JP3422990B2 - Magnetic head - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head which is a main component of a magnetic disk device mainly used as an external storage device such as an electronic computer or a workstation, and is particularly excellent in sliding resistance and wear of the magnetic disk. The present invention also relates to a magnetic head that can reduce

[0002]

2. Description of the Related Art Magnetic disk, floppy (registered trademark)
Storage devices that use magnetic recording technology such as disks and magnetic tapes are widely used as external storage devices such as computers and workstations, and with the increase in the amount of information in recent years, an ever-increasing capacity is demanded. There is.

On the other hand, the shape of the device is desired to be smaller and lighter, and in order to achieve both of them, it is essential to dramatically improve the recording density of the recording medium. For example, in an apparatus that uses a magnetic disk (hereinafter, abbreviated as disk) as a recording medium, a magnetic head (hereinafter, abbreviated as head) is conventionally levitated from the disk with a certain floating space, which enables high-speed read / write. In addition, the head prevents abrasion damage of the medium caused by rubbing the medium.

However, in order to improve the recording density, it is necessary to further lower the flying space to bring the head closer to the medium, and the head and the disk may be changed due to variations in the head posture, unevenness of the medium surface, and waviness during rotation. It is expected that the frequency of contact will increase more and more. Ultimately, a driving method such as so-called contact recording in which the head and the disk are always in contact with each other is also required.

Further, in order to perform recording / reproducing at high speed, the rotation speed of the disk becomes higher than the current one. In consideration of the above, it goes without saying that it is necessary to devise both the head and the disk to prevent such abrasion and damage at the time of contact at high speed and keep the friction coefficient low.

In view of the above circumstances, various measures have been conventionally made to protect the surface of the magnetic recording medium. For example, attempts have been made to coat a carbon film, a SiO ₂ film, a ceramics-based thin film, etc. obtained by sputtering graphite as a protective film. The purpose of these protective films is mainly to prevent the surface of the magnetic recording medium from being worn and to keep the friction coefficient at the time of sliding with the head low.

However, as the strength of the magnetic recording medium is increased in order to prevent it from being worn, the wear of the magnetic head that slides with the magnetic recording medium is promoted, resulting in the generation of a large amount of wear powder and the change in the head surface shape. As a result, it has been a problem that the reliability of the magnetic recording device itself is not improved as much as expected.

On the other hand, it is known that a sliding layer is provided with a protective layer also from the viewpoint of improving the sliding resistance of the magnetic head. For example, JP-A-56-107326 discloses a resin made of polyvinyl alkyl ether. It is shown to provide layers. This is naturally conceivable, but in reality, the slider surface of the head is always in contact with the disk surface except during flying, and the degree of wear is significant, so the protective layer immediately wears away. Not only is the protective effect lost, the abrasion powder generated by this adheres to the disk and head, causing a crash, which is not practical.

Further, it has been proposed to coat the sliding surface of the head core with an amorphous carbon film, a diamond-structured carbon film, or a carbon film made of a mixture thereof as a protective film. JP-A-6
No. 0-193112, JP-A-63-58613, JP-A-63-222314 and the like.

Certainly, when these carbon films are used as protective films, the film strength is superior to the former case in which the resin layer is provided, but in practical use, the abrasion resistance is still insufficient. There were problems such as being sufficient and causing abrasion powder when sliding and causing a crash.

In particular, all of the above known examples are formed for the purpose of protecting the element portion of the head, and are formed so as to cover the surface of the element. Therefore, in order to obtain a sufficient life, the protective layer must be thickened, and if it is thickened, the gap between the head element and the recording medium is widened, and the high recording density cannot be achieved.

[0012]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the problems in the conventional case where a carbon film is used as a protective film, and to prevent damage to the sliding parts of both the head and the magnetic disk. It is an object of the present invention to provide an improved magnetic head which is capable of preventing and reducing the change in friction coefficient during sliding.

[0013]

[0014]

To achieve the above object, even in an ultra-thin film, the slider sliding portion on which the magnetic head is mounted has high wear resistance, less abrasion powder is generated, and less damage to the recording medium. It is preferable to form a protective layer using such a material.

For example, in the case of a fixed type magnetic disk apparatus having a floating type head in which the head floats above a rotating disk , the head and the disk slide at a high speed of 20 to 40 m / sec when the apparatus is started and stopped. It moves and floats with a narrow space of 0.1-0.3 μm maintained during operation. Therefore, the protective layer must have a thickness that does not significantly affect the floating space, and the characteristics must not be deteriorated by abrasion even if the sliding is repeated tens of thousands of times.

The provision of the protective layer on the sliding portion of the head cannot be easily realized because there is no suitable protective layer material that satisfies the above conditions. The present inventors have tried coating with various materials, and as a result of various experimental studies, they have found that a specific carbon-based protective film is suitable for the above purpose.

The present invention has been made on the basis of such findings, and specific means for achieving the object will be described below in order.

An object of the present invention is to provide a floating type magnetic head in which a slider on which a magnetic recording / reproducing element is mounted is levitated on a rotating magnetic disk, and an amorphous carbon having a lattice shape on a sliding surface of the slider. This is achieved by a magnetic head characterized in that a thin film is formed. Another object of the present invention is to provide a floating type magnetic head in which a slider on which a magnetic recording / reproducing element is mounted flies over a rotating magnetic disk, wherein the slider is a titanium oxide containing zirconia or alumina.
A slider, close to the sliding surface of the slider,
Moreover, the magnetic recording / reproducing element is arranged so as to form a non-sliding surface, and an amorphous carbon thin film having a lattice shape is formed on the sliding surface of the slider. To be achieved.

The protective film in the present invention is mainly made of carbon.
It is a hard and amorphous thin film of
When formed to the above thickness, the micro Vickers hardness
It is about 1500 Hv or more, and the density is 1.7 to 2.4.
If it contains hydrogen, its atomic ratio is 3
˜30 atom%. Films outside the above range are soft
However, it is preferred because it has a high wear rate or is brittle and fragile.
Not good.

[0020]

[0021]

The findings obtained by the inventors of the present invention regarding the above-mentioned characteristic carbon thin film of the present invention will be described in more detail below.

Regarding the above - mentioned amorphous carbon thin film, hydrocarbon gas is decomposed in plasma, especially among carbonaceous materials,
It has been found that an amorphous hydrogenated carbon film formed by deposition on a substrate with a negative bias voltage is good. This is a well-known film forming technique called plasma CVD, but similarly, so-called ion beam deposition in which hydrocarbons are ionized and attracted to a substrate to which a negative bias voltage is applied to form a film is also effective. It was The materials obtained by these film forming methods have high hardness, are resistant to cracking, have a low friction coefficient, and are unlikely to generate abrasion powder, which are the most suitable properties for the present invention. Further, since the wear rate is extremely low, a great effect can be exhibited even with a very thin film.

This amorphous hydrogenated carbon film contains an appropriate amount of hydrogen as described above, and the control of the hydrogen content depends on the CVD conditions such as the source gas pressure and the electric power supplied when generating plasma. With proper control, this can be done easily. When hydrogen is decomposed into a carbon film, most of the hydrogen is decomposed and desorbed, but part of it is trapped in the film, and it is thought that hydrogen has the effect of binding to the end of the carbon chain and stabilizing the film. To be

The above-mentioned carbon thin film having a fine uneven surface is preferably the above - mentioned amorphous hydrogenated carbon thin film, but not limited to this, it may be, for example, a carbon-based thin film containing diamond microcrystals. What is important is to form a carbon-based thin film having fine irregularities on the sliding portion.

The fine irregularities thus formed have the effect of reducing the contact area between the head and the disk and reducing the friction coefficient. About the degree of this minute unevenness
Has an average roughness (Ra) of about 2 to 50 nm and a maximum protrusion height of 100 nm or less, and an average distance between adjacent protrusions of 10 to 1000 nm. If the average roughness is rougher than this, or if the maximum protrusion height is higher, the disc may be damaged. Further, if the average roughness is smaller than the above, the effect of reducing the friction coefficient becomes small.

As a method of forming irregularities on the head sliding portion, vapor deposition method is used to form a deposit having fine irregularities made of diamond microcrystals, and an amorphous carbon thin film is slid on the slider of the head. Surface and disk surface, a resist film is provided on this carbon thin film, and a fine mask is formed by patterning the resist by photolithography. You may selectively remove by etching etc.

According to this selective etching method by lithography, it is possible to form irregularities having a desired shape. For example, if grid-shaped irregularities are formed in the sliding direction of the head, damage to the disk is small, which is advantageous during high-speed rotation.

When the grid-like irregularities are formed so as to be inclined within 30 °, preferably 5 to 30 ° with respect to the sliding direction of the slider, there is an effect of scraping and eliminating dirt such as fine powder generated by sliding. Further, the reliability is improved.

Further, the coefficient of friction during sliding can be further reduced.
In order to achieve this, it is advisable to attach a lubricant to the head sliding portion .
The lubricant has a main chain composed of, for example, perfluoropolyether or perfluoroalkyl, and at least one end thereof is substituted with a polar group such as an ether group, an ester group, a hydroxyl group, a carbonyl group, an amino group or an amide group. It is best to use one having a molecular weight of about 1,000 to 10,000. In addition, saturated fatty acids and their derivatives, higher alcohols and their derivatives, etc. can be used.

[0031]

DETAILED DESCRIPTION OF THE INVENTION Specific Description of Magnetic Head Next, a specific structure of a magnetic head according to the present invention will be described with reference to the drawings.

FIG. 1 schematically shows a perspective view of the structure of the magnetic head of the present invention as seen from the bottom side of the slider.
The slider body 1 of the head is made of a material such as zirconia oxide, titanium carbide containing alumina, and ferrite, and two slider sliding portions 2 are formed by machining or etching.

A recording / reproducing element 3 for converting a magnetic signal into an electric signal is provided on the rear side surface of the slider sliding portion 2 close to the sliding surface, but slightly retracted from the sliding surface to form a non-sliding surface. Is formed, arranged, and mounted. The slider sliding portion 2 has a sled shape, and the leading portion 2a and the trailing portion 2b are tapered so that the edges do not hit when the head is running. A protective layer 4 made of carbon, which is a feature of the present invention, is provided on the sliding surface in the shaded area in the figure.

[0034] FIG. 2 is a plan view of the head rear surface covering the sliding surface of the slider sliding portion 2 in the carbon protective layer 4 shows schematically, FIG. 2 (a) above amorphous examples example of forming a carbon protective film, FIG. 2 (b) forming a carbon protective layer having fine asperities as described above, FIG. 2 (c) above
An example of forming a carbon protective layer having fine grid-like irregularities in which the longitudinal direction of the grid is aligned in the sliding direction of the slider as described above , and FIG. In this example, the angle θ is within 30 ° with respect to the moving direction.

FIG. 3 is an enlarged view of the XX 'section of FIG. 1 in which the carbon protective layer 4 is formed on the sliding surface of the slider sliding portion 2. FIG. 3 (a) shows a uniform thickness. 3 (b) is provided with a film having fine irregularities, FIG. 3 (c) is provided with the particulate deposit 5, and FIG. 3 (d) is provided with the particulate deposit. This is a case where the protective film 4 having a uniform thickness is provided on the surface 5.

Further, FIGS. 4A to 4D are shown in FIG.
FIG. 6 is an enlarged cross-sectional view of a case where a lubricating layer 6 is further provided on (d).

In the above example, the slider sliding portion 2 is moved to the left and right by two.
Although the thin-film magnetic head having the present invention has been described, the present invention is not limited to this type of head, and any type of head having a structure in which sliding and contact between the head and the recording medium occur can be used. effective.

The protective film in the present invention is a hard and amorphous thin film composed mainly of carbon, which is, for example, 1 μm.
When formed to have the above thickness, the micro Vickers hardness is about 1500 Hv or more, and the density is 1.7 to 2.4, and when hydrogen is contained, the atomic ratio is 3 or more.
˜30 atom%. Coatings outside the above range are not preferred because they are soft and have a high wear rate or are brittle and easily broken. The carbon thin film can be formed by the following method, for example.

[Description of Specific Example of Forming Carbon Thin Film on Head] -1). Hydrocarbon gas is used alone or as a raw material by mixing with other gas, plasma is generated, and CVD (chemical vapor deposition) is performed under conditions such that the substrate surface causes a potential drop of 100 V or more with respect to the plasma potential. The easiest way is to use the substrate to be processed as one of the electrodes, and use a commercial high frequency (13.56MHz) between it and the electrode that is sufficiently wider than this area.
It is preferable that a film is formed by applying a high frequency voltage such as to generate plasma and accelerating the ions by a self-bias voltage generated near the substrate. An example of an apparatus used in this method is shown in FIG.

-2). A hydrocarbon gas is used alone or mixed with another gas as a raw material, and this gas is ionized in an ionization chamber, and the generated ions are accelerated by an electric field to about 100 to 1000 V and collided with a substrate. An example of an apparatus used in this method is shown in FIG.

The following methods are well known for growing the deposit containing the diamond microcrystals, and one of them is selected in consideration of the generation rate, the upper limit of the substrate temperature that can be set, and the like. Is good.

-3). Microwave plasma is generated using a mixed gas of a hydrocarbon-based gas and hydrogen as a raw material, and the substrate is heated to 200 ° C to 700 ° C. When a magnetic field is applied to the above plasma region and the treatment is performed under the condition that a phenomenon called electron cyclotron resonance occurs, the plasma density is increased and the growth rate of diamond particles can be increased. Although the growth rate is lower than the above, high frequency plasma or direct current plasma may be used instead of the above microwave plasma. An example of an apparatus used in this method is shown in FIG.

-4). The substrate is heated to about 700 ° C. to 1000 ° C., a mixed gas of hydrocarbon gas and hydrogen gas is introduced, and diamond particles are generated on the surface of the substrate by thermal reaction.

-5). A mixed gas of hydrocarbon gas and hydrogen gas is maintained at atmospheric pressure or less, and a source gas is reacted by utilizing thermoelectrons generated by passing an electric current through a filament such as tungsten arranged close to the substrate.

-6). Ionize hydrocarbon molecules, 30
The substrate is made to collide with energy of 0V to 2000V.

-7). Under atmospheric pressure, the substrate is placed in the reducing flame portion of the combustion flame of hydrocarbon gas, and diamond particles are generated on the substrate surface.

In practice, the heat resistance of the element of the magnetic head may be low, so it is preferable that the element can be formed at the lowest temperature possible, and the microwave CVD method of -3) is most suitable.

The above method often produces amorphous carbon in addition to diamond at the same time. However, even though amorphous carbon is used, it often has a low density and is fragile. Unlike amorphous carbon containing a proper amount of hydrogen which is characteristic, it adversely affects the improvement of sliding resistance which is the object of the present invention in some cases. Therefore, in such a case, it is better to remove the amorphous portion by ashing or etching with the plasma of O ₂ or H ₂ .

The raw material used in the method for producing the above-mentioned amorphous carbon thin film or carbon thin film containing diamond particles is a hydrocarbon compound mainly composed of carbon and hydrogen, and may contain oxygen and other atoms.

Specifically, methane, ethane, propane,
Saturated hydrocarbons such as butane, pentane and hexane, unsaturated hydrocarbons such as ethylene, acetylene, propene and butene, aromatic hydrocarbons such as benzene, toluene and xylene, alcohols such as methanol, ethanol and propanol, Ketones such as acetaldehyde, acetone and methyl ethyl ketone, ethers such as dimethyl ether, methyl ethyl ether and diethyl ether are used.

Further, a mixed gas of two or more kinds of these or a mixed gas of Xr, Ar, He, Ne, O ₂ , H ₂ O, N 2 or the like may be used. Furthermore, it is also possible to use a hydrocarbon molecule in which a part of hydrogen atoms is replaced with fluorine.

If the thickness of the above-mentioned thin film mainly composed of amorphous carbon or the deposit containing diamond microcrystals is too thick, the substantial distance between the head and the magnetic layer will increase, and the S / N ratio will increase.
It is preferable that the thickness be 50 nm or less because it causes a decrease in On the other hand, if it is too thin, the effect is reduced due to abrasion, so 10 nm or more is preferable.

[Specific Example of Forming Lubricating Film on Head] In order to realize the above-described head, a method of applying a lubricant to the protective film on the sliding portion of the head slider is as follows.

-1). A dipping method in which the head is dipped in a solution containing lubricant molecules, held for a certain period of time, and then pulled up.

-2). A spray method in which a solution of lubricant molecules is sprayed and the solvent is volatilized.

-3). A vapor deposition method that vaporizes lubricant molecules in a vacuum chamber and deposits them on the surface of the head slider.

Of course, the method is not limited to these. Also, if the amount of lubricant is too large, it collects in the contact area between the head and the magnetic recording medium, causing an adhesion phenomenon that fixes the head, and if it is too small, the lubricating action becomes small, so it is necessary to control within a certain range. is there. Although this amount depends on the kind and molecular weight of the lubricant, it is generally 1 to 50 nm, preferably 2 to 10 nm in terms of film thickness.

As the lubricant molecule, one having a highly polarizable group such as a carbonyl group, a carboxyl group, an ester group, an ether bond, an amide group, an amino group and a hydroxyl group at the terminal or the molecular chain is used, and the surface of the protective layer is used. To A
When a small amount of a metal such as 1, Fe, Ni, Co, Ag, or a compound thereof is present, a strong bond can be formed between the protective layer and the lubricant, and the adhesion phenomenon can be reduced.

[Formation of Carbon Thin Film on Magnetic Disk] In order to further improve the sliding reliability of the magnetic disk, a protective film of the same kind as the specific protective film applied to the magnetic head of the present invention should be used. It is better to provide
Particularly preferable is an amorphous hydrogenated carbon film formed by the same method as that used for the protective film of the magnetic head.
Further, if a lubricating layer is provided on this protective film, the reliability can be further improved. As the material and forming method of this lubricating layer, the same ones as those explained in the case of the above magnetic head can be used.

The reason why the reliability of the magnetic disk device is improved by the present invention is as follows. When a magnetic disk fails, the disk side is almost always damaged. This is because the mechanical strength of the magnetic recording medium is weak, and for this reason, it has been conventionally devised to provide a protective layer having high wear resistance or a lubricating layer.

However, the present inventors consider that the role or influence of the magnetic head on the sliding of the magnetic head and the magnetic disk is large, and therefore the portion where the magnetic head slides on the magnetic disk must be made of an appropriate material and shape. I thought there was. This is because it should depend on the contact area between the magnetic head and the magnetic disk, which occurs during sliding.Before sliding, a relatively small contact area increases due to abrasion due to fine irregularities on the surface. This is because it is thought that the increase in frictional force will eventually lead to a head crash.

That is, by preventing the wear of the magnetic head, the change in frictional force is reduced, damage on the magnetic disk side is suppressed, and reliability should be improved. In order to realize this, a protective layer having high wear resistance is necessary, and the present inventors have conducted comparative examinations of various materials and found that a specific carbon-based material is superior. The specific carbon-based material is a deposit containing amorphous carbon and diamond crystallites as described above. These have the following characteristics, and it is considered that these are effective in improving the sliding resistance.

That is, (a) the hardness is high (Vickers hardness of 1500 to 5000). (B) Large abrasion powder is unlikely to be generated during sliding. (C) It is difficult to adhere to the material of the sliding partner.

In the present invention, both the magnetic head and the magnetic disk are provided with the same type of carbon-based protective film on their sliding surfaces. Generally, in the field of friction and wear, it is said that a combination of materials of the same quality, so-called "shear," promotes wear. However, it has been found that, conversely, the carbonaceous material of the present invention has a synergistic effect with the same material, and the wear resistance is dramatically improved. It is considered that this is because, due to the characteristics of the above-mentioned carbon-based material, the adhesion phenomenon, which is generally a problem due to sliding of like materials, is unlikely to occur.

By using the present invention, performances other than the sliding reliability of the magnetic disk device can be improved. That is,
If the wear on the magnetic head side is reduced, the above-mentioned increase in frictional force can be prevented without roughening the surface on the magnetic disk side by roughening the surface roughness of the sliding portion of the magnetic head. Therefore, the surface of the magnetic disk can be smoothed, the flying height of the magnetic head can be reduced, and the recording density and the S / N can be improved.

Further, since the wear of the magnetic head and the magnetic disk is greatly reduced by the present invention, a severe condition such as so-called contact recording in which recording / reproduction is performed in a state where the magnetic head and the magnetic disk are constantly or intermittently contacted with each other. It can be preferably used even under the conditions.

[0067]

EXAMPLES The present invention will be described in more detail with reference to the following examples. Example 1 A 4 mm-thick wafer made of a material having a high magnetic permeability such as zirconia oxide was prepared, and a core material and a coil were formed on the surface of the wafer by a thin film forming process such as vacuum deposition, plating and sputtering and a photolithography process. A required pattern of materials, electrodes, protective layers, etc. is formed. The thin-film magnetic head element 3 thus formed was cut out from the wafer and machined to form the head body 1 having a shape as shown in FIG.

Next, the sliding surface of the slider sliding portion 2 was mirror-polished and the tapered portion 2a and the side edge portion 2b were chamfered to form a sled-shaped sliding portion 2. After cleaning the head body 1 to remove the processing residue, the slider sliding portion side is placed on the electrode on the biased side of the internal electrode type high frequency plasma generator as shown in FIG. Is introduced at a flow rate of 50 sccm and the gas pressure is 50 mTo
The exhaust speed was adjusted so as to be rr.

After the gas pressure in the reaction chamber has stabilized, a high-frequency voltage is applied and the standing wave ratio SW is set so as to minimize the reflected power.
Matching adjustment of R (Standing Wave Ratio) was performed, and it was left for 1 minute at an effective power of 1 kW. As a result, an amorphous hydrogenated carbon film having a hydrogen content of 20 nm and a hydrogen content of about 10 atomic% was formed on the slider sliding surface.

The magnetic head thus manufactured was combined with a magnetic disk on which a carbon protective film was formed by sputtering and incorporated into a CSS tester to obtain a load of 1
Rotate the disk by applying 0 g, and once the head has floated, loosen the rotation and contact the disk with the head again,
A so-called CSS test in which a cycle of stopping the rotation was repeated was performed to evaluate the change in frictional force (gf) generated in the head and the degree of damage to the head and the disk after the 30-k test.

For comparison, the same test was conducted on a head having a sputtered carbon film containing no hydrogen. The results are as shown in Table 1, and the frictional force did not increase much and the sliding surfaces of the head and the disk were slightly damaged as compared with the case where sputtered carbon was formed. Further, FIG. 6 shows the dependency of the frictional force applied to the head in the above CSS test on the number of sliding times. As shown in the figure, as the number of CSSs increases, the difference between the two characteristics becomes clear. <Examples 2 to 7> Similar to Example 1, magnetic heads having an amorphous carbon protective film formed were prepared, and a CSS test was conducted by combining this with a magnetic disk as described below. As shown in Table 1, the increase in frictional force (gf) was small, and the sliding surfaces of the head and the disk were not significantly damaged. As is clear from comparison between Examples 1 and 3, the characteristics of the disk protective film coated with the same amorphous carbon as the head side were remarkably improved.
When the lubricant film is coated as shown in FIG.

[0072]

[Table 1] <Embodiment 8> The hydrogen content in the amorphous hydrogenated carbon thin film is changed by controlling the input power, the gas flow rate, and the like when forming the amorphous hydrogenated carbon thin film of Example 1. The relationship with the strength (expressed as hardness) of the thin film was investigated.

FIG. 8 (a) shows the relationship between the input electric power and the hydrogen content, and FIG. 8 (b) shows the relationship between the gas flow rate and the hydrogen content. Amount control is possible.

FIG. 9 is a characteristic diagram showing the relationship between the hydrogen content and the strength (indicated by hardness) of the carbon thin film, showing a good strength at a content of 1 to 30 atom%, particularly 3 to
It can be seen that 15 atom% is preferable. <Examples 9 to 15> In the same steps as in Example 1, first, a wafer of zirconia oxide was prepared as a material for the slider, and necessary patterns such as a core material and a coil material, electrodes, and a protective layer were formed on the surface of the wafer. Then, the element is cut out from the wafer and formed into a head shape by machining, and then the sliding surface of the slider sliding portion 2 is mirror-polished, and the taper portion 2a and the side edge portion 2b are chamfered. Prepared.

After cleaning the head body 1 to remove processing residues, the slider sliding portion side is placed in a table and placed in a vacuum chamber of a magnetic field microwave plasma generator as shown in FIG. Is heated to 250 ° C., a mixed gas of methane and hydrogen with a mixing ratio of 2:98 is introduced at a flow rate of 100 sccm, and the gas pressure is 100 mTo.
The exhaust speed was adjusted so as to be rr.

After the gas pressure in the reaction chamber became stable, a current was passed through the magnetic field generating coil and a microwave of 500 W was introduced to generate plasma. After 5 minutes, the microwave was stopped, the vacuum chamber was opened to the atmosphere, and the head body was taken out. As a result, a deposit having fine irregularities was formed on the slider sliding surface.

Raman scattering spectrum and thin film X
An analysis by line diffraction confirmed that diamond fine particles and amorphous carbon were mixed. Further, the surface shape thereof has an average thickness of 20 nm and an average roughness Ra of 10 nm.
I found out. The amount of hydrogen contained in the amorphous carbon was about 7 atom%.

On the other hand, as the magnetic disk, the same magnetic disks as those in Examples 1 to 7 in Table 1 were prepared. Using the magnetic head and the magnetic disk thus manufactured, the CSS test was conducted in the same manner as in Example 1, and the frictional force (g
The change in f) and the degree of damage to the head and disk after the 30 k test were evaluated. The results are shown in Table 2, and compared with Examples 1 to 7 in Table 1, the increase in frictional force was small and the damages on the sliding surfaces of the head and the disk were also slight.

[0079]

[Table 2] <Example 16> In the same steps as in Example 1, first, a wafer of zirconia oxide was prepared as a material for forming a slider, and necessary patterns such as a core material and a coil material, electrodes, and a protective layer were formed on the surface of the wafer. After the element is cut out from the wafer and formed into a head shape by machining, the sliding surface of the slider sliding portion 2 is mirror-polished and the taper portion 2a and the side edge portion 2b are chamfered to prepare the head body 1. did.

After cleaning the head body 1 to remove the processing residue, the slider sliding portion side is placed on the surface of the electrode on the biased side of the internal electrode type high frequency plasma generator in the same manner as in Example 1, and methane gas is added. Was introduced at a flow rate of 50 sccm, and the exhaust speed was adjusted so that the gas pressure was 50 mTorr. When left for 1 minute with an effective power of 1 kW, an amorphous hydrogenated carbon film (hydrogen content: about 10 atomic%) having a film thickness of 20 nm was formed on the slider surface.

A 200 nm-thick positive resist is applied to the carbon thin film thus formed, dried, and then irradiated with ultraviolet rays through a mask original plate having a lattice-shaped pattern having a width of 1 μm and an interval of 5 μm. By doing so, the resist mask pattern having the above dimensions was formed by exposing and developing.

Next, with the slider sliding portion side of this magnetic head facing up, the slider was again placed in the above-mentioned plasma generator, and oxygen gas was introduced to maintain the gas pressure at 0.2 Torr and 500 W.
Power was applied and held for 2 minutes. This selectively etches the exposed carbon film without the resist,
A pattern of a carbon thin film having the above-mentioned grid-like mask size was formed. After that, the resist mask is peeled off and the first embodiment is performed.
Similarly to the above, a CSS test was performed in combination with a magnetic disk provided with a sputtered carbon protective film.

The results show that the increase in the friction coefficient was 3 g or less even after the test of 30 k times, and the increase in the frictional force was small.
The sliding surface of the disc was also slightly damaged.

In the pattern of the carbon thin film having the grid-like mask size provided on the head slider sliding portion, the grid direction is made to coincide with the sliding direction of the slider sliding portion, and the angle θ is inclined from the sliding direction. When the sliding characteristics were measured and the sliding characteristics were matched, the damage to the disk was small and it was advantageous for high speed rotation, and it was within 30 °, preferably 5 °. ~
It was found that if the inclination angle is 30 °, it is effective to scrape the dirt adhering to the head by tilting the head, and it is more effective to improve the reliability. <Embodiment 17> Using the combination of the magnetic head and the magnetic disk implemented in Embodiments 1 to 7 and 9 to 16, ten magnetic disks were attached to the spindle at regular intervals as shown in FIG. A magnetic head positioning mechanism and a signal recording / reproducing circuit board were attached to each surface of the magnetic disk, and a magnetic disk device was assembled. When this device is operated, the flying height of the magnetic head is 0.1μ.
A life test was carried out in which the system was levitated at m, and signals were sequentially written on all tracks and sequentially read out.

After continuous operation for 5000 hours, the device was disassembled and the surfaces of the magnetic head and the magnetic disk were observed with an optical microscope. As a result, the taper portion 2a of the slider sliding portion of the magnetic head was slightly soiled. There was,
Other than that, no scratches or deposits were found on either the magnetic head or the magnetic disk.

For comparison, a graphite head was used as a target, and one magnetic head having a carbon protective film formed by sputtering on the slider sliding surface was incorporated into each device.
Several scratches were generated on this head in the sliding direction, and there were many deposits. Also, a lot of dirt adheres to the magnetic disk,
Some of them even crashed. Note that this carbon protective film does not contain hydrogen. <Embodiment 18> Using the magnetic disk device used in Embodiment 17, the head load and the number of revolutions are adjusted so that the magnetic head almost continuously hits the magnetic disk surface (referred to as contact recording). The same test as in Example 17 was conducted.

After continuous 2000 hours of testing, the device was disassembled and the damage to the magnetic head and the magnetic disk was examined.
There were several slight wear marks on the magnetic disk side that could be discerned with an optical microscope, but the wear was on the protective film only and did not reach the magnetic recording medium. In the apparatus, the magnetic disk assembled with the magnetic head (sputtered carbon film) of the comparative example shown in Example 17 crashed and the scratches on the magnetic head side were large.

[0088]

As described above, according to the present invention, not only the magnetic head but also the sliding resistance of the magnetic disk can be improved, which has a great effect on extending the life of the magnetic disk device. Further, since the required reliability can be secured even if the floating space between the magnetic disk and the magnetic head is reduced, the recording density of the magnetic disk can be further improved.

Up to now, the description has been limited to the magnetic disk, but the present invention can be used in the same manner as long as it is a storage device for recording / reproducing by using a head, and it is possible to realize a long life. Needless to say. Examples of this include a magnetic tape, a floppy disk, and a magneto-optical disk using a floating head.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing a magnetic head according to an embodiment of the present invention.

FIG. 2 is a plan view in which a carbon thin film is formed on the sliding surface of the magnetic head according to the embodiment of the present invention.

FIG. 3 is a sectional view of a magnetic head sliding portion according to another embodiment of the present invention.

FIG. 4 is a sectional view of a magnetic head sliding portion according to another embodiment of the present invention.

FIG. 5 is a schematic view of a film forming apparatus for forming a carbon thin film.

FIG. 6 is a characteristic curve diagram showing the results of a CSS test using the magnetic head of the present invention.

FIG. 7 is a sketch drawing showing the structure of the magnetic disk device of the present invention.

FIG. 8 is a characteristic curve diagram showing an example of controlling the hydrogen content in a carbon thin film.

FIG. 9 is a characteristic curve diagram showing the relationship between hydrogen content and hardness in a carbon thin film.

[Explanation of symbols]

1 ... Head body, 2 ... Slider sliding part, 3 ... Recording / reproducing element, 4 ... Protective film.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Issei Takemoto               292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa               Production Engineering Laboratory, Hitachi, Ltd. (72) Inventor Ryo Kitou               292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa               Production Engineering Laboratory, Hitachi, Ltd.                (56) Reference JP-A-4-182916 (JP, A)

Claims (6)

(57) [Claims] 1. A floating type magnetic head in which a slider on which a magnetic recording / reproducing element is mounted floats above a rotating magnetic disk, wherein an amorphous carbon thin film having a lattice shape is formed on a sliding surface of the slider. A magnetic head characterized by being formed. 2. A floating type magnetic head in which a slider on which a magnetic recording / reproducing element is mounted flies over a rotating magnetic disk, wherein the slider is zirconium oxide.
A or alumina-containing titanium carbide , the magnetic recording / reproducing element is arranged so as to form a non-sliding surface close to the sliding surface of the slider, and a grid shape is formed on the sliding surface of the slider. A magnetic head comprising an amorphous carbon thin film having the same. 3. The longitudinal direction of the lattice of the amorphous carbon thin film is
3. The magnetic head according to claim 1, wherein the magnetic head is formed so as to substantially match the sliding direction of the slider. 4. The longitudinal direction of the lattice of the amorphous carbon thin film is
The magnetic head according to claim 1 or 2, wherein the magnetic head is formed so as to be inclined in a range of 5 ° to 30 ° with respect to the sliding direction of the slider. 5. The magnetic head according to claim 1, wherein the lattice shape has a width of 1 μm, and an interval between adjacent lattices is 5 μm. 6. The Vickers hardness of the amorphous carbon thin film is 1.
It is 500 Hv or more, It is characterized by the above-mentioned.
The magnetic head according to any one of 1.