JPS63240913A - Dust removing device - Google Patents
Dust removing deviceInfo
- Publication number
- JPS63240913A JPS63240913A JP62073051A JP7305187A JPS63240913A JP S63240913 A JPS63240913 A JP S63240913A JP 62073051 A JP62073051 A JP 62073051A JP 7305187 A JP7305187 A JP 7305187A JP S63240913 A JPS63240913 A JP S63240913A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- temp
- temperature
- dust
- filter element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims abstract description 28
- 239000012530 fluid Substances 0.000 claims abstract description 24
- 238000001914 filtration Methods 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract 1
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 8
- 239000002245 particle Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Filtration Of Liquid (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体製造装置、特に流体中の塵埃を除去する
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to semiconductor manufacturing equipment, and particularly to equipment for removing dust from fluid.
従来、この種の塵埃除去装置は微細な間隙を持つ高分子
膜もしくは多層金属網（以下フィルタエレメントという
）を配管中に静置し、流体の流圧によりフィルタエレメ
ントレこて濾過を行うことにより塵埃の除去を行ってい
る。Conventionally, this type of dust removal device uses a polymer membrane or a multilayer metal net (hereinafter referred to as a filter element) with fine gaps placed in the piping, and performs trowel filtration with the filter element using the flow pressure of the fluid. Dust is being removed.
上述した従来の塵埃除去装置における塵埃の濾過能力は
フィルタエレメントの微細な間隙の径に支配される。半
導体装置製造しこ必要とされる微小な塵埃のｊｋ過には
より微細な間隙径をもつフィルタエレメントが必要とさ
れるため、流体の粘度が高い場合や必要とされる濾過能
力が供給されているフィルタエレメントの径より小さい
場合にはＱｉ１ε体の流れが妨げられたり、必要とされ
る濾過能力を得ることができなくなるという欠截がある
。The dust filtration ability of the above-mentioned conventional dust removal device is controlled by the diameter of the fine gaps in the filter element. Filter elements with finer pore diameters are required to filter out the minute dust particles required in semiconductor device manufacturing. If the diameter is smaller than that of the existing filter element, the flow of the Qi1ε body may be obstructed or the required filtration ability may not be obtained.
本発明の目的は前記問題点を解消した塵埃除去装置を提
供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a dust removal device that solves the above-mentioned problems.
上述した従来の塵埃除去装置に対し、本発明は塵埃除去
装置内に流体の温度調節器を組み込み。In contrast to the conventional dust removal device described above, the present invention incorporates a fluid temperature regulator in the dust removal device.
流体の粘性の制御及び塵埃の大きさの制御を行うという
独創的内容を有する。It has an original content of controlling the viscosity of fluid and the size of dust.
本発明はフィルタエレメントを通して流体中に含まれる
）Ｉ！埃を除去する装置＋″′ｔにおいて、１フ；６体
１’ｆ、ａ 、’＜を測定する１測定部と、流体を加熱
或いは冷却する温度調節部と、前記口（１定部からの出
力に基づいて温度調節部の温度制御を行う制御部とを有
することを特徴とする塵埃除去装置である。The present invention is contained in the fluid through the filter element) I! The device for removing dust includes a measuring section for measuring 1f, 1'f, a,'<, a temperature adjusting section for heating or cooling the fluid, and The dust removal device is characterized in that it has a control section that controls the temperature of the temperature adjustment section based on the output of the dust removal device.
以下、本発明の実施例を図により説明する。 Embodiments of the present invention will be described below with reference to the drawings.
（実施例１）
第１図において、塵埃除去装置本体Ｍは流体の流入口重
と流出口Ｍ２とを有し、流入０町と流出口りとの間に濾
過用フィルタエレメント３を設置しである。さらに本体
Ｍの流入口Ｍ１と流出口Ｍ２とエレメント３の設置空間
阿、にそれぞれ流体温度を測定する温度計１ａ、ｌｂ、
ｌｃを設置するとともに、その各側壁に、流体を加熱或
いは冷却する温度調節器２ａ 、 ２ｂ 、 ２ｃを設
置し、さらに温度計１ａ、ｌｂ、ｌｃの出力に基づいて
温度調節器２ａ 、 ２ｂ 、 ２ｅの温度制御を行う
制御部５を備えている。(Example 1) In FIG. 1, the dust removal device main body M has a fluid inlet port M2 and an outlet port M2, and a filter element 3 for filtration is installed between the inlet port and the outlet port. be. Furthermore, thermometers 1a and lb for measuring the fluid temperature are installed at the inlet M1 and outlet M2 of the main body M and the installation space A of the element 3, respectively.
lc is installed, and temperature regulators 2a, 2b, 2c for heating or cooling the fluid are installed on each side wall thereof, and further temperature regulators 2a, 2b, 2e are installed based on the outputs of the thermometers 1a, lb, lc. It is equipped with a control section 5 that performs temperature control.
実施例において、塵埃を含む流体として四塩化炭素４が
塵埃除去装置内を流れている６四塩化炭素４は室温（〜
２０℃）で粘度０．９７ｃｐ程度であるが。In the example, carbon tetrachloride 4 is flowing through the dust removal device as a fluid containing dust. 6 Carbon tetrachloride 4 is at room temperature (~
The viscosity is about 0.97 cp at 20°C).
８０℃に加熱することにより０．４７ｃｐ程まで低下で
きる。It can be reduced to about 0.47 cp by heating to 80°C.
よって、温度調節器２ａ 、 ２ｂ 、 ２ｃにより加
熱又は冷却を行い、温度計１ａ、 ｌｂ、 ｌｃの出力
に基づいて制御部５で温度調節器２ａ、２ｂ、２ｃをコ
ントロールして定温（この場合は８０℃）に保つよう制
御する。Therefore, the temperature regulators 2a, 2b, 2c perform heating or cooling, and the control unit 5 controls the temperature regulators 2a, 2b, 2c based on the outputs of the thermometers 1a, lb, lc to maintain a constant temperature (in this case, control to maintain the temperature at 80°C).
以上より濾過能力を上げるためにフィルタエレメント３
の間隙径をより微細なものを用いても。In order to increase the filtration capacity from the above, filter element 3
Even if a finer gap diameter is used.
流体粘性或いは塵埃の大きさの制御を行うことにより所
定の流量を得ることが可能となる。A predetermined flow rate can be obtained by controlling the fluid viscosity or the size of dust.
（実施例２） 次に本発明の第２の実施例について説明する。(Example 2) Next, a second embodiment of the present invention will be described.
本実施例では実施例１で用いた流体、四塩化炭素４に代
えて界面活性剤を用いる。In this example, a surfactant is used in place of the fluid carbon tetrachloride 4 used in Example 1.
界面活性剤には塵埃表面の親水性、疎水性に応じて塵埃
を数ケの分子で取りかこむ作用があり。Surfactants have the effect of surrounding dust with several molecules depending on the hydrophilicity or hydrophobicity of the dust surface.
温度が低温である程会合する分子数は多くなり大きな粒
子を形成する。The lower the temperature, the greater the number of molecules that associate together, forming larger particles.
本実施例では本発明による塵埃除去装置の温度調節器２
ａ 、 ２ｂ 、 ２ｃにて冷却を行うことにより室温
状態での塵埃より径の大きな粒子を形成し、フィルタエ
レメント３の間隙径を極端に機側化することなく必要と
する濾過能力を得るものである。In this embodiment, the temperature controller 2 of the dust removal device according to the present invention
By performing cooling in a, 2b, and 2c, particles with a diameter larger than that of dust at room temperature are formed, and the necessary filtration capacity can be obtained without making the gap diameter of the filter element 3 extremely close to the machine side. be.
以上説明したように本発明は塵埃除去装置自体に流体の
温度調節機構を組み込むことにより、塵埃の除去を、流
量を損なうことなくかつ充分に行うことができる効果を
有するものである。As explained above, the present invention has the effect that dust can be sufficiently removed without impairing the flow rate by incorporating a fluid temperature control mechanism into the dust removal device itself.
第１図は本発明の実施例を示す概念的断面図である。
ｌａ、 ｌｂ、 ｌｃ一温度計 ２ａ 、 ２ｂ
、 ２ｃｍ温度調節器３・フィルタエレメント ４・
・・四塩化炭素５・・・制御部FIG. 1 is a conceptual cross-sectional view showing an embodiment of the present invention. LA, LB, LC - Thermometer 2A, 2B
, 2cm temperature regulator 3・filter element 4・
・・Carbon tetrachloride 5・・Control unit
Claims (1)
埃を除去する装置において、流体温度を測定する測定部
と、流体を加熱或いは冷却する温度調節部と、前記測定
部からの出力に基づいて温度調節部の温度制御を行う制
御部とを有することを特徴とする塵埃除去装置。(1) A device that removes dust contained in a fluid through a filter element, which includes a measuring section that measures the fluid temperature, a temperature adjusting section that heats or cools the fluid, and a temperature adjusting section based on the output from the measuring section. A dust removal device comprising: a control section that controls the temperature of the dust remover;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62073051A JPH0817904B2 (en) | 1987-03-27 | 1987-03-27 | Dust removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62073051A JPH0817904B2 (en) | 1987-03-27 | 1987-03-27 | Dust removal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63240913A true JPS63240913A (en) | 1988-10-06 |
| JPH0817904B2 JPH0817904B2 (en) | 1996-02-28 |
Family
ID=13507181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62073051A Expired - Lifetime JPH0817904B2 (en) | 1987-03-27 | 1987-03-27 | Dust removal device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0817904B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019000317A1 (en) * | 2017-06-29 | 2019-01-03 | 黄琴 | Waste gas dust removal device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5154046A (en) * | 1974-11-06 | 1976-05-12 | Kobe Steel Ltd | Yosetsuhyuumujokyohoho |
| JPS55104604A (en) * | 1979-02-02 | 1980-08-11 | Hitachi Ltd | Mist trap |
-
1987
- 1987-03-27 JP JP62073051A patent/JPH0817904B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5154046A (en) * | 1974-11-06 | 1976-05-12 | Kobe Steel Ltd | Yosetsuhyuumujokyohoho |
| JPS55104604A (en) * | 1979-02-02 | 1980-08-11 | Hitachi Ltd | Mist trap |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019000317A1 (en) * | 2017-06-29 | 2019-01-03 | 黄琴 | Waste gas dust removal device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0817904B2 (en) | 1996-02-28 |
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