JPS63229863A - 陽極接合方法 - Google Patents
陽極接合方法Info
- Publication number
- JPS63229863A JPS63229863A JP6487887A JP6487887A JPS63229863A JP S63229863 A JPS63229863 A JP S63229863A JP 6487887 A JP6487887 A JP 6487887A JP 6487887 A JP6487887 A JP 6487887A JP S63229863 A JPS63229863 A JP S63229863A
- Authority
- JP
- Japan
- Prior art keywords
- insulating material
- anode
- bonding
- anodic bonding
- bonding method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 12
- 239000011810 insulating material Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- -1 L Bi Chemical class 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010405 anode material Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Ceramic Products (AREA)
- Joining Of Glass To Other Materials (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6487887A JPS63229863A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6487887A JPS63229863A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63229863A true JPS63229863A (ja) | 1988-09-26 |
| JPH0577305B2 JPH0577305B2 (cs) | 1993-10-26 |
Family
ID=13270818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6487887A Granted JPS63229863A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63229863A (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141442A (ja) * | 1988-11-21 | 1990-05-30 | Mitsubishi Electric Corp | シリコンウエハとガラス基板の陽極接合法 |
| JPH035346A (ja) * | 1989-06-01 | 1991-01-11 | Toshiba Corp | 陽極接合装置 |
| US5496199A (en) * | 1993-01-25 | 1996-03-05 | Nec Corporation | Electron beam radiator with cold cathode integral with focusing grid member and process of fabrication thereof |
-
1987
- 1987-03-19 JP JP6487887A patent/JPS63229863A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141442A (ja) * | 1988-11-21 | 1990-05-30 | Mitsubishi Electric Corp | シリコンウエハとガラス基板の陽極接合法 |
| JPH035346A (ja) * | 1989-06-01 | 1991-01-11 | Toshiba Corp | 陽極接合装置 |
| US5496199A (en) * | 1993-01-25 | 1996-03-05 | Nec Corporation | Electron beam radiator with cold cathode integral with focusing grid member and process of fabrication thereof |
| US5514847A (en) * | 1993-01-25 | 1996-05-07 | Nec Corporation | Electron beam radiator with cold cathode integral with focusing grid member and process of fabrication thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577305B2 (cs) | 1993-10-26 |
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