JPS63242904A - Ozonizer - Google Patents

Abstract

PURPOSE:To enable evolution of highly concentrated ozone-containing gas, by setting electrodes generating both creeping discharge and silent discharge. CONSTITUTION:A first electrode 20, second electrodes 40 opposing the first electrode while laying an alumina ceramic layer 30 between them and a third electrode 50 opposing the second electrodes are set in a hollow outer frame 10 of approximately rectangular parallelepiped shape. Oxygen or air is made to flow from an inlet 11 at one face of the outer frame 10, simultaneously high-frequency voltage of given value is impressed to the electrodes 40 to generate creeping discharge between the electrodes 40. Then, when high-frequency voltage of given value is impressed to the electrode 50, since a gas in the vicinity of the electrodes 40 is ionized, immediately silent discharge is generated between the electrodes 50 and 20. Oxygen or air flowing in the vicinity of the electrodes 40 of the introduced oxygen or air is converted into ozone by creeping discharge and flowing at part separated from the electrodes 40 into ozone by silent discharge. Consequently, highly concentrated ozone-containing gas is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an ozone generator for converting oxygen into ozone.

<Prior art> Ozone has a strong oxidizing power, so it is used in all fields for sterilization, disinfection, deep cleaning, color development, etc.

As ozone generators that generate the ozone, there are conventionally known ozone generators that utilize silent discharge and those that utilize creeping discharge.

Figure 3 is a schematic diagram of an ozone generator using silent discharge.
FIG. 4 is a schematic diagram of an ozone generator using creeping discharge.

An ozone generator using silent discharge includes a substantially cylindrical negative electrode 10 that also serves as a cooling device, and a substantially test tube-shaped glass tube 20 installed inside the negative electrode 10.

The negative electrode 10 is hollow, and cooling water is circulated by a cooling water circulation pump (not shown) or the like.

The glass tube 20 is made of high alumina glass with a dielectric constant of about 7, and aluminum as the positive electrode 22 is vapor-deposited on its inner surface.

Furthermore, a brush 21 connected to a high frequency power source 30 is installed inside the positive electrode 22 .

Injecting oxygen or air between the positive electrode 22 and the negative electrode lO,
When a high frequency voltage is applied, a silent discharge occurs between the positive electrode 20 and the negative electrode 10, and chemical changes 302-203 occur,
Ozone-containing gas escapes.

An ozone generator using creeping discharge has a tungsten discharge electrode 42 fired in a hydrogen or nitrogen atmosphere and an induction electrode 41 formed on both sides of an alumina ceramic layer 40, and a high frequency high voltage is applied between the two electrodes. do. At this time, creeping discharge occurs on the surface of the alumina ceramic layer 40 from the discharge electrode 42 toward the induction electrode 41, changing oxygen into ozone. Note that 411 is a protective layer for protecting the discharge electrode, which is coated with frit glass or alumina film, fired, and insulated.

<Problems to be solved by the invention> However, in an ozone generator that uses silent discharge, even if 17 ml of oxygen is introduced, the amount of oxygen is approximately 7 to 811 t%.
of ozone can only be generated.

In addition, an ozone generator using creeping discharge has 5,000
As can be seen from FIG. 5, which shows the electric field distribution when a voltage of V is applied, discharge occurs only in the vicinity of the discharge electrode. Therefore, only oxygen near the surface of the alumina ceramic layer where creeping discharge is occurring can be converted into ozone. In other words, oxygen in a portion away from the discharge electrode (within the range of arrow A shown in FIG. 5) hardly changes to ozone.

The present invention was devised in view of the above circumstances, and an object of the present invention is to provide an ozone generator capable of generating a gas containing ozone at a higher concentration.

<Means for Solving the Problems> The ozone generator according to the present invention generates a creeping discharge between the first electrode and the second electrode, which generates a creeping discharge between the first electrode and the first electrode. The structure includes a third electrode that generates .

<Operation> A creeping discharge is generated between the first electrode and the second electrode, and at the same time, a silent discharge is generated between the first electrode and the third electrode.

<Embodiment> An embodiment of the present invention will be described below with reference to the drawings.

The ozone generator according to the present invention includes a hollow substantially rectangular parallelepiped outer frame 10 and a first electrode 20 installed inside the outer frame 10.
, a second electrode 40 facing the first electrode 20 with the alumina ceramic layer 30 in between, and a third electrode 50 installed facing the second electrode 40.

An inlet 11 for allowing oxygen or air to flow into the ozone generator and an outlet 12 for allowing ozone-containing gas to flow out are provided on both end faces of the outer frame 10, respectively.

On the surface side of the alumina ceramic layer 30, second
The first electrode 20 corresponding to the second electrode 40 is formed on the back side of the electrode 40 . The alumina ceramic layer 30 is attached to a mica Fi 31 with a corresponding opening, exposing the second electrode 40 (in this case, it is not necessary to use mica (although a thin alumina film can (Also, other highly insulating and corona-resistant materials may be used.)

The third electrode 50 is attached to the back side of the mica layer 51, and is connected to the second electrode with a predetermined interval (4 mm in the experimental example).
It faces the electrode 40. The inlet 11 and the outlet 12
is provided between the second electrode 40 and the third electrode 50.

The first electrode 20 is grounded, and a high frequency voltage of a predetermined value (3 KV in the experimental example described later) is applied to the second electrode 40.
A high frequency voltage higher than the predetermined value (5 or 6 KV in the experimental example) is applied to the third electrode 50, respectively.

Next, the operation of the ozone generator according to the present invention will be explained.

First, while oxygen or air is introduced from the inlet 11, a high frequency voltage of a predetermined value is applied to the second electrode 40.
A creeping discharge is generated between the electrodes 40. Thereafter, a high frequency voltage of a predetermined value is applied to the third electrode 50. Then, since the gas near the second electrode 40 is ionized, a silent discharge immediately occurs between the third electrode 50 and the first electrode 20.

Of the oxygen or air that flows in from the inlet 11, the oxygen flowing near the second electrode 40 becomes ozone due to creeping discharge, and the oxygen flowing in the portion away from the second electrode 40 also becomes ozone due to silent discharge.

Next, Tables A and B show experimental results in which air was changed to ozone by creeping discharge, and experimental results in which air was changed to ozone by the ozone generator according to the present invention. In addition, the experiment in Table A was conducted at a room temperature of 13°C and a humidity of 65%, and in Table B.
The experiment was conducted at a room temperature of 13℃, humidity of 65%, and an oxygen dew point of -30℃.
It was carried out at ℃.

Table A shows the experimental results when air is supplied, A■ shows the experimental results when only creeping discharge is generated, and A■ shows the experimental results when 5KV high frequency voltage is applied and creeping discharge and silent discharge are generated. Experimental results A■ are the experimental results when a high frequency voltage of 6 KV was applied to generate creeping discharge and silent discharge.

Table B shows the experimental results when oxygen was supplied, B■ shows the experimental results when only creeping discharge was generated, and B■ shows the experimental results when 5KV high frequency voltage was applied and creeping discharge and silent discharge were generated. Experimental results B■ are the experimental results when a high frequency voltage of 6 KV was applied to generate creeping discharge and silent discharge.

As can be seen from FIG. 2, which is a graph of the above experimental results, the ozone generator according to the present invention can generate ozone-containing gas at an extremely higher concentration than the conventional ozone generator. In particular, when pure oxygen is supplied, oxygen can be converted into ozone-containing gas with very high efficiency.

<Effects of the Invention> According to the ozone generator according to the present invention, since two discharges, creeping discharge and silent discharge, are used, oxygen that is not ozonated in the conventional ozone generator can be changed into ozone. Therefore, it is possible to generate ozone-containing gas at a higher concentration than conventional ozone generators.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of an ozone generator according to the present invention, and Fig. 2 is a graph comparing the ozone generator according to the present invention with a conventional ozone generator (one that uses creeping discharge), that is, Table A. A graph of Table B, Figure 3 is a schematic diagram of a conventional ozone generator (using silent discharge), and Figure 4 is a schematic diagram of a conventional ozone generator (utilizing creeping discharge). , FIG. 5 is a schematic diagram showing the electric field distribution when a voltage of 5000 V is applied to an ozone generator using creeping discharge. 20... First electrode, 30... Alumina ceramic layer (dielectric), 40... Second electrode, 50... Third electrode.

Claims (1)

[Claims] (1) Ozone generation characterized by having a first electrode, a second electrode that generates a creeping discharge between the first electrode, and a third electrode that generates a silent discharge between the first electrode. Device.