JPS63236213A - Dielectric ceramic - Google Patents
Dielectric ceramicInfo
- Publication number
- JPS63236213A JPS63236213A JP62069894A JP6989487A JPS63236213A JP S63236213 A JPS63236213 A JP S63236213A JP 62069894 A JP62069894 A JP 62069894A JP 6989487 A JP6989487 A JP 6989487A JP S63236213 A JPS63236213 A JP S63236213A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- temperature coefficient
- porcelain
- load
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title description 21
- 229910052573 porcelain Inorganic materials 0.000 claims description 16
- 229910052771 Terbium Inorganic materials 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 2
- 229910052693 Europium Inorganic materials 0.000 claims 1
- 229910052779 Neodymium Inorganic materials 0.000 claims 1
- 229910052772 Samarium Inorganic materials 0.000 claims 1
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は高周波用とし好適な新規誘電体磁器に関し、特
に、共振器を構成したときの共振周波数の温度係数が負
であって温度係数の補償用として有用である誘電体磁器
に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a novel dielectric ceramic suitable for high frequencies, and in particular, when a resonator is constructed, the temperature coefficient of the resonant frequency is negative and the temperature coefficient is negative. This invention relates to dielectric ceramics useful for compensation purposes.
近年、マイクロ波、ミリ波などの高周波領域で用いられ
る誘電体磁器として、無負荷Ｑ及び比誘電率が高い誘電
体磁器が開発されている。In recent years, dielectric ceramics with high no-load Q and high dielectric constant have been developed as dielectric ceramics used in high frequency regions such as microwaves and millimeter waves.
これらの高周波用誘電体磁器の中には、無負荷Ｑ、及び
比誘電率が優れているにも拘らず、共振器を構成したと
きの共振周波数の温度係数が正に偏り過ぎるために発振
周波数安定化等の用途に使用することが困難であるもの
があり、例えば、Ｔｉ０ｚ、５ｒＯ−ＴｉＯ□系磁器導
磁器げられる。Although some of these high-frequency dielectric ceramics have excellent no-load Q and relative dielectric constant, when a resonator is constructed, the temperature coefficient of the resonant frequency is too positive, so the oscillation frequency There are some materials that are difficult to use for purposes such as stabilization, such as TiOz and 5rO-TiO□-based porcelain conductors.
このような共振周波数の温度係数が正に偏り過ぎる誘電
体磁器の改良方法として、このような誘電体磁器を温度
係数が逆に負に大きい誘電体磁器と複合化して、温度係
数を±１０ｐｐｍ／ ”Ｃの範囲内に制御して実用的な
ものとする試みが行なわれている。この複合化に用いる
共振周波数の温度係数が負に大きい誘電体磁器として、
例えば、ＭｇＴｉ０．、ＬａｚＴｉｚ０７、ＣａｚＮｂ
ｚＯｌ等が知られている。As a method for improving dielectric ceramics in which the temperature coefficient of the resonant frequency is too positive, such dielectric ceramics are combined with dielectric ceramics whose temperature coefficients are negatively large, and the temperature coefficient is adjusted to ±10 ppm/ ``Attempts are being made to make it practical by controlling it within the range of C.As a dielectric ceramic with a negative temperature coefficient of the resonant frequency used for this composite,
For example, MgTi0. , LazTiz07, CazNb
zOl etc. are known.
しかし、上記の共振周波数の温度係数が負に大きい誘電
体磁器は複合化によって温度係数を補償することはでき
るものの、無負荷Ｑが小さいため、得られる複合誘電体
の無負荷Ｑが低下するという問題があった。However, although it is possible to compensate for the temperature coefficient of dielectric ceramics with a negative temperature coefficient of the resonant frequency mentioned above by compounding, the no-load Q of the obtained composite dielectric is low because the no-load Q is small. There was a problem.
そこで、本発明の目的は、共振周波数の温度係数が負で
、かつ無負荷Ｑ、比誘電率等の特性が優れ、共振周波数
の温度係数の補償用として適する新規な誘電体磁器を提
供することにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a novel dielectric ceramic having a negative temperature coefficient of resonance frequency, excellent characteristics such as no-load Q, relative dielectric constant, etc., and suitable for compensation of the temperature coefficient of resonance frequency. It is in.
本発明は、前記従来の問題点を解決するものとして、
Ｌｎ２０３（ここで、Ｌｎは、Ｌａｓ Ｎｄｓ Ｓｍ、
Ｂｕｓ Ｇｄｓ Ｔｂ及びＤＹから選ばれる少なくと
も１種の希土類元素を表わす）とＡＩ、０．とからなる
実質的にペロブスカイト構造を有する誘電体磁器を提供
するものである。The present invention solves the above conventional problems by providing Ln203 (where Ln is Las Nds Sm,
Bus Gds represents at least one rare earth element selected from Tb and DY) and AI, 0. The present invention provides a dielectric ceramic having a substantially perovskite structure comprising:
ここで、本発明の誘電体磁器が「実質的にペロブスカイ
ト構造を有する」とは、Ｘ線回折において、ペロブスカ
イト型結晶構造の相が認められ、かつそれ以外の相が全
（またはほとんど全く認められないことを意味する。Here, the dielectric ceramic of the present invention "substantially has a perovskite structure" means that a perovskite crystal structure phase is observed in X-ray diffraction, and all (or almost no) other phases are observed. It means no.
本発明においては、希土類元素のＬｎとしては、Ｌａ、
ＮＬ ＳｍＸＥｕ、Ｇｄ、Ｔｂ及びＤｙの１種単独でも
２種以上の組合わせでもよ＜ 、ＬｎｚＯ＝とＡｌ２Ｏ
２の割合は、一般に、ＬｎｚＯ：＋ ６０〜８０重量％
、Ａｌｚ（ｈ ２０〜４０重景％の範囲が好ましく、特
に、ＬｎｚＯ３７５〜８０重量％、Ａｌ２Ｏ３２０〜２
５重量％の範囲がより好ましい。ＬｎｚＯｓが６０重量
％未満でＡｌｚ（ｈが４０重世％を超えると、磁器の比
誘電率が低下して実用に供し難くなり、またしｎｚ０３
が８０重量％を超えＡｌ２Ｏ３が２０重量％未満である
と、磁器の焼結密度したがって機械的強度が低下すると
ともに無負荷Ｑが低下するからである。In the present invention, the rare earth element Ln includes La,
NL SmXEu, Gd, Tb and Dy may be used alone or in combination of two or more, LnzO= and Al2O
The proportion of 2 is generally LnzO: +60-80% by weight
, Alz(h) is preferably in the range of 20 to 40% by weight, particularly LnzO375 to 80% by weight, Al2O320 to 2
A range of 5% by weight is more preferred. If LnzOs is less than 60% by weight and Alz (h exceeds 40% by weight, the dielectric constant of the porcelain will decrease and it will be difficult to put it into practical use.
is more than 80% by weight and Al2O3 is less than 20% by weight, the sintered density and therefore the mechanical strength of the porcelain will decrease, and the no-load Q will decrease.
希土類元素として単一種類の元素を用いる場合には、各
希土類元素ごとのＡｌｚＯ３との好ましい割合は第１表
に示すとおりであり、これらの場合においてさらに特に
好ましい割合はいずれの希土類元素の場合でも、Ｌｎ、
ｏ、 ７５〜８０重世％、八１２０３２０〜２５重量％
の範囲である。When a single type of element is used as the rare earth element, the preferable ratio of each rare earth element to AlzO3 is as shown in Table 1, and in these cases, the particularly preferable ratio is as follows for any rare earth element: ,Ln,
o, 75-80% by weight, 8120320-25% by weight
is within the range of
第１表
本発明の誘電体磁器の製法は、特に限定されず、通常の
方法により製造することができる。例えば希土類元素の
原料として希土類酸化物を用い、アルミニウムの原料と
して酸化アルミニウムを選び、それぞれを所要の割合に
秤取、混合し、約１０００〜１２００℃で仮焼した後、
加圧成形物を１５００〜１６５０℃の温度で焼成するこ
とにより製造することができる。Table 1 The method for manufacturing the dielectric ceramic of the present invention is not particularly limited, and can be manufactured by a conventional method. For example, use a rare earth oxide as the raw material for the rare earth element, select aluminum oxide as the raw material for aluminum, weigh each in the required proportions, mix them, and calcinate at about 1000 to 1200 ° C.
It can be manufactured by firing a press-molded product at a temperature of 1500 to 1650°C.
本発明の誘電体磁器は、共振器を構成したときの共振周
波数の温度係数が負の値を有し、しかも無負荷Ｑ、比誘
電率等も高周波用として十分なものである。したがって
、無負荷Ｑ、比誘電率等が良好でありながら共振周波数
の温度係数が正に偏り過ぎるため従来実用に供し難かっ
た誘電体磁器の温度係数を複合化により実用上適切な±
１０ｐｐｍ／℃の範囲内に補償するのに適している。The dielectric ceramic of the present invention has a negative temperature coefficient of the resonant frequency when forming a resonator, and has sufficient no-load Q, dielectric constant, etc. for high frequency use. Therefore, although the no-load Q, dielectric constant, etc. are good, the temperature coefficient of the resonant frequency is too positive, so it has been difficult to put it into practical use in the past.
Suitable for compensation within a range of 10 ppm/°C.
複合化の方法としては、本発明の例えば板状の誘電体磁
器と補償しようとする板状の誘電体磁器を接合する方法
、再読電体磁器を粉砕して粉体として混合し、焼成によ
り一体化し、再読電体磁器のそれぞれの小さな相からな
る磁器を形成する方法など用いることができる。すなわ
ち、発明の磁器が後者のように微細な粒子の状態で別の
磁器と複合がされた場合も本発明の一態様として含まれ
る。Examples of composite methods include, for example, joining the plate-shaped dielectric porcelain of the present invention and the plate-shaped dielectric porcelain to be compensated, and pulverizing the rereading porcelain and mixing it as a powder, and then firing it to make it into one piece. A method of forming a porcelain consisting of each small phase of rereading material porcelain can be used. That is, the case where the porcelain of the invention is composited with another porcelain in the form of fine particles as in the latter case is also included as one aspect of the present invention.
以下、本発明を次の実施例により具体的に説明するが、
これら実施例に限定されるものではない。Hereinafter, the present invention will be specifically explained using the following examples.
The present invention is not limited to these examples.
実施例Ｉ
ＬａｚＯ３とＡｌｚＯｉとからなり、その組成が第２表
に示すとおりである５種の誘電体磁器（試料番号１〜５
）を次のようにして製造した。Example I Five types of dielectric ceramics (sample numbers 1 to 5) consisting of LazO3 and AlzOi and whose compositions are as shown in Table 2
) was produced as follows.
原料として純度９９．９％以上の酸化ランタン（Ｌａｚ
Ｏｚ）と酸化アルミニウム（Ａｌ２Ｏ２）を所定の割合
に秤取し、ジルコニアボールを用いてポット内で純水中
、１６時間ボールミルで粉砕、混合を行った。この混合
物をポットより取り出し、１５０℃で５時間乾燥した後
、１０００〜１２００℃で仮焼した。仮焼後粉砕し、整
粒したのち、直径１０龍、高さ５鶴の成形体とし、１５
００〜１６５０℃にて１〜３時間焼成した。得られた磁
器の比誘電率（εｒ）および１０ＧＨｚにおける無負荷
Ｑ （Ｑｕ）を誘電体共振器法により測定した。さらに
温度を＋６０℃から０℃まで変化させて共振器の共振周
波数を測定し、温度係数
（τ、）を算出した。得られた結果を第２表に示す。Lanthanum oxide (Laz) with a purity of 99.9% or more is used as a raw material.
Oz) and aluminum oxide (Al2O2) were weighed out at a predetermined ratio, and ground and mixed in a ball mill for 16 hours in a pot in pure water using zirconia balls. This mixture was taken out from the pot, dried at 150°C for 5 hours, and then calcined at 1000-1200°C. After calcining, it is crushed and sized to form a compact with a diameter of 10 dragons and a height of 5 cranes.
It was baked at 00 to 1650°C for 1 to 3 hours. The relative dielectric constant (εr) and no-load Q (Qu) at 10 GHz of the obtained ceramic were measured by the dielectric resonator method. Furthermore, the temperature was varied from +60° C. to 0° C., the resonant frequency of the resonator was measured, and the temperature coefficient (τ,) was calculated. The results obtained are shown in Table 2.
第 ２ 表（実施例１）
実施例２〜８
実施例２〜７においては、希土類元素酸化物としてＬａ
１０３の代りに、それぞれ、純度９９．９％以上である
Ｎｄ２Ｏ２、ＳｍｚＯｚ 、ＥｕｚＯｚ 、Ｇｄ２Ｏ２
、ＴｂｔＯｚ及びｏｙ、ｏ、を用い、また実施例８にお
いてはＬａ、Ｏ。Table 2 (Example 1) Examples 2 to 8 In Examples 2 to 7, La was used as the rare earth element oxide.
103, Nd2O2, SmzOz, EuzOz, Gd2O2, each with a purity of 99.9% or more
, TbtOz and oy,o, and in Example 8, La,O.
の代りにＮｄ２Ｏ２とＥｕｚ０３の混合物を用いた以外
は、実施例１と同様の方法で数種の誘電体磁器を製造し
た。実施例２〜８で製造した磁器の組成及び実施例と同
様にして測定した共振周波数の温度係数（τ、）、無負
荷Ｑ （Ｑｕ）及び比誘電率（εｒ）を、それぞれ第３
〜９表に示す。Several types of dielectric ceramics were manufactured in the same manner as in Example 1, except that a mixture of Nd2O2 and Euz03 was used instead. The composition of the porcelain manufactured in Examples 2 to 8 and the temperature coefficient of resonance frequency (τ, ), no-load Q (Qu), and relative dielectric constant (εr) measured in the same manner as in Examples were determined by the third
- Shown in Table 9.
また、実施例１の試料番号３、実施例２の試料番号４、
及び実施例４の試料番号４の磁器を粉砕し、得られた粉
末をＸ線回折に供したところペロブスカイト型結晶構造
の相が認められ、かつそれ以外の相が全くまたはほとん
ど全く認められなかった。In addition, sample number 3 of Example 1, sample number 4 of Example 2,
When the porcelain of Sample No. 4 of Example 4 was crushed and the resulting powder was subjected to X-ray diffraction, a phase with a perovskite crystal structure was observed, and no or almost no other phases were observed. .
■
第 ４ 表（実施例３）
第 ５ 表（実施例４）
実施例９
比誘電率３８、無負荷Ｑ １２０００ （１２ＧＨｚ）
、共振器としたときの共振周波数の温度係数＋１５０ｐ
ｐｍ／”ｃである５ｒＯ−ＴｉＯｚ系誘電体磁器（組成
： ＳｒＯ／Ｔｉ０ｚ＝２／１（重量））の前記温度係
数を、前記実施例４の試料番号５の誘電体磁器を用い複
合化により補償を試みた。■ Table 4 (Example 3) Table 5 (Example 4) Example 9 Relative dielectric constant 38, no-load Q 12000 (12GHz)
, temperature coefficient of resonance frequency when used as a resonator +150p
The temperature coefficient of the 5rO-TiOz-based dielectric porcelain (composition: SrO/TiOz=2/1 (weight)) having a I tried to make amends.
すなわち、５ｒＯ−ＴｉＯｚ系誘電体磁器は直径７．５
龍、厚さ１．０■の円板に、実施例４、試料番号５の誘
電体磁器は直径７．５鶴、厚さ２．７ｎ＋の円板に加工
後、両者の片面同士を貼り合わせ、円板型共振器を作成
した。こうして得られた複合誘電体共振器を実施例１と
同様にして測定したところ、比誘電率２３、無負荷Ｑ
８９５０、共振周波数の温度係数は＋９．２ｐｐｍ／
’Ｃ（１２Ｇｌｌｚ）であった。In other words, the diameter of 5rO-TiOz dielectric porcelain is 7.5
The dielectric porcelain of Example 4 and Sample No. 5 was processed into a disk with a diameter of 7.5cm and a thickness of 2.7n+, and then one side of the two was bonded together. , a disc-shaped resonator was created. When the thus obtained composite dielectric resonator was measured in the same manner as in Example 1, the relative dielectric constant was 23, and the unloaded Q
8950, temperature coefficient of resonance frequency is +9.2ppm/
'C (12Gllz).
実施例から明らかなように、本発明の誘電体磁器はマイ
クロ波領域において共振周波数の温度係数が負であり、
しかも比誘電率、無負荷Ｑとも十分に高く優れたもので
ある。したがって、従来、比誘電率、無負荷Ｑ等が良好
でありながら共振周波数の温度係数が正に偏り過ぎるた
めに実用に供し得なかった誘電体磁器の温度係数を複合
化により改良するのに適し、これら材料の実用性を高め
るものである。As is clear from the examples, the dielectric ceramic of the present invention has a negative temperature coefficient of resonance frequency in the microwave region,
Furthermore, both the dielectric constant and the no-load Q are sufficiently high and excellent. Therefore, it is suitable for improving the temperature coefficient of dielectric ceramics, which conventionally could not be put to practical use because the temperature coefficient of the resonant frequency was too positive even though the relative permittivity and no-load Q were good. , which increases the practicality of these materials.
Claims (1)
、Ｅｕ、Ｇｄ、Ｔｂ及びＤｙから選ばれる少なくとも１
種の希土類元素を表わす）とＡｌ＿２Ｏ＿３とからなる
実質的にペロブスカイト構造を有する誘電体磁器。Ln_2O_3 (here, Ln is La, Nd, Sm
, Eu, Gd, Tb and Dy.
A dielectric porcelain having a substantially perovskite structure consisting of Al_2O_3 and Al_2O_3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62069894A JP2516620B2 (en) | 1987-03-24 | 1987-03-24 | Dielectric porcelain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62069894A JP2516620B2 (en) | 1987-03-24 | 1987-03-24 | Dielectric porcelain |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63236213A true JPS63236213A (en) | 1988-10-03 |
| JP2516620B2 JP2516620B2 (en) | 1996-07-24 |
Family
ID=13415876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62069894A Expired - Lifetime JP2516620B2 (en) | 1987-03-24 | 1987-03-24 | Dielectric porcelain |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516620B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0676633A (en) * | 1992-06-24 | 1994-03-18 | Kyocera Corp | Dielectric ceramic composition and dielectric resonator |
| JPH08325054A (en) * | 1995-05-31 | 1996-12-10 | Kyocera Corp | Low dielectric loss body |
| WO2016052010A1 (en) * | 2014-09-29 | 2016-04-07 | 住友大阪セメント株式会社 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member |
| JP2016069268A (en) * | 2014-09-29 | 2016-05-09 | 住友大阪セメント株式会社 | Corrosion resistant member, electrostatic chuck member, and method of producing the corrosion resistant member |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62270460A (en) * | 1986-05-19 | 1987-11-24 | 日本特殊陶業株式会社 | Colored ceramic composition |
-
1987
- 1987-03-24 JP JP62069894A patent/JP2516620B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62270460A (en) * | 1986-05-19 | 1987-11-24 | 日本特殊陶業株式会社 | Colored ceramic composition |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0676633A (en) * | 1992-06-24 | 1994-03-18 | Kyocera Corp | Dielectric ceramic composition and dielectric resonator |
| JP2625074B2 (en) * | 1992-06-24 | 1997-06-25 | 京セラ株式会社 | Dielectric ceramic composition and dielectric resonator |
| JPH08325054A (en) * | 1995-05-31 | 1996-12-10 | Kyocera Corp | Low dielectric loss body |
| WO2016052010A1 (en) * | 2014-09-29 | 2016-04-07 | 住友大阪セメント株式会社 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member |
| JP2016069268A (en) * | 2014-09-29 | 2016-05-09 | 住友大阪セメント株式会社 | Corrosion resistant member, electrostatic chuck member, and method of producing the corrosion resistant member |
| KR20170066313A (en) * | 2014-09-29 | 2017-06-14 | 스미토모 오사카 세멘토 가부시키가이샤 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member |
| US20170294331A1 (en) * | 2014-09-29 | 2017-10-12 | Sumitomo Osaka Cement Co., Ltd. | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member |
| US10497599B2 (en) | 2014-09-29 | 2019-12-03 | Sumitomo Osaka Cement Co., Ltd | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516620B2 (en) | 1996-07-24 |
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