JPS63251981A - Magnetic head slider and its manufacture - Google Patents
Magnetic head slider and its manufactureInfo
- Publication number
- JPS63251981A JPS63251981A JP8648787A JP8648787A JPS63251981A JP S63251981 A JPS63251981 A JP S63251981A JP 8648787 A JP8648787 A JP 8648787A JP 8648787 A JP8648787 A JP 8648787A JP S63251981 A JPS63251981 A JP S63251981A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- carbon film
- slide rail
- magnetic head
- head slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000007667 floating Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 10
- 238000003682 fluorination reaction Methods 0.000 claims description 9
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
- 239000011737 fluorine Substances 0.000 claims description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000005339 levitation Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 abstract description 16
- 239000000314 lubricant Substances 0.000 abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000005871 repellent Substances 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 230000002940 repellent Effects 0.000 description 3
- 238000005273 aeration Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概要〕
本発明は磁気ディスク装置に用いられる磁気ヘッドスラ
イダとその製造方法であって、該磁気ヘッドスライダに
おける媒体対向面の少なくともスライドレール面に、弗
素プラズマ、または弗素ラジカル中での弗素化処理によ
り表面部に弗素化された層を有する低表面エネルギーで
、かつ撥水、撥油性の異物付着阻止用カーボン膜を設け
た構成とすることにより、回転する磁気ディスク媒体上
で浮上中の該スライダの少なくともスライドレール面へ
の、該媒体側からの潤滑剤や塵埃の付着を軽減してヘッ
ドクラッシュを防止し、安定な浮上状態を長期にわたり
維持し得るようにしたものである。DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a magnetic head slider used in a magnetic disk device and a method for manufacturing the same, which comprises applying fluorine plasma or fluorine to at least the slide rail surface of the medium facing surface of the magnetic head slider. A rotating magnetic disk medium with a structure that has a fluorinated layer on the surface by fluorination treatment in radicals and a carbon film that has low surface energy and is water and oil repellent to prevent adhesion of foreign matter. This prevents head crashes by reducing the adhesion of lubricant and dust from the medium side to at least the slide rail surface of the slider while it is floating above the slider, thereby making it possible to maintain a stable floating state for a long period of time. It is.
本発明は磁気ディスク装置に用いられる磁気ヘッドスラ
イダとその製造方法に係り、特に磁気ヘッドスライダに
おける媒体対向面の少なくともスライドレール面に、磁
気ディスク側からの潤滑材や塵埃の付着を狙止し、ヘッ
ドクラッシュを防止する磁気ヘッドスライダの構成及び
その製造方法に関するものである。The present invention relates to a magnetic head slider used in a magnetic disk device and a method for manufacturing the same, and in particular, to prevent lubricant and dust from adhering to at least the slide rail surface of the medium facing surface of the magnetic head slider from the magnetic disk side. The present invention relates to a structure of a magnetic head slider that prevents head crashes and a method of manufacturing the same.
コンピュータシステムの大容量ファイル装置として用い
られる磁気ディスク装置では、近来、情報量の増大によ
り大容量化、高密度記録化の強力な推進が要求されてい
る。このような高密度記録化には磁気ディスク媒体に対
する磁気ヘッドスライダの低浮上化が不可欠であるが、
このヘッド浮上量の低減に伴って回転する磁気ディスク
媒体と浮上する磁気ヘッドスライダとが接触する確率が
増加する。2. Description of the Related Art In recent years, magnetic disk devices used as large-capacity file devices in computer systems are required to have larger capacities and higher recording densities due to an increase in the amount of information. For such high-density recording, it is essential to lower the flying height of the magnetic head slider relative to the magnetic disk medium.
As the flying height of the head decreases, the probability of contact between the rotating magnetic disk medium and the flying magnetic head slider increases.
また該磁気ヘッドスライダの媒体対向面に媒体側からの
潤滑材や環境雰囲気からの塵埃の付着に起因して浮上状
態が不安定になり、ヘッドクラッシュを引き起こし易く
なり、媒体及びヘッドの双方を損傷させるといった傾向
がある。このため、磁気ヘッドスライダの媒体面への潤
滑材や塵埃の付着を阻止して、その浮上安定性とへソド
クラソシュに対する安全性を高めた磁気へラドスライダ
が必要とされている。In addition, due to adhesion of lubricant from the medium side and dust from the environment to the medium-facing surface of the magnetic head slider, the flying state becomes unstable, making it easy to cause a head crash, damaging both the medium and the head. There is a tendency to For this reason, there is a need for a magnetic head slider that prevents lubricant and dust from adhering to the medium surface of the magnetic head slider and improves its flying stability and safety against head sliders.
従来の磁気ヘッドスライダは第３図に示すようにＮｉ−
Ｚｎフェライト、Ｍｎ−Ｚｎフェライトなどの磁性体、
或いは＾ＩＩ ２０３−Ｔｉｃ ５ＢａＴｉ０３及びＣ
ａＴｉＯ３などの非磁性体等からなるスライダ用基板を
研削加工により、媒体対向面（理解し易くするために上
向きで示している）の空気流入端側から流出部側に向か
って、該空気流入端に傾斜面３と浮上力発生面を有する
一対のスライドレール２が形成され、このようなスライ
ダ本体１におけるスライドレール２の空気流出側の後端
面に記録再生用の磁気トランスデユーサ（図示を省略）
が設けられた構成からなり、通常タイプとして一般的に
広く用いられている。The conventional magnetic head slider is made of Ni-
Magnetic materials such as Zn ferrite and Mn-Zn ferrite,
Or ^II 203-Tic 5BaTi03 and C
By grinding a slider substrate made of a non-magnetic material such as aTiO3, the air inflow end is cut from the air inflow end side of the medium facing surface (shown upward for ease of understanding) toward the outflow part side. A pair of slide rails 2 having an inclined surface 3 and a levitation force generating surface are formed on the slider body 1, and a magnetic transducer for recording and reproducing (not shown) is mounted on the rear end surface of the slide rail 2 on the air outflow side of the slider body 1. )
It is generally widely used as a normal type.
ところでこのような磁気へラドスライダを用いる磁気デ
ィスク装置では、磁気ディスク媒体面に磁気ヘッドスラ
イダの接触による損傷を避けるためと、滑り性を確保す
るために通常潤滑剤を塗布する等の特別な表面処理が施
されている。By the way, in a magnetic disk device using such a magnetic head slider, a special surface treatment such as applying lubricant is usually applied to the magnetic disk medium surface to avoid damage caused by contact with the magnetic head slider and to ensure slipperiness. is applied.
ところがこのような磁気ディスク媒体を回転させ、該媒
体面上に磁気ヘッドスライダを浮上させて記録再生を行
っていくうちに、媒体面からの潤滑剤や、該潤滑剤と周
囲雰囲気からの微小な塵埃との混合物が前記浮上中の磁
気ヘッドスライダの媒体対向面に付着する現象がある。However, when such a magnetic disk medium is rotated and the magnetic head slider is levitated above the surface of the medium to perform recording and reproduction, lubricant from the medium surface and minute particles from the lubricant and the surrounding atmosphere are released. There is a phenomenon in which a mixture of dust and dust adheres to the medium facing surface of the flying magnetic head slider.
特に前記した磁性体、非磁性体からなるスライダの媒体
対向面には潤滑剤や微小な塵埃が付着し易く、この付着
現象がスライドレール２面で顕著になると当該スライダ
の低浮上状態が不安定とな′−Ｊ
す、場合によってはヘッドクラッシュを発生させて、媒
体面は勿論のこと、スライダ側の記録再生用磁気トラン
スデユーサなどの双方をも損傷させてしまうという問題
があった。In particular, lubricant and minute dust tend to adhere to the media-facing surface of the slider made of magnetic or non-magnetic materials, and if this adhesion phenomenon becomes noticeable on the two slide rail surfaces, the low flying state of the slider becomes unstable. However, there is a problem in that, in some cases, a head crash may occur, damaging not only the medium surface but also the recording/reproducing magnetic transducer on the slider side.
従って、かかる磁気ディスク装置を長期間にわたり動作
させる上での信頼性が著しく低下する欠点があった。Therefore, there is a drawback that the reliability of operating such a magnetic disk device over a long period of time is significantly reduced.
本発明は上記した従来の問題点に鑑み、スライダの媒体
対向面、特にスライドレール面を表面エネルギーの小さ
い撥水性及び撥油性な面にして、潤滑剤及び塵埃等の付
着を阻止し、ヘッドクラッシュの発生を防止した新規な
磁気へラドスライダの構成とその製造方法を提供するこ
とを目的とするものである。In view of the above-mentioned conventional problems, the present invention makes the medium-facing surface of the slider, especially the slide rail surface, a water- and oil-repellent surface with low surface energy to prevent lubricants and dust from adhering to the surface, thereby preventing head crashes. It is an object of the present invention to provide a new magnetic rad slider structure and a method for manufacturing the same, which prevents the occurrence of .
本発明は上記目的を達成するため、磁気ヘッドスライダ
における媒体対向面の少なくとも浮上力発生用のスライ
ドレール面に、その表面エネルギーが低く異物付着を阻
止する、弗素化された層を表面に有するカーボン膜を被
覆した構成とする。In order to achieve the above object, the present invention provides carbon fiber having a fluorinated layer on the surface of at least the slide rail surface for generating flying force on the medium facing surface of a magnetic head slider, which has a low surface energy and prevents foreign matter from adhering. The structure is coated with a membrane.
また本発明の磁気ヘッドスライダは、スライダ用基板を
研削加工工程によりスライダ形状に形成した媒体対向面
の少なくとも浮上力発生用のスライドレール面に、スパ
ッタリング法、若しくは化学気相堆積法によりカーボン
膜を被着形成した後、表面エネルギーを低下させるため
に、このカーボン膜を弗素プラズマ、または弗素ラジカ
ル中で弗素化処理することにより、異物付着阻止用のカ
ーボン膜をスライドレール上に被覆したスライダ構成が
得られる。Further, in the magnetic head slider of the present invention, a carbon film is formed by sputtering or chemical vapor deposition on at least the slide rail surface for generating flying force on the medium facing surface formed into a slider shape by a grinding process of the slider substrate. After the adhesion is formed, this carbon film is fluorinated in fluorine plasma or fluorine radicals to lower the surface energy, thereby creating a slider structure in which the slide rail is coated with a carbon film to prevent foreign matter from adhering. can get.
本発明の磁気ヘッドスライダは、媒体対向面の少なくと
も浮上力発生用のスライドレール面に、表面エネルギー
の小さい、弗素化処理を施した異物付着阻止用のカーボ
ン膜が被覆されているため、これら異物付着阻止用のカ
ーボン膜面が撥水、撥油性で、異物の付着力が著しく小
さくなる。In the magnetic head slider of the present invention, at least the slide rail surface for generating flying force on the medium facing surface is coated with a carbon film having low surface energy and subjected to fluorination treatment to prevent foreign matter from adhering. The carbon film surface for preventing adhesion is water and oil repellent, and the adhesion force of foreign matter is significantly reduced.
この結果、潤滑剤や塵埃の付着が阻止され、磁気へラド
スライダの浮上安定性とヘッドクラッシュの発生が防止
される。As a result, the adhesion of lubricant and dust is prevented, thereby improving the flying stability of the magnetic rad slider and preventing the occurrence of head crashes.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明に係る磁気ヘッドスライダの一実施例を
示す斜視図であり、構成を理解し易くするために媒体対
向面を上向きにして示している。FIG. 1 is a perspective view showing an embodiment of a magnetic head slider according to the present invention, and the medium facing surface is shown facing upward to make the structure easier to understand.
なお、第３図と同等部分には同一符号を付している。Note that the same parts as in FIG. 3 are given the same reference numerals.
図において、本実施例は基本となるスライダ本体１の構
成は従来の構成と同様であるが、第１図の実施例が第３
図の従来例と異なる点は、スライダ本体１における媒体
対向面の少なくとも浮上力発生用のスライドレール２面
に、弗素化処理により弗素化された層を表面部に有する
表面エネルギーの小さい異物付着阻止用のカーボン膜２
１を例えば２５０人の膜厚に被覆した構成とする。In the figure, the basic structure of the slider body 1 of this embodiment is the same as the conventional structure, but the embodiment of FIG.
The difference from the conventional example shown in the figure is that at least the two surfaces of the slide rails for generating floating force on the medium facing surface of the slider body 1 have a fluorinated layer on the surface part by fluorination treatment to prevent the adhesion of foreign matter with low surface energy. Carbon film 2 for
1 is coated with a thickness of, for example, 250 people.
かくすれば、上記異物付着阻止用のカーボン膜２１は、
表面エネルギーが低り、撥水、撥油性となっており、異
物付着力が表面エネルギーの大きさに依存して小さいこ
とから、潤滑剤や塵埃の付着が著しく阻止され、該潤滑
剤や塵埃の付着に起因するヘッドクラッシュの発生を防
止することが可能となる。In this way, the carbon film 21 for preventing the adhesion of foreign matter,
The surface energy is low, making it water and oil repellent, and the adhesion of foreign matter is small depending on the surface energy, so the adhesion of lubricants and dust is significantly prevented, and the lubricants and dust are It is possible to prevent head crashes caused by adhesion.
次に前記スライダ本体１における媒体対向面の少なくと
も浮上力発生用のスライドレール２面に、弗素化された
層を表面部に有する異物付着阻止用のカーボン膜２１を
被着形成する方法を説明する。Next, a method of forming a carbon film 21 having a fluorinated layer on its surface to prevent foreign matter from adhering to at least the surface of the slide rail 2 for generating flying force on the medium facing surface of the slider body 1 will be explained. .
先ずＡ Ｉ！２０３ ・ＴｉＣ等からなるスライダ用
基板を研削加工工程によりスライダ形状に形成した後、
そのスライダ本体１の媒体対向面の少なくとも浮上力発
生用のスライドレール２面に、即ち、本実施例では浮上
力発生用のスライドレール２面を含む媒体対向面に、ス
パッタリング法、または化学気相堆積法（ＣＶＤ法）に
より硬質で耐摩耗性を有するカーボン膜を例えば１００
〜２５０人の膜厚に被着形成する。First, AI! 203 - After forming a slider substrate made of TiC etc. into a slider shape through a grinding process,
Sputtering or chemical vapor deposition is applied to at least the two surfaces of the slide rails for generating levitation force on the medium facing surface of the slider body 1, that is, in this embodiment, the surface facing the medium including the two surfaces of the slide rails for generating levitation force. For example, a hard and wear-resistant carbon film is deposited using a deposition method (CVD method).
Deposit to a film thickness of ~250 people.
次に前記カーボン膜が被着されたスライダ本体１を、例
えば第２図に示すような円筒型プラズマエツチング装置
の反応チャンバ３１内に配置したメツシュ状エッチトン
ネル３２部内に配設し、該反応チャンバ３１内を０．０
ＩＴｏｒｒ程度の真空度に排気した後、その反応チャン
バ３１内にフレオン（ＣＦ４）ガスを例えば０．３〜０
．５Ｔｏｒｒのガス圧となるように導入する。Next, the slider body 1 coated with the carbon film is placed in a mesh-like etch tunnel 32 disposed in a reaction chamber 31 of a cylindrical plasma etching apparatus as shown in FIG. 0.0 within 31
After evacuating to a vacuum level of approximately ITorr, Freon (CF4) gas is injected into the reaction chamber 31 at a rate of, for example, 0.3 to 0.0 Torr.
．． The gas is introduced so that the gas pressure is 5 Torr.
しかる後、前記反応チャンバ３１の外周に付設した高周
波コイル３３に高周波電源３４より例えば２５０Ｗの電
力を給電して該チャンバ３１内にプラズマ放電を発生さ
せる。Thereafter, power of, for example, 250 W is supplied from the high frequency power supply 34 to the high frequency coil 33 attached to the outer periphery of the reaction chamber 31 to generate plasma discharge within the chamber 31.
この際、前記スライダ本体１はメツシュ状エッチトンネ
ル３２部内に生じるＣＦ、プラズマ、或いは活性化され
た弗素ラジカル雰囲気３５中に曝されるが、その媒体対
向面に被着されたカーボン膜を所定時間曝気した状態で
弗素化処理を施すことにより、エツチング反応がなされ
ない状態で、表面エネルギーの小さい弗素化された層を
表面部に有する異物付着阻止用のカーボン膜２１を形成
することかでき、潤滑剤や塵埃の付着を著しく低減した
磁気ヘッドスライダを得ることが可能となる。At this time, the slider body 1 is exposed to the CF, plasma, or activated fluorine radical atmosphere 35 generated in the mesh-like etch tunnel 32, and the carbon film deposited on the surface facing the medium is exposed for a predetermined period of time. By performing the fluorination treatment in an aerated state, it is possible to form a carbon film 21 having a fluorinated layer with low surface energy on the surface to prevent foreign matter from adhering, without causing an etching reaction. It becomes possible to obtain a magnetic head slider in which adhesion of chemicals and dust is significantly reduced.
因に、スライダ材料の異なる各ヘッドスライダのスライ
ドレールにカーボン膜が、膜厚と弗素化処理条件とを種
々に組み合わせて形成された本実施例の各レール面の水
濡れ性と、従来タイプのスライダ材料の異なる各ヘッド
スライダのレール面の水濡れ性とを比較検討した結果を
別表に示す。Incidentally, the water wettability of each rail surface in this example, in which the carbon film was formed on the slide rail of each head slider made of different slider materials by various combinations of film thickness and fluorination treatment conditions, was compared with that of the conventional type. The results of a comparative study of the water wettability of the rail surface of head sliders made of different slider materials are shown in the attached table.
この別表により明らかなように本発明の実施例によるヘ
ッドスライダのレール面の水濡れ性は、従来のヘッドス
ライダのレール面の水濡れ性、例えば８０〜１１６ ｅ
ｒｇ／ｃｍ”に比べて３３〜５０ｅｒｇ／ｃｍ２と顕著
に低減され、潤滑剤や塵埃の付着し難い表面が得られて
いることが判明できるし、また実用面でも確認できた。As is clear from this table, the water wettability of the rail surface of the head slider according to the embodiment of the present invention is higher than that of the rail surface of the conventional head slider, for example, 80 to 116 e.
erg/cm2, which was significantly reduced to 33 to 50 erg/cm2, and it was found that a surface to which lubricants and dust were difficult to adhere was obtained, and it was also confirmed in practical terms.
弗素化処理を施さないカーボン膜面に対する水濡れ性に
ついては、従来のヘッドスライダにおけるスライドレー
ル面の水濡れ性と殆ど差異がないことからこの比較検討
例より省いている。Regarding the water wettability of the carbon film surface that is not subjected to fluorination treatment, it is omitted from this comparative example because there is almost no difference in water wettability from the water wettability of the slide rail surface of a conventional head slider.
さらに前記弗素化処理後のスライドレールにおけるカー
ボン膜の表面部が弗素化されていることは、オージェ電
子分光法（ＡＥＳ）分析やｘ′４ｉＡ電子分光法（Ｘ
Ｐ Ｓ）分析により確認済みであり、またＡ ｊ！ ｚ
ｏｉ ・ＴｉＣ等からなるスライダ用基板の表面に、
前記ＣＦ、プラズマ処理を直接施しても、その表面エネ
ルギーの変化が極めて少ないことからも、弗素のカーボ
ン膜への結合が表面エネルギーの低下に極めて有効であ
ることは明白である。Furthermore, the fact that the surface of the carbon film on the slide rail after the fluorination treatment is fluorinated can be confirmed by Auger electron spectroscopy (AES) analysis and x'4iA electron spectroscopy (X
P S) It has been confirmed by analysis, and A j! z
oi ・On the surface of the slider substrate made of TiC, etc.
It is clear that the bonding of fluorine to the carbon film is extremely effective in lowering the surface energy, as even if the CF or plasma treatment is directly applied, the change in surface energy is extremely small.
なお、以上の実施例では異物付着阻止用のカーボン膜を
磁気ヘッドスライダのスライドレール面を含む媒体対向
面に設けた場合の例について説明したが、本発明はこの
例に限定されるものではなく、例えばスライドレール面
にのみ異物付着阻止用のカーボン膜を設けるようにして
もよく、同様の効果が得られる。In the above embodiments, an example was described in which a carbon film for preventing foreign matter from adhering was provided on the medium facing surface including the slide rail surface of a magnetic head slider, but the present invention is not limited to this example. For example, a carbon film for preventing foreign matter from adhering may be provided only on the slide rail surface, and the same effect can be obtained.
また前記カーボン膜の膜厚も２５０〜５００人の例につ
いて説明したが、これ以下の例えば１００人程度の膜厚
にしても有効である。さらに磁気ヘッドスライダのスラ
イドレール面、或いは該スライドレール面を含む媒体対
向面に設けたカーボン膜の弗素化処理には、実施例で説
明したＣＦ、プラズマ中の曝気処理法に限らず、例えば
ＮＦ３ガス、ＢＦ３ガス、或いは５ｉＦａガスなどのプ
ラズマ放電にて励起された弗素ラジカルの曝気により処
理するようにしてもよ（、同様の効果が得られる。Further, although the thickness of the carbon film has been described as an example of 250 to 500 people, it is also effective to make the film thickness smaller than this, for example, about 100 people. Furthermore, the fluorination treatment of the carbon film provided on the slide rail surface of the magnetic head slider or the medium facing surface including the slide rail surface is not limited to the CF or aeration treatment method in plasma described in the examples, but also NF3, for example. The treatment may also be performed by aeration of fluorine radicals excited by plasma discharge of gas, BF3 gas, or 5iFa gas (the same effect can be obtained).
更に本実施例では正圧浮上型の磁気ヘッドスライダを対
象とした例について説明したが、負圧浮上型の磁気ヘッ
ド、スライダにも適用可能なことはいうまでもない。Further, in this embodiment, an example has been described in which a positive pressure floating type magnetic head slider is used, but it goes without saying that the present invention can also be applied to a negative pressure floating type magnetic head and slider.
以上の説明から明らかなように、本発明に係る磁気ヘッ
ドスライダ及びその製造方法によれば、スライドレール
面、或いは該スライドレール面を含む媒体対向面の表面
エネルギーが低下し、撥水、撥油性であるため、回転す
る磁気ディスク媒体上で浮上中の該スライドレール面、
或いは該スライドレール面を含む媒体対向面への潤滑剤
や塵埃の付着が著しく軽減される。As is clear from the above description, according to the magnetic head slider and the manufacturing method thereof according to the present invention, the surface energy of the slide rail surface or the medium facing surface including the slide rail surface is reduced, and water repellency and oil repellency are improved. Therefore, the slide rail surface flying above the rotating magnetic disk medium,
Alternatively, the adhesion of lubricant and dust to the medium facing surface including the slide rail surface is significantly reduced.
その結果、ヘッドクラッシュが防止され、安定な浮上状
態を長期にわたり維持することが可能となる優れた効果
を奏する。As a result, head crashes are prevented and a stable flying state can be maintained for a long period of time, which is an excellent effect.
また、前記スライドレール面が優れた耐摩耗性を有する
ことから、コンタクトスタートストップ（Ｃ３Ｓ）方式
の磁気ヘッドスライダとして適用した際に耐久性が向上
する等、実用上の効果は大きい。Further, since the slide rail surface has excellent wear resistance, it has great practical effects such as improved durability when applied as a contact start/stop (C3S) type magnetic head slider.
第１図は本発明に係る磁気へラドスライダの一実施例を
示す斜視図、
第２図は本発明に係る磁気ヘッドスライダの製造方法に
用いる円筒型プラズマエツチ
ング装置の一実施例を示す要部断面図、第３図は従来の
磁気へラドスライダを説明するための斜視図である。
第１図及び第２図において、
ｌはスライダ本体、２はスライドレール、３は傾斜面、
２１は弗素化カーボン膜、３１は反応チャンバ、３２は
メツシュ状エッチトンネル、３３は高周波コイル、３４
は高周別 表
、亭完瞬へ表を戦へッｐスライグ１泉ＴＨ羊ｌの第１図
↑回置・ス
Δミ２≦ａＪ（＾唾ζ３Ｌ方しＬ＋＝ｍい）ス、１勤と
Ｍｆｆｘｇンｊ（１第２図FIG. 1 is a perspective view showing an embodiment of a magnetic head slider according to the present invention, and FIG. 2 is a cross-sectional view of a main part showing an embodiment of a cylindrical plasma etching apparatus used in the method of manufacturing a magnetic head slider according to the present invention. FIG. 3 is a perspective view for explaining a conventional magnetic rad slider. In Figures 1 and 2, l is the slider body, 2 is the slide rail, 3 is the inclined surface,
21 is a fluorinated carbon film, 31 is a reaction chamber, 32 is a mesh-like etch tunnel, 33 is a high frequency coil, 34
1st figure of Takashu separate table, Tei Kanshun to table Slig 1 spring TH sheep l ↑ rotation ・S Δmi 2 ≦ aJ (＾ spit ζ 3 L direction L + = m) Su, 1 shift and Mffxgnj (1 fig. 2
Claims (2)
イドレール（２）を備えたスライダ構成において、 上記媒体対向面の少なくともスライドレール（２）面に
、表面に弗素化された層を有する異物付着阻止用のカー
ボン膜（２１）を設けたことを特徴とする磁気ヘッドス
ライダ。(1) In a slider configuration including a slide rail (2) for generating floating force in the air flow direction on the medium facing surface, a fluorinated layer is applied to at least the surface of the slide rail (2) on the medium facing surface. A magnetic head slider characterized in that a carbon film (21) for preventing foreign matter adhesion is provided.
ライドレール（２）を有する媒体対向面を形成した後、
該媒体対向面の少なくともスライドレール（２）面に、
スパッタリング法、若しくは化学気相堆積法によりカー
ボン膜を形成し、さらに該カーボン膜を弗素プラズマ、
または弗素ラジカル中で弗素化処理を行うことにより、
表面部に弗素化された層を有する異物付着阻止用のカー
ボン膜（２１）をスライドレール上に形成することを特
徴とする磁気ヘッドスライダの製造方法。(2) After forming a medium facing surface having a slide rail (2) for generating levitation force on the substrate by the slider processing process,
At least on the slide rail (2) surface of the medium facing surface,
A carbon film is formed by a sputtering method or a chemical vapor deposition method, and then the carbon film is subjected to fluorine plasma,
Or by performing fluorination treatment in fluorine radicals,
A method for manufacturing a magnetic head slider, characterized in that a carbon film (21) for preventing foreign matter adhesion having a fluorinated layer on the surface is formed on a slide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648787A JPS63251981A (en) | 1987-04-07 | 1987-04-07 | Magnetic head slider and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648787A JPS63251981A (en) | 1987-04-07 | 1987-04-07 | Magnetic head slider and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63251981A true JPS63251981A (en) | 1988-10-19 |
Family
ID=13888340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8648787A Pending JPS63251981A (en) | 1987-04-07 | 1987-04-07 | Magnetic head slider and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63251981A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5151294A (en) * | 1989-10-03 | 1992-09-29 | International Business Machines Corporation | Method for forming a protective film on a slider air bearing surface in a magnetic recording disk file |
| US5231613A (en) * | 1990-01-19 | 1993-07-27 | Sharp Kabushiki Kaisha | Magneto-optical recording device |
| US5386400A (en) * | 1990-01-19 | 1995-01-31 | Sharp Kabushiki Kaisha | Magneto-optical head device having a lubricated member |
| US5879578A (en) * | 1997-03-12 | 1999-03-09 | International Business Machines Corporation | Etched/lubricated swage balls for use in DASD suspension-arm attachment |
| US6249403B1 (en) * | 1997-05-23 | 2001-06-19 | Hitachi, Ltd. | Magnetic hard disk drive and process for producing the same |
| KR100441418B1 (en) * | 2001-08-01 | 2004-07-22 | 김대은 | Structure of magnetic-optical head for information storage Device |
| US7116521B2 (en) * | 2000-11-17 | 2006-10-03 | Fujitsu Limited | Head slider and disk drive employing same head slider, and method for providing water repellent treatment to same head slider |
| US8164859B2 (en) * | 2008-07-04 | 2012-04-24 | Toshiba Storage Device Corporation | Head slider producing reduced lubricant adsorption and magnetic storage apparatus |
| US8218266B2 (en) * | 2006-09-07 | 2012-07-10 | HGST Netherlands BV | Head slider |
| US20150179216A1 (en) * | 2013-12-20 | 2015-06-25 | Seagate Technology Llc | Contamination reduction head for media |
-
1987
- 1987-04-07 JP JP8648787A patent/JPS63251981A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5151294A (en) * | 1989-10-03 | 1992-09-29 | International Business Machines Corporation | Method for forming a protective film on a slider air bearing surface in a magnetic recording disk file |
| US5231613A (en) * | 1990-01-19 | 1993-07-27 | Sharp Kabushiki Kaisha | Magneto-optical recording device |
| US5386400A (en) * | 1990-01-19 | 1995-01-31 | Sharp Kabushiki Kaisha | Magneto-optical head device having a lubricated member |
| EP0767457A3 (en) * | 1990-01-19 | 1998-09-30 | Sharp Kabushiki Kaisha | Magneto-optical recording device |
| US5879578A (en) * | 1997-03-12 | 1999-03-09 | International Business Machines Corporation | Etched/lubricated swage balls for use in DASD suspension-arm attachment |
| US6035681A (en) * | 1997-03-12 | 2000-03-14 | International Business Machines Corporation | Etched/lubricated swage balls for use in DASD suspension-arm |
| US6249403B1 (en) * | 1997-05-23 | 2001-06-19 | Hitachi, Ltd. | Magnetic hard disk drive and process for producing the same |
| US6329023B2 (en) | 1997-05-30 | 2001-12-11 | Hitachi, Ltd. | Process for producing a magnetic head slider |
| US7417829B2 (en) | 2000-11-17 | 2008-08-26 | Fujitsu Limited | Head slider having a flat first step and a second flat step with a groove therein, and disk drive employing the head slider |
| US7116521B2 (en) * | 2000-11-17 | 2006-10-03 | Fujitsu Limited | Head slider and disk drive employing same head slider, and method for providing water repellent treatment to same head slider |
| US7352531B2 (en) | 2000-11-17 | 2008-04-01 | Fujitsu Limited | Head slider having a flat first step and a second flat step with a groove therein, and disk drive employing the head slider |
| KR100441418B1 (en) * | 2001-08-01 | 2004-07-22 | 김대은 | Structure of magnetic-optical head for information storage Device |
| US8218266B2 (en) * | 2006-09-07 | 2012-07-10 | HGST Netherlands BV | Head slider |
| US8164859B2 (en) * | 2008-07-04 | 2012-04-24 | Toshiba Storage Device Corporation | Head slider producing reduced lubricant adsorption and magnetic storage apparatus |
| US20150179216A1 (en) * | 2013-12-20 | 2015-06-25 | Seagate Technology Llc | Contamination reduction head for media |
| US9190108B2 (en) * | 2013-12-20 | 2015-11-17 | Seagate Technology Llc | Contamination reduction head for media |
| US9613658B2 (en) | 2013-12-20 | 2017-04-04 | Seagate Technology Llc | Contamination reduction head for media |
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