JPH08161736A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPH08161736A
JPH08161736A JP29859394A JP29859394A JPH08161736A JP H08161736 A JPH08161736 A JP H08161736A JP 29859394 A JP29859394 A JP 29859394A JP 29859394 A JP29859394 A JP 29859394A JP H08161736 A JPH08161736 A JP H08161736A
Authority
JP
Japan
Prior art keywords
recording medium
magnetic recording
magnetic
layer
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29859394A
Other languages
Japanese (ja)
Inventor
Yoshihiro Nosaka
佳弘 野坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP29859394A priority Critical patent/JPH08161736A/en
Publication of JPH08161736A publication Critical patent/JPH08161736A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE: To obtain an excellent magnetic recording medium with limited foul of a head even under a high temperature and high humidity. CONSTITUTION: A method of manufacturing a magnetic recording medium in which a magnetic layer, a protective layer and a lubrication layer are formed sequentially on a non-magnetic substrate, prior to the formation of the lubrication layer, a washing is made by hot pure water above 55 deg.C but below 90 deg.C. This enables the obtaining of a magnetic recording medium which excels in durability with excellent lubricating property and wear resistance.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、情報産業等で利用され
る高記録密度の磁気記録媒体の製造方法に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a high recording density magnetic recording medium used in the information industry and the like.

【0002】[0002]

【従来の技術】情報産業等で利用される高記録密度の磁
気記録媒体の代表的な例である薄膜型磁気記録媒体は、
通常、磁性金属またはその合金をメッキ、蒸着またはス
パッタリング法等によって非磁性基板上に披着して製造
される。実際の使用時においては磁気ヘッドと磁気記録
媒体とが高速で接触摺動するので、摩耗損傷を受けた
り、磁気特性の劣化を起こしたりする。
2. Description of the Related Art A thin film magnetic recording medium, which is a typical example of a high recording density magnetic recording medium used in the information industry, is
It is usually manufactured by depositing a magnetic metal or its alloy on a non-magnetic substrate by plating, vapor deposition or sputtering. In actual use, the magnetic head and the magnetic recording medium come into contact with each other at high speed and slide, so that the magnetic head may be damaged by wear or the magnetic characteristics may be deteriorated.

【0003】このような欠点を解決する方法として、磁
性層上に保護膜や潤滑層を設けることによって接触摺動
の際の静/動摩擦を極力低減させ、耐摩耗性を向上させ
ることが提案されている。保護膜としては、炭素質膜、
酸化物膜、窒化物膜及びホウ化物膜等が利用される。
As a method for solving such a drawback, it has been proposed to provide a protective film or a lubricating layer on the magnetic layer to reduce static / dynamic friction during contact sliding as much as possible and improve wear resistance. ing. As the protective film, a carbonaceous film,
An oxide film, a nitride film, a boride film or the like is used.

【0004】[0004]

【発明が解決しようとする課題】磁気記録媒体は、その
使用時においてディスク媒体が停止状態から急速に回転
加速され、これに伴い、浮上ヘッドスライダに浮力が与
えられてヘッドは浮上する。使用後に電源が切断される
とディスク媒体を回転させているモータが停止し、ヘッ
ドと媒体とが高速で接触を起こして摺動する。
When the magnetic recording medium is used, the disk medium is rapidly rotated and accelerated from a stopped state. Along with this, buoyancy is applied to the flying head slider and the head flies. When the power is cut off after use, the motor that rotates the disk medium stops, and the head and medium make contact at high speed and slide.

【0005】ところが、近年、面記録密度を高めるため
にヘッドの低浮上化とディスク回転の高速化が求められ
て要る。媒体基板はより平滑になる方向にある。動摩擦
係数を低減するために液体潤滑膜を設けることは非常に
有効であるが、液体潤滑膜を厚くしていくと、ヘッドと
ディスクとの間に液体潤滑剤の表面張力によるマイクロ
メニスカスが形成されて、吸着現象(sticking)が生じる
ことが知られている。このため静摩擦係数が増加し、往
々にしてヘッドがディスクに張り付いたまま動作不能と
なることが指摘されている。
However, in recent years, in order to increase the areal recording density, it is required to lower the flying height of the head and increase the disk rotation speed. The media substrate tends to be smoother. It is very effective to provide a liquid lubricant film to reduce the dynamic friction coefficient, but as the liquid lubricant film is made thicker, a micromeniscus is formed between the head and the disk due to the surface tension of the liquid lubricant. It is known that the sticking phenomenon occurs. For this reason, it has been pointed out that the static friction coefficient increases, and the head is often inoperable while being stuck to the disk.

【0006】[0006]

【課題を解決するための手段】本発明の磁気記録媒体の
製造方法は、高温多湿下においてもヘッド汚れの少ない
優れた磁気記録媒体を得ることを特徴とする。本発明に
より得られた磁気記録媒体は、コンポジットヘッド、ミ
グヘッドおよび薄膜ヘッドにも適応できる。以下、本発
明を詳細に説明する。
A method of manufacturing a magnetic recording medium according to the present invention is characterized in that an excellent magnetic recording medium with less head contamination even under high temperature and high humidity is obtained. The magnetic recording medium obtained by the present invention can be applied to a composite head, a MIG head and a thin film head. Hereinafter, the present invention will be described in detail.

【0007】本発明を適用する磁気記録媒体として、非
磁性基板としては、通常、ニッケル・リン層を設けたア
ルミニウム合金板またはガラス基板が用いられるが、そ
のほかにもセラミック基板、カーボン基板、樹脂基板等
を用いることもできる。磁性層としては、必要に応じて
下引層を設けた後、例えばCoまたはCoP系合金、C
oNiP系合金、CoNiCr系合金、CoNiPt系
合金、CoCrPt系合金、CoCrPtTa系合金等
のCo合金等を無電解メッキ法、スパッタリング法等に
より形成される。磁性層の膜厚は、磁気記録媒体として
要求される特性により決定され、通常、200〜150
0Åである。薄膜磁性層上の保護膜は、必ずしも不可欠
のものではなく、磁性膜の硬度や弾性率等の物理物性を
鑑みて、必要に応じて形成される。保護膜としては炭素
質膜、酸化物膜、窒化物膜、ホウ化物膜等が用いられ、
スパッタリング法、イオンプレーティング法、プラズマ
重合法等により形成される。保護膜として好ましく用い
られるのは、無定形炭素、水素化カーボン等の炭素質膜
であり、通常、50〜500Å、好適には、100〜3
00Åの膜厚で用いられる。また必要に応じて紫外線照
射等の保護膜表面処理を施すこともできる。
In the magnetic recording medium to which the present invention is applied, as the non-magnetic substrate, an aluminum alloy plate or a glass substrate provided with a nickel-phosphorus layer is usually used, but in addition to this, a ceramic substrate, a carbon substrate, a resin substrate. Etc. can also be used. As the magnetic layer, after providing an undercoat layer if necessary, for example, Co or CoP-based alloy, C
A Co alloy such as an oNiP-based alloy, a CoNiCr-based alloy, a CoNiPt-based alloy, a CoCrPt-based alloy, and a CoCrPtTa-based alloy is formed by an electroless plating method, a sputtering method, or the like. The film thickness of the magnetic layer is determined by the characteristics required for the magnetic recording medium, and is usually 200 to 150.
It is 0Å. The protective film on the thin film magnetic layer is not necessarily essential, and is formed as necessary in consideration of physical properties such as hardness and elastic modulus of the magnetic film. A carbonaceous film, an oxide film, a nitride film, a boride film or the like is used as the protective film,
It is formed by a sputtering method, an ion plating method, a plasma polymerization method, or the like. A carbonaceous film such as amorphous carbon or hydrogenated carbon is preferably used as the protective film, and is usually 50 to 500 Å, preferably 100 to 3
Used with a film thickness of 00Å. If necessary, surface treatment of the protective film such as irradiation with ultraviolet rays can be performed.

【0008】形成した保護膜表面を、温純水で洗浄した
のち潤滑層を形成する。保護膜表面に存在する水溶性不
純物が、保護膜と潤滑剤との結合力を弱め、ディスク駆
動時に潤滑剤がヘッドに転写されるものと考えられる。
潤滑層を形成する前にディスク表面の不純物を温純水で
洗浄して不純物を溶出させて取り除くことで、清浄な表
面に潤滑層を形成させることができる。保護膜と潤滑剤
との結合力が弱い部分がなくなり、CSSを行ってもヘ
ッドが汚れることが無くなると考えられる。常温常湿の
みでなく高温多湿のような過酷な環境下でもヘッド汚れ
が少ないディスクを得ることができる。洗浄方法として
は、ディスクを温純水に浸漬したのち乾燥する。温純水
の温度としては、ディスクを浸漬したのちその表面が乾
く温度が必要であり、純水が沸騰しない温度の範囲内
で、55℃以上90℃以下が適当である。温純水で洗浄
する工程と併せて超音波洗浄を施してもよい。
The surface of the formed protective film is washed with warm pure water, and then a lubricating layer is formed. It is considered that the water-soluble impurities existing on the surface of the protective film weaken the binding force between the protective film and the lubricant, and the lubricant is transferred to the head when the disk is driven.
By cleaning the impurities on the disk surface with warm pure water to elute and remove the impurities before forming the lubricating layer, the lubricating layer can be formed on a clean surface. It is considered that there is no part where the protective film and the lubricant have a weak bonding force, and the head is not contaminated even if CSS is performed. It is possible to obtain a disk with less head contamination not only under normal temperature and normal humidity but also under severe environments such as high temperature and high humidity. As a cleaning method, the disk is dipped in warm pure water and then dried. The temperature of the hot pure water is required to be a temperature at which the surface of the disk dries after it is dipped, and 55 ° C. or more and 90 ° C. or less is suitable within a temperature range where pure water does not boil. Ultrasonic cleaning may be performed together with the step of cleaning with warm pure water.

【0009】[0009]

【実施例】次に本発明を実施例によりさらに具体的に説
明するが、本発明はその要旨を越えない限り以下の実施
例に限定されるものではない。 実施例1 アルミニウム合金の基板上にスパッタリング法によりク
ロム下地層(500Å)、コバルト合金の磁性薄膜(6
00Å)および炭素質保護膜(260Å)を形成し、テ
ープクリーニング処理を施した直径3.5インチの磁気
ディスクを、温度65℃の温純水に30秒間浸漬、乾燥
した。このディスクにパーフルオロポリエーテル潤滑層
(Fombline Z Dol/2000)を形成
し、グライド処理を行った。
EXAMPLES Next, the present invention will be described more specifically by way of examples, but the present invention is not limited to the following examples unless it exceeds the gist. Example 1 A chromium underlayer (500 Å) and a cobalt alloy magnetic thin film (6) were formed on an aluminum alloy substrate by a sputtering method.
00 Å) and the carbonaceous protective film (260 Å) were formed, and the magnetic disk having a diameter of 3.5 inches and subjected to tape cleaning treatment was dipped in warm pure water at a temperature of 65 ° C for 30 seconds and dried. A perfluoropolyether lubricating layer (Fombline Z Dol / 2000) was formed on this disc, and glide treatment was performed.

【0010】グライド処理を行ったディスクについて、
温度32°C、相対湿度80%の環境下でCSS試験を
行ったところ、ヘッドの汚れはほとんど見られなかっ
た。CSS試験については周速3600rpmの薄膜ヘ
ッドスライダ(材質:Al 2 3 TiC)を用いて行な
った。スピンドルへ10秒間通電した後、24秒間電源
を切断する計34秒をCSS1サイクルとし、CSSサ
イクルを20000回行なった。
For the glide-treated disk,
CSS test under the environment of temperature 32 ° C and relative humidity 80%
When I went, almost no dirt on the head was seen
Was. For the CSS test, select a thin film with a peripheral speed of 3600 rpm.
Dead slider (material: Al 203TiC)
It was. Energize the spindle for 10 seconds, then power for 24 seconds
The total of 34 seconds for disconnecting the
Eggling was performed 20000 times.

【0011】実施例2 テープクリーニング処理を施した後、温度73℃の温純
水に浸漬すること以外は、実施例1と同様にして得た磁
気ディスクを、CSS試験を行ったところ、ヘッドの汚
れはほとんど見られなかった。 比較例1 テープクリーニング処理を施した後、温度25℃の純水
に浸漬すること以外は、実施例1と同様にして得た磁気
ディスクを、CSS試験を行ったところ、ヘッド全体に
激しい汚れが見られた。
Example 2 A magnetic disk obtained in the same manner as in Example 1 except that it was immersed in warm pure water at a temperature of 73 ° C. after the tape cleaning treatment was subjected to a CSS test. It was hardly seen. Comparative Example 1 A magnetic disk obtained in the same manner as in Example 1 except that it was immersed in pure water at a temperature of 25 ° C. after the tape cleaning treatment was subjected to a CSS test. I was seen.

【0012】比較例2 実施例1とテープクリーニングまで同様の処理を行った
ディスクを用い、潤滑層を形成し、グライド処理を行っ
たディスクについて、実施例1と同様にCSS試験を行
なったところ、ヘッド全体に激しい汚れが見られた。
Comparative Example 2 A disk which was subjected to the same treatment as in Example 1 up to the tape cleaning was subjected to the CSS test in the same manner as in Example 1 with respect to the disk on which the lubricating layer was formed and the glide treatment was carried out. Severe dirt was found on the entire head.

【0013】[0013]

【発明の効果】本発明によれば、薄膜で優れた潤滑性・
耐摩耗性を有し、長期間にわたり優れた耐久性を維持す
ることができる信頼性の高い磁気記録媒体が得られ、C
SS試験においてもヘッドの汚れを低減することがで
き、長期にわたり信頼性の高い磁気記録媒体を得ること
ができる。
According to the present invention, a thin film having excellent lubricity
It is possible to obtain a highly reliable magnetic recording medium which has abrasion resistance and can maintain excellent durability for a long period of time.
Even in the SS test, the contamination of the head can be reduced, and a highly reliable magnetic recording medium can be obtained for a long period of time.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】非磁性基板上に磁性層、保護層及び潤滑層
を順次形成してなる磁気記録媒体の製造方法において、
潤滑層を形成する前に、55℃以上90℃以下の温純水
で洗浄することを特徴とする磁気記録媒体の製造方法
1. A method of manufacturing a magnetic recording medium comprising a magnetic layer, a protective layer and a lubricating layer which are sequentially formed on a non-magnetic substrate,
A method for manufacturing a magnetic recording medium, which comprises washing with warm pure water of 55 ° C. or higher and 90 ° C. or lower before forming a lubricating layer
【請求項2】潤滑層を形成する前に、超音波洗浄するこ
とを特徴とする請求項1記載の磁気記録媒体の製造方法
2. A method of manufacturing a magnetic recording medium according to claim 1, wherein ultrasonic cleaning is performed before forming the lubricating layer.
JP29859394A 1994-12-01 1994-12-01 Manufacture of magnetic recording medium Pending JPH08161736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29859394A JPH08161736A (en) 1994-12-01 1994-12-01 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29859394A JPH08161736A (en) 1994-12-01 1994-12-01 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH08161736A true JPH08161736A (en) 1996-06-21

Family

ID=17861748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29859394A Pending JPH08161736A (en) 1994-12-01 1994-12-01 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH08161736A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999014746A1 (en) * 1997-09-17 1999-03-25 Showa Denko K.K. Magnetic recording medium and method of producing the same
US6316062B1 (en) 1997-09-17 2001-11-13 Showa Denko K.K. Magnetic recording medium and method of producing the same
US6680112B1 (en) 1999-06-29 2004-01-20 Showa Denko Kabushiki Kaisha Magnetic recording medium and production process thereof
JP2009087456A (en) * 2007-09-28 2009-04-23 Hoya Corp Method for manufacturing magnetic recording medium
WO2011125990A1 (en) * 2010-04-06 2011-10-13 昭和電工株式会社 Manufacturing method of magnetic recording medium

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999014746A1 (en) * 1997-09-17 1999-03-25 Showa Denko K.K. Magnetic recording medium and method of producing the same
US6316062B1 (en) 1997-09-17 2001-11-13 Showa Denko K.K. Magnetic recording medium and method of producing the same
US6468602B2 (en) 1997-09-17 2002-10-22 Showa Denko K.K. Method of manufacturing a magnetic recording medium
US6680112B1 (en) 1999-06-29 2004-01-20 Showa Denko Kabushiki Kaisha Magnetic recording medium and production process thereof
JP2009087456A (en) * 2007-09-28 2009-04-23 Hoya Corp Method for manufacturing magnetic recording medium
WO2011125990A1 (en) * 2010-04-06 2011-10-13 昭和電工株式会社 Manufacturing method of magnetic recording medium
JP2011222062A (en) * 2010-04-06 2011-11-04 Showa Denko Kk Method for manufacturing magnetic recording medium

Similar Documents

Publication Publication Date Title
JPH07122933B2 (en) Magnetic recording disk and manufacturing method thereof
US4029541A (en) Magnetic recording disc of improved durability having tin-nickel undercoating
KR20010021674A (en) Magnetic recording medium comprising multilayered carbon-containing protective overcoats
JPH08102033A (en) Thin-film magnetic recording disk and manufacture thereof
US6136421A (en) Magneto-resistance recording media comprising multilayered protective overcoats
US6238780B1 (en) Magnetic recording medium comprising multilayered carbon-containing protective overcoats
JP3965277B2 (en) Magnetic recording medium and magnetic storage device
US6083626A (en) Magnetic storage member comprising a carbon layer and directly overcoated fluorolubricant layer
JPH08161736A (en) Manufacture of magnetic recording medium
US6572958B1 (en) Magnetic recording media comprising a silicon carbide corrosion barrier layer and a c-overcoat
US6537686B1 (en) Magneto-resistance recording media comprising a silicon nitride corrosion barrier layer and a C-overcoat
US6517956B1 (en) Magneto-resistance recording media comprising aluminum nitride corrosion barrier layer and a c-overcoat
US5599632A (en) Carbon seedlayer on non-metallic substrates for magnetic recording media
US6322880B1 (en) Magneto-resistance recording media comprising a foundation layer and a C-overcoat
JPH0554373A (en) Magnetic recording medium
JP3657196B2 (en) Magnetic recording medium and magnetic disk device
JP3934697B2 (en) Magnetic recording medium
EP1136987A1 (en) Magnetic recording and reproducing device
WO1988002168A1 (en) Magnetic data storage media
JP2001028117A (en) Disk medium
JPS5939809B2 (en) magnetic memory
JPS6379230A (en) Magnetic recording medium
JP3460381B2 (en) Magnetic recording medium and method of manufacturing the same
US9117476B1 (en) Magnetic media on a plastic substrate
JPS63117311A (en) Magnetic disk