JPS63117311A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPS63117311A JPS63117311A JP26233486A JP26233486A JPS63117311A JP S63117311 A JPS63117311 A JP S63117311A JP 26233486 A JP26233486 A JP 26233486A JP 26233486 A JP26233486 A JP 26233486A JP S63117311 A JPS63117311 A JP S63117311A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- aluminum oxide
- perfluoropolyether
- film
- magnetic disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 239000000314 lubricant Substances 0.000 claims abstract description 8
- 239000010702 perfluoropolyether Substances 0.000 claims abstract description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 125000000524 functional group Chemical group 0.000 claims abstract description 4
- 239000011248 coating agent Substances 0.000 claims abstract 8
- 239000010408 film Substances 0.000 abstract description 27
- 239000010409 thin film Substances 0.000 abstract description 9
- 239000002131 composite material Substances 0.000 abstract description 6
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 4
- 238000007598 dipping method Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000004528 spin coating Methods 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract description 2
- 230000001681 protective effect Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 235000019589 hardness Nutrition 0.000 description 6
- 230000001050 lubricating effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical compound FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Lubricants (AREA)
- Paints Or Removers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は固定式磁気記憶装置に用いられる磁気ディスク
に関し、詳しくは該磁気ディスクの金属磁性薄膜上の保
護、潤滑膜に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk used in a fixed magnetic storage device, and more particularly to a protective and lubricating film on a metal magnetic thin film of the magnetic disk.
固定式磁気記憶装置に使用する磁気ディスクは高記録密
度化に伴い、従来の磁性媒体を塗布す石塗布型ディスク
から、金属磁性薄膜を媒体とする薄膜ディスクに移行し
つつある。一方、使用するヘッドも高記録密度化に伴い
従来のM、n−Znフェライトヘッドから、ミニコンポ
ジットタイプヘッドあるいは薄膜ヘッドへとその採用動
向が移行しつつあるが、ミニコンポジットヘッドや8M
ヘッドのスライダ一部の材質にはチタン酸カルシウムや
アルミナ;チタン・カーバイドのような高硬度のセラミ
ックスが用いられる。したがって、磁気ディスク側もそ
れらのヘッドによる・aSS<コンタクト・スタート彎
ストップ)に耐えつるだけの耐久性が妾求されている。With the increase in recording density of magnetic disks used in fixed magnetic storage devices, there is a shift from conventional stone-coated disks coated with a magnetic medium to thin-film disks using a metal magnetic thin film as the medium. On the other hand, with the increase in recording density, the use of heads is shifting from conventional M, n-Zn ferrite heads to mini composite type heads or thin film heads, but mini composite heads and 8M
A part of the head slider is made of high-hardness ceramics such as calcium titanate, alumina, or titanium carbide. Therefore, the magnetic disk side is also required to be durable enough to withstand the aSS (contact start/stop) caused by these heads.
従来より金属薄膜を磁性媒体とする固定式の磁気ディス
クには保護潤滑膜として、スパッタリングによる炭素質
膜や、スパッタリングあるいは湿式法によるSiO□膜
に潤滑剤を塗布したものが提案されているが、例えば炭
素質膜は、チタン酸カルシウム(Hv中1500)をス
ライダーとして用いるミニコンポジツタヘッドに対して
は、摩食式 In>−+ ノ 1−小 白羽3研
噌ハ其t々l乙鋒I−シ − 1−ν4ことごとく摩耗
してヘッドクラッシュを起こす。Conventionally, as a protective lubricant film for fixed magnetic disks that use a thin metal film as a magnetic medium, a sputtered carbon film or a sputtered or wet SiO□ film coated with a lubricant has been proposed. For example, a carbonaceous membrane is suitable for a mini-compositor head that uses calcium titanate (Hv 1500) as a slider. C-1-ν4 will wear out and cause a head crash.
また、より硬度の高いアルミナ・チタン・カーバイド(
B?−)−2000〜!5000)を用いた薄膜ヘッド
に対しては、上述のような現象がより顕著に発生する。In addition, alumina, titanium, and carbide with higher hardness (
B? -)-2000~! 5000), the above-mentioned phenomenon occurs more markedly.
他方、Sin、膜は通常Hv≦1000で形成されるた
め、優れた潤滑剤を塗布しても、その耐久性に関し、特
に薄膜ヘッドに対して信頼性がない。On the other hand, since the Sin film is usually formed with Hv≦1000, even if a good lubricant is applied, its durability is unreliable, especially for thin film heads.
以上のように、従来の保護、潤滑膜をもつ金属磁性媒体
を有する磁気ディスクに対して、より一増の高記録密度
を達成するために、ミニコンポジットヘッドや薄膜ヘッ
ドを用−ると、その硬いスライダー材質によるaSSに
対しディスク側の耐摩耗性、潤滑性が十分に確保できな
いと−う問題点を有して−た。As described above, mini composite heads and thin film heads can be used to achieve even higher recording densities than conventional magnetic disks that have metal magnetic media with protective and lubricating films. The aSS, which is made of a hard slider material, has the problem of not being able to ensure sufficient wear resistance and lubricity on the disk side.
そこで本発明はこのような問題点を解決するためのもの
で、その目的とするところは、金属磁性媒体上にHv=
1000〜2000程度の従来の保護膜よりは高硬度の
材質からなる保護膜を設け、さらにその上層に、保護膜
と化学的に結合し、かつ、優れた潤滑性をもつ潤滑剤を
塗布することにより、ミニコンポジットヘッドや薄膜ヘ
ッドに対し、耐摩耗性や潤滑性などの機械的信頼性を高
めた金属磁性媒体を有する固定式磁気ディスクを提供す
ることにある。Therefore, the present invention is intended to solve such problems, and its purpose is to provide Hv=
A protective film made of a material with a hardness higher than the conventional protective film of about 1000 to 2000 is provided, and a lubricant that chemically bonds with the protective film and has excellent lubricity is applied on top of the protective film. Therefore, an object of the present invention is to provide a fixed magnetic disk having a metal magnetic medium with improved mechanical reliability such as wear resistance and lubricity for mini-composite heads and thin film heads.
本発明の磁気ディスクは、基体上に酸化アルミニウムを
被覆し、さらに前記酸化アルミニウム被膜上に官能基と
して水酸基を持つパーフロロポリエーテルを潤滑剤とし
て塗布したことを特徴とす6、!化アルミニウム膜はマ
グネトロンスパッタにより形成し、膜厚は200〜10
00λが望ましい、また、硬度は、上記のような膜厚で
は正確な評価ができないが、厚膜形成した場合大別して
Hv+1500および1500程度の硬度に相当する本
発明の目的に適合する最低2種類のものがスパッタ条件
を変えることにより得られることが判明した。The magnetic disk of the present invention is characterized in that a substrate is coated with aluminum oxide, and a perfluoropolyether having a hydroxyl group as a functional group is coated as a lubricant on the aluminum oxide coating6. The aluminum chloride film is formed by magnetron sputtering, and the film thickness is 200 to 10
00λ is desirable.Although the hardness cannot be accurately evaluated with the above film thickness, when a thick film is formed, there are at least two types of hardness that meet the purpose of the present invention, which correspond to hardnesses of approximately Hv+1500 and 1500. It has been found that this can be obtained by changing the sputtering conditions.
次に、酸化アルミニウム上に形成スるパー70ロボリエ
ーテル膜は、分子の両端にOH基を有するものを使用し
、膜厚は30〜1soXg度が望ましい、塗布法はディ
ッピング法あるいはスプレー法、スピンコード法などが
適用できる。ここで作成上の重要なポイントであるが、
このパー70ロボリエーテル塗布後に100−200℃
で10〜60分通常雰囲気下で加熱を行なう、すなわも
、酸化アル4ニウムの衰弱には通常OR基が存在するた
め、同じ(OH基をもつパー70ロボリエーテル塗布後
に上述の加熱を行なうと、−OH+ −OH−一一
−〇−+ H,O↑のような脱水縮合反応が起こ
る。したがってこのパーフロロポリエーテルは常温で液
体であっても化学的に強固に結合され、ディスクの回転
によりスピンオフすることもなく、その優れた潤滑性を
効果的に発揮できるものである。Next, the Super 70 Robolyether film formed on the aluminum oxide has OH groups at both ends of the molecule, and the film thickness is preferably 30 to 1soXg.The coating method is dipping, spraying, or spin coating. Laws etc. can be applied. Here is an important point when creating
100-200℃ after applying this par 70 roboliether
Heating is carried out in a normal atmosphere for 10 to 60 minutes at , -OH+ -OH-11 -〇-+ H,O↑A dehydration condensation reaction occurs.Therefore, even though this perfluoropolyether is liquid at room temperature, it is chemically strongly bonded and the rotation of the disk The excellent lubricity can be effectively exhibited without causing spin-off.
表1.に示すような試作品を作成した。以下に作成法を
説明する。直径95■のアル4 +ラムディスク基板上
に無電解N1−P非磁性メッキを約20μmの膜厚で形
成しポリッシングにより約15μmになるまで研磨し、
表面粗さもRmawα03μm以下に加工した。Table 1. We created a prototype as shown in the figure below. The creation method will be explained below. Electroless N1-P nonmagnetic plating was formed to a thickness of about 20 μm on an Al4 + RAM disk substrate with a diameter of 95 cm, and polished to a thickness of about 15 μm.
The surface roughness was also processed to Rmawα03 μm or less.
次に金属磁性媒体の形成であるが、実施例1および2に
おいては、研摩したN1−Pメッキ膜上に、同じく無電
解メッキにより0o−Ni−P膜を7.ooK形成した
。実施例3および4は磁性媒体としてマグネトロンスパ
ッタによt)Co−50atm%N i −7,5at
m%Or合金を7001形成した。Next, regarding the formation of a metal magnetic medium, in Examples 1 and 2, a 0o-Ni-P film was formed on the polished N1-P plating film by electroless plating. ooK was formed. Examples 3 and 4 were prepared using magnetron sputtering as the magnetic medium.
m%Or alloy 7001 was formed.
続いて、酸化アルミニウム保護膜の形成は、マグネトロ
ンスパッタ装置により、表1に示したように膜厚、硬度
を変えたものを作成した。Subsequently, aluminum oxide protective films were formed using a magnetron sputtering device, with film thicknesses and hardnesses varied as shown in Table 1.
さらに、パー70ロボリエーテル潤滑膜は、水酸基を持
つパー70ロボリエーテル(7オンプリン ZDOL
、日本モンテジリン社製)をa、1W/V% の濃度で
ダイフロン5−5(ダイキン工業製)に溶解し、ディッ
ピング法で塗布した。膜厚は引き上げ速度によりコント
ロールした。Furthermore, the Par 70 Robo-Rether lubricating film has a hydroxyl group-containing Par 70 Robo-Ether (7-on-purine ZDOL).
(manufactured by Nippon Montegilin Co., Ltd.) was dissolved in Daiflon 5-5 (manufactured by Daikin Industries) at a concentration of 1 W/V% and applied by dipping. The film thickness was controlled by the pulling speed.
さらに最後の加熱焼成はすべて150℃で30分行なり
た。Furthermore, the final heating and baking process was all carried out at 150°C for 30 minutes.
表1. 実施例および比較例
以上の実施例と比較例の品質評価はaSS試験により実
施し、03’3後のディ不り表面の外観変化、静摩擦係
数μ、および出力低下率を求めた。Table 1. Examples and Comparative Examples The quality of the above Examples and Comparative Examples was evaluated by an aSS test, and the appearance change of the deformed surface after 03'3, the static friction coefficient μ, and the output reduction rate were determined.
その結果を表2に示す。The results are shown in Table 2.
表2 品質評価結果(08135万回後)〔発明の効果
〕
表2に示したように、本発明の効果は顕著であることが
認められ、これにより、今後の磁気ディスク装置の高密
度化に伴ない、ヘッドサイドとして、ミニコンポジット
ヘッドや薄膜ヘッドが用いられても、ディスクサイドと
して十分な機械的信頼性が保証できることになった。ま
た、酸化アルミニウム膜の形成により金属磁性媒体の耐
食性も向上するという副次的な効果も得られた。さらに
、酸化アルミニウムはスパッタリングのターゲットとし
て安価であるためコスト・的なメリットも期待できるも
のである。Table 2 Quality evaluation results (after 0.8135 million times) [Effects of the invention] As shown in Table 2, it is recognized that the effects of the present invention are remarkable, and this will help improve the density of future magnetic disk drives. Accordingly, even if a mini-composite head or a thin film head is used as the head side, sufficient mechanical reliability can be guaranteed as the disk side. In addition, a secondary effect of improving the corrosion resistance of the metal magnetic medium was also obtained by forming the aluminum oxide film. Furthermore, since aluminum oxide is inexpensive as a sputtering target, cost benefits can also be expected.
以上that's all
Claims (1)
ルミニウム被膜上に官能基として水酸基を持つパーフロ
ロポリエーテルを潤滑剤として塗布したことを特徴とす
る磁気ディスク。1. A magnetic disk characterized in that a substrate is coated with aluminum oxide, and a perfluoropolyether having a hydroxyl group as a functional group is applied as a lubricant on the aluminum oxide coating.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26233486A JPS63117311A (en) | 1986-11-04 | 1986-11-04 | Magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26233486A JPS63117311A (en) | 1986-11-04 | 1986-11-04 | Magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63117311A true JPS63117311A (en) | 1988-05-21 |
Family
ID=17374320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26233486A Pending JPS63117311A (en) | 1986-11-04 | 1986-11-04 | Magnetic disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63117311A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0515687A1 (en) * | 1990-10-25 | 1992-12-02 | Ebara Corporation | Gas dynamic bearing |
-
1986
- 1986-11-04 JP JP26233486A patent/JPS63117311A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0515687A1 (en) * | 1990-10-25 | 1992-12-02 | Ebara Corporation | Gas dynamic bearing |
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