JPH0444364U - - Google Patents
Info
- Publication number
- JPH0444364U JPH0444364U JP8727090U JP8727090U JPH0444364U JP H0444364 U JPH0444364 U JP H0444364U JP 8727090 U JP8727090 U JP 8727090U JP 8727090 U JP8727090 U JP 8727090U JP H0444364 U JPH0444364 U JP H0444364U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode support
- plasma processing
- support rod
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8727090U JPH0444364U (tr) | 1990-08-20 | 1990-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8727090U JPH0444364U (tr) | 1990-08-20 | 1990-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0444364U true JPH0444364U (tr) | 1992-04-15 |
Family
ID=31819479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8727090U Pending JPH0444364U (tr) | 1990-08-20 | 1990-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444364U (tr) |
-
1990
- 1990-08-20 JP JP8727090U patent/JPH0444364U/ja active Pending
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