JPS6325732Y2 - - Google Patents
Info
- Publication number
- JPS6325732Y2 JPS6325732Y2 JP18108383U JP18108383U JPS6325732Y2 JP S6325732 Y2 JPS6325732 Y2 JP S6325732Y2 JP 18108383 U JP18108383 U JP 18108383U JP 18108383 U JP18108383 U JP 18108383U JP S6325732 Y2 JPS6325732 Y2 JP S6325732Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- arm
- pin
- push
- pull
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000032258 transport Effects 0.000 description 7
- 230000007547 defect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
Landscapes
- Special Conveying (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18108383U JPS6088546U (ja) | 1983-11-24 | 1983-11-24 | ホルダ搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18108383U JPS6088546U (ja) | 1983-11-24 | 1983-11-24 | ホルダ搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6088546U JPS6088546U (ja) | 1985-06-18 |
JPS6325732Y2 true JPS6325732Y2 (fr) | 1988-07-13 |
Family
ID=30392477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18108383U Granted JPS6088546U (ja) | 1983-11-24 | 1983-11-24 | ホルダ搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6088546U (fr) |
-
1983
- 1983-11-24 JP JP18108383U patent/JPS6088546U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6088546U (ja) | 1985-06-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4924258A (en) | Mask holder and a mask conveying and holding mechanism using the same | |
JP2010534945A (ja) | 基板特にプリント回路基板を搬送するための、保持手段、装置、及び方法 | |
JP2002141405A (ja) | 基板搬送装置 | |
JPS6325732Y2 (fr) | ||
JPH10305894A (ja) | 基板収納ケースおよび半導体製造プロセス | |
JPH0119576B2 (fr) | ||
US3743299A (en) | Cassette tape recording and reproducing apparatus | |
JPH02229499A (ja) | 基板搬送装置 | |
JP2606934B2 (ja) | 板状体の把持装置 | |
JPS6383949A (ja) | カ−トリツジ搬送装置 | |
JP2021166218A (ja) | ロボットハンド | |
JPH0510350Y2 (fr) | ||
JPH0118395Y2 (fr) | ||
JP2005175200A (ja) | 部品供給装置、及び部品実装装置 | |
JP2508964Y2 (ja) | 軸状部品の搬送装置 | |
JP2821440B2 (ja) | 露光装置 | |
JPH06255766A (ja) | 物品搬送方法及び装置 | |
JPH0538890U (ja) | ガラス基板の搬送機構 | |
JPS5852548U (ja) | 自動原稿送り装置 | |
JPH0711291U (ja) | 搬送ハンド | |
JPS59170959U (ja) | イオン注入装置 | |
JPS605520A (ja) | 防塵カセツト | |
JPS5896536U (ja) | 記録材料装着装置 | |
JP3678914B2 (ja) | ホルダ装着用ステージ | |
JPH0544355Y2 (fr) |