KR101791155B1 - Apparatus and Method for Analysis of Ortho- and Para-Hydrogen - Google Patents

Abstract

An ortho and para hydrogen analyzer and method for measuring at least one of a difference in gas flow rate or a difference in thermal conductivity between a hydrogen gas to be analyzed and a reference hydrogen gas and analyzing the ratio of ortho and para hydrogen of the gas to be analyzed from the measured value . Accordingly, since a thermal conductivity analyzer, a gas flow meter, and a catalytic reactor are used under a mild temperature condition such as room temperature, the equipment itself does not become a cryogenic temperature condition, and orthos and para hydrogen ratios can be easily made in real time under mild temperature conditions Can be measured. In addition, the device is simple and economical and portable.

Description

[0001] The present invention relates to an ortho and para hydrogen analyzer,

TECHNICAL FIELD The present invention relates to an ortho and parahydrogen analysis apparatus and method capable of measuring the ratio of ortho and para hydrogen among hydrogen gas in a portable manner in real time.

Hydrogen has a unique characteristic that the ratio of ortho hydrogen to para hydrogen is 3: 1 at room temperature (300K), and hydrogen is produced in ortho ) It is necessary to change the ratio of hydrogen to para hydrogen.

Therefore, it is necessary to monitor the ratio of ortho and para hydrogen to monitor in real time.

As an orthos and para hydrogen analysis technique, an analytical technique using a gas chromatography / thermal conductivity detector has been disclosed (Patent Document 1).

However, according to the results of our studies, this method requires a column with a thermal conductivity detector and requires a cooling device to maintain the column temperature, i.e. the analytical instrument itself, at -195 ° C and a carrier gas (helium) Etc., are complicated and uneconomical, are not suitable for real-time measurement, and are difficult to carry on the spot.

Japanese Patent Application Laid-Open No. 1988-103960

Exemplary embodiments of the present invention provide an ortho and para hydrogen analyzer and method that can be measured in real time under mild temperature conditions and are simple and portable.

In an exemplary embodiment of the present invention, in one aspect, an apparatus for analyzing the ratio of ortho and para hydrogen, comprising: measuring at least one of a gas flow rate difference or a thermal conductivity difference between a hydrogen gas to be analyzed and a reference hydrogen gas, And an ortho and para hydrogen analyzer for analyzing the ratio of ortho and para hydrogen of the gas to be analyzed from the measured values.

In one exemplary embodiment, the apparatus comprises: a subject hydrogen gas supply; A thermal conductivity meter connected to the target hydrogen gas supply unit for measuring the thermal conductivity of the hydrogen gas to be analyzed and the reference hydrogen gas, respectively; A catalytic reactor connected to the thermal conductivity meter and converting ortho-hydrogen to para-hydrogen; And an analyzer connected to the thermal conductivity meter and analyzing the ratio of ortho and para hydrogen from the difference in thermal conductivity between the gas to be analyzed and the reference hydrogen, The hydrogen gas to be analyzed is measured and the hydrogen gas to be analyzed which has passed through the thermal conductivity measuring instrument passes through the catalytic reactor to become the reference hydrogen gas, and the thermal conductivity measuring instrument measures the thermal conductivity of the reference hydrogen gas passing through the thermal conductivity meter The analyzer can analyze the ratio of ortho and para hydrogen from the thermal conductivity of the hydrogen gas to be analyzed and the thermal conductivity difference of the reference hydrogen gas measured from the thermal conductivity meter have.

 In one exemplary embodiment, the apparatus comprises: a subject hydrogen gas supply; A reference hydrogen gas supply unit; A thermal conductivity meter connected to the target hydrogen gas supply unit and the reference hydrogen gas supply unit and measuring the thermal conductivity of the hydrogen gas to be analyzed and the reference hydrogen gas, respectively; And an analyzer for analyzing the ratio of ortho and para hydrogen from the difference in thermal conductivity between the gas to be analyzed and the reference hydrogen gas.

In an exemplary embodiment, the apparatus comprises: a first gas flow meter for measuring a flow rate of hydrogen gas to be analyzed; A catalytic reactor connected to the hydrogen gas to be analyzed, into which hydrogen gas to be analyzed flows and converts ortho hydrogen to para hydrogen; A second gas flow meter connected to the catalytic reactor and measuring a flow rate of the reference hydrogen gas passed through the catalytic reactor; And an analyzer connected to the first and second gas flow meters for analyzing the ortho and para hydrogen ratios in the subject hydrogen gas from the gas flow rate difference between the subject hydrogen gas and the reference hydrogen gas, The hydrogen gas to be analyzed may be the reference hydrogen gas passing through the catalytic reactor.

In an exemplary embodiment, the analysis target hydrogen gas supply unit includes a pump for providing hydrogen; A filter for filtering impurities from the provided hydrogen; And a gas pressure regulator for regulating the gas pressure of the provided hydrogen.

In an exemplary embodiment, the filter may use, for example, a molecular sieve, silica gel, zeolite, alumina or the like as a filter material for removing moisture and / or impurities of the hydrogen gas to be analyzed.

In an exemplary embodiment, the Thermal Conductivity Detector (TCD) may comprise a total of four resistors, each of which may comprise a Wheatstone bridge circuit coupled such that the two resistors are opposed. In addition, the thermal conductivity meter may further include a DC power supply unit 8 and a temperature controller 11.

In an exemplary embodiment, the analyzer comprises a computer for calculating thermal conductivity and / or gas flow rate differences at ortho and para hydrogen ratios, a signal amplifier for amplifying signals relating to the difference in thermal conductivity and / or gas flow rate difference; And a computer and a display that perform the analysis and display the results. The computer and the display 10 can detect the potential difference between the opposing points of the above-mentioned circuit, receive the signal, obtain the thermal conductivity, and display the thermal conductivity.

In an exemplary embodiment, the catalytic reactor comprises a catalytic material selected from the group consisting of Fe, Ru, Cr, Molybdenum, W, Gd, Neodium, Nd), Eu (Eu), Hoi (Ho), and their oxides can be used. Further, it may further include zeolite, molecular sieve, and the like.

In an exemplary embodiment, the catalytic reactor catalyst may be in the form of one or more of powder, fiber, bead, honeycomb.

In an exemplary embodiment, the catalytic reactor temperature may range from 25 to 300 < 0 > C.

In an exemplary embodiment, the apparatus may comprise a gas flow meter and regulator (MFC) for measuring and constantly maintaining the flow rate of the analyzed hydrogen gas and / or the reference hydrogen gas.

In an exemplary embodiment, the reference gas may be a gas at ambient temperature.

In an exemplary embodiment, the apparatus may further include a three-way valve.

In an exemplary embodiment of the present invention, in another aspect, there is provided a method of analyzing the ratio of ortho and para hydrogen, comprising measuring at least one of a gas flow rate difference or a thermal conductivity difference between a hydrogen gas to be analyzed and a reference hydrogen gas , And an ortho and para hydrogen analysis method for analyzing the ratio of ortho and para hydrogen in the gas to be analyzed from the measured values.

In one exemplary embodiment, the method includes: measuring a thermal conductivity by introducing hydrogen gas to be analyzed into a thermal conductivity meter; Introducing the hydrogen gas to be analyzed which has passed through the thermal conductivity measuring instrument into the catalytic reactor so that the hydrogen gas to be analyzed becomes the reference hydrogen gas; Introducing the reference hydrogen gas into the thermal conductivity meter and measuring the thermal conductivity of the reference hydrogen gas; And analyzing the ratio of ortho and para hydrogen of the analyzed hydrogen gas based on the measured thermal conductivity of the analyzed hydrogen gas and the difference of the thermal conductivity of the reference hydrogen gas.

In one exemplary embodiment, the method includes: measuring a thermal conductivity by introducing hydrogen gas to be analyzed into a thermal conductivity meter; Introducing the reference hydrogen gas into the thermal conductivity meter and measuring the thermal conductivity; And analyzing the ratio of ortho and para hydrogen of the analyzed hydrogen gas based on the measured thermal conductivity of the analyzed hydrogen gas and the difference of the thermal conductivity of the reference hydrogen gas.

In an exemplary embodiment, the method further comprises: introducing the hydrogen gas to be analyzed into a catalytic reactor; And the hydrogen gas to be analyzed that has passed through the catalytic reactor becomes a reference hydrogen gas and measures the gas flow rate of the gas to be analyzed and the gas flow rate of the reference hydrogen gas before passing through the catalytic reactor, And analyzing the ratio of saw and para hydrogen.

According to exemplary embodiments of the present invention, since a thermal conductivity analyzer, a gas flow meter, and a catalytic reactor are used at a mild temperature condition such as room temperature, measurement conditions such as a cryogenic temperature condition are unnecessary, and ortho and para The hydrogen ratio can be easily measured in real time. In addition, the device is simple and economical and portable.

1 is a schematic diagram showing the configuration of a portable orthoses and para-hydrogen analyzing apparatus according to an exemplary embodiment of the present invention.
2 is a schematic view showing the configuration of a portable orthoses and para-hydrogen analyzer according to another exemplary embodiment of the present invention.
3 is a schematic diagram showing the configuration of a portable orthoses and para-hydrogen analyzer according to another exemplary embodiment of the present invention.
FIG. 4A shows measured values of thermal conductivity of a gas to be analyzed in the embodiment of the present invention, and shows changes in thermal conductivity values with temperature. FIG. 4B is a graph showing the ratio of para hydrogen according to the thermal conductivity of the hydrogen gas to be analyzed in the embodiment of the present invention. FIG.

Hereinafter, an ortho and para hydrogen analyzer and method according to exemplary embodiments of the present invention will be described in detail with reference to the drawings.

According to exemplary embodiments of the present invention, at least one of a gas flow rate difference or a thermal conductivity difference between a hydrogen gas to be analyzed and a reference hydrogen gas is measured, and the ratio of ortho and para hydrogen of the gas to be analyzed The present invention also provides an apparatus and method for analyzing ortho and para hydrogen.

1 is a schematic diagram showing the configuration of a portable orthoses and para-hydrogen analyzing apparatus according to an exemplary embodiment of the present invention.

As shown in FIG. 1, an ortho and para hydrogen analyzer according to an exemplary embodiment of the present invention includes a hydrogen gas supply unit 1, 2, 4, 5; A thermal conductivity meter 6 connected to the hydrogen gas supply units 1, 2, 4, 5 for measuring the thermal conductivities of the hydrogen gas to be analyzed and the reference hydrogen gas, respectively; A catalytic reactor (3) connected to the thermal conductivity meter (6) for converting ortho hydrogen of the hydrogen gas to be analyzed into para-hydrogen; And analyzers (9, 10) connected to the thermal conductivity meter (6) for analyzing ortho and para hydrogen ratios from the difference in thermal conductivity between the analyte gas and the reference hydrogen. Here, the hydrogen gas to be analyzed which has passed through the thermal conductivity meter 6 passes through the catalytic reactor 3 to become the reference hydrogen gas.

Specifically, the hydrogen gas supply unit (1, 2, 4, 5) to be analyzed includes a pump 1 for supplying hydrogen, a filter 2 for filtering impurities from the supplied hydrogen, and a gas pressure A regulator 4 may be included. It may also include a pressure gauge (5).

In a non-limiting example, the filter 2 has a filter material for removing water, impurities and the like of the hydrogen gas to be analyzed and / or a reference hydrogen gas to be described later. As such a filter material, for example, molecular sieve, silica gel, zeolite, alumina and the like.

The thermal conductivity detector (TCD) measures the thermal conductivity of a sample of hydrogen gas to be analyzed and the difference in thermal conductivity of a reference hydrogen gas sample that has passed through the catalytic reactor (3).

Such a thermal conductivity meter may comprise, for example, a total of four resistors, each of which includes a Wheatstone bridge circuit connected so that two resistors are opposed to each other. In addition, the thermal conductivity meter may further include a DC power supply 8 and a temperature controller 11. The DC power supply unit 8 supplies a constant current to the detector and the temperature controller 11 serves to keep the temperature of the thermal conductivity detector 6 constant.

On the other hand, the analyzer (9, 10) of the apparatus comprises a signal amplifier (9) for amplifying a signal relating to the difference in thermal conductivity and / or gas flow rate and a signal amplifier And a computer and display 10 for computing and displaying the results.

The computer and the display 10 can detect the potential difference between the opposing resistance points of the circuit described above and receive the potential difference signal to obtain and display the thermal conductivity. The signal amplifier 9 adjusts the thermal conductivity detection value signal.

The thermal conductivity value of the thermal conductivity meter (TCD) 6 shows a low resistance at a given current value because para-hydrogen has a higher thermal conductivity value than ortho-hydrogen, and therefore, the ortho- The voltage becomes low.

The catalytic reactor (3) is a reactor packed with a catalyst such as metal oxide and / or metal. The catalyst used in the catalytic reactor may be in the form of powder, fiber, bead or honeycomb, and the catalytic reactor temperature may range, for example, from 25 to 300 ° C.

 A sample of the hydrogen gas to be analyzed which has passed through the thermal conductivity measuring device first passes through the catalytic reactor 3 and the para hydrogen is converted into ortho to become a reference gas and then pass secondly to the thermal conductivity measuring device 6, Measurement is possible.

In a non-limiting example, the catalytic reactor 3 is a catalytic material having the effect of converting parahydrogen to ortho-hydrogen, such as iron (Fe), ruthenium (Ru), chromium (Cr), molybdenum One or more complexes selected from the group consisting of tungsten (W), gadolinium (Gd), neodymium (Nd), europium (Eu), holmium (Ho) . Further, it may further include zeolite, molecular sieve, and the like.

On the other hand, in a non-limiting example, the apparatus may further comprise a gas flow measuring and regulating (MFC) 7 for measuring and constantly maintaining the flow rate of the analyzed hydrogen gas and / or the reference hydrogen gas.

The operation of the above apparatus will be described more specifically. When a hydrogen gas sample to be analyzed is introduced first by the pump 1, it is subjected to a moisture and impurity filtration process by the filter 2. Passes through the pressure regulator 4 and then passes through the thermal conductivity meter (TCD) 6.

After passing through the thermal conductivity meter (TCD) 6 firstly and passing through the catalytic reactor 3, the reaction of converting the para-hydrogen in the gas to be analyzed into ortho-hydrogen proceeds. Thus, the hydrogen gas to be analyzed which has passed through the catalytic reactor 3 becomes the reference hydrogen gas.

This reference hydrogen gas is subjected to water and impurity filtration by a filter 2 and then secondarily passed through a thermal conductivity meter (TCD) 6, passed through a gas flow meter and regulator 7, ) To be discharged to the outside.

2 is a schematic view showing the configuration of a portable orthoses and para-hydrogen analyzer according to another exemplary embodiment of the present invention. 2, description of the same components as those of FIG. 1 will be omitted.

As shown in FIG. 2, the ortho and para hydrogen analyzer according to an exemplary embodiment of the present invention includes a hydrogen gas supply unit 1, 2, 4, 5, a reference hydrogen gas supply unit 2, 7, 5), a thermal conductivity meter (6) connected to the analysis target hydrogen gas supply unit and the reference hydrogen gas supply unit and measuring the thermal conductivity of the analysis target hydrogen gas and the reference hydrogen gas, and a thermal conductivity difference between the analysis target gas and the reference hydrogen gas And an analyzer 9, 10 for analyzing the ortho and para hydrogen ratios.

The details of the hydrogen gas supply units 1, 2, 4 and 5, the thermal conductivity meter 6 and the analyzers 9 and 10 are the same as those in FIG. However, unlike FIG. 1, in the embodiment shown in FIG. 2, supply units 2, 7, and 5 for supplying reference hydrogen gas, preferably normal temperature reference hydrogen gas, are separately provided. A filter 2, a pressure gauge 5, a gas flow rate measuring and regulating device 7, and the like, which are installed in the hydrogen gas supply part to be analyzed, may also be provided in the reference hydrogen gas supplying part.

In the embodiment shown in FIG. 2, the hydrogen gas to be analyzed passes through the catalytic reactor 3 after passing through the thermal conductivity meter, and thus the analyzed hydrogen gas passing through the catalytic reactor 3 becomes the reference hydrogen gas And may be provided to the reference hydrogen gas supply unit. After the catalytic reactor 3, a filter 2, a gas flow rate measurement and regulator 7 and the like may be provided.

To explain the operation of the apparatus, the pump 1 and the pressure regulator 4 allow a sample of the hydrogen gas to be analyzed to be introduced at a constant pressure, and the filter 2 serves to remove water and other impurities. After passing through the thermal conductivity meter (TCD) 6, it is discharged to the outside through the catalytic reactor 3.

The reference hydrogen gas is supplied separately. Even in this case, moisture, impurities and the like can be removed through the filter 2. Further, in a non-limiting example, the same flow rate as the pressure of the hydrogen gas sample to be analyzed is maintained through the gas flow measurement and regulator 7 or the like. The reason for maintaining the same pressure and flow rate is to exclude such influence because the value of the thermal conductivity meter may vary if the pressure and the flow rate are different.

Then passes through the thermal conductivity meter (TCD) 6 and is discharged to the outside. The thermal conductivity meter 6 serves to measure the thermal conductivity of the sample hydrogen gas to be analyzed and the thermal conductivity difference of the reference hydrogen gas sample at the room temperature. As in FIG. 1, the thermal conductivity meter may be equipped with a DC power supply 8 and a temperature controller 11. Further, the analyzer may be provided with a signal amplifier 9, a computer, and a display 10. The DC power supply 8 supplies a constant current to the thermal conductivity meter, and the temperature controller 11 serves to keep the temperature of the thermal conductivity meter 6 constant. The signal amplifier 9 adjusts the thermal conductivity detection value signal, and the computer and the display 10 monitor the analysis results based on the thermal conductivity detection value.

3 is a schematic diagram showing the configuration of a portable orthoses and para-hydrogen analyzer according to another exemplary embodiment of the present invention.

3, the ortho and para hydrogen analyzer according to an exemplary embodiment of the present invention includes a hydrogen gas supply unit 10, 20, 70, a hydrogen gas supply unit 10, 20, 70, a catalytic reactor 30 into which hydrogen gas to be analyzed flows and converts ortho-hydrogen to para-hydrogen in the gas to be analyzed, the catalytic reactor 30, and the hydrogen gas supply units 10, 20, 70 ), Connected to the gas flow rate measuring and regulating devices (70, 71), and connected to the gas flow rate measuring and regulating devices (70, 71) And an analyzer (not shown) for analyzing the ratio of ortho and hydrogen in the hydrogen. A part of the hydrogen gas to be analyzed may pass through the catalytic reactor 30 to become a reference hydrogen gas.

The hydrogen gas supply units 10, 20 and 70 to be analyzed may include a pump 10, a filter 20 for filtering impurities from the supplied hydrogen as in FIGS. 1 and 2, And a first gas flow rate measuring and regulating device (70). The pump 10 and the first gas flow rate measuring and regulating device 70 allow the hydrogen gas sample to flow at a constant pressure while measuring the gas flow rate and the filter 20 serves to remove water and other impurities.

Meanwhile, as shown in FIG. 3, the supplied hydrogen gas to be analyzed passes through the catalytic reactor 30 through a three-way valve 40.

1 and 2, the catalytic reactor 30 is a reactor filled with a catalyst such as a metal oxide and serves to convert para hydrogen of a sample gas to be analyzed into ortho-hydrogen to be a reference hydrogen gas .

And allows the hydrogen gas to be analyzed to pass through or bypass the catalytic reactor 30 by using the three-way valve 40. The valve is closed at one side of the three-way valve 40 so as not to flow to the catalytic reactor 30 side so that the flow rate of the hydrogen gas sample to be analyzed whose parahydrogen is not converted to ortho-hydrogen is measured by the gas flow measuring and regulating device 70 ) And (71), respectively. There is no gas flow difference between the first gas flow measurement and regulator 70 and the second gas flow measurement and regulator 71 since the para hydrogen is not converted to ortho hydrogen.

On the other hand, among the three-way valves, when the hydrogen gas to be analyzed passes through the catalytic reactor 30 by opening the side of the catalytic reactor 30 and the other side is closed, the para hydrogen in the analyzed hydrogen gas is converted into ortho- Gas. The second gas flow measurement and regulator 71 thus measures the flow rate of the reference hydrogen gas.

When the ratio of ortho and para hydrogen in the gas is changed, the thermal conductivity of the gas is also different, which causes a difference in the gas minute flow rate. In addition, the ratio of ortho-hydrogen to para-hydrogen can be confirmed through the difference in gas flow rate. Thus, in the exemplary embodiments of the present invention, the gas flow rate difference (i.e., the flow rate of the hydrogen gas to be analyzed measured by the first gas flow rate measurement and regulator 70 and the flow rate of the second gas flow rate measured by the second gas flow rate measurement and regulator 71 The difference of flow rate of reference hydrogen gas] can be used to measure the ratio of ortho and para hydrogen in the hydrogen gas to be analyzed.

Hereinafter, specific embodiments according to embodiments of the present invention will be described in more detail. It should be understood, however, that the invention is not limited to the embodiments described below, but that various embodiments of the invention may be practiced within the scope of the appended claims, It will be understood that the invention is intended to facilitate the practice of the invention to those skilled in the art.

[Example]

In this embodiment, the apparatus of Fig. 1 is used.

FIG. 4A shows measured values of thermal conductivity of a gas to be analyzed in the embodiment of the present invention, and shows changes in thermal conductivity values with temperature.

FIG. 4B is a graph showing the ratio of para hydrogen according to the thermal conductivity of the hydrogen gas to be analyzed from the apparatus using FIG. 1 in the embodiment of the present invention. FIG.

As the temperature of the sample hydrogen gas is lowered, the voltage of the thermal conductivity detector increases when passing through the iron oxide catalyst layer of the catalytic reactor. Therefore, the concentration of para-hydrogen was calculated using the equilibrium value of the given para-hydrogen at that temperature.

For reference, as described above, para-hydrogen exhibits a lower resistance at a given current value because it has a higher thermal conductivity value than ortho-hydrogen, and therefore the voltage must be lowered as the ortho- do. However, the + and - values of the detector used in the present embodiment are reversed, and the increase and decrease are reversed, indicating that the voltage increases in FIG.

In the case of the conventional ortho hydrogen and para hydrogen ratio analyzing apparatus, the analysis equipment itself should be lowered to the cryogenic temperature, which is the temperature of the liquefied hydrogen. However, according to the embodiments of the present invention, the analytical equipment is measured at a mild temperature condition This is possible.

1, 10: pump 2, 20: filter
3, 30: catalytic reactor 4: pressure regulator
5: Pressure gauge 6: Thermal conductivity meter
7: Gas flow measurement and regulator 8: DC power supply
9: Signal Amplifier 10: Computer and Display
11: Temperature regulator 40: Three-way valve
70, 71: Gas flow measurement and regulator

Claims (17)

An apparatus for analyzing the ratio of ortho and para hydrogen,
The gas flow rate difference between the hydrogen gas to be analyzed and the reference hydrogen gas was measured,
And analyzing the ratio of ortho and para hydrogen of the gas to be analyzed from the measured values.
delete delete delete delete The method according to claim 1,
The apparatus comprises:
A first gas flow meter for measuring a flow rate of hydrogen gas to be analyzed;
A catalytic reactor connected to the hydrogen gas to be analyzed, into which hydrogen gas to be analyzed flows and converts ortho hydrogen to para hydrogen;
A second gas flow meter connected to the catalytic reactor and measuring a flow rate of the reference hydrogen gas passed through the catalytic reactor; And
And an analyzer connected to the first and second gas flow meters for analyzing ortho and para hydrogen ratios in the hydrogen gas to be analyzed from the gas flow rate difference between the hydrogen gas to be analyzed and the reference hydrogen gas,
Wherein the hydrogen gas to be analyzed passes through a catalytic reactor to become a reference hydrogen gas.
The method according to claim 6,
The apparatus includes a hydrogen gas supply portion to be analyzed,
Wherein the analysis target hydrogen gas supply unit comprises a pump for providing hydrogen; A filter for filtering impurities from the provided hydrogen; And a gas pressure regulator for regulating the gas pressure of the supplied hydrogen.
8. The method of claim 7,
Wherein the filter is a filter material for removing at least one of moisture and impurities of the hydrogen gas to be analyzed and comprises at least one selected from the group consisting of a molecular sieve, silica gel, zeolite and alumina Ortho and para hydrogen analyzers.
The method according to claim 6,
The catalytic reactor may be a catalytic reactor comprising at least one selected from the group consisting of Fe, Ru, Cr, Mo, W, Gd, Eu, Ho, and oxides thereof. The ortho and para hydrogen analyzer according to claim 1,
10. The method of claim 9,
Wherein the catalytic reactor catalyst is in the form of at least one of powder, fiber, bead, and honeycomb.
delete The method according to claim 6,
Said analyzer comprising: a computer for calculating the gas flow rate difference with an ortho and para hydrogen ratio; A signal amplifier for amplifying a signal relating to the gas flow rate difference; And a display showing the result of the analysis.
The method according to claim 6,
Wherein the apparatus further comprises a gas flow meter and controller (MFC) for measuring and maintaining a flow rate of at least one of a hydrogen gas to be analyzed and a reference hydrogen gas.
As a method for analyzing the ratio of ortho and para hydrogen,
Wherein the gas flow rate difference between the hydrogen gas to be analyzed and the reference hydrogen gas is measured and the ratio of ortho and para hydrogen of the gas to be analyzed is analyzed from the measured value.
delete delete 15. The method of claim 14,
Flowing hydrogen gas to be analyzed into a catalytic reactor; And
The hydrogen gas to be analyzed which has passed through the catalytic reactor is referred to as reference hydrogen gas. The gas flow rate of the gas to be analyzed and the gas flow rate of the reference hydrogen gas before passing through the catalytic reactor are measured. From these differences, And analyzing the ratio of para-hydrogen.

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