JPS63245920A - 半導体アニ−ル方法 - Google Patents

半導体アニ−ル方法

Info

Publication number
JPS63245920A
JPS63245920A JP62090882A JP9088287A JPS63245920A JP S63245920 A JPS63245920 A JP S63245920A JP 62090882 A JP62090882 A JP 62090882A JP 9088287 A JP9088287 A JP 9088287A JP S63245920 A JPS63245920 A JP S63245920A
Authority
JP
Japan
Prior art keywords
flash discharge
wafer
plane
flash
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62090882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234165B2 (OSRAM
Inventor
Tetsuharu Arai
荒井　徹治
Mitsuru Ikeuchi
満 池内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP62090882A priority Critical patent/JPS63245920A/ja
Publication of JPS63245920A publication Critical patent/JPS63245920A/ja
Publication of JPH0234165B2 publication Critical patent/JPH0234165B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/422—

Landscapes

  • Recrystallisation Techniques (AREA)
JP62090882A 1987-04-15 1987-04-15 半導体アニ−ル方法 Granted JPS63245920A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62090882A JPS63245920A (ja) 1987-04-15 1987-04-15 半導体アニ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62090882A JPS63245920A (ja) 1987-04-15 1987-04-15 半導体アニ−ル方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55126068A Division JPS5750427A (en) 1980-09-12 1980-09-12 Annealing device and annealing method

Publications (2)

Publication Number Publication Date
JPS63245920A true JPS63245920A (ja) 1988-10-13
JPH0234165B2 JPH0234165B2 (OSRAM) 1990-08-01

Family

ID=14010814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62090882A Granted JPS63245920A (ja) 1987-04-15 1987-04-15 半導体アニ−ル方法

Country Status (1)

Country Link
JP (1) JPS63245920A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203804A (ja) * 2000-12-28 2002-07-19 Tokyo Electron Ltd 加熱装置、当該加熱装置を有する熱処理装置、及び、熱処理制御方法
JP2006261695A (ja) * 2006-05-22 2006-09-28 Toshiba Corp 半導体装置の製造方法
JP2007274007A (ja) * 2007-06-18 2007-10-18 Toshiba Corp 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0553464U (ja) * 1991-12-26 1993-07-20 株式会社クラレ 水槽用上蓋

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203804A (ja) * 2000-12-28 2002-07-19 Tokyo Electron Ltd 加熱装置、当該加熱装置を有する熱処理装置、及び、熱処理制御方法
JP2006261695A (ja) * 2006-05-22 2006-09-28 Toshiba Corp 半導体装置の製造方法
JP2007274007A (ja) * 2007-06-18 2007-10-18 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0234165B2 (OSRAM) 1990-08-01

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