JPS6325277A - 窒化ケイ素焼結体の製造方法 - Google Patents
窒化ケイ素焼結体の製造方法Info
- Publication number
- JPS6325277A JPS6325277A JP61168599A JP16859986A JPS6325277A JP S6325277 A JPS6325277 A JP S6325277A JP 61168599 A JP61168599 A JP 61168599A JP 16859986 A JP16859986 A JP 16859986A JP S6325277 A JPS6325277 A JP S6325277A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- oxide
- silicon
- silicon nitride
- nitriding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 7
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 7
- 238000005121 nitriding Methods 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000012298 atmosphere Substances 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 101000588931 Thalassianthus aster Delta-thalatoxin-Tas1a Proteins 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168599A JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168599A JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6325277A true JPS6325277A (ja) | 1988-02-02 |
| JPH0569791B2 JPH0569791B2 (enrdf_load_stackoverflow) | 1993-10-01 |
Family
ID=15871040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61168599A Granted JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6325277A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411114A (en) * | 1977-06-29 | 1979-01-27 | Ngk Insulators Ltd | Method of making siliconnnitride sintered body |
| JPS5860676A (ja) * | 1981-09-30 | 1983-04-11 | 日本特殊陶業株式会社 | 窒化珪素焼結体及びその製造方法 |
-
1986
- 1986-07-17 JP JP61168599A patent/JPS6325277A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411114A (en) * | 1977-06-29 | 1979-01-27 | Ngk Insulators Ltd | Method of making siliconnnitride sintered body |
| JPS5860676A (ja) * | 1981-09-30 | 1983-04-11 | 日本特殊陶業株式会社 | 窒化珪素焼結体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0569791B2 (enrdf_load_stackoverflow) | 1993-10-01 |
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