JPS63244731A - プラズマ気相成長装置 - Google Patents

プラズマ気相成長装置

Info

Publication number
JPS63244731A
JPS63244731A JP62076384A JP7638487A JPS63244731A JP S63244731 A JPS63244731 A JP S63244731A JP 62076384 A JP62076384 A JP 62076384A JP 7638487 A JP7638487 A JP 7638487A JP S63244731 A JPS63244731 A JP S63244731A
Authority
JP
Japan
Prior art keywords
substrate
gas
reaction chamber
plasma
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62076384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587130B2 (enrdf_load_stackoverflow
Inventor
Mitsuaki Yano
矢野　満明
Kenji Nakatani
健司 中谷
Hiroshi Okaniwa
宏 岡庭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP62076384A priority Critical patent/JPS63244731A/ja
Priority to US07/166,689 priority patent/US4920917A/en
Priority to DE3808974A priority patent/DE3808974A1/de
Priority to FR8803589A priority patent/FR2613535B1/fr
Publication of JPS63244731A publication Critical patent/JPS63244731A/ja
Publication of JPH0587130B2 publication Critical patent/JPH0587130B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP62076384A 1987-03-18 1987-03-31 プラズマ気相成長装置 Granted JPS63244731A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62076384A JPS63244731A (ja) 1987-03-31 1987-03-31 プラズマ気相成長装置
US07/166,689 US4920917A (en) 1987-03-18 1988-03-11 Reactor for depositing a layer on a moving substrate
DE3808974A DE3808974A1 (de) 1987-03-18 1988-03-17 Anordnung zum abscheiden einer materialschicht auf einem bewegten traeger
FR8803589A FR2613535B1 (fr) 1987-03-18 1988-03-18 Reacteur permettant de faire deposer une couche sur un substrat mobile pour la fabrication d'un dispositif semiconducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62076384A JPS63244731A (ja) 1987-03-31 1987-03-31 プラズマ気相成長装置

Publications (2)

Publication Number Publication Date
JPS63244731A true JPS63244731A (ja) 1988-10-12
JPH0587130B2 JPH0587130B2 (enrdf_load_stackoverflow) 1993-12-15

Family

ID=13603840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62076384A Granted JPS63244731A (ja) 1987-03-18 1987-03-31 プラズマ気相成長装置

Country Status (1)

Country Link
JP (1) JPS63244731A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0587130B2 (enrdf_load_stackoverflow) 1993-12-15

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Legal Events

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LAPS Cancellation because of no payment of annual fees