JP3523601B2 - Magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates mainly to an electronic computer.
Used as external storage devices such as computers and workstations
BeMagnetic disk driveFor magnetic head which is the main part
Instead, it has particularly good sliding resistance and the friction of the magnetic disk.
Wear can be reducedMagnetic headAbout. [0002] 2. Description of the Related Art Magnetic disks, floppy (registered trademark)
Recording using magnetic recording technology such as disks and magnetic tapes
Storage devices are external storage devices such as computers and workstations.
It is widely used as an
Larger capacity is required. On the other hand, the shape of the device is smaller and lighter.
It is desired that the
Dramatic improvement in recording density is essential. For example, magnetic
Disk as a recording medium.
Conventionally, magnetic heads (hereinafter abbreviated as heads) are
From the disc with a certain floating space.
This enables high-speed read / write and the head
Prevents wear destruction of media caused by rubbing media
You. However, in order to improve the recording density, the above-mentioned floating is required.
Lower the head space further and move the head closer to the media.
Fluctuations in head attitude, irregularities on the media surface, and rotation
The frequency of contact between the head and the disc due to undulation
It is expected to increase more and more. Also, ultimately
Head and disk are always in contact, so-called
Driving methods such as contact recording are also required
Come. Further, in order to perform recording and reproduction at high speed, data
The rotational speed of the disk will be even higher than the current state. More than
Considering that, both the head and disk
To prevent wear and damage during high-speed contact and to keep the coefficient of friction low.
Needless to say, some ingenuity is required. In view of the above circumstances, conventional magnetic recording media
Various devices have been devised to protect the surface. An example
For example, by sputtering graphite
Obtained carbon film, SiO_TwoFilm, ceramic thin film
Attempts have been made to coat such as a protective film. this
These protective films mainly protect the surface of the magnetic recording medium from wear.
And maintain a low coefficient of friction when sliding with the head.
The purpose is. However, in order to prevent wear of the magnetic recording medium,
The stronger the strength, the more the magnetic
Wear of the head is promoted, a large amount of wear powder is generated and the head surface
Changes in shape, resulting in the reliability of the magnetic recording device itself.
The problem is that the sex does not improve as expected
Was. On the other hand, from the viewpoint of improving the sliding resistance of the magnetic head.
It is also known to provide a protective layer on the sliding part.
For example, JP-A-56-107326 discloses polyvinyl alcohol.
It is shown that a resin layer made of a kill ether is provided.
You. While this is of course conceivable,
In this case, the slider surface of the head is always displayed except when floating.
Surface, and the degree of wear is significant.
The protective layer quickly wears away and loses its protective effect.
Not only does this result,
And stick to the head and cause a crash instead.
It was not practical. Further, an amorphous carbon film is formed on the sliding surface of the head core.
Or diamond-structured carbon film or a mixture of these
It has also been proposed to coat a carbon film consisting of
Japanese Patent Application Laid-Open No.
0-193112, JP-A-63-58613, JP-A-63-58613
JP-A-63-222314 and the like. Indeed, if these carbon films are used as protective films,
Better film strength than the former with a resin layer.
Although it has a high degree of wear, its wear resistance is still insufficient for practical use.
Is sufficient or wear powder is generated during sliding.
There was a problem such as causing a shuffle. In particular, any of the above-mentioned known examples is a head element.
Formed for the purpose of protecting the part
It is formed so that it may cover. Therefore, sufficient life
In order to obtain, it is necessary to make the protective layer thicker.
The gap between the head element and the recording medium widens,
It had the drawback that it could not be recorded. [0012] SUMMARY OF THE INVENTION Therefore, the present invention
The purpose is to solve the problem when the conventional carbon film is used as the protective film
To doYes, with the headBoth sliding with magnetic disk
Prevents damage to the part and changes the friction coefficient during sliding
Providing an improved magnetic head that can be made smaller
To provide. [0013] [0014] In order to achieve the above object, a magnetic device is used.
Abrasion resistance even with ultra-thin film on slider slider where head is mounted
Highly wear-resistant, hardly generates abrasion powder, and suitable for recording media
A protective layer made of a material that reduces damage to
It is good to make. For example,Spinning discHead floating above
Fixed type magnetic with floating type head
In the case of a multi-disk drive,
Disk slides at high speed of 20-40m / sec
In operation, a narrow space of 0.1 to 0.3 μm is required.
It keeps floating. Therefore, the protective layer
The thickness must be so large that it does not significantly affect the clearance space
Even if the above-mentioned sliding is repeated tens of thousands of times.
The properties must not be reduced by wear. It is preferable to provide a protective layer on the sliding portion of the head.
What is not easily realized is that
There is no other material than a sharp protective layer material. The present invention
Have tried coating with various materials and studied various experiments.
As a result, certain carbon-based protective coatings
Was obtained. The present invention has been made based on such findings.
The specific means of achieving the objectives are as follows:
The following is a description. The slider on which the magnetic recording / reproducing element is mounted is
Floating tie floating above a rotating magnetic disk
The magnetic head ofZirconium oxide
A or titanium carbide containing aluminaAnd said
Form a non-sliding surface close to the sliding surface of the slider
The magnetic recording / reproducing element is arranged so that
The sliding surface of the damper has a Vickers hardness of 1500 Hv or more.
Magnetic properties characterized by being coated with an amorphous carbon thin film
Achieved by the head. [0019]The protective film in the present invention is mainly made of carbon.
A hard and amorphous thin film having a thickness of, for example, 1 μm
When formed to a thickness greater than the above, the micro Vickers hardness
About 1500 Hv or more, and the density is 1.7 to 2.4.
If it contains hydrogen, its atomic ratio is 3
-30 atomic%. Films outside the above range are soft
Easy to wear, high wear rate or brittle and fragile
Not good. [0020] [0021] Here, the characteristic carbon thin film of the present invention is
The findings obtained by the present inventors will be described in more detail below.
It is as follows. [0023]aboveEspecially for amorphous carbon thin films,
Hydrocarbon gas is decomposed in the plasma in the
By depositing on a substrate with a negative bias voltage
It turns out that the formed amorphous hydrogenated carbon film is good
Was. This is a well-known film forming technology called plasma CVD.
But also ionize hydrocarbons in the same way
To form a film by attracting it to a substrate to which a bias voltage is applied.
On-beam deposition was also effective. These films
The material obtained by the method has high hardness and cracks
Low, low coefficient of friction and low generation of wear powder
It has properties most suitable for the present invention. Also wear
Extremely low speed, great effect even with very thin films
Can be demonstrated. This amorphous hydrogenated carbon film has the following properties.
Contains an appropriate amount of hydrogen.
The roll generates CVD conditions such as source gas pressure and plasma.
It is easy if you control the power etc.
Can do it. Hydrogen decomposes hydrocarbons into carbon film
During the reaction, most decompose and desorb, but some are trapped in the membrane.
Is bonded to the end of the carbon chain to stabilize the membrane.
It is thought to have. Also,aboveCarbon thin with fine uneven surface
For the membrane,The aboveAmorphous hydrogenated carbon thin film preferred
Not limited to this, but includes, for example, diamond microcrystals
It may be a carbon-based thin film. It is important to have fine irregularities
Is formed on the sliding portion. The fine irregularities formed in this way are
The contact area between the disk and the disk
It has the effect of reducing. This fine unevennessAbout the degree
Is the average roughness(Ra) about 2 to 50 nm, maximum protrusion height
100 nm or less, and the average distance between adjacent protrusions
The separation is 10 to 1000 nm. Average than this
If the roughness is rough or the maximum protrusion height is high, the disc will be damaged
There is a risk that. If the average roughness is smaller than the above, friction
The effect of coefficient reduction is reduced. In the method of making the head sliding portion uneven,
Is a fine diamond microcrystal
In addition to forming deposits with irregularities, amorphous carbon thin films
Formed on the slider sliding surface of the head and the disk surface
Later, a resist film is provided on this carbon thin film, and photolithography is performed.
Pattern the resist by roughing
A mask is formed, and the amorphous charcoal
Selectively remove the base film by, for example, oxygen plasma.
You may leave. Selective etching by lithography
According to the method, irregularities of desired shape can be formed
You. For example, grid-like irregularities aligned with the head sliding direction
Formed, the damage to the disc is small and high
This is advantageous when rotating at high speed. [0029]Also, this gridSliding slider for unevenness
Angled within 30 ° with the direction, preferably 5-30 °
When it is formed, it removes dirt such as fine powder generated by sliding.
Therefore, there is an effect of elimination, and the reliability is further improved. Further, the friction coefficient at the time of sliding is further increased.Lowered
To the head sliding partA lubricant may be applied.
This lubricant is, for example, perfluoropolyether or
Having a main chain of fluoroalkyl, at least one
Is terminated by ether group, ester group, hydroxyl group, carbonyl
Molecules substituted with a polar group such as an amino group, an amino group or an amide group
It is best to use one with a volume of about 1,000 to 10,000
No. In addition, saturated fatty acids and their derivatives, higher alcohol
And derivatives thereof can also be used. [0031] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Description) Next, the specific structure of the magnetic head according to the present invention will be described with reference to the drawings.
It will be explained while referring to the figures. FIG. 1 shows the structure of a magnetic head according to the present invention in a sliding manner.
FIG. 2 schematically shows a perspective view as viewed from a bottom face side of the die.
The slider body 1 of the head contains zirconia oxide and alumina.
Made of materials such as titanium carbide and ferrite
The two slider sliding parts 2 are machined or etched.
It is formed with the principle. The rear side surface of the slider sliding portion 2 is magnetic.
The recording / reproducing element 3 for converting a signal into an electric signal has a sliding surface.
Close to, but slightly receding from the sliding surface, non-sliding surface
Formed, arranged and mounted. Slider sliding part 2
It has the shape of a sled, and the top 2a and the last 2b
Tapered so that the edge does not hit when running the head
Have been. The characteristic sliding surface of the present invention
A protective layer 4 made of carbon is provided. FIG. 2 shows the sliding surface of the slider sliding portion 2 as a car.
FIG. 4 schematically shows a plan view of the back surface of the head covered with a protective layer 4 for bonding.
FIG. 2 (a)aboveAmorphous carbon thin film
FIG. 2B shows an example in which a protective film is formed.AboveFine irregularities
FIG. 2C shows an example in which a carbon protective layer is formed.the above
As you didThe longitudinal direction of the grid is aligned with the sliding direction of the slider
Carbon protective layer with fine grid-like fine irregularities
In the example shown in FIG.As mentioned aboveGrid orientation
Has an angle θ within 30 ° with respect to the sliding direction of the slider.
This is an example formed by adding. FIG. 3 shows a case in which the sliding surface of
FIG. 2 is an enlarged cross-sectional view taken along the line XX ′ of FIG.
FIG. 3A shows a case where a film having a uniform thickness is provided.
FIG. 3B shows a case where a film having fine irregularities is provided.
3 (c) shows the case where the particulate deposit 5 is provided, and FIG.
When a protective film 4 having a uniform thickness is provided on the particulate deposit 5
It is. FIGS. 4 (a) to 4 (d), FIG.(A)
(D) Cross-sectional enlargement when lubrication layer 6 is further provided on
FIG. In the above example, the slider sliding portion 2 is
Although the thin-film magnetic head having the above has been described, the present invention
Of course, it is not limited to this type of head.
Head with a structure that causes sliding and contact between the
In any case, it is effective. In the present invention, the protective film is mainly made of carbon.
A hard and amorphous thin film having a thickness of, for example, 1 μm
When formed to a thickness greater than the above, the micro Vickers hardness
About 1500 Hv or more, and the density is 1.7 to 2.4.
If it contains hydrogen, its atomic ratio is 3
-30 atomic%. Films outside the above range are soft
Easy to wear, high wear rate or brittle and fragile
Not good. The above carbon thin film is prepared, for example, by the following method.
Can be formed. [Specific example of forming carbon thin film on head
Explanation] -1). Hydrocarbon gas alone or mixed with other gases
As a raw material, plasma is generated, and the substrate surface is plasma
Under conditions that cause a potential drop of 100 V or more with respect to the potential
CVD (chemical vapor deposition) is performed. most
For simplicity, the substrate to be processed is used as one electrode, and the area
Commercial high frequency (13.56MHz) between electrodes
Apply high frequency voltage such as
Accelerate ions by self-bias voltage generated near plate
It is preferable to form a film in such a way as to perform the above. Use this method
An example of the device is shown in FIG. -2). Hydrocarbon gas alone or in another gas
Mixed with water to produce a raw material, and this gas is ionized in an ionization chamber.
And generate ions at an electric field of about 100 to 1000 V
To accelerate and collide with the substrate. Of the equipment used in this method
An example is shown in FIG. Further, a deposit containing the above-mentioned diamond microcrystals
The following methods are well known for growing deposits.
From among these, the production speed and the upper limit of the substrate temperature that can be set
It is better to select in consideration of which factors. -3). Mainly hydrocarbon gases and hydrogen
Microwave plasma is generated from a mixed gas of
And heat the substrate to 200 ° C to 700 ° C. the above
A magnetic field is applied to the plasma region of
Process under conditions that cause a phenomenon called cyclotron resonance
Processing increases the plasma density and increases the formation of diamond particles.
Long speed can be increased. Growth rate is lower than above
High frequency instead of the microwave plasma
Plasma or DC plasma may be used. For this method
FIG. 5 (c) shows an example of such a device. -4). Substrate at about 700 ° C to 1000 ° C
And introduce a mixed gas of hydrocarbon gas and hydrogen gas.
To generate diamond particles by thermal reaction on the substrate surface
You. -5). Mixing gas of hydrocarbon gas and hydrogen gas
Pressure below atmospheric pressure, and a
It is generated by passing current through filaments such as tungsten
The source gas is reacted using thermoelectrons. -6). Ionize hydrocarbon molecules, 30
The substrate is caused to collide with energy of 0 V to 2000 V. -7). Flame of hydrocarbon gas under atmospheric pressure
The substrate on the reducing flame, and place a diamond on the substrate surface.
Generate mond particles. Actually, the heat resistance of the element of the magnetic head is low.
Be formed at the lowest possible temperature.
And the microwave CVD method of -3) is most suitable.
ing. It should be noted that the above method often uses
Amorphous carbon is also produced in addition to carbon dioxide,
High quality carbon but often low density and fragile
Amorphous coal containing an appropriate amount of hydrogen that is characteristic of the present invention
In some cases, unlike the element,
This has an adverse effect on improving mobility. Therefore such a place
O if_TwoAnd H_TwoThe amorphous part by plasma
It is better to remove by etching or etching. The above amorphous carbon thin film or diamond
Raw materials used in the method for producing a carbon thin film containing particles are mainly
Is a hydrocarbon compound consisting of carbon and hydrogen, and oxygen
Other atoms may be included. Specifically, methane, ethane, propane,
Saturated hydrocarbons such as butane, pentane and hexane;
Unsaturated carbon such as styrene, acetylene, propene and butene
Aromatics such as hydrides, benzene, toluene and xylene
Hydrocarbons, methanol, ethanol, propanol
Which alcohols, acetaldehyde, acetone, methyl
Ketones such as ethyl ketone, dimethyl ether,
Ethers such as tyl ethyl ether and diethyl ether
And the like are used. In addition, a mixed gas of two or more of these
Or Xr, Ar, He, Ne, O_Two, H2O, N2, etc.
May be used. In addition, the above hydrocarbons
Use a molecule in which some hydrogen in the molecule has been replaced by fluorine
You can also. There is a thin film mainly composed of the above amorphous carbon.
Or deposits containing diamond crystallites are too thick
As a result, the substantial distance between the head and the magnetic layer is increased, and the S / N ratio is increased.
Is preferably 50 nm or less, since this leads to a decrease in Thin on the other hand
If it breaks, the effect will be reduced by abrasion.
preferable. [Specific example of forming lubricating film on head]Above Head slider sliding to realize the head
The following methods can be used to apply lubricant to the protective film
There is something. -1). To the solution in which lubricant molecules are dissolved
Dip for dipping, holding for a certain period of time
Law. -2). Remove the solution containing the lubricant molecules.
Spray method to play and volatilize solvent. -3). Lubricant molecules are steamed in a vacuum chamber.
An evaporation method that emits and deposits on the surface of the head slider. Of course, the method is limited to these methods.
There is no. Also, if the amount of lubricant is too large, the head and magnetic recording
Viscosity that collects at the contact area of the recording medium and fixes the head
And the lubrication is reduced
It is necessary to control to a range. This amount is lubricated
Although it depends on the type and molecular weight of the agent,
1 to 50 nm, preferably 2 to 10 nm. Also, the terminal or molecular chain is used as the lubricant molecule.
Carbonyl group, carboxyl group, ester group,
Large polarizability such as ter bond, amide group, amino group, hydroxyl group
A substrate having a kin group is used, and A
metals such as l, Fe, Ni, Co, Ag, or compounds thereof
If a small amount of material is present, the gap between the protective layer and the lubricant
Strong bonding, and can reduce the sticking phenomenon. [Formation of Carbon Thin Film on Magnetic Disk] To further improve the sliding reliability of magnetic disks
Is the same as the specific protective film applied to the magnetic head of the present invention.
Is preferably provided as a protective film for the magnetic disk.
Particularly preferred are those used for the protective film of the magnetic head.
It is an amorphous hydrogenated carbon film formed by the same method.
In addition, providing a lubricating layer on this protective film will increase reliability.
Can be improved. The material and forming method of this lubricating layer
Use the same one as described for the head
Can be. According to the present invention, the reliability of the magnetic disk drive is improved.
The improvement is due to the following reasons. Magnetic disk
In the event of failure, the disk side is almost completely damaged. This is magnetic
This is because the mechanical strength of the recording medium is weak.
Since then, a protective layer with high wear resistance and a lubricating layer have been provided.
Ingenuity has been devised. However, the present inventors have proposed a magnetic head and a magnetic head.
Role or influence of magnetic head on disk sliding
Magnetic head slides with magnetic disk
I think that the parts also need to be made of appropriate material and shape
Was. This is because of the sliding of the magnetic head and the magnetic disk.
It must depend on the contact area between the two
Before moving, a relatively small contact area due to fine irregularities on the surface
Wear increases with sliding, which increases the frictional force.
Is likely to lead to a head crash. That is, to prevent the wear of the magnetic head.
The change in frictional force becomes smaller and the magnetic disk
Page, and reliability should be improved. this
Requires a protective layer with high wear resistance.
Therefore, the present inventors compare and examine various materials and determine a specific carbon-based material.
The material was found to be excellent. Specific charcoal
Basic materials refer to amorphous carbon and die as described above.
It is a sediment containing microcrystals of almond. These are as follows
It is considered that this is acting to improve the sliding resistance.
available. That is, (a) the hardness is high (Vickers
1500 to 5000 in hardness). (B) Large abrasion powder is hardly generated during sliding. (C) It does not easily adhere to the sliding partner material. In the present invention, the magnetic head is also a magnetic disk.
Both discs have the same carbon-based protective film on their sliding surfaces.
ing. Generally referred to as so-called warp in the field of friction and wear
Combinations of similar materials promote wear
It is. However, only the carbon-based material of the present invention
The same material has a synergistic effect and dramatically improves wear resistance
It turned out to be better. This is a characteristic of the carbon-based material
In general, there is a problem with sliding between homogeneous materials.
It is considered that the wearing phenomenon hardly occurs. The sliding signal of the magnetic disk drive using the present invention
Performance other than reliability can also be improved. That is,
If the wear on the magnetic head side is reduced, the sliding part of the magnetic head
By reducing the surface roughness, the surface of the magnetic disk
The above-mentioned increase in frictional force can be prevented without roughening the surface.
You. Therefore, make the surface of the magnetic disk smooth
To reduce the flying height of the magnetic head and improve the recording density
And is effective for improving S / N. Further, according to the present invention, a magnetic head and a magnetic
The wear of the disk is greatly reduced,
Make sure that the disc is in constant or intermittent contact.
Like contact recording for recording and playback
It can be suitably used even under severe conditions. [0067] The following examples are provided to further illustrate the present invention.
explain. <Example 1> Using a material having high magnetic permeability such as zirconia oxide
A wafer having a thickness of 4 mm was prepared, and vacuum evaporation was performed on this surface.
Thin film forming processes such as deposition, plating, sputtering, etc.
Core material and coil material using photolithography process
The necessary patterns such as materials, electrodes, and protective layers are formed. this
The thin-film magnetic head element 3 formed as described above is
Cut out and machined to form the head body as shown in Fig. 1.
It was set to 1. Next, the sliding surface of the slider sliding portion 2 is mirror-polished.
Polishing and chamfering of the tapered part 2a and the side edge part 2b
Thus, a sled-shaped sliding portion 2 was formed. This head body 1
After cleaning and removing processing residues, the slider sliding
And the internal electrode type high frequency plasma as shown in FIG.
Place the electrode on the biased side of the generator and
Gas at a flow rate of 50 sccm and a gas pressure of 50 mTo
The pumping speed was adjusted to be rr. After the gas pressure in the reaction chamber is stabilized,
Pressure, and the standing wave ratio SW so that the reflected power is minimized.
R (Standing WaveRatio) matching adjustment
Then, it was left for 1 minute at an effective power of 1 kW. This allows
Hydrogen content of about 10 atoms with a film thickness of 20 nm on the sliding surface of the ida
% Of the amorphous hydrogenated carbon film was formed. The magnetic head manufactured in this manner is
Magnetic disk with carbon protective film formed by sputtering
Combined with a disk, built into a CSS testing machine, and load 1
Rotate the disc by applying 0 g, and once the head comes up
After that, loosen the rotation and bring the head and disk into contact again,
A so-called CSS test that repeats a cycle of stopping rotation
To change the frictional force (gf) generated in the head and 30k times
Assess the extent of head and disk damage after the test.
Was. For comparison, a sputter without hydrogen was used.
The same test was performed on the head with the carbon film formed.
Was. The results are as shown in Table 1, and
The increase in frictional force is smaller than when
And the sliding surface of the disk was also slightly damaged. Also on
Of the frictional force applied to the head in the CSS test described above
FIG. 6 shows the number dependence. As shown, the number of CSS increases
Accordingly, the difference between the two characteristics is clear. <Examples 2 to 7> As in Example 1, the amorphous carbon protective film was
Create the formed magnetic head, and
CSS test is performed in combination with the disc
Was. The results showed that the increase in frictional force (gf) was small as shown in Table 1,
The sliding surfaces of the disk and disk were also slightly damaged. Example
As is clear from a comparison between 1 and 3, the disc
The same amorphous carbon as the head side is used as the protective film type.
The properties of the coated product were remarkably improved.
When the lubricant film is coated as shown in
You. [0072] [Table 1] Example 8 The amorphous hydrogenated carbon thin film of Example 1 was formed.
Control input power, gas flow rate, etc.
By changing the hydrogen content in the amorphous hydrogenated carbon thin film,
The relationship between the amount of hydrogen and the strength (expressed in hardness) of the thin film
Examined. FIG. 8A shows the relationship between the input power and the hydrogen content.
FIG. 8B shows the relationship between the gas flow rate and the hydrogen content.
In all cases, hydrogen content
Control of the amount is possible. FIG. 9 shows the relationship between the hydrogen content and the carbon thin film.
It is a characteristic diagram showing the relationship with strength (expressed in hardness), containing
Good strength is exhibited at an amount of 1 to 30 atomic%,
It turns out that it is preferable at 15 atomic%. <Examples 9 to 15> In the same steps as in Example 1,
A zirconia oxide wafer is used as a material for
Provide core and coil materials, electrodes and protection on this surface
Form the necessary patterns such as layers and cut the device from the wafer.
However, after making the head shape by machining, the slider
The sliding surface of the sliding portion 2 is mirror-polished, and the tapered portion 2a is
The head body 1 is prepared by chamfering the ridge portion 2b.
Was. The head body 1 is cleaned to remove processing residues.
After removal, the slider sliding part side is shown in front in Fig. 5 (c).
In a vacuum chamber of a magnetic field microwave plasma generator
And heat the head body 1 serving as a substrate to 250 ° C.
And a mixed gas of methane and hydrogen at a mixing ratio of 2:98
Introduced at a flow rate of 100 sccm and gas pressure is 100 mTo
The pumping speed was adjusted to be rr. After the gas pressure in the reaction chamber is stabilized, a magnetic field is generated.
Current through the coil and introduce 500W microwave
To generate plasma. Stop microwave after 5 minutes
To release the vacuum chamber to the atmosphere and remove the head body.
A fine uneven deposit is formed on the slider sliding surface.
Was. This was measured by Raman scattering spectrum and thin film X.
When analyzed by X-ray diffraction, diamond fine particles and amorphous
It was confirmed that carbon was mixed. Also, its surface shape
Has an average thickness of 20 nm and an average roughness Ra of 10 nm
It turned out to be. In addition, water contained in amorphous carbon
The elementary amount was about 7 atomic%. On the other hand, with respect to the magnetic disk,
The same ones as in Examples 1 to 7 were prepared. Made in this way
Example 1 using the magnetic head and magnetic disk
Similarly, a CSS test was performed to determine the frictional force (g
f) Changes in head and disk after 30k tests
The degree of scratch was evaluated. The results are as shown in Table 2,
As compared with the first to seventh embodiments, the increase in frictional force was small, and
And the sliding surface of the disk was also slightly damaged. [0079] [Table 2] <Embodiment 16> In the same process as in Embodiment 1, first, the slider
Zirconia wafer prepared as material
Core and coil materials, electrodes, and protective layers
Form the required pattern, such as, and cut the device from the wafer
After making the head shape by machining,
The sliding surface of the moving part 2 is mirror-polished, and the tapered part 2a and the side edge are polished.
The head body 1 is prepared by chamfering the
Was. The head body 1 is washed to remove processing residues.
After removing, the same as in Example 1 with the slider sliding part side facing up
The bias of the internal electrode type RF plasma generator?
Methane gas at a flow rate of 50 sccm
Pumping speed so that gas pressure becomes 50 mTorr by introducing
Was adjusted. Sly where left for 1 minute at 1kW effective power
A 20 nm-thick amorphous hydrogenated carbon film (water
Elemental content of about 10 atomic%). On the carbon thin film thus formed,
A 200 nm thick positive resist was applied and dried
Later, it has a grid pattern with a width of 1 micron and an interval of 5 μm
Exposure by irradiating ultraviolet rays through the mask master
Then, by developing and rinsing,
A strike mask pattern was formed. Next, on the slider sliding portion side of the magnetic head
Into the plasma generator again,
The gas pressure is maintained at 0.2 Torr by introducing
For 2 minutes. This allows the resist
The exposed portion of the carbon film is selectively etched,
The pattern of the carbon thin film having the lattice mask dimension described above.
Was formed. Then, the resist mask was peeled off, and Example 1 was removed.
In the same manner as in
A CSS test was performed in combination with a disk. The results show that the coefficient of friction increased after 30k tests.
Addition is less than 3g, little increase in friction force, head,
The sliding surface of the disk was also slightly damaged. The grating provided on the head slider sliding portion
The size of the carbon thin film pattern
The direction of the slider matches the sliding direction of the slider sliding part.
Prepare the one that is inclined by θ angle from the sliding direction
When the sliding characteristics are measured and the sliding direction is matched
Low damage to the disk
Advantageous, and within 30 °, preferably 5 ° to
If the angle is 30 °, the dirt attached to the head is more inclined.
Effective for scraping and effective for improving reliability
I understand. <Embodiment 17> Magnetization performed in Embodiments 1 to 7 and 9 to 16
Using a combination of a magnetic head and a magnetic disk, FIG.
As shown, 10 magnetic disks are fixed on the spindle
Magnetic heads, one on each side of the magnetic disk
Magnetic head positioning mechanism and signal recording / reproducing
Assemble the magnetic disk drive by attaching the circuit board for
Was. By operating this device, the flying height of the magnetic head was 0.1μ.
m, and write signals to all tracks sequentially
A life test was performed in which reading cycles were continuously performed. Disassembly after 5000 hours of continuous operation
And observe the surfaces of the magnetic head and magnetic disk with an optical microscope.
I found that the slider part of the magnetic head was tapered.
2a was very slightly stained,
Other than that, scratches and deposits on both the magnetic head and the magnetic disk
I couldn't see it. For comparison, a graphite plate was used as a target.
Sputtered carbon protective film on slider sliding surface
When one magnetic head was assembled into each device,
This head has several scratches in the sliding direction, and there is no
There were many. Also, a lot of dirt adheres to the magnetic disk,
Some crashed. Note that this
The carbon protective film does not contain hydrogen. <Embodiment 18> The magnetic disk drive used in Embodiment 17
Adjust the head load and the number of rotations to make the magnetic head almost
Conditions that continuously hit the magnetic disk surface (contact level
Coding) and the same as in the seventeenth embodiment.
Was tested. After 2000 hours of continuous testing, the device was disassembled.
And inspected the magnetic head and magnetic disk for damage,
Slight wear marks on the magnetic disk that can be discerned with an optical microscope
Were observed in several places, but only the protective film was worn.
Recording media had not been reached. Implemented in the same device
The magnetic head (sputter carbon) of the comparative example shown in Example 17
The magnetic disk assembled with the magnetic film crashes and the magnetic head
The wound on the C side was also large. [0088] As described above, according to the present invention, magnetic
Not only the head but also the anti-sliding properties of the magnetic disk
To extend the life of the magnetic disk drive.
It has an effect. Also, between the magnetic disk and the magnetic head
The required reliability can be secured even if the floating space of
Therefore, it is necessary to further improve the recording density of the magnetic disk.
Can be. The explanation so far is limited to the magnetic disk only.
In addition to this, storage that performs recording and playback using a head
The present invention can be used in exactly the same
Needless to say, a longer life can be realized. this
Examples include magnetic tapes and floppy disks.
Discs, magneto-optical discs using floating heads, etc.
You.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view schematically showing a magnetic head according to an embodiment of the present invention. FIG. 2 is a plan view of a magnetic head according to an embodiment of the present invention in which a carbon thin film is formed on a sliding surface. FIG. 3 is a sectional view of a magnetic head sliding portion according to another embodiment of the present invention. FIG. 4 is a sectional view of a magnetic head sliding portion according to another embodiment of the present invention. FIG. 5 is a schematic view of a film forming apparatus for forming a carbon thin film. FIG. 6 is a characteristic curve diagram showing a result of a CSS test using the magnetic head of the present invention. FIG. 7 is a sketch drawing showing the structure of the magnetic disk drive of the present invention. FIG. 8 is a characteristic curve diagram showing one embodiment for controlling the hydrogen content in the carbon thin film. FIG. 9 is a characteristic curve diagram showing a relationship between a hydrogen content in a carbon thin film and hardness. [Description of Signs] 1 ... Head body, 2 ... Slider sliding portion, 3 ... Recording / reproducing element, 4 ... Protective film.

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kazunari Takemoto 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside the Production Engineering Laboratory, Hitachi, Ltd. (72) Inventor Ryo Kito 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Address: Within Hitachi, Ltd. Production Engineering Laboratory (56) References JP-A-63-297208 (JP, A) JP-A-62-214510 (JP, A) JP-A-1-258219 (JP, A) 1-189019 (JP, A) JP-A-4-182916 (JP, A) JP-A-1-113914 (JP, A) JP-A-59-142937 (JP, U) (58) Fields investigated (Int. Cl. ^7, DB name) G11B 5/60 G11B 21/21

Claims (1)

(57) Claims 1. A floating type magnetic head in which a slider on which a magnetic recording / reproducing element is mounted floats on a rotating magnetic disk, wherein the slider is made of zirconia oxide or alumina-containing titanium carbide. The magnetic recording / reproducing element is arranged so as to form a non-sliding surface in close proximity to the sliding surface of the slider, and the sliding surface of the slider has a Vickers hardness of 1500 Hv or more .
A magnetic head comprising an amorphous carbon thin film having a density of 1.7 to 2.4 .