JPS6322732U - - Google Patents
Info
- Publication number
- JPS6322732U JPS6322732U JP11629986U JP11629986U JPS6322732U JP S6322732 U JPS6322732 U JP S6322732U JP 11629986 U JP11629986 U JP 11629986U JP 11629986 U JP11629986 U JP 11629986U JP S6322732 U JPS6322732 U JP S6322732U
- Authority
- JP
- Japan
- Prior art keywords
- container
- end opening
- opening
- semiconductor wafers
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000011295 pitch Substances 0.000 claims 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Weting (AREA)
Description
第１図は本考案に係る半導体製造装置の一実施
例を示す概略構成断面図、第２図は第１図装置の
容器を示す正断面図、第３図は第２図の部分断面
を含む側面図である。第４図は半導体製造装置の
従来例を示す概略構成断面図、第５図は第４図装
置のキヤリアを示す正断面図、第６図は第５図の
部分断面を含む側面図である。
１……半導体ウエーハ（ウエーハ）、７……薬
液、１５……半導体製造装置、１６……容器、１
６ａ，１６ｂ……上下端部、１９……液回収槽、
２０……給液口。
FIG. 1 is a schematic cross-sectional view showing an embodiment of a semiconductor manufacturing apparatus according to the present invention, FIG. 2 is a front cross-sectional view showing a container of the apparatus shown in FIG. 1, and FIG. 3 includes a partial cross-section of FIG. 2. FIG. 4 is a schematic cross-sectional view showing a conventional example of a semiconductor manufacturing apparatus, FIG. 5 is a front cross-sectional view showing a carrier of the apparatus shown in FIG. 4, and FIG. 6 is a side view including a partial cross-section of FIG. 5. 1... Semiconductor wafer (wafer), 7... Chemical solution, 15... Semiconductor manufacturing equipment, 16... Container, 1
6a, 16b...upper and lower ends, 19...liquid recovery tank,
20...Liquid supply port.
Claims (1)
部に複数の半導体ウエーハを定ピツチで整列保持
した保水性の容器と、 上記容器の下端開口部が給液口に連結され、且
つ、該給液口から容器の下端開口部を介して容器
内に供給されて半導体ウエーハを液処理する薬液
を、容器の上端開口部からオーバーフローさせて
回収する液回収槽とを含むことを特徴とする半導
体製造装置。[Scope of Claim for Utility Model Registration] A water-retentive container that has a funnel shape with open upper and lower ends and holds a plurality of semiconductor wafers arranged at regular pitches inside, and a lower end opening of the container that supplies liquid. a liquid recovery tank that is connected to the opening of the container and that collects a chemical solution that is supplied from the liquid supply opening into the container through the lower end opening of the container and treats semiconductor wafers by overflowing from the upper end opening of the container; A semiconductor manufacturing device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (en) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (en) | 1986-07-29 | 1986-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322732U true JPS6322732U (en) | 1988-02-15 |
| JPH0128677Y2 JPH0128677Y2 (en) | 1989-08-31 |
Family
ID=31000758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11629986U Expired JPH0128677Y2 (en) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128677Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051267A (en) * | 2011-08-30 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | Tank carrier and substrate processing apparatus |
-
1986
- 1986-07-29 JP JP11629986U patent/JPH0128677Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051267A (en) * | 2011-08-30 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | Tank carrier and substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128677Y2 (en) | 1989-08-31 |
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