JPS6322729U - - Google Patents

Info

Publication number
JPS6322729U
JPS6322729U JP11688486U JP11688486U JPS6322729U JP S6322729 U JPS6322729 U JP S6322729U JP 11688486 U JP11688486 U JP 11688486U JP 11688486 U JP11688486 U JP 11688486U JP S6322729 U JPS6322729 U JP S6322729U
Authority
JP
Japan
Prior art keywords
support substrate
counter electrode
reaction chamber
thin film
magnetic poles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11688486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11688486U priority Critical patent/JPS6322729U/ja
Publication of JPS6322729U publication Critical patent/JPS6322729U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11688486U 1986-07-30 1986-07-30 Pending JPS6322729U (tr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11688486U JPS6322729U (tr) 1986-07-30 1986-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11688486U JPS6322729U (tr) 1986-07-30 1986-07-30

Publications (1)

Publication Number Publication Date
JPS6322729U true JPS6322729U (tr) 1988-02-15

Family

ID=31001891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11688486U Pending JPS6322729U (tr) 1986-07-30 1986-07-30

Country Status (1)

Country Link
JP (1) JPS6322729U (tr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121629A (en) * 1980-02-29 1981-09-24 Canon Inc Film forming method
JPS58132920A (ja) * 1982-02-01 1983-08-08 Kanegafuchi Chem Ind Co Ltd アモルフアスシリコン系半導体の製造方法
JPS59161812A (ja) * 1983-03-07 1984-09-12 Hitachi Ltd プラズマｃｖｄ装置
JPS60234313A (ja) * 1984-05-07 1985-11-21 Hitachi Ltd プラズマ処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56121629A (en) * 1980-02-29 1981-09-24 Canon Inc Film forming method
JPS58132920A (ja) * 1982-02-01 1983-08-08 Kanegafuchi Chem Ind Co Ltd アモルフアスシリコン系半導体の製造方法
JPS59161812A (ja) * 1983-03-07 1984-09-12 Hitachi Ltd プラズマｃｖｄ装置
JPS60234313A (ja) * 1984-05-07 1985-11-21 Hitachi Ltd プラズマ処理装置

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