JPH02149923A - Production of thin-film magnetic recording medium - Google Patents
Production of thin-film magnetic recording mediumInfo
- Publication number
- JPH02149923A JPH02149923A JP30362288A JP30362288A JPH02149923A JP H02149923 A JPH02149923 A JP H02149923A JP 30362288 A JP30362288 A JP 30362288A JP 30362288 A JP30362288 A JP 30362288A JP H02149923 A JPH02149923 A JP H02149923A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- lubricating
- recording medium
- heating treatment
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 26
- 239000010409 thin film Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010410 layer Substances 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 239000000314 lubricant Substances 0.000 claims abstract description 13
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011241 protective layer Substances 0.000 claims abstract description 9
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910001096 P alloy Inorganic materials 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000010687 lubricating oil Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims description 4
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 16
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000000576 coating method Methods 0.000 abstract description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 4
- 229910000990 Ni alloy Inorganic materials 0.000 abstract description 2
- 230000002411 adverse Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract 4
- 230000001681 protective effect Effects 0.000 abstract 2
- 239000010408 film Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、薄膜磁気記録媒体の製造方法に関し、詳し
くは表面潤滑層の形成方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a thin film magnetic recording medium, and more particularly to a method for forming a surface lubricating layer.
固定磁気ディスク装置などに好適に用いられる薄膜磁気
記録媒体（以下単に媒体とも称する）として、アルミニ
ウム合金基板上に無電解めっきでニッケル・りん合金層
を形成し、その上にスパッタ法で非磁性金属１例えばク
ロムからなる非磁性金属下地層２強磁性金属薄膜１例え
ばコバルト・ニッケル合金薄膜からなる磁性層、炭素保
護層を順次形成し、さらにその上に液体潤滑剤を塗布し
てなる表面潤滑層を形成したものが知られている。As a thin-film magnetic recording medium (hereinafter simply referred to as a medium) that is suitably used in fixed magnetic disk devices, etc., a nickel-phosphorus alloy layer is formed on an aluminum alloy substrate by electroless plating, and a non-magnetic metal is deposited on top of it by sputtering. 1 A non-magnetic metal base layer made of, for example, chromium 2 A ferromagnetic metal thin film 1 A surface lubricating layer formed by sequentially forming a magnetic layer made of, for example, a cobalt-nickel alloy thin film and a carbon protective layer, and then coating a liquid lubricant thereon. It is known that the formation of
このような媒体の製造に際して、表面潤滑層は液体潤滑
剤を塗布するだけでなく、塗布後加熱処理を行うと潤滑
特性が大幅に向上することが知られている。液体潤滑剤
として、フロロカーボン系で分子量が数千程度のものを
塗布した場合、塗布後の加熱処理温度としては１２０℃
程度が適していた。It is known that when manufacturing such a medium, the surface lubricant layer is not only coated with a liquid lubricant, but also subjected to heat treatment after coating to significantly improve the lubricating properties. When applying a fluorocarbon-based liquid lubricant with a molecular weight of several thousand, the heat treatment temperature after application is 120°C.
The level was appropriate.
ところが、フロロカーボン系で分子量が数千程度の液体
潤滑剤を塗布し、１２０℃程度で加熱処理を施して形成
した表面潤滑層を備えた媒体は、磁気ヘッドと組み合わ
せてＣＳ Ｓ （Ｃｏｎｔａｃｔ ５ｔａｒｔＳｔｏｐ
） を繰り返したとき、Ｍｎ−Ｚｎフェライトヘッド
を用いた場合には動摩擦係数の変動は小さく良好である
が、ＣａＴｉ０．あるいは＾ｊ！２０＊／ＴＩＣからな
るスライダーをもつ硬度の高い磁気ヘッドを用いた場合
には動摩擦係数が増大し問題となる。However, media with a surface lubricant layer formed by coating a fluorocarbon-based liquid lubricant with a molecular weight of several thousand and heat-treating it at about 120°C can be
) When a Mn-Zn ferrite head is used, the variation in the coefficient of dynamic friction is small and good, but when CaTi0. Or ^j! When a highly hard magnetic head with a slider made of 20*/TIC is used, the coefficient of dynamic friction increases, which poses a problem.
このような硬度の高い磁気ヘッドに適応させるためには
、媒体の表面潤滑層を形成する液体潤滑剤として、分子
量が１万以上のものを用いると良いといわれている。し
かしながら、分子量１万以上の液体潤滑剤を塗布し１２
０℃程度の温度で加熱処理を行って形成した表面潤滑層
を備えた媒体は硬度が高い磁気ヘッドを用いてＣ８Ｓを
繰り返すと動摩擦係数が増加してしまう。In order to adapt to such a highly hard magnetic head, it is said that it is best to use a liquid lubricant with a molecular weight of 10,000 or more to form the surface lubricant layer of the medium. However, if a liquid lubricant with a molecular weight of 10,000 or more is applied,
If a medium with a surface lubricant layer formed by heat treatment at a temperature of about 0° C. is subjected to repeated C8S using a magnetic head with high hardness, the coefficient of dynamic friction will increase.
この発明は、上述の問題点を解消して、硬度の高い磁気
ヘッドを用いてＣ８Ｓを繰り返した場合でも動摩擦係数
の変動が小さい、潤滑特性の優れた表面潤滑層を備えた
媒体の製造方法を提供することを目的とする。The present invention solves the above-mentioned problems and provides a method for manufacturing a medium having a surface lubricant layer with excellent lubrication properties and with small fluctuations in the coefficient of dynamic friction even when C8S is repeated using a magnetic head with high hardness. The purpose is to provide.
〔課題を解決するための手段〕
上記の目的は、この発明によれば、アルミニウムを主成
分とする材料からなる基板上に、ニッケル・りん合金層
、非磁性金属下地層９強磁性金属薄膜からなる磁性層、
炭素保護層１表面潤滑層を順次形成する薄膜磁気記録媒
体の製造方法にふいて、前記表面潤滑層を前記炭素保護
層上に分子量が１万以上のフロロカーボン系の液体潤滑
剤を塗布し、２００℃以上２５０℃以下の範囲の温度で
加熱処理を施して形成することによって達成できる。[Means for Solving the Problems] According to the present invention, the above object is achieved by forming a nickel-phosphorus alloy layer, a non-magnetic metal underlayer 9, a ferromagnetic metal thin film on a substrate made of a material containing aluminum as a main component. magnetic layer,
Carbon protective layer 1 A method for producing a thin film magnetic recording medium in which surface lubricating layers are sequentially formed, the surface lubricating layer is coated with a fluorocarbon-based liquid lubricant having a molecular weight of 10,000 or more on the carbon protective layer, This can be achieved by performing a heat treatment at a temperature in the range of .degree. C. or higher and 250.degree. C. or lower.
分子量が１万以上のフロロカーボン系の液体潤滑剤を塗
布し、その後２００℃以上２５０℃以下の範囲の温度で
加熱処理を行うことにより、潤滑特性の優れた表面潤滑
層を形成することができ、硬度の高い磁気ヘッドを用い
てＣ８Ｓを繰り返した場合でも動摩擦係数の変動が小さ
い媒体が得られる。By applying a fluorocarbon-based liquid lubricant with a molecular weight of 10,000 or more, and then performing heat treatment at a temperature in the range of 200°C or more and 250°C or less, a surface lubricant layer with excellent lubricating properties can be formed. Even when C8S is repeated using a magnetic head with high hardness, a medium with small fluctuations in the coefficient of dynamic friction can be obtained.
分子量が１万以上の液体潤滑剤は、蒸気圧が低いために
、塗布膜の余分な溶剤、塗布中に付着した吸着水や汚れ
を除去し潤滑特性の優れた層とするためには、分子量が
数千の液体潤滑剤に比べて塗布膜を高温で加熱する必要
があり、少なくとも２００℃以上の温度で加熱処理を行
うことが必要である。一方、下地層を形成している材料
のうち、ニッケル・りん合金は２７５℃の温度で加熱さ
れると磁化し、媒体の磁気特性に悪影響を及ぼすように
なる。従って、分子量が１万以上の液体潤滑剤の塗布膜
の加熱処理温度は２００℃以上２５０℃以下とするのが
好適である。Liquid lubricants with a molecular weight of 10,000 or more have low vapor pressure, so in order to remove excess solvent from the coating film, adsorbed water and dirt that adhered during coating, and create a layer with excellent lubricating properties, it is necessary to increase the molecular weight. It is necessary to heat the coated film at a high temperature compared to liquid lubricants, which have a temperature of several thousand, and it is necessary to perform heat treatment at a temperature of at least 200°C or higher. On the other hand, among the materials forming the underlayer, the nickel-phosphorus alloy becomes magnetized when heated to a temperature of 275° C., which adversely affects the magnetic properties of the medium. Therefore, it is preferable that the heat treatment temperature for a coating film of a liquid lubricant having a molecular weight of 10,000 or more is 200°C or more and 250°C or less.
以下、この発明の実施例について説明する。 Examples of the present invention will be described below.
アルミニウム合金基板上に無電解めっき法でニッケル・
りん合金層を形成し、この上にスパッタ法でクロム下地
層、 Ｃｏ−Ｎｉ−Ｃｒ磁性層、炭素保護層を順次形成
した。この炭素保護層上に次のステップで表面潤滑層を
形成して媒体とした。Nickel is deposited on an aluminum alloy substrate using an electroless plating method.
A phosphorus alloy layer was formed, and a chromium underlayer, a Co--Ni--Cr magnetic layer, and a carbon protective layer were successively formed thereon by sputtering. A surface lubricating layer was formed on this carbon protective layer in the next step to prepare a medium.
（ａ）テープ研磨：
基板を５００ｒｌ）Ｉｌｌで回転させながら＃４０００
のポリッシングチーブで炭素保護層表面を研磨。(a) Tape polishing: #4000 while rotating the substrate at 500rl)
Polish the surface of the carbon protective layer with a polishing knife.
（ｂ）前加熱：温度り２０℃、６０分間加熱（Ｃ）潤滑
剤塗布：
溶剤としてのフロン１１３中に分子量１万５千のフロロ
カーボン系液体潤滑剤を濃度０．４重量％となるように
混合し調製した塗布液中に浸漬し、６０ｍ／秒の速度で
引き上げて厚さ１５人〜２ＯＡの塗布膜を形成。(b) Preheating: Heating at 20°C for 60 minutes (C) Lubricant application: Fluorocarbon liquid lubricant with a molecular weight of 15,000 was added to Freon 113 as a solvent to a concentration of 0.4% by weight. It was immersed in the mixed and prepared coating solution and pulled up at a speed of 60 m/sec to form a coating film with a thickness of 15 to 2 OA.
（６）後加熱：温度２５０℃、６０分間加熱処理（ｅ）
パフ仕上げ：
基板を１１００ｒｐで回転させながら塗布膜表面をミク
ロスター（■音大製のワイピングクロスの商品名）で６
回パフ仕上げ。(6) Post-heating: Heat treatment at a temperature of 250°C for 60 minutes (e)
Puff finishing: While rotating the substrate at 1100 rpm, the surface of the coating film is coated with Microstar (trade name of wiping cloth manufactured by Ongaku University) for 6 days.
Puff finish.
また、比較のために上記ステップ（ｄ）の後加熱の温度
を１２０℃と変え、その他は実施例と同様にして比較例
の媒体を作製した。Further, for comparison, a medium of a comparative example was produced in the same manner as in the example except that the temperature of the post-heating in step (d) was changed to 120°C.
これら実施例および比較例の媒体について、磁気ヘッド
としてＣａＴｉＯｓヘッドを用いＣ８Ｓを繰り返して動
摩擦係数の変動を調査した。その結果を第１図に示す。Regarding the media of these Examples and Comparative Examples, C8S was repeated using a CaTiOs head as the magnetic head to investigate variations in the coefficient of dynamic friction. The results are shown in FIG.
第１図において、線Ａは実施例の媒体、線Ｂは比較例（
従来例）についての結果を示す。第１図より、実施例の
媒体はＣ５Ｓサイクル１万回後でも動摩擦係数は約０．
２ という低い値を示しほとんど変動が認められないが
、比較例の媒体ではＣ８Ｓサイクル３千回程度で動摩擦
係数−は１．０を超え、初期値の約０．２より大幅に増
大していることが判る。後加熱の温度を１２０℃から２
５０℃に変更した実施例の方法が表面潤滑層の潤滑特性
の向上に非常に有効であることは明らかである。In FIG. 1, line A is the medium of the example, line B is the medium of the comparative example (
The results for the conventional example) are shown below. From FIG. 1, it can be seen that the dynamic friction coefficient of the medium of the example is about 0.00 even after 10,000 C5S cycles.
The coefficient of dynamic friction exceeds 1.0 after approximately 3,000 C8S cycles in the comparative example medium, which is significantly higher than the initial value of approximately 0.2. I understand that. Adjust the post-heating temperature from 120℃ to 2
It is clear that the method of the example in which the temperature was changed to 50°C is very effective in improving the lubricating properties of the surface lubricating layer.
この発明によれば、薄膜磁気記録媒体の製造に際して、
炭素保護層上に分子量が１万以上のフロロカーボン系の
液体潤滑剤を塗布し、その後２００℃以上２５０℃以下
の温度で加熱処理を行って表面保護層を形成することに
より、ＣａＴｉ０．あるいは＾ｊ２ｉＧｓ／ＴＩＣから
なるスライダーをもつ硬度の高い磁気ヘッドを用いてＣ
８Ｓを繰り返した場合でも動摩擦係数の変動が小さい、
潤滑特性の優れた表面潤滑層を備えた薄膜磁気記録媒体
を得ることができる。According to this invention, when manufacturing a thin film magnetic recording medium,
CaTi0. Alternatively, use a highly hard magnetic head with a slider made of ^j2iGs/TIC to
Even when 8S is repeated, the fluctuation of the dynamic friction coefficient is small.
A thin film magnetic recording medium having a surface lubricating layer with excellent lubrication properties can be obtained.
第１図はＣ８Ｓサイクルと動摩擦係数との関係を示す線
図で、線Ａは実施例の媒体、線Ｂは従来例の媒体に関す
るものである。FIG. 1 is a diagram showing the relationship between the C8S cycle and the coefficient of dynamic friction, in which line A relates to the medium of the embodiment, and line B relates to the medium of the conventional example.
Claims (1)
ニッケル・りん合金層、非磁性金属下地層、強磁性金属
薄膜からなる磁性層、炭素保護層、表面潤滑層を順次形
成する薄膜磁気記録媒体の製造方法において、前記表面
潤滑層が前記炭素保護層上に分子量が１万以上のフロロ
カーボン系の液体潤滑剤を塗布し２００℃以上２５０℃
以下の範囲の温度で加熱処理を施して形成されることを
特徴とする薄膜磁気記録媒体の製造方法。1) A thin-film magnetic recording medium in which a nickel-phosphorus alloy layer, a non-magnetic metal underlayer, a magnetic layer made of a ferromagnetic metal thin film, a carbon protective layer, and a surface lubricant layer are sequentially formed on a substrate made of a material whose main component is aluminum. In the manufacturing method, the surface lubricant layer is formed by applying a fluorocarbon liquid lubricant having a molecular weight of 10,000 or more on the carbon protective layer at a temperature of 200°C or more and 250°C.
A method for manufacturing a thin film magnetic recording medium, characterized in that it is formed by performing heat treatment at a temperature in the following range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30362288A JPH02149923A (en) | 1988-11-30 | 1988-11-30 | Production of thin-film magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30362288A JPH02149923A (en) | 1988-11-30 | 1988-11-30 | Production of thin-film magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149923A true JPH02149923A (en) | 1990-06-08 |
Family
ID=17923203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30362288A Pending JPH02149923A (en) | 1988-11-30 | 1988-11-30 | Production of thin-film magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149923A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03153645A (en) * | 1989-11-01 | 1991-07-01 | Internatl Business Mach Corp <Ibm> | Lubricating film for thin membrane disk |
| JPH0467430A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
| JP2006171188A (en) * | 2004-12-14 | 2006-06-29 | Nidec Copal Corp | Blade driving device for camera |
-
1988
- 1988-11-30 JP JP30362288A patent/JPH02149923A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03153645A (en) * | 1989-11-01 | 1991-07-01 | Internatl Business Mach Corp <Ibm> | Lubricating film for thin membrane disk |
| JPH0467430A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
| JP2006171188A (en) * | 2004-12-14 | 2006-06-29 | Nidec Copal Corp | Blade driving device for camera |
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| JPS5857628A (en) | Flexible magnetic recording medium |