JPS63242904A - オゾン発生装置 - Google Patents

オゾン発生装置

Info

Publication number
JPS63242904A
JPS63242904A JP7722487A JP7722487A JPS63242904A JP S63242904 A JPS63242904 A JP S63242904A JP 7722487 A JP7722487 A JP 7722487A JP 7722487 A JP7722487 A JP 7722487A JP S63242904 A JPS63242904 A JP S63242904A
Authority
JP
Japan
Prior art keywords
electrode
ozone
ozone generator
discharge
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7722487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427165B2 (https=
Inventor
Masao Okubo
昌男 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP7722487A priority Critical patent/JPS63242904A/ja
Publication of JPS63242904A publication Critical patent/JPS63242904A/ja
Publication of JPH0427165B2 publication Critical patent/JPH0427165B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP7722487A 1987-03-30 1987-03-30 オゾン発生装置 Granted JPS63242904A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7722487A JPS63242904A (ja) 1987-03-30 1987-03-30 オゾン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7722487A JPS63242904A (ja) 1987-03-30 1987-03-30 オゾン発生装置

Publications (2)

Publication Number Publication Date
JPS63242904A true JPS63242904A (ja) 1988-10-07
JPH0427165B2 JPH0427165B2 (https=) 1992-05-11

Family

ID=13627882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7722487A Granted JPS63242904A (ja) 1987-03-30 1987-03-30 オゾン発生装置

Country Status (1)

Country Link
JP (1) JPS63242904A (https=)

Also Published As

Publication number Publication date
JPH0427165B2 (https=) 1992-05-11

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