JPS6324617Y2 - - Google Patents
Info
- Publication number
- JPS6324617Y2 JPS6324617Y2 JP6088881U JP6088881U JPS6324617Y2 JP S6324617 Y2 JPS6324617 Y2 JP S6324617Y2 JP 6088881 U JP6088881 U JP 6088881U JP 6088881 U JP6088881 U JP 6088881U JP S6324617 Y2 JPS6324617 Y2 JP S6324617Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- signal
- focusing
- ray tube
- cathode ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000010894 electron beam technology Methods 0.000 description 32
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6088881U JPS6324617Y2 (zh) | 1981-04-27 | 1981-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6088881U JPS6324617Y2 (zh) | 1981-04-27 | 1981-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57173258U JPS57173258U (zh) | 1982-11-01 |
| JPS6324617Y2 true JPS6324617Y2 (zh) | 1988-07-06 |
Family
ID=29857156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6088881U Expired JPS6324617Y2 (zh) | 1981-04-27 | 1981-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324617Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019239546A1 (ja) * | 2018-06-14 | 2019-12-19 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡装置 |
-
1981
- 1981-04-27 JP JP6088881U patent/JPS6324617Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57173258U (zh) | 1982-11-01 |
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