JPS63239162A - Manufacture of ceramic joined body - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method for joining ceramic members and ceramic members or ceramic members and metal members.

(Prior art) Traditionally, metal members have been bonded to ceramic members in order to take advantage of the advantages of ceramic members and compensate for their drawbacks.
It is common practice to bond ceramic members together and use them as a composite.

Various methods are known for bonding ceramics to ceramics or ceramics to metals. For example, there is a method in which a plurality of insert materials are sandwiched between the two. This method involves laminating several layers of brazing filler metal or inorganic material for bonding and, if necessary, stress relief material to relieve stress at the bonding interface, and inserting the layers between the surfaces of the parts to be bonded. Then, in this state, they are heated and bonded.

(Problems to be Solved by the Invention) In this method of joining multiple insert materials in a bottle, if the joining surface is small or the shape of the joining surface is complicated, it may be difficult to set it in the heating furnace. There is a high possibility that the insert material will shift due to shock or vibration during the initial stage of heating.
For this reason, the joining position may shift and it may not be possible to join properly.
There was also the problem that the bonding area was smaller than originally planned and sufficient bonding strength could not be obtained.

The present invention was made to solve these problems, and it allows the insert material to be fixed in an accurate position without shifting even on small or complex joint surfaces, and provides sufficient joint strength and soundness. It is an object of the present invention to provide a method for manufacturing a ceramic bonded body that yields a bonded body.

[Structure of the Invention] (Means for Solving the Problems) The method for manufacturing a ceramic bonded body of the present invention includes one or more bonded ceramic members and a ceramic member or a ceramic member and a metal member to be bonded. After inserting the insert material, an organic adhesive is applied from the outside of the insert material to fix the bonded portion, and in this state, the two are bonded by heating.

The joining methods to which the method for manufacturing a ceramic bonded body of the present invention can be applied include the conventionally known metallization brazing method, direct brazing method, various brazing methods, and active metal method. Among the bonding methods between ceramics or ceramics and metals, any bonding method may be used as long as the bonding method involves interposing at least one inserter 1 to the material at the bonding interface. In addition, examples of the insert material include layers that contribute to bonding, such as brazing materials used in various brazing methods and metal foils such as titanium and zirconium used in active metal methods. It is more effective when a plurality of materials are used, and may further include a stress relieving layer of copper, nickel, Kovar, etc. in addition to the material that contributes to bonding.

Further, as the organic adhesive, any type of adhesive that decomposes during heat bonding may be used, but acrylic-based or isocyanate-1-based adhesives are particularly preferred, as they have good bonding properties and produce little decomposition residue.

To explain in more detail the method for manufacturing the ceramic bonded body of the present invention, first, a necessary insert material is inserted between the members to be bonded, and an organic adhesive is applied to the outer surface of the bonded part so that at least the laminated state does not collapse during handling. and place it in a heating oven. In the process of raising the temperature to the bonding temperature that matches the bonding method applied, the organic adhesive used is held at the decomposition temperature for an appropriate period of time, the organic adhesive is decomposed and removed before the bonding temperature, and then the temperature is raised to the bonding temperature. Heat it to complete the bond.

(Function) In the method for manufacturing a ceramic bonded body of the present invention, since the laminate consisting of the members to be joined and the insert material before heat bonding is fixed with an organic adhesive, there is no possibility of misalignment between the laminates due to handling of the laminate, etc. Furthermore, since the organic adhesive decomposes during heating, it does not adversely affect the bonded product.

(Example) Next, one embodiment of the present invention will be described.

Example First, as shown in Fig. 1, 12 mm x 12 mm x
A stress relaxation layer with a thickness of 0 is provided between the ceramic member 1 mainly composed of 20nl silicon nitride and the stainless steel metal member 2 of 12n+mx 12no+x 20nn+.
．． A 3 μm thick Ti foil 3a and a 60 μm thick Ti foil 3a are placed on both sides of the 2nun copper plate 11 in the center as a layer that contributes to bonding.
After arranging the Ag-Cu alloy foils 3b of μm in order, Aron Alpha (trade name) 5
was applied to fix the insert material and the members to be joined, and in this state, they were placed in a heating furnace, and joined by heating in a vacuum. The heating conditions are 250°C as shown in Figure 2.
Holds were carried out at temperatures of 1300° C. and 600° C. for decomposition of the organic adhesive and for raising the vacuum, and a temperature ramp program was followed in which the bonding temperature was held at 830° C. for 6 minutes.

When we visually inspected the joint of the ceramic-metal bonded body obtained in this way, we found that it had the same shape as when it was fixed with an organic adhesive before heat bonding, and no deviation was observed. As a result, a very small amount of C was found to be a solid solution in the Ag in the interfacial product layer, but the bonding strength was determined by a 4-point bending test @ (upper span 10rn+m, lower span 30ml, 1l,
350MPa at crosshead speed 0.51m/min)
showed a good value.

[Effects of the Invention] As explained above, according to the method for manufacturing a ceramic bonded body of the present invention, after inserting an insert material used for bonding between ceramic members or metal members to be bonded, the outside of the bonded portion is Since it is fixed with a more organic adhesive, the ease of removal is greatly improved, work efficiency is increased, and the stacking weight is reduced.
Misalignment of J'PIJ is also eliminated, thereby ensuring sufficient bonding and preventing a decrease in bonding strength.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a bonded portion before heat bonding for explaining the method of an embodiment of the present invention, and FIG. 2 is a graph showing a temperature increase program during heat bonding of an embodiment of the present invention. . 1... Ceramic member 2...
...Metal member 3a...Ti foil 3b...Ag-Cu alloy foil 4...Copper plate

Claims (3)

[Claims] (1) After inserting one or more insert materials between the ceramic members to be joined, or between the ceramic members and the metal members, an organic adhesive is applied from the outside of the insert material to bond the joint. A method for manufacturing a ceramic bonded body, characterized by fixing the two and heating them in this state to bond the two. (2) The method for manufacturing a ceramic bonded body according to claim 1, wherein the plurality of insert materials include a layer contributing to bonding and a stress relaxation layer. (3) The method for manufacturing a ceramic bonded body according to claim 1 or 2, wherein the organic adhesive is an acrylic or isocyanate adhesive.