JPS61181939A - Measuring system for fine particle in liquid - Google Patents
Measuring system for fine particle in liquidInfo
- Publication number
- JPS61181939A JPS61181939A JP2259685A JP2259685A JPS61181939A JP S61181939 A JPS61181939 A JP S61181939A JP 2259685 A JP2259685 A JP 2259685A JP 2259685 A JP2259685 A JP 2259685A JP S61181939 A JPS61181939 A JP S61181939A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- deaerator
- bubbles
- temperature
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 61
- 239000010419 fine particle Substances 0.000 title abstract description 6
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 239000013618 particulate matter Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000007872 degassing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005057 refrigeration Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000009849 vacuum degassing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は液体中の微粒子を計測する際に、液体中の気泡
による微粒子計測への影響を減少せしめた液中微粒子計
測システムに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an in-liquid particulate measurement system that reduces the influence of air bubbles in the liquid on the particulate measurement when measuring particulates in the liquid.
［従来の技術］
従来の液中微粒子計測システムは、第３図に示すように
、配管（１）に液中微粒子計測センサー（２）のみを取
り付け、計測器（６）で微粒子の数を計測するようにし
たものである。通常このような液中Ｗ粒子計測シ又予ム
ｌ±、堵過１− ｆ前槽ｆｐムボンプなどにより液体が
供給される配管に設けられる。[Prior art] As shown in Fig. 3, a conventional liquid particle measurement system attaches only a liquid particle measurement sensor (2) to a pipe (1) and measures the number of particles with a measuring device (6). It was designed to do so. Usually, such in-liquid W particle measurement devices are installed in piping to which liquid is supplied by the pre-tank l±, filter 1-f pre-tank fp pump, etc.
［発明が解決しようとする問題点１
従来の液中微粒子計測システムは以上説明したように構
成されており、微粒子計測センサーが液体中の微粒子の
ほかにも炭酸〃スや空気などの気泡をも計測するという
問題がある。[Problem to be solved by the invention 1 The conventional liquid particle measurement system is configured as explained above, and the particle measurement sensor detects not only particles in the liquid but also bubbles such as carbon dioxide and air. There is a problem of measurement.
本発明は前記のごとき従来の液中微粒子計測システムの
問題を解決するためになされたものである。The present invention has been made in order to solve the problems of the conventional in-liquid particulate measurement systems as described above.
Ｅ問題点を解決するための手段］
本発明は、液中微粒子計測センサーに先立って気層部を
減圧にして液体中の脱気をするための装置および液温を
調節するためのサーモコントローラーを取り付けたこと
を特徴とする液中微粒子計測システムに関する。Means for Solving Problem E] The present invention provides a device for depressurizing the gas layer and degassing the liquid prior to the sensor for measuring particles in the liquid, and a thermocontroller for adjusting the temperature of the liquid. The present invention relates to an in-liquid particulate measurement system, which is characterized in that it is attached.
［作 用］
本発明においては、液中微粒子計測センサーに先立って
液体中の脱気をするための装置（脱気装置）およびサー
モコントローラーが取り付けられているため、脱気装置
内の気層部を減圧にし、液体中の脱気を行ない、かつ液
温を低下させることができ、気泡による液体中の微粒子
計測への影響が除去され、正確な微粒子測定が行なえる
。[Function] In the present invention, since a device for degassing the liquid (deaerator) and a thermocontroller are installed prior to the in-liquid particulate measurement sensor, the gas layer in the deaerator is installed. It is possible to reduce the pressure in the liquid, deaerate the liquid, and lower the temperature of the liquid. This eliminates the influence of air bubbles on particle measurement in the liquid, allowing accurate particle measurement.
［実施例］
本発明に用いる液中微粒子計測センサーとしては、従来
から使用されている通常の液中微粒子計測センサーがと
くに限定されることなく使用されうる。[Example] As the sensor for measuring particles in liquid used in the present invention, a conventional sensor for measuring particles in liquid can be used without particular limitation.
本発明に用いる脱気装置は、微粒子が計測される、たと
えば半導体製造、原子力、バイオテクノロジーなどの分
野で用いられている純水や薬品を含む液体などから気泡
を除去するためのものであり、液体が流される配管に接
続され、該装置内の気層部を７３０〜７５０ｉｖＨ＠程
度の減圧にすることができる脱気装置であればとくに制
限なく使用することができる。その具体例としては、た
とえば純水精製装置で用いる真空脱気装置などがあげら
れる。The degassing device used in the present invention is for removing air bubbles from pure water or liquid containing chemicals used in fields such as semiconductor manufacturing, nuclear power, and biotechnology, where fine particles are measured. Any degassing device can be used without particular restrictions as long as it is connected to a pipe through which liquid flows and can reduce the pressure of the gas layer within the device to about 730 to 750 ivH@. A specific example thereof is a vacuum degassing device used in a pure water purification device.
本発明に用いるサーモコントローラーは、液中微粒子計
測のために配管に流される前記液体を配管を介して、電
子冷凍エレメントや１０℃前後の冷水で冷やし、通常液
体ダストカウンターで測定する温度の１５〜２５℃より
１０〜１５℃冷やした状態である５〜１０℃まで液温を
下げるための装置であり、配管に流される液体を所望の
温度にすることができる限り、とくに限定なく使用しう
る。The thermo-controller used in the present invention cools the liquid flowing through the piping for measuring particulates in the liquid with an electronic refrigeration element or cold water of around 10°C, and cools the liquid through the piping with an electronic refrigeration element or cold water of about 10°C, which is a temperature of 15°C to 10°C, which is normally measured with a liquid dust counter. This is a device for lowering the liquid temperature to 5 to 10°C, which is 10 to 15°C colder than 25°C, and it can be used without any particular limitations as long as it can bring the liquid flowing into the pipe to the desired temperature.
本発明においで、液中微粒子計測センサーに先立って脱
気装置お上りサーモコントローラーが取り付けられてい
ればよく、脱気装置お上びサーモコントローラーの取り
付は順序にはとくに限定はない。In the present invention, it is sufficient that the deaerator upstream thermo-controller is installed prior to the in-liquid particle measurement sensor, and there is no particular limitation on the order in which the deaerator and thermo-controller are installed.
本発明のシステムを第１図および第２図に基づ慇説明す
る。The system of the present invention will be briefly explained based on FIGS. 1 and 2.
Ｗ＆１図において、（３）はサーモコントローラーであ
り、（４）はその制御部、（５）は脱気装置である。In Figure W&1, (3) is a thermocontroller, (4) is its control unit, and (5) is a deaerator.
また第２図において、（７）はフィルター、（８）はポ
ンプ、（９）は水槽である。In FIG. 2, (7) is a filter, (8) is a pump, and (9) is a water tank.
水槽（９）中の液体がポンプ（８）により循環せしめら
れる。このシステム中の液中微粒子計測センサー（２）
に先立って設けられた脱気装置（５）の気層部を減圧に
し、液体中の気泡が除去される。さらにサーモコントロ
ーラー（３）に上り液温が、通常の液体ダストカウンタ
ーの使用温度より１０〜１５℃下げられる。そののち液
中微粒子計測センサー（２）により液体中の微粒子が計
測される。The liquid in the water tank (9) is circulated by a pump (8). Liquid particulate measurement sensor (2) in this system
The gas layer section of the deaerator (5) provided prior to this is reduced in pressure, and air bubbles in the liquid are removed. Furthermore, the temperature of the liquid going up to the thermo controller (3) is lowered by 10 to 15 degrees Celsius than the operating temperature of a normal liquid dust counter. Thereafter, the particulate matter in the liquid is measured by the particulate matter measurement sensor (2) in the liquid.
つぎに本発明のシステムを実施例に基づき説明する。Next, the system of the present invention will be explained based on an example.
実施例１
液体中に気泡を発生させにくくするために、被測定液を
サーモコントローラー（電子冷凍ニレメン） ）（３）
により使用温度より１０〜１５℃冷却した温度である５
〜１０℃にした。そののち気泡を除去するために、脱気
装置（真空脱気装置）（５）を用い、減圧ポンプで装置
内の気層部を３０Ｔｏｒｒ程度減圧にした０以上の処理
を行なった液体を液体中微粒子計測センサー（２）で測
定することにより、液体中の気泡による影響のない正確
な液中微粒子の計測を行なうことができた。Example 1 In order to make it difficult to generate bubbles in the liquid, the liquid to be measured is controlled by a thermocontroller (electronic refrigeration) (3)
5, which is a temperature 10 to 15 degrees cooler than the operating temperature.
-10°C. After that, in order to remove air bubbles, a deaerator (vacuum deaerator) (5) is used to reduce the pressure of the gas layer inside the device to about 30 Torr using a vacuum pump. By measuring with the particulate measurement sensor (2), it was possible to accurately measure particulates in the liquid without being affected by air bubbles in the liquid.
［発明の効果］
以上のように従来のシステムで用いている液中微粒子計
測センサーに先覚うてサーモコントローラー（３）、そ
の制御部（４）、脱気装置（５）を取り付けた本発明の
システムを用いて、液体中の気泡を除去し、液温を低下
させることにより、液体中の気泡による微粒子計測時の
カウント数への影響を除外、正確な微粒子計測が行なえ
る。[Effects of the Invention] As described above, the present invention has a thermocontroller (3), its control unit (4), and a deaerator (5) attached to the liquid particle measurement sensor used in the conventional system. By using the system to remove air bubbles in the liquid and lower the liquid temperature, it is possible to eliminate the influence of air bubbles in the liquid on the count number during particle measurement, and to perform accurate particle measurements.
第１図は本発明のシステムに関する説明図、第２図は本
発明のシステムを用いた装置に関する説明図、第３図は
従来の液中微粒子計測システムに関する説明図である。
図において（２）は液中微粒子計測センサー、（３）は
サーモコントローラー、（５）は脱気装置である。
なお各図中同一符号は同一または相当部分を示す。FIG. 1 is an explanatory diagram of the system of the present invention, FIG. 2 is an explanatory diagram of an apparatus using the system of the present invention, and FIG. 3 is an explanatory diagram of a conventional in-liquid particle measuring system. In the figure, (2) is a sensor for measuring particles in liquid, (3) is a thermocontroller, and (5) is a deaerator. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
にして液体中の脱気をするための装置および液温を調節
するためのサーモコントローラーを取り付けたことを特
徴とする液中微粒子計測システム。(1) Measurement of particulates in liquid, characterized in that a device for depressurizing the gas layer to degas the liquid and a thermo controller for adjusting the temperature of the liquid are installed prior to the particulate matter measurement sensor in liquid. system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259685A JPS61181939A (en) | 1985-02-06 | 1985-02-06 | Measuring system for fine particle in liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259685A JPS61181939A (en) | 1985-02-06 | 1985-02-06 | Measuring system for fine particle in liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61181939A true JPS61181939A (en) | 1986-08-14 |
Family
ID=12087217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2259685A Pending JPS61181939A (en) | 1985-02-06 | 1985-02-06 | Measuring system for fine particle in liquid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61181939A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162130A (en) * | 1987-12-19 | 1989-06-26 | Fujitsu Ltd | Particle detector contained in fluid |
| EP0634641A1 (en) * | 1993-07-15 | 1995-01-18 | Degremont | Arrangement for continuous measurement of the concentration of suspended matter in a centrifugate |
| EP0924506A1 (en) * | 1997-12-17 | 1999-06-23 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and system for measuring particles in a liquid sample |
| US6310356B1 (en) | 1998-02-18 | 2001-10-30 | Horiba, Ltd. | Fluid fine particle measuring system for processing semiconductors |
-
1985
- 1985-02-06 JP JP2259685A patent/JPS61181939A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162130A (en) * | 1987-12-19 | 1989-06-26 | Fujitsu Ltd | Particle detector contained in fluid |
| EP0634641A1 (en) * | 1993-07-15 | 1995-01-18 | Degremont | Arrangement for continuous measurement of the concentration of suspended matter in a centrifugate |
| FR2707758A1 (en) * | 1993-07-15 | 1995-01-20 | Degremont | Device for continuously measuring the concentration of suspended solids in a centrate. |
| EP0924506A1 (en) * | 1997-12-17 | 1999-06-23 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and system for measuring particles in a liquid sample |
| US6172376B1 (en) | 1997-12-17 | 2001-01-09 | American Air Liquide Inc. | Method and system for measuring particles in a liquid sample |
| US6310356B1 (en) | 1998-02-18 | 2001-10-30 | Horiba, Ltd. | Fluid fine particle measuring system for processing semiconductors |
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