JPS6325709B2 - - Google Patents

Info

Publication number
JPS6325709B2
JPS6325709B2 JP56115084A JP11508481A JPS6325709B2 JP S6325709 B2 JPS6325709 B2 JP S6325709B2 JP 56115084 A JP56115084 A JP 56115084A JP 11508481 A JP11508481 A JP 11508481A JP S6325709 B2 JPS6325709 B2 JP S6325709B2
Authority
JP
Japan
Prior art keywords
electrode
wafer
bump
main surface
auxiliary electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56115084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5817638A (ja
Inventor
Kazuhisa Nakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56115084A priority Critical patent/JPS5817638A/ja
Publication of JPS5817638A publication Critical patent/JPS5817638A/ja
Publication of JPS6325709B2 publication Critical patent/JPS6325709B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/47—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP56115084A 1981-07-24 1981-07-24 バンプ形成装置 Granted JPS5817638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56115084A JPS5817638A (ja) 1981-07-24 1981-07-24 バンプ形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56115084A JPS5817638A (ja) 1981-07-24 1981-07-24 バンプ形成装置

Publications (2)

Publication Number Publication Date
JPS5817638A JPS5817638A (ja) 1983-02-01
JPS6325709B2 true JPS6325709B2 (OSRAM) 1988-05-26

Family

ID=14653788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56115084A Granted JPS5817638A (ja) 1981-07-24 1981-07-24 バンプ形成装置

Country Status (1)

Country Link
JP (1) JPS5817638A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025149U (ja) * 1983-07-27 1985-02-20 関西日本電気株式会社 バンプ電極形成ウエ−ハ
JPS636860A (ja) * 1986-06-27 1988-01-12 Oki Electric Ind Co Ltd フリップチップ用バンプ形成方法
US4777683A (en) * 1987-12-07 1988-10-18 Pellerin Milnor Corporation Treatment of cloth or other liquid absorbent goods
JP3462970B2 (ja) * 1997-04-28 2003-11-05 三菱電機株式会社 メッキ処理装置およびメッキ処理方法

Also Published As

Publication number Publication date
JPS5817638A (ja) 1983-02-01

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