JPS6324262U - - Google Patents
Info
- Publication number
- JPS6324262U JPS6324262U JP11643886U JP11643886U JPS6324262U JP S6324262 U JPS6324262 U JP S6324262U JP 11643886 U JP11643886 U JP 11643886U JP 11643886 U JP11643886 U JP 11643886U JP S6324262 U JPS6324262 U JP S6324262U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- etching
- manipulator
- liquid supply
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11643886U JPS6324262U (cs) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11643886U JPS6324262U (cs) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324262U true JPS6324262U (cs) | 1988-02-17 |
Family
ID=31001026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11643886U Pending JPS6324262U (cs) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324262U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9074626B2 (en) | 2011-10-19 | 2015-07-07 | Mitsubishi Electric Corporation | AC generator for vehicle |
-
1986
- 1986-07-29 JP JP11643886U patent/JPS6324262U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9074626B2 (en) | 2011-10-19 | 2015-07-07 | Mitsubishi Electric Corporation | AC generator for vehicle |
| US9243666B2 (en) | 2011-10-19 | 2016-01-26 | Mitsubishi Electric Corporation | AC generator for vehicle |
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