JPS63227035A - Substrate container - Google Patents
Substrate containerInfo
- Publication number
- JPS63227035A JPS63227035A JP62061618A JP6161887A JPS63227035A JP S63227035 A JPS63227035 A JP S63227035A JP 62061618 A JP62061618 A JP 62061618A JP 6161887 A JP6161887 A JP 6161887A JP S63227035 A JPS63227035 A JP S63227035A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- cutouts
- hanger
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 5
- 235000012431 wafers Nutrition 0.000 description 21
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、主として、半導体製造分野においてウェハー
の保持、搬送に利用される基板格納具に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates primarily to a substrate storage device used for holding and transporting wafers in the field of semiconductor manufacturing.
従来の技術
近年、最も広く使用されている基板格納具、いわゆる、
ウェハーカセットは、第３図の斜視展開図に示すように
、ウェハーカセット１の外側にカセットハンガー２との
接触部分を持っており、カセットハンガー２はカセット
ｇ４壁部の棚部４の側部突端の四点支持でハンガー２の
係合部分５をウェハーカセット１に取り付けられるよう
になっている。Prior Art In recent years, the most widely used board storage device, the so-called
As shown in the perspective development view of FIG. 3, the wafer cassette has a contact portion with a cassette hanger 2 on the outside of the wafer cassette 1, and the cassette hanger 2 is attached to the side protrusion of the shelf 4 on the wall of the cassette g4. The engaging portion 5 of the hanger 2 can be attached to the wafer cassette 1 with four-point support.
発明が解決しようとする問題点
上記第３図示のような従来の技術においては、ウェハー
カセット１内に納まったウェハーの振動を抑えることは
できない。また、同ウェハーカセット１をカセットハン
ガー２を持って携行する際、カセットハンガー２の強度
不足によってウェハーカセット１の落下事故が発生する
。Problems to be Solved by the Invention In the conventional technique as shown in the third figure above, it is not possible to suppress the vibration of the wafer housed in the wafer cassette 1. Further, when carrying the wafer cassette 1 with the cassette hanger 2, the wafer cassette 1 may fall due to insufficient strength of the cassette hanger 2.
問題点を解決するための手段
本発明は、基板格納用棚部の並設された側壁部に前記棚
部に交差する切り込み部をそなえ、同切り込みにつり手
部を係合させた基板格納具である。Means for Solving the Problems The present invention provides a board storage device in which a side wall of the board storage shelves arranged side by side is provided with a notch that intersects with the shelf, and a hanging handle is engaged with the notch. It is.
作用
本発明によると、ウェハーカセットの切り込みにあてが
ったカセットハンガーにより、ウェハーの振動を抑え、
また、ウェハーカセットの切り込みとカセットハンガー
の接触面積を、従来の技術より大きくすることによって
、ウェハーカセットの落下を防止する。According to the present invention, the cassette hanger applied to the notch of the wafer cassette suppresses the vibration of the wafer.
Further, by making the contact area between the notch of the wafer cassette and the cassette hanger larger than that of the conventional technology, the wafer cassette is prevented from falling.
実施例
第１図に示すウェハーカセット１およびカセットハンガ
ー２において、ウェハーカセット１に、切り込み３をい
れ、ここにカセットハンガー２の係合部分５を嵌め込む
。この状態を第２図に一部断面図で示す。この時にウェ
ハ６は棚部４およびハンガー２の係合部分５によって固
定される。EXAMPLE In the wafer cassette 1 and cassette hanger 2 shown in FIG. 1, a notch 3 is made in the wafer cassette 1, and the engaging portion 5 of the cassette hanger 2 is fitted into the notch 3. This state is shown in a partially sectional view in FIG. At this time, the wafer 6 is fixed by the shelf 4 and the engaging portion 5 of the hanger 2.
発明の効果
本発明によると、ウェハーカセットの切り込みに、カセ
ットハンガーの係合部分を嵌め込むことにより、ウェハ
ーが固定され、振動しなくなる。Effects of the Invention According to the present invention, by fitting the engaging portion of the cassette hanger into the notch of the wafer cassette, the wafer is fixed and does not vibrate.
ウェハーカセットの切り込みとカセットハンガーの係合
部分の形状により、カセットハンガーからウェハーカセ
ットがはずれて落下する事を防止する。The shape of the notch in the wafer cassette and the engaging part of the cassette hanger prevents the wafer cassette from coming off and falling from the cassette hanger.
第１図は本発明実施例の斜視展開図、第２図は同実施例
の一部拡大断面図、第３図は従来例の斜視展開図である
。
１・・・・・・ウェハーカセット、２・・・・・・カセ
ットハンガー、３・・・・・・切り込み部、４・・・・
・・棚部、５・・・・・・係合部分、６・・・・・・ウ
ェハー。
代理人の氏名 弁理士 中尾敏男 ほか１名第１図
第２図
第３図FIG. 1 is a perspective developed view of an embodiment of the present invention, FIG. 2 is a partially enlarged sectional view of the same embodiment, and FIG. 3 is a perspective development view of a conventional example. 1...Wafer cassette, 2...Cassette hanger, 3...Notch, 4...
... Shelf section, 5 ... Engagement part, 6 ... Wafer. Name of agent: Patent attorney Toshio Nakao and one other person Figure 1 Figure 2 Figure 3
Claims (1)
する切り込み部をそなえ、同切り込み部につり手部を係
合させた基板格納具。1. A substrate storage device, wherein a side wall of the board storage shelves arranged side by side is provided with a notch that intersects with the shelves, and a hanging handle is engaged with the notch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62061618A JPS63227035A (en) | 1987-03-17 | 1987-03-17 | Substrate container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62061618A JPS63227035A (en) | 1987-03-17 | 1987-03-17 | Substrate container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63227035A true JPS63227035A (en) | 1988-09-21 |
Family
ID=13176342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62061618A Pending JPS63227035A (en) | 1987-03-17 | 1987-03-17 | Substrate container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63227035A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278104A (en) * | 1989-07-25 | 1994-01-11 | Kabushiki Kaisha Toshiba | Semiconductor wafer carrier having a dust cover |
-
1987
- 1987-03-17 JP JP62061618A patent/JPS63227035A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278104A (en) * | 1989-07-25 | 1994-01-11 | Kabushiki Kaisha Toshiba | Semiconductor wafer carrier having a dust cover |
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