JPS63239708A - Dielectric ceramic composition - Google Patents

Dielectric ceramic composition

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Publication number
JPS63239708A
JPS63239708A JP62074629A JP7462987A JPS63239708A JP S63239708 A JPS63239708 A JP S63239708A JP 62074629 A JP62074629 A JP 62074629A JP 7462987 A JP7462987 A JP 7462987A JP S63239708 A JPS63239708 A JP S63239708A
Authority
JP
Japan
Prior art keywords
composition
dielectric ceramic
firing
ceramic composition
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62074629A
Other languages
Japanese (ja)
Other versions
JPH0821260B2 (en
Inventor
横谷 洋一郎
博司 加賀田
洋 丹羽
純一 加藤
三原 敏弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62074629A priority Critical patent/JPH0821260B2/en
Publication of JPS63239708A publication Critical patent/JPS63239708A/en
Publication of JPH0821260B2 publication Critical patent/JPH0821260B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、1100℃以下で焼成される高誘電率系誘電
体磁器組成物に関し、特に低酸素分圧雰囲気で焼成でき
高い抵抗率の得られる組成物に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a high dielectric constant dielectric ceramic composition that is fired at 1100°C or lower, and in particular a composition that can be fired in a low oxygen partial pressure atmosphere and has a high resistivity. relating to things.

従来の技術 近年セラミックコンデンサにおいては素子の小型化、大
容量化への要求から積層型セラミックコンデンサが急速
に普及しつつある。積層型セラミックコンデンサは内部
電極とセラミックを一体焼成する工程によって通常製造
される。従来より高誘電率系のセラミックコンデンサ材
料にはチタン酸バリウム系の材料が用いられてきたが、
焼成温度が1300℃程度と高いため、内部電極材料と
してはPt、Pdなどの高価な金属を用いる必要があっ
た。
BACKGROUND OF THE INVENTION In recent years, multilayer ceramic capacitors are rapidly becoming popular due to the demand for smaller elements and larger capacitance in ceramic capacitors. Multilayer ceramic capacitors are typically manufactured by a process of integrally firing internal electrodes and ceramics. Barium titanate-based materials have traditionally been used as high-permittivity ceramic capacitor materials, but
Since the firing temperature is as high as about 1300° C., it is necessary to use expensive metals such as Pt and Pd as internal electrode materials.

これに対し発明者らは、低酸素分圧雰囲気中1100℃
以下で焼成でき銅を主成分とする卑金属材料を内部電極
として使用できるPba <Mgxt3Nb2t2)x
 Tiy (Nis/2W1/2)O2 )Z O2+
aで表される誘電体磁器組成物を提案している。この組
成物は低温度で焼成でき低酸素分圧下で焼成した際高い
抵抗率を有する特性をもち、鋼もしくは銅を主成分とす
る内部電極をもちいた積層コンデンサ素子にもちいるこ
とができる優れた誘電体磁器組成物である。いっぽう上
に述べたセラミック積層コンデンサ素子の製造工程にお
いては、焼成時に内部電極である銅もしくは鋼を主成分
とする合金が酸化せず、誘電体セラミックが還元して低
抵抗化しない酸素分圧下での焼成が必要とされる。この
酸素分圧の制御においては、焼成温度が高いほど最適条
件を得るためのガス混合比の制御が困難になる。このた
め、誘電体セラミックにたいしては、より低い温度で焼
成できかつ高い抵抗率を有する組成物が求められていた
On the other hand, the inventors proposed that
Pba <Mgxt3Nb2t2)x, which can be fired as follows and can be used as an internal electrode using a base metal material mainly composed of copper
Tiy (Nis/2W1/2)O2 )Z O2+
A dielectric ceramic composition represented by a is proposed. This composition can be fired at low temperatures and has high resistivity when fired under low oxygen partial pressure, making it an excellent material that can be used in multilayer capacitor elements with internal electrodes mainly made of steel or copper. It is a dielectric ceramic composition. On the other hand, in the manufacturing process of the ceramic multilayer capacitor elements mentioned above, during firing, the internal electrodes, which are alloys mainly composed of copper or steel, are not oxidized and the dielectric ceramic is reduced and the resistance is not lowered under oxygen partial pressure. firing is required. In controlling this oxygen partial pressure, the higher the firing temperature is, the more difficult it becomes to control the gas mixture ratio to obtain optimal conditions. For this reason, there has been a demand for dielectric ceramic compositions that can be fired at lower temperatures and have high resistivity.

発明が解決しようとする問題点 Pb2(MgIts Nb2t3)X Tiy (Ni
1z2W1/2)O2 )Z02+aで表される組成物
を主成分とする誘電体磁器組成物において、誘電特性を
損なわず焼成温度をより低くし抵抗率の高い誘電体磁器
組成物を提供することを目的としている。
Problem to be solved by the invention Pb2(MgIts Nb2t3)X Tiy (Ni
1z2W1/2)O2)Z02+a In a dielectric ceramic composition whose main component is a composition represented by Z02+a, it is an object of the present invention to provide a dielectric ceramic composition with high resistivity by lowering the firing temperature without impairing the dielectric properties. The purpose is

問題点を解決するための手段 Pba(Mgtzs Nb5zs )x Tiy (N
i1z2W1/2)O2 )ZO2+aで表される磁器
組成物(ただしx+y+z=1)に対し、副成分として
銅酸化物をCu2O換算で0.03〜0.65重量%含
有する組成物とする。
Means for solving the problem Pba (Mgtzs Nb5zs ) x Tiy (N
i1z2W1/2)O2)ZO2+a (where x+y+z=1) is a composition containing 0.03 to 0.65% by weight of copper oxide as a subcomponent in terms of Cu2O.

作用 本発明の誘電体磁器組成物の系において、副成分を含ま
ない組成物に対し、副成分を含む組成物は低い温度で焼
結し誘電率の低下は少なく、誘電損失の増大も小さく、
かつ抵抗率は同等ないし向上する。
Function: In the dielectric ceramic composition system of the present invention, the composition containing the subcomponent is sintered at a lower temperature than the composition containing no subcomponent, the dielectric constant decreases less, the dielectric loss increases less,
And the resistivity is the same or improved.

実施例 出発原料には化学的に高純度なPbO,MgO。Example The starting materials are chemically highly pure PbO and MgO.

Nb2O5、TiO2、NiO,WOs 、CIJ20
を用いた。これらを純度補正をおこなったうえで所定量
を秤量し、ジルコニア製玉石を用い純水を溶媒としボー
ルミルで17時時間式混合した。これを吸引ろ過して水
分の大半を分離した後乾燥し、その後ライカイ機で充分
解砕した後粉体量の5wt%の水分を加え、直径60m
高さ約50mmの円柱′状に成形圧力500kg/cm
2  で成形した。これをアルミナルツボ中に入れ同質
のフタをし、680℃〜760℃で2時間仮焼した。次
に仮焼物をアルミナ乳鉢で粗砕し、さらにジルコニア製
玉石を用い純水を溶媒としてボールミルで17時間粉砕
し、これを吸引ろ過し水分の大半を分離した後乾燥した
。以上の仮焼、粉砕、乾燥を数回くりがえした後この粉
末にポリビニルアルコール6wt%水溶液を粉体量の6
wt%加え、32メツシユふるいを通して造粒し、成形
圧力1000kg/cm2で成形した。成形物は空気中
で700℃まで昇温し1時間保持しポリビルアルコール
分をバーンアウトした。これを、上述の仮焼粉を体積の
173程度敷きつめた上に200メツシュMgO粉を約
1mm敷いたマグネシャ磁器容器に移し、同質のフタを
し、管状電気炉の炉心管内に挿入し、炉心管内を ゛ロ
ータリーポンプで脱気したのち、N2H2−H20混合
ガスで置換し、焼成温度での酸素分圧(PO2)が1.
oxlo−8atmになるようN2とH2ガスの混合比
を調節しながら混合ガスを流し所定温度まで400℃/
 h rで昇温し、2時間保持後400℃/ h rで
降温した。炉心管内のPO9は挿入した安定化ジルコニ
ア酸素センサーにより測定した。第2図に焼成時のマグ
ネシャ磁器容器の構造を、第3図に炉心管内部をそれぞ
れ断面図で示す。
Nb2O5, TiO2, NiO, WOs, CIJ20
was used. After correcting the purity of these, a predetermined amount was weighed and mixed in a ball mill for 17 hours using zirconia cobblestones and pure water as a solvent. This was filtered by suction to separate most of the water, then dried, and then thoroughly crushed in a Raikai machine, after which 5 wt% of water was added to the powder amount, and the diameter was 60 m.
Molding pressure 500kg/cm to form a cylinder with a height of about 50mm
It was molded with 2. This was placed in an aluminum crucible, covered with a homogeneous lid, and calcined at 680°C to 760°C for 2 hours. Next, the calcined product was roughly crushed in an alumina mortar, and further crushed in a ball mill using zirconia cobblestones and pure water as a solvent for 17 hours, filtered under suction to remove most of the moisture, and then dried. After repeating the above calcining, crushing, and drying several times, a 6 wt% aqueous solution of polyvinyl alcohol was added to the powder to make 6 wt% of the powder.
wt% was added, granulated through a 32 mesh sieve, and molded at a molding pressure of 1000 kg/cm2. The molded product was heated to 700° C. in air and held for 1 hour to burn out the polyvinyl alcohol content. This was transferred to a Magnesia porcelain container in which about 173 of the volume of the calcined powder was spread, and about 1 mm of 200 mesh MgO powder was spread over it, covered with a homogeneous lid, and inserted into the core tube of a tubular electric furnace. After degassing with a rotary pump, it was replaced with a N2H2-H20 mixed gas, and the oxygen partial pressure (PO2) at the firing temperature was 1.
While adjusting the mixture ratio of N2 and H2 gas to obtain oxlo-8 atm, the mixed gas was flowed at 400℃/ to the specified temperature.
The temperature was raised at 400°C/hr, held for 2 hours, and then lowered at 400°C/hr. PO9 in the reactor core tube was measured by an inserted stabilized zirconia oxygen sensor. FIG. 2 shows the structure of the Magnesia porcelain container during firing, and FIG. 3 shows a cross-sectional view of the inside of the furnace tube.

第2図において1はマグネシア容器であり、その上部は
マグネシア容器蓋2で封じた。マグネシア容器1の下部
には仮焼粉3を配置し、その上にマグネシア紛24を配
置した。さらにその上に試料5を配置した。
In FIG. 2, 1 is a magnesia container, the upper part of which is sealed with a magnesia container lid 2. Calcined powder 3 was placed in the lower part of magnesia container 1, and magnesia powder 24 was placed on top of it. Further, sample 5 was placed on top of it.

第2図のように準備されたマグネシア容器1を第3図の
ように炉心管6内に配置した。7は安定化ジルコニア酸
素センサーである。
The magnesia container 1 prepared as shown in FIG. 2 was placed in the furnace core tube 6 as shown in FIG. 7 is a stabilized zirconia oxygen sensor.

焼成物は厚さIIIIII+の板状に切断し、両面にC
r−Auを蒸着し、誘電率、tanδを1ktlz、1
v/m1の電界下で測定した。また抵抗率は1kV/聰
の電圧を印加後1分値から求めた。
The fired product was cut into plates with a thickness of III+, and both sides were coated with C.
r-Au was deposited, and the dielectric constant, tan δ, was 1 ktlz, 1
Measurements were made under an electric field of v/m1. Further, the resistivity was determined from the value 1 minute after applying a voltage of 1 kV/voltage.

なお焼成温度は焼成物の密度がもっとも大きくなる温度
とした。
The firing temperature was set to the temperature at which the density of the fired product was the highest.

表1に、本発明の組成範囲および周辺組成の成分(a、
x、7+ Zは、P b (Mgxts Nbzz3)
XTiy(Nitz* Wst2>zo*均と表したと
きの値]、低酸素分圧雰囲気で焼成したときの焼成温度
、誘電率、誘電率の温度変化率(20℃に対する)、t
anδ、抵抗率、密度を示した。
Table 1 shows the composition range of the present invention and the peripheral composition components (a,
x, 7+ Z is P b (Mgxts Nbzz3)
XTiy (value expressed as Nitz*Wst2>zo*average), firing temperature when fired in a low oxygen partial pressure atmosphere, dielectric constant, temperature change rate of dielectric constant (relative to 20°C), t
anδ, resistivity, and density are shown.

第1図は表1に示した各試料を、P b@ T i O
2+@Pba (Mgx/s Nbqt3)02 +a
  Pb*・(N i 1 / 2W1/2)O2 )
02 +a  を端成分とする三角組成図中に示したも
ので、斜線の範囲が発明の範囲である。
Figure 1 shows each sample shown in Table 1 as P b@T i O
2+@Pba (Mgx/s Nbqt3)02 +a
Pb*・(N i 1/2W1/2)O2)
This is shown in a triangular composition diagram with 02 +a as the end member, and the shaded area is the scope of the invention.

発明範囲外の組成物では、aが0.985より小さいと
副成分として銅酸化物を添加しても焼成温度が1100
℃より高くなるか、1100℃より焼成温度が低くなる
まで鋼酸化物を添加すると誘電率が低下する、もしくは
抵抗率が低下する難点を有しており、1100より大き
くなると誘電率および抵抗率が低下する難点を有する。
In a composition outside the scope of the invention, if a is smaller than 0.985, the firing temperature will be 1100°C even if copper oxide is added as a subcomponent.
If steel oxide is added until the firing temperature is higher than 1100℃ or lower than 1100℃, the dielectric constant or resistivity will decrease. It has the disadvantage of decreasing.

副成分の鋼酸化物が0.03wt$より小さいと焼成温
度低下の改善効果が現れず、0.65wt$より大きく
なると誘電特性と(に誘電率と抵抗率の低下が大きくな
る。またx、y、zが限定の範囲外の組成物はキュリ一
点が室温から大きくはずれ誘電率が低(なる、もしくは
誘電率の温度変化率が太きなる難点を有している。特許
請求の範囲内の組成物では前記の問題がいずれも克服さ
れている。
If the amount of steel oxide as a subcomponent is less than 0.03 wt$, the improvement effect of lowering the firing temperature will not appear, and if it is more than 0.65 wt$, the dielectric properties and dielectric constant and resistivity will decrease significantly. Compositions in which y and z are outside the specified ranges have the disadvantage that the Curie point greatly deviates from room temperature and the dielectric constant becomes low (or the rate of change in dielectric constant with temperature increases). The composition overcomes both of the above problems.

なお焼成雰囲気として選択した低酸素分圧雰囲気PO2
; 1.OxlO−eatw  は焼成温度における銅
の平衡酸素分圧より低く金属はほとんど酸化しないと考
えられる。
Note that the low oxygen partial pressure atmosphere PO2 selected as the firing atmosphere
;1. It is considered that OxlO-eatw is lower than the equilibrium oxygen partial pressure of copper at the firing temperature, and the metal is hardly oxidized.

発明の効果 本発明によれば低酸素分圧雰囲気1100℃以下の焼成
で積層コンデンサ素子として高信頼性を得るためのチ密
で抵抗率の高い焼結体が得られ、とくに本発明の副成分
の添加により焼成温度が低下し焼成時の酸素分圧の制御
が容易になる。このため内部電極としてCuなとの卑金
属材料を用いた積層コンデンサ素子に本発明の組成物を
用いた場合、電気的特性を損なうことなく、より安定な
製造条件で素子が製造でき、量産性が向上する。
Effects of the Invention According to the present invention, a dense and highly resistive sintered body for obtaining high reliability as a multilayer capacitor element can be obtained by firing at 1100° C. or lower in a low oxygen partial pressure atmosphere. By adding , the firing temperature is lowered and the oxygen partial pressure during firing can be easily controlled. Therefore, when the composition of the present invention is used in a multilayer capacitor element using a base metal material such as Cu as the internal electrode, the element can be manufactured under more stable manufacturing conditions without impairing the electrical characteristics, and mass production is improved. improves.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る磁器組成物の成分組成を示す三角
組成図、第2図は焼成時に磁器を入れるマグネシャ容器
の断面図、第3図は焼成時の炉心管内の断面図を示す。 l・・・マグネシャ容器、2・・・マグネシャ容器蓋、
3・・・仮焼粉、4・・・マグネシア粉、5・・・試料
、6・・・炉心管、7・・・安定化ジルコニア酸素セン
サー。 代理人の氏名 弁理士 中尾敏男 ほか1名第1図 Pbn(Ni+/xW+/2)Ox+a   z   
  PbaTi02+s第  1  図 第3図
FIG. 1 is a triangular composition diagram showing the component composition of the porcelain composition according to the present invention, FIG. 2 is a cross-sectional view of a magnesia container in which the porcelain is placed during firing, and FIG. 3 is a cross-sectional view of the inside of the furnace tube during firing. l...Magnesha container, 2...Magnesha container lid,
3... Calcined powder, 4... Magnesia powder, 5... Sample, 6... Furnace tube, 7... Stabilized zirconia oxygen sensor. Name of agent: Patent attorney Toshio Nakao and one other person Figure 1 Pbn (Ni+/xW+/2)Ox+a z
PbaTi02+sFigure 1Figure 3

Claims (1)

【特許請求の範囲】  Pb_a(Mg_1_/_3Nb_2_/_3)_x
Ti_y(Ni_1_/_2W_1_/_2)_zO_
2_+_aで表される組成を有し(ただしx+y+z=
1)、aが 0.985≦a≦1.110 の範囲にあり、この範囲内の各aの値に対し、Pb_a
(Mg_1_/_3Nb_2_/_3)O_2_+_a
、Pb_aTiO_2_+_a、Pb_a(Ni_1_
/_2W_1_/_2)O_2_+_aを頂点とする三
角座標において下記組成点A、B、C、D、E、 A;x=0.950y=0.025z=0.025B;
x=0.850y=0.125z=0.025C;x=
0.100y=0.060z=0.300D;x=0.
100y=0.400z=0.500E;x=0.90
0y=0.025z=0.075を頂点とする五角形の
領域内にある組成物に対し、副成分として、銅酸化物を
Cu_2O換算の重量%で0.03〜0.65%含有す
ることを特徴とした誘電体磁器組成物。
[Claims] Pb_a(Mg_1_/_3Nb_2_/_3)_x
Ti_y(Ni_1_/_2W_1_/_2)_zO_
It has a composition represented by 2_+_a (where x+y+z=
1), a is in the range 0.985≦a≦1.110, and for each value of a within this range, Pb_a
(Mg_1_/_3Nb_2_/_3)O_2_+_a
, Pb_aTiO_2_+_a, Pb_a(Ni_1_
/_2W_1_/_2) In the triangular coordinates with O_2_+_a as the vertex, the following composition points A, B, C, D, E, A; x = 0.950y = 0.025z = 0.025B;
x=0.850y=0.125z=0.025C;x=
0.100y=0.060z=0.300D;x=0.
100y=0.400z=0.500E;x=0.90
For the composition within the pentagonal region with 0y = 0.025z = 0.075 as the apex, it is assumed that copper oxide is contained as a subcomponent in an amount of 0.03 to 0.65% by weight in terms of Cu_2O. Characteristic dielectric porcelain composition.
JP62074629A 1987-03-27 1987-03-27 Dielectric porcelain composition Expired - Lifetime JPH0821260B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62074629A JPH0821260B2 (en) 1987-03-27 1987-03-27 Dielectric porcelain composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62074629A JPH0821260B2 (en) 1987-03-27 1987-03-27 Dielectric porcelain composition

Publications (2)

Publication Number Publication Date
JPS63239708A true JPS63239708A (en) 1988-10-05
JPH0821260B2 JPH0821260B2 (en) 1996-03-04

Family

ID=13552680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62074629A Expired - Lifetime JPH0821260B2 (en) 1987-03-27 1987-03-27 Dielectric porcelain composition

Country Status (1)

Country Link
JP (1) JPH0821260B2 (en)

Also Published As

Publication number Publication date
JPH0821260B2 (en) 1996-03-04

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