JPH02304714A - Magnetic recording medium and its production - Google Patents

Magnetic recording medium and its production

Info

Publication number
JPH02304714A
JPH02304714A JP12472289A JP12472289A JPH02304714A JP H02304714 A JPH02304714 A JP H02304714A JP 12472289 A JP12472289 A JP 12472289A JP 12472289 A JP12472289 A JP 12472289A JP H02304714 A JPH02304714 A JP H02304714A
Authority
JP
Japan
Prior art keywords
lubricant
thin film
carbon
nitrides
ferromagnetic metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12472289A
Other languages
Japanese (ja)
Inventor
Shuji Ito
伊藤 周二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP12472289A priority Critical patent/JPH02304714A/en
Publication of JPH02304714A publication Critical patent/JPH02304714A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a magnetic recording medium which is free from mechanical damage in its ferromagnetic metal medium and shows no increase in the coefft. of friction by covering with a thin film comprising oxides, nitrides, carbides or carbon on the ferromagnetic metal medium and then impregnating the film with a liquid lubricant or a solid lubricant. CONSTITUTION:A thin film comprising at least one material selected from oxides, nitrides, carbides and carbon is formed on the ferromagnetic metal medium, and then the thin film is impregnated with at least one kind of liquid lubricant or solid lubricant. Although oxides, nitrides, carbides and carbon formed on the ferromagnetic metal substrate act as a buffer against impact by a magnetic head, even the film is abraded on CSS when the magnetic head has a hard slider. Therefore, it is necessary to laminate a single layer, mixture or multilayer of liquid lubricant and/or solid lubricant with good lublicity. Or a diluted soltuion of liquid or solid lubricant is made to diffuse or permeate in the thin film of oxide, nitride, carbide or carbon by use of ultrasonic in the process of coating the lubricant. Thus, the medium has long-term CSS dura bility.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は非磁性基板上に強磁性金属薄膜を設けて成る磁
気記憶媒体及びその製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic storage medium comprising a ferromagnetic metal thin film provided on a non-magnetic substrate, and a method for manufacturing the same.

〔従来の技術〕[Conventional technology]

金属媒体を有する磁気記憶媒体では、磁気ヘッドとの接
触に十分耐えうる機械的信頼性を有することが必要不可
欠である。磁気記憶媒体はドライブ構成の簡略化により
、コンタクト・スタート・ストップ(以下C8S方式と
略す)が採用され、更に磁気記録面の保護のため、磁気
記録面以外のシツピングゾーンの同一トラックでc s
 s −b;行われる場合が多い。
It is essential for a magnetic storage medium having a metal medium to have sufficient mechanical reliability to withstand contact with a magnetic head. Contact start/stop (hereinafter referred to as C8S method) has been adopted for magnetic storage media to simplify the drive configuration, and in order to protect the magnetic recording surface, cs is applied to the same track in the shipping zone other than the magnetic recording surface.
s-b: Often performed.

また、磁気記録の高密度化にともない磁気ヘッドもフェ
ライトミニモノリシックヘッドから、コンポジットヘッ
ド、薄膜ヘッドと変わり、スライダー材の硬度が増加し
磁気記憶媒体の保護膜の耐久性の向上が求められている
In addition, as magnetic recording density increases, magnetic heads are changing from ferrite mini-monolithic heads to composite heads and thin film heads, and as the hardness of slider materials increases, there is a need to improve the durability of the protective film of magnetic storage media. .

従来、金属磁性媒体の表面に飽和脂肪酸等の有機潤滑層
を設ける方法(特公昭56−30609号)脂肪酸アミ
ドとリン系化合物の混合潤滑層を設ける方法(特公昭5
9−165238)高級脂肪酸と脂肪酸金属塩の混合潤
滑層を設ける方法(特公昭59−177728)等があ
るが、硬度の高いスライダーを有する磁気ヘッドでのC
8Sでは摩擦係数の上昇、クラッシュの問題がある。
Conventionally, there has been a method of providing an organic lubricant layer of saturated fatty acids or the like on the surface of a metal magnetic medium (Japanese Patent Publication No. 56-30609), a method of providing a mixed lubricant layer of fatty acid amide and a phosphorus compound (Japanese Patent Publication No. 56-30609).
9-165238) There is a method of providing a mixed lubricating layer of higher fatty acids and fatty acid metal salts (Japanese Patent Publication No. 59-177728), but C
8S has problems with increased friction coefficient and crashes.

潤滑層と保護膜層との両方の特性を示す炭素質膜(特公
昭54−33521)(特開昭53−143206)(
特開昭56−41524)は、C8S時に傷が入らず磁
気ヘッドの衝撃を緩衝するため、磁気特性の劣化も見ら
れないが、硬度の高いスライダーを有する磁気ヘッドで
のC8Sでは、C8S回数の増加につれ炭素質膜が削れ
摩楠係数が増大するという問題を有していた。
Carbonaceous film exhibiting the characteristics of both a lubricating layer and a protective film layer (Japanese Patent Publication No. 54-33521) (Japanese Patent Publication No. 53-143206) (
Japanese Patent Application Laid-Open No. 56-41524) does not cause scratches during C8S and buffers the impact of the magnetic head, so no deterioration of magnetic properties is observed. However, in C8S with a magnetic head with a highly hard slider, There was a problem in that as the carbonaceous film increased, the carbonaceous film was worn away and the abrasive coefficient increased.

〔発明が解決しようとする課題及び目的〕上述のごと〈
従来技術では硬度の高いスライダーを有する磁気ヘッド
とのC8Sでは十分な機械的信頼性が得られず摩擦係数
の上昇を押さえることができなかった。
[Problem and purpose to be solved by the invention] As mentioned above
In the conventional technology, sufficient mechanical reliability could not be obtained with C8S using a magnetic head having a highly hard slider, and an increase in the coefficient of friction could not be suppressed.

そこで本発明はこの様な問題点を解決するもので、その
目的とするところは硬度の高いスライダーを有する磁気
ヘッドでのC8Sでも強磁性金属媒体に機械的ダメージ
を与えず、かつ摩擦係数も増加しない磁気記憶媒体を提
供することである。
Therefore, the present invention is intended to solve these problems, and its purpose is to avoid mechanical damage to the ferromagnetic metal medium even with C8S in a magnetic head with a highly hard slider, and to increase the coefficient of friction. The objective is to provide a magnetic storage medium that does not.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の磁気記憶媒体は、非磁性基板上に形成された強
磁性金属媒体上に、酸化物、窒化物、炭化物あるいは炭
素から選ばれる少なくとも1種の物質より成る薄膜が被
覆され、その中に超音波を用いて、液体潤滑剤あるいは
固体潤滑剤の少なくとも1種を含浸せしめたことを特徴
とする。
In the magnetic storage medium of the present invention, a ferromagnetic metal medium formed on a non-magnetic substrate is coated with a thin film made of at least one substance selected from oxides, nitrides, carbides, and carbon. It is characterized by being impregnated with at least one type of liquid lubricant or solid lubricant using ultrasonic waves.

酸化物は、5if2、TiC2、Cr、03等、窒化物
は、TiN、TazN、AIN、S 1sNt等、炭化
物は、SiC,TiC等、炭素は、ダイ、ヤモンド状、
グラファイト状、アモルフオス状の何れでもよく、膜厚
は、150人〜800人形成する。
Oxides include 5if2, TiC2, Cr, 03, etc., nitrides include TiN, TazN, AIN, S 1sNt, etc., carbides include SiC, TiC, etc., and carbon includes diamond, diamond, etc.
It may be either graphite or amorphous, and the film thickness is 150 to 800.

以上は真空蒸着法、スパッタリング法、イオンブレーテ
ィング法やCVD法の何れの方法でも形成可能である。
The above can be formed by any method such as a vacuum evaporation method, a sputtering method, an ion blating method, or a CVD method.

潤滑の含浸方法は、超音波法のほかに、高圧ジェットス
プレー法、バブルジェット法、HIP法等で可能である
In addition to the ultrasonic method, lubrication can be impregnated by a high-pressure jet spray method, a bubble jet method, a HIP method, or the like.

液体潤滑剤は、パーフロロポリエーテル、固体潤滑剤は
、高級アルコール、飽和、不飽和脂肪酸等を用いる。何
れも可溶性溶媒に希釈され、上記含浸方法を行い、ディ
ッピングで形成する。
Perfluoropolyether is used as the liquid lubricant, and higher alcohol, saturated or unsaturated fatty acid, etc. are used as the solid lubricant. Both are diluted with a soluble solvent and formed by the above-mentioned impregnation method and dipping.

〔作用〕[Effect]

強磁性金属媒体上に形成された酸化物、窒化物、炭化物
、炭素は磁気ヘッドの衝撃を緩衝する機能があるが硬度
の高いスライダーを有する磁気ヘッドとのC8Sでは削
れてしまう。そこで潤滑性に優れた液体潤滑剤、固体潤
滑剤を単層、混合又は積層する。
The oxides, nitrides, carbides, and carbon formed on the ferromagnetic metal medium have the function of buffering the impact of the magnetic head, but they are scraped by C8S with a magnetic head having a highly hard slider. Therefore, liquid lubricants and solid lubricants with excellent lubricity are used in a single layer, mixed or laminated.

酸化物、窒化物、炭化物、炭素のN膜は、多孔質膜とし
て形成されており、単純に潤滑剤を被、覆するだけでは
硬質磁気ヘッドでのC8Sをクリアすることはできない
The N film of oxide, nitride, carbide, and carbon is formed as a porous film, and simply covering it with a lubricant cannot clear C8S in a hard magnetic head.

本発明では、潤滑塗布工程において、液体潤滑、固体潤
滑の希釈溶媒に超音波をかけて、酸化物、窒化物、炭化
物、炭素の薄膜中に潤滑剤を拡散、浸透させる。
In the present invention, in the lubricant application step, ultrasonic waves are applied to the diluted solvent of liquid lubrication or solid lubrication to diffuse and penetrate the lubricant into a thin film of oxide, nitride, carbide, or carbon.

この含浸された潤滑剤の効果が持続することにより、長
期のC8S耐久性を確保することが可能となった。
By maintaining the effect of this impregnated lubricant, it became possible to ensure long-term C8S durability.

次に実施例で具体的に説明する。Next, examples will be specifically explained.

〔実施例−1〕 鏡面仕上げされたディスク状アルミニウム合金基板状に
非磁性合金めっきとしてN1−P合金めっきを約15μ
mの厚さにめっき後、研磨により10μmの厚さ、表面
粗さ0.03μm以下にし、更に金属磁性薄膜としてC
o−N1−P合金を約0.06μm厚にめっきした。
[Example-1] Approximately 15 μm of N1-P alloy plating was applied as non-magnetic alloy plating to a disk-shaped aluminum alloy substrate with mirror finish.
After plating to a thickness of m, polish to a thickness of 10 μm and a surface roughness of 0.03 μm or less, and then coat as a metal magnetic thin film.
o-N1-P alloy was plated to a thickness of about 0.06 μm.

次にマグネトロンスパッタ法で、アモルフォス状炭素質
膜を300人形成した。
Next, 300 amorphous carbonaceous films were formed by magnetron sputtering.

次にフォンブリンAM2001(液体潤滑剤)をダイフ
ロンS−3溶媒にO,0OIW/V%酒度で溶解し、6
0秒間超音波(30kHz、 1.6W/cm)をかけ
たのち、ディッピング法(10cm /I!1in)で
塗布した。
Next, Fomblin AM2001 (liquid lubricant) was dissolved in Daiflon S-3 solvent at a concentration of O,0 OIW/V%, and 6
After applying ultrasonic waves (30 kHz, 1.6 W/cm) for 0 seconds, coating was performed by a dipping method (10 cm 2 /I!1 inch).

〔実施例−2〕 実施例1と同様にして金属媒体を有するディスクを作成
した。
[Example 2] A disk having a metal medium was produced in the same manner as in Example 1.

次にマグネトロンスパッタ装置でTa2N膜を700人
形成した。次にリグノセリン酸(固体潤滑剤)をダイフ
ロンS−3とメタノールの混合溶媒(体積比80対20
)に0.002W/V%濃度で溶解し、30秒間超音波
(25kHz、0.8W/c+1)をかけたのちディッ
ピング法(10cta /min )で塗布した。
Next, 700 Ta2N films were formed using a magnetron sputtering device. Next, lignoceric acid (solid lubricant) was added to a mixed solvent of Daiflon S-3 and methanol (volume ratio 80:20).
) at a concentration of 0.002 W/V%, and after applying ultrasonic waves (25 kHz, 0.8 W/c+1) for 30 seconds, it was applied by a dipping method (10 cta/min).

〔実施例−3〕 実施例1と同様にして金属媒体を有するディスクを作成
した。
[Example 3] A disk having a metal medium was produced in the same manner as in Example 1.

次にマグネトロンスパッタ装置でグラファイト状の炭素
質膜を800人形成した。次にステアリンM(固体潤滑
剤)をダイフロンS−3とメタノールの混合溶媒(体積
比60対40)に0.0.OIW/V%濃度で溶解し、
120秒間超音波(30kHz、 1 、2W/cj 
)をかけたのちディッピング法(100m/m1n)で
塗布した。
Next, 800 graphite-like carbonaceous films were formed using a magnetron sputtering device. Next, Stearin M (solid lubricant) was added to a mixed solvent of Daiflon S-3 and methanol (volume ratio 60:40) at 0.0. Dissolved at OIW/V% concentration,
Ultrasound for 120 seconds (30kHz, 1,2W/cj
) and then applied by dipping method (100 m/m1n).

〔実施例−4〕 実施例1と同様にして金属媒体を有するディスクを作成
した。
[Example 4] A disk having a metal medium was produced in the same manner as in Example 1.

次にマグネトロンスパッタ装置でグラファイト状の炭素
質膜を500人形成した。次にステアリン酸カリウム(
固体潤滑剤)をダイフロンS−3とメタノールの混合溶
媒(体積比75対25)に0゜002W/V%濃度で溶
解し、30秒間超音波(15kHz、 0 、8w/c
+a )をかけたのちディッピング法(LoCm/m1
n)で塗布した。
Next, 500 graphite-like carbonaceous films were formed using a magnetron sputtering device. Next, potassium stearate (
A solid lubricant) was dissolved in a mixed solvent of Daiflon S-3 and methanol (volume ratio 75:25) at a concentration of 0.002 W/V%, and then subjected to ultrasonic waves (15 kHz, 0.8 w/c) for 30 seconds.
+a) and then the dipping method (LoCm/m1
n).

〔比較例−1〕 実施例1に於いて超音波をかけずに潤滑を塗布して、サ
ンプルを作成した。
[Comparative Example-1] A sample was prepared in Example 1 by applying lubrication without applying ultrasonic waves.

〔比較例−2〕 実施例2に於いて超音波をかけずに潤滑を塗布して、サ
ンプルを作成した。
[Comparative Example-2] A sample was prepared in Example 2 by applying lubrication without applying ultrasonic waves.

〔比較例−3〕 実施例3に於いて超音波をかけずに潤滑を塗布して、サ
ンプルを作成した。
[Comparative Example-3] A sample was prepared in Example 3 by applying lubrication without applying ultrasonic waves.

〔比較例−4〕 実施例4に於いて超音波をかけずに潤滑を塗布して、サ
ンプルを作成した。
[Comparative Example-4] A sample was prepared in Example 4 by applying lubrication without applying ultrasonic waves.

〔比較例−5〕 実施例4に於いて潤滑剤を塗布せずにサンプルを作成し
た。
[Comparative Example-5] A sample was prepared in Example 4 without applying a lubricant.

以上の実施例、比較例のディスクをC8S試験した。C
SS試験は、浮上量0.20μm、Hv1200のスラ
イダー材質アルミナチタンカーバイドの薄膜ヘッドを用
いてCSS前とC3S200oo回後の静摩擦係数の測
定を行った。その結果を第1表に示す。
The disks of the above Examples and Comparative Examples were subjected to a C8S test. C
In the SS test, a thin film head made of alumina titanium carbide as a slider material with a flying height of 0.20 μm and Hv 1200 was used to measure the coefficient of static friction before CSS and after 20000 cycles of C3S. The results are shown in Table 1.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば、酸化物、窒化物、
炭化物、炭素中に超音波を用いて強制的に、液体潤滑剤
、固体潤滑剤を含浸、拡散させることによりCSSの耐
久性が向上した。
As described above, according to the present invention, oxides, nitrides,
The durability of CSS has been improved by forcibly impregnating and diffusing a liquid lubricant or solid lubricant into carbide or carbon using ultrasonic waves.

また硬質磁気ヘッドでの耐久特性が向上したことにより
、高記録密度の磁気ディスクを提供す、ることが可能と
なった。
Furthermore, improvements in the durability of hard magnetic heads have made it possible to provide magnetic disks with high recording densities.

第1表 社Table 1 company

Claims (4)

【特許請求の範囲】[Claims] (1)非磁性基板上に形成された強磁性金属薄膜媒体上
に、酸化物、窒化物、炭化物あるいは炭素から選ばれる
少なくとも1種の物質より成る薄膜が被覆され、その中
に液体潤滑剤あるいは固体潤滑剤の少なくとも1種を含
浸せしめたことを特徴とする磁気記憶媒体。
(1) A ferromagnetic metal thin film medium formed on a nonmagnetic substrate is coated with a thin film made of at least one substance selected from oxides, nitrides, carbides, or carbon, and a liquid lubricant or A magnetic storage medium impregnated with at least one solid lubricant.
(2)酸化物、窒化物、炭化物あるいは炭素から選ばれ
る少なくとも1種の物質よりなる薄膜に、超音波を用い
て、液体潤滑剤あるいは固体潤滑剤の少なくとも1種を
を含浸せしめたことを特徴とする第1項記載の磁気記憶
媒体。
(2) A thin film made of at least one substance selected from oxides, nitrides, carbides, or carbon is impregnated with at least one liquid lubricant or solid lubricant using ultrasonic waves. 2. The magnetic storage medium according to claim 1.
(3)非磁性基板上に形成された強磁性金属薄膜媒体上
に、酸化物、窒化物、炭化物あるいは炭素から選ばれる
少なくとも1種の物質よりなる薄膜が被覆され、その中
に液体潤滑剤あるいは固体潤滑剤の少なくとも1種を含
浸する工程からなることを特徴とする磁気記憶媒体の製
造方法。
(3) A thin film made of at least one substance selected from oxide, nitride, carbide, or carbon is coated on a ferromagnetic metal thin film medium formed on a nonmagnetic substrate, and a liquid lubricant or A method for producing a magnetic storage medium, comprising the step of impregnating it with at least one solid lubricant.
(4)酸化物、窒化物、炭化物あるいは炭素から選ばれ
る少なくとも1種の物質からなる薄膜に、超音波を用い
て、液体潤滑剤あるいは固体潤滑剤の少なくとも1種を
含浸する工程からなることを特徴とする第3項記載の磁
気記憶媒体の製造方法。
(4) A process of impregnating a thin film made of at least one substance selected from oxides, nitrides, carbides, or carbon with at least one liquid lubricant or solid lubricant using ultrasonic waves. 4. The method for manufacturing a magnetic storage medium according to item 3.
JP12472289A 1989-05-18 1989-05-18 Magnetic recording medium and its production Pending JPH02304714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12472289A JPH02304714A (en) 1989-05-18 1989-05-18 Magnetic recording medium and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12472289A JPH02304714A (en) 1989-05-18 1989-05-18 Magnetic recording medium and its production

Publications (1)

Publication Number Publication Date
JPH02304714A true JPH02304714A (en) 1990-12-18

Family

ID=14892486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12472289A Pending JPH02304714A (en) 1989-05-18 1989-05-18 Magnetic recording medium and its production

Country Status (1)

Country Link
JP (1) JPH02304714A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006048801A (en) * 2004-08-03 2006-02-16 Fuji Electric Holdings Co Ltd Method for manufacturing magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006048801A (en) * 2004-08-03 2006-02-16 Fuji Electric Holdings Co Ltd Method for manufacturing magnetic recording medium

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