a ferromagnetic thin film layer is formed on the polished surface of the nonmagnetic underlayer in a certain atmosphere. A method for producing a magnetic recording medium, characterized in that after forming a protective film layer containing a carbon thin film on the surface of the ferromagnetic thin film layer, the medium is left in a predetermined hygroscopic atmosphere maintained at constant temperature and constant humidity. .
、耐蝕性を有する耐蝕保護膜を被覆した後、炭素薄膜を
被覆して形成し、しかる後に恒温恒湿に維持された所定
吸湿雰囲気中に放置して、炭素薄膜のみ吸湿させたこと
を特徴とする特許請求の範囲第１項記載の磁気記録媒体
の製造方法。(2) The protective film layer is formed by coating the surface of the metal film as a ferromagnetic thin film layer with a corrosion-resistant protective film having corrosion resistance, and then covering it with a carbon thin film, and then a predetermined area maintained at constant temperature and humidity. 2. The method of manufacturing a magnetic recording medium according to claim 1, wherein only the carbon thin film absorbs moisture by leaving it in a hygroscopic atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9396186A JPS62250522A (en) | 1986-04-23 | 1986-04-23 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9396186A JPS62250522A (en) | 1986-04-23 | 1986-04-23 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62250522A true JPS62250522A (en) | 1987-10-31 |
Family
ID=14097003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9396186A Pending JPS62250522A (en) | 1986-04-23 | 1986-04-23 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62250522A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5029317A (en) * | 1989-05-31 | 1991-07-02 | Hoya Corporation | Magnetic recording medium capable of recording information at a high recording density |
-
1986
- 1986-04-23 JP JP9396186A patent/JPS62250522A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5029317A (en) * | 1989-05-31 | 1991-07-02 | Hoya Corporation | Magnetic recording medium capable of recording information at a high recording density |
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