JPS63246889A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPS63246889A
JPS63246889A JP8213987A JP8213987A JPS63246889A JP S63246889 A JPS63246889 A JP S63246889A JP 8213987 A JP8213987 A JP 8213987A JP 8213987 A JP8213987 A JP 8213987A JP S63246889 A JPS63246889 A JP S63246889A
Authority
JP
Japan
Prior art keywords
exposure
hole
printed wiring
wiring board
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8213987A
Other languages
Japanese (ja)
Inventor
齋藤 秀男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP8213987A priority Critical patent/JPS63246889A/en
Publication of JPS63246889A publication Critical patent/JPS63246889A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明はスルーホールプリント配線板の製造方法、特に
その製造において使用するプリント配線板用露光装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for manufacturing a through-hole printed wiring board, and particularly to an exposure apparatus for a printed wiring board used in the manufacturing.

〈従来の技術及び発明が解決しようとする問題点〉従来
から用いられているスルーホールプリント配線板の製造
方法のうち代表的な2つの製造方法を示す。
<Prior Art and Problems to be Solved by the Invention> Two typical manufacturing methods of through-hole printed wiring boards that have been used in the past will be described.

′テンティング法及びはんだスルーホール法は、いずれ
を感光性樹脂としてドライフィルムを用いているが、ド
ライフィルムの厚み及び感光特性からの制約上、その解
像度は線間線巾ともに50〜60μmと言われているが
、実際はドライフィルムがラミネートされる銅箔面の打
こん、傷等の凹凸への埋め込み性に問題があシ、歩留り
t−考慮した上で製造可能と判断できるのは線間・線巾
とも80〜100μmと考えられている。又、コスト面
でも、テンティング法はドライフィルムそのものが高く
、はんだスルーホール法では、ドライフィルムを用いた
後にはんだめっきを施すなど工程が複雑でコスト高であ
り、後に施されるソルダーレジストとの密着性も劣って
いる。
'The tenting method and the solder through-hole method both use a dry film as a photosensitive resin, but due to constraints from the thickness and photosensitive characteristics of the dry film, the resolution for both line-to-line widths is 50 to 60 μm. However, in reality, there are problems with embedding into unevenness such as dents and scratches on the copper foil surface on which the dry film is laminated. Both line widths are thought to be 80 to 100 μm. In addition, in terms of cost, the dry film itself is expensive in the tenting method, and in the solder through-hole method, the process is complicated and expensive, such as applying solder plating after using the dry film, and it is difficult to combine with the solder resist that is applied later. Adhesion is also poor.

他方、従来紫外線により硬化する液状の樹脂を用いてス
ルーホールプリント配線[−製造する場合、ドライフィ
ルム法とは異なシ、銅箔面の凹凸への適応性は良好であ
るが、従来の露光機による露光では基板面に垂直な光線
なのでスルーホール内の樹脂を均一に露光し、硬化させ
るのが難しく、そのため後の現像工程により一部の樹脂
がスルーホール内より流い出され、その結果エツチング
によシスルーホール内の一部の銅メッキが除去されてし
まい、スルーホールの導通信頼性を損なうものであった
On the other hand, when manufacturing through-hole printed wiring using a liquid resin that is cured by ultraviolet light, it is different from the dry film method and has good adaptability to unevenness on the copper foil surface, but conventional exposure equipment When exposed to light, it is difficult to uniformly expose and harden the resin inside the through-holes because the light is perpendicular to the substrate surface, so some of the resin flows out from inside the through-holes during the subsequent development process, resulting in etching. As a result, some of the copper plating inside the through-holes was removed, impairing the continuity reliability of the through-holes.

本発明は上記問題点を解消することのできるプリント配
線板の製造方法を提供することを目的とする0 く問題点を解決するための手段及び作用〉第3図に製造
工程のあらましを示したが、従来の露光はフォトマスク
としてネガフィルム(回路部分が透明なフィルム)を基
板の両側に重ねて垂直光をあてて、第1の露光を行なう
。ついで、スルーホールの穴径より少し大きい穴径を有
する金属薄板を両側に重ねる。この時の穴径は第1の露
光で用いたランド径よりも大きくなってはいけない。金
属薄板の材質は特に何を使用してもよいが、望ましくは
ステンレス薄板が適しており、少し基板に対し凸状の形
状にそりを有しているものが、基板との浮きが少くなる
ため好ましい。第2の露光は基材の垂直面に対し、OO
から450の角度でなされるようにuv光を照射する。
An object of the present invention is to provide a method for manufacturing a printed wiring board that can solve the above-mentioned problems. However, in conventional exposure, a negative film (a film with transparent circuit parts) is stacked on both sides of the substrate as a photomask, and vertical light is applied to perform the first exposure. Next, thin metal plates having a hole diameter slightly larger than the hole diameter of the through hole are stacked on both sides. The hole diameter at this time must not be larger than the land diameter used in the first exposure. Any material may be used for the thin metal plate, but preferably a thin stainless steel plate is suitable, and one with a slightly convex warp to the board will reduce the amount of lifting from the board. preferable. The second exposure is OO
UV light is irradiated at an angle of 450 degrees.

このUV光の照射によりスルーホール壁面にもuv光が
あたり、スルーホール内部も露光される。この露光にお
けるuvクランプ冷水により充分に冷却する方式を使用
するのが適当である。空冷方式ではuvラングからの熱
を充分に除去できないためラング下の温度が上がシ過ぎ
、その結果感光樹脂が熱重合するために次工程の現像時
に、フォトマスクに忠実な画像形成ができなくなるため
、空冷方式UVラングは使用しない方がよい。このよう
にして、スルーホール内部を光硬化した樹脂で被われる
のでエツチング工程を経ても、スルーホール内がエツチ
ングされることはない。
By irradiating the UV light, the wall surface of the through hole is also exposed to the UV light, and the inside of the through hole is also exposed. It is appropriate to use a method of sufficiently cooling the UV clamp with cold water during this exposure. With the air cooling method, the heat from the UV rung cannot be removed sufficiently, so the temperature under the rung gets too high, and as a result, the photosensitive resin thermally polymerizes, making it impossible to form an image faithful to the photomask during the next development process. Therefore, it is better not to use air-cooled UV rungs. In this way, the inside of the through-hole is covered with the photocured resin, so that the inside of the through-hole will not be etched even after the etching process.

〈実施例〉 以下図示する実施例に基づいて本発明について更に詳し
く説明する。
<Example> The present invention will be described in more detail below based on the illustrated example.

第1図(a)〜(d)は本発明に係る基板の断面を示す
ものである。第1図(a)は、スルーホール銅メッキが
完了し、感光液をスルーホール内部も含み全面的に塗布
乾燥したものであり、基材■と銅箔■とからなる銅張積
層基材、スルーホール銅メッキ■及び乾燥した紫外線に
より硬化する感光樹脂■により構成される。
FIGS. 1(a) to 1(d) show cross sections of a substrate according to the present invention. Figure 1(a) shows a copper-clad laminated base material consisting of a base material (■) and a copper foil (■), after the through-hole copper plating has been completed and a photosensitive liquid has been applied and dried on the entire surface including the inside of the through-hole. Consists of through-hole copper plating (■) and photosensitive resin (■) that is cured by dry ultraviolet light.

第1図(b)は第1露光の状態を示し、フォトマスク■
が感光樹脂の上に重ねられて、上下から基材1に垂直な
方向に紫外線が照射され、照射された感光樹脂■′ は
光硬化する。ついで、第1図(C)では第2露光の状態
を示し、スルーホールのみを紫外線照射するようなフォ
トマスク■を感光樹脂5の上に重ね、斜め党を照射して
スルーホールの内部の感光樹脂を光硬化する。ここに使
用するフォトマスクは、好ましくは0.1〜Q、2mm
  厚のステンレス板がよい。この第2露光で使用する
露光機は80−120w/cm(長さ)のuvシランを
使用し、発生する熱を水冷によシ除去し、基板表面の温
度上昇を防止することが必要である。uvランプ■は第
2図に示すように放物面鏡■を用いて平行光線に近づけ
、光線を基板の垂直面に対して50〜45°の角度で両
面照射する。紫外線の照射の際にはガラス板■の上をフ
ック[株]がフォトマスク■の端部に設けた穴をひっか
けて、uvクランプ間を基板を通過させる4造である。
FIG. 1(b) shows the state of the first exposure, and the photomask ■
is placed on the photosensitive resin, and ultraviolet rays are irradiated from above and below in a direction perpendicular to the base material 1, and the irradiated photosensitive resin 1 is photocured. Next, FIG. 1(C) shows the state of the second exposure, in which a photomask ■ that irradiates only the through holes with ultraviolet rays is placed on the photosensitive resin 5, and the inside of the through holes is exposed by irradiating diagonally. Lightly cure the resin. The photomask used here preferably has a thickness of 0.1 to Q, 2 mm.
A thick stainless steel plate is best. The exposure machine used for this second exposure uses UV silane of 80-120 W/cm (length), and it is necessary to remove the generated heat by water cooling to prevent the temperature of the substrate surface from rising. . As shown in FIG. 2, the UV lamp (2) uses a parabolic mirror (2) to approximate parallel light beams, and irradiates both sides of the substrate at an angle of 50 to 45 degrees with the light beam. When irradiating with ultraviolet rays, a hole made by Hook Co., Ltd. at the end of a photomask (2) is hooked onto the top of the glass plate (2), and the substrate is passed between the UV clamps.

このようにしてスルーホール内壁まで露光された感光樹
脂を現像すると第1図(d)に示すように、スルーホー
ル内壁部を完全に被った感光樹脂層が得られ、これは後
に行なわれるエツチングに充分耐えうるものとなってい
る。
When the photosensitive resin exposed to the inner wall of the through hole is developed in this way, a photosensitive resin layer completely covering the inner wall of the through hole is obtained, as shown in FIG. It is durable enough.

尚、第1露光と第2露光の順序を入れかえても得られる
効果には何らの変わシがない。
Note that even if the order of the first exposure and the second exposure is switched, there is no change in the effect obtained.

〈発明の効果〉 本発明によるスルーホールプリント配stのw遣方法は
以上のような方法にょシなされ、ドライフィルムに比べ
感光液によれば材料コストを安価に、かつ銅箔の凹凸へ
の埋込み性に優れ、回路欠陥が発生しにりくすって歩留
りが向上し、又スルーホール内の露光(第2露光)を両
面同時にできることより、製造時間の短縮が可能であり
、大量かつ安1IIIiなスルーホールプリント配線板
の製造方法を提供できる。
<Effects of the Invention> The method of through-hole printing according to the present invention is carried out as described above, and compared to dry film, photosensitive liquid is used to reduce the material cost and to embed copper foil into uneven surfaces. It is possible to shorten manufacturing time by being able to expose the inside of the through hole (second exposure) on both sides at the same time, and to reduce the occurrence of circuit defects, thereby improving the yield. A method for manufacturing a hole printed wiring board can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)乃至(dJは本発明によるスルーホールプ
リント配線板を製造する工程を示すスルーホール部の部
分拡大断面図、第2図は本発明でスルーホール内壁部の
感光樹脂を露光する時に使用する両面露光機の主要部分
の構成図、第3図は本発明に係るフローチャートである
。 ■−基材、■−銅箔、■−銅メツキ、■−感光液、l−
光硬化した感光液(樹脂)、■−フォトマスクフィルム
、■−7第1・マスク金属板、■−UVラング、■−放
物面反射鏡、■−ガラス、■−フック 以上 代理人 弁理士 杉 山 毅 至(他1名)第 1 図 第3vXJ 第2 聞
FIGS. 1(a) to (dJ are partially enlarged cross-sectional views of the through-hole portion showing the steps of manufacturing the through-hole printed wiring board according to the present invention, and FIG. 2 is the exposure of the photosensitive resin on the inner wall of the through-hole according to the present invention. FIG. 3 is a flowchart according to the present invention. ■-Base material, ■-Copper foil, ■-Copper plating, ■-Photosensitive liquid, l-
Photocured photosensitive liquid (resin), ■-photomask film, ■-7 first mask metal plate, ■-UV rung, ■-parabolic reflector, ■-glass, ■-Hook and above, agent and patent attorney. Takeshi Sugiyama (and 1 other person) No. 1 Figure 3vXJ No. 2

Claims (1)

【特許請求の範囲】 1、所定のスルーホールを有する両面銅張積層板の、前
記スルーホールを含む全面に銅めっきを施した後、紫外
線硬化樹脂を全面に塗布及び乾燥をした後、フォトマス
クを介して紫外線硬化樹脂に紫外線を照射し、エッチン
グによって配線パターンを形成してなるプリント配線板
の製造方法において、 前記紫外線の照射は、垂直光による第1の露光と、スル
ーホール内面に向う斜め光による第2の露光とからなる
ことを特徴とするプリント配線板の製造方法。 2、前記第2の露光の斜め光は、前記両面銅張積層板の
スルーホール内面の平行線に対して5°〜45°の角度
を有してなることを特徴とする特許請求の範囲第1項記
載のプリント配線板の製造方法。
[Scope of Claims] 1. After applying copper plating to the entire surface including the through holes of a double-sided copper-clad laminate having predetermined through holes, applying an ultraviolet curable resin to the entire surface and drying it, a photomask is applied. In the method of manufacturing a printed wiring board, in which a wiring pattern is formed by irradiating ultraviolet rays onto an ultraviolet curing resin through etching, the irradiation of ultraviolet rays includes a first exposure with vertical light and an oblique exposure toward the inner surface of the through hole. A method for producing a printed wiring board, comprising: second exposure to light. 2. The oblique light of the second exposure has an angle of 5° to 45° with respect to a parallel line on the inner surface of the through hole of the double-sided copper-clad laminate. A method for manufacturing a printed wiring board according to item 1.
JP8213987A 1987-04-01 1987-04-01 Manufacture of printed wiring board Pending JPS63246889A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8213987A JPS63246889A (en) 1987-04-01 1987-04-01 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8213987A JPS63246889A (en) 1987-04-01 1987-04-01 Manufacture of printed wiring board

Publications (1)

Publication Number Publication Date
JPS63246889A true JPS63246889A (en) 1988-10-13

Family

ID=13766089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8213987A Pending JPS63246889A (en) 1987-04-01 1987-04-01 Manufacture of printed wiring board

Country Status (1)

Country Link
JP (1) JPS63246889A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255693A (en) * 1990-03-05 1991-11-14 Nec Corp Manufacture of printed wiring board
JP2007201125A (en) * 2006-01-26 2007-08-09 Eito Kogyo:Kk Manufacturing method of printed circuit board with side pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255693A (en) * 1990-03-05 1991-11-14 Nec Corp Manufacture of printed wiring board
JP2007201125A (en) * 2006-01-26 2007-08-09 Eito Kogyo:Kk Manufacturing method of printed circuit board with side pattern

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