JPH0513559A - Adapter for wafer insertion - Google Patents

Abstract

PURPOSE:To insert a wafer to a wafer case accurately and straightly as fitted to both sides and to prevent cracks of the wafer in the case by mounting an adapter with a hole wherethrough the wafer can pass on the upper side of the wafer case. CONSTITUTION:When a wafer 1 is inserted, an adapter 2 for wafer insertion is mounted on the upper side of a wafer case 3, the wafer 1 is fixed to a hole 5 wherethrough the wafer 1 can pass formed in its substrate main body 2a, and the wafer 1 is made go inside the case as held by tweezers. Then, the wafer 1 can be easily brought into contact with opposing knurls of both longer sides of a case opening and inserted the case using the hole 5 as a guide; therefore, it is possible to insert the wafer 1 accurately and straightly as fitted to both sides independent of deviated knurls of the both sides even at a central part of the wafer case 3. Therefore, the wafer 1 does not break inside the case.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer insertion adapter used for inserting a wafer into a wafer case used for transferring the wafer.

[0002]

2 and 3 are views showing a state in which a wafer is inserted into a wafer case. In the figure, (1)
Is a wafer, and (3) is a wafer case, and a plurality of guide grooves for inserting the wafer are provided on two opposite sides in the case. Further, (6) is a wafer that is normally inserted in the case, and (7) is a wafer that is inserted while being displaced in the case.

Next, a method of storing wafers will be described. When the wafer (1) is inserted into the wafer case (3), the wafer (1) is inserted in parallel with the notches (4) on both sides of the case as marks, but as shown in FIG. Since it is difficult to correspond to the notches (guide grooves) and the case may be inserted while being displaced in the case, if the case is moved while inserting the case, the wafer (1) may be broken in the case during movement.

[0004]

Since the conventional wafer case is constructed as described above, it is difficult to distinguish the dents on both sides at the center of the wafer case when the wafer is inserted, and the wafers cannot be stored in parallel in the case. However, there is a problem that the wafer is broken in the case.

The present invention has been made to solve the above problems, and when a wafer is inserted into a wafer case, the wafer is inserted in parallel even at the center of the case without being caught by the misaligned steps on both sides. It is an object of the present invention to obtain a wafer insertion adapter that can prevent the wafer from cracking in the case.

[0006]

A wafer insertion adapter according to the present invention has a hole through which a wafer can pass in a main body of a substrate, and a mounting device for mounting the adapter on the upper side of a wafer case at the lower part of the substrate. It is a thing.

[0007]

Since the wafer insertion adapter according to the present invention is constructed as described above, by mounting the adapter on the upper side of the case and inserting the wafer through the hole through which the wafer passes, both sides of the case center can be removed. The wafer can be inserted into the opposed steps without being caught by the misaligned steps, and the wafer will not be broken in the case.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a wafer insertion adapter according to an embodiment of the present invention. In the figure, (1) is the wafer, (2) is the wafer insertion adapter, (3) is the wafer case, (4) is the notch on both sides of the wafer case, and (5) is the hole in the base body of the adapter (2). There is a hole (5b) widened in the center so that the tweezers sandwiching the wafer reach the inner part as shown in Fig. 4 (a). A groove (5a) is formed. (8) is a mounting device provided on the lower part of the base body of the adapter (2), and the width of the mounting device is gradually narrowed toward the tip so that the already stored wafer does not get in the way when mounted on the wafer case. It has a shape.

Next, the operation and effect will be described. Wafer
(1) When inserted, as shown in Fig. 4 (b), the wafer case (3)
When the wafer insertion adapter is attached to the upper side of the wafer, the wafer is attached to the hole formed in the base body through which the wafer can pass, and the wafer is inserted toward the inside of the case while sandwiching the wafer with tweezers, As shown in FIG. 4 (c), the wafer (1) can be inserted into the inside of the case by easily abutting the notches on both long sides of the case opening, using the hole as a guide. The wafer (1) can be inserted side by side, that is, in a straight line without being caught by the misaligned steps on both sides even in the central part of (). Therefore, the wafer is not broken in the case.

[0010]

As described above, according to the wafer insertion adapter of the present invention, a hole for allowing a wafer to pass through is formed in the base body, and the adapter for mounting the main adapter on the upper side of the wafer case is attached to the lower part of the base body. Since a container is provided, when a wafer is inserted into the wafer case, an adapter with a hole through which the wafer passes is attached to the upper side of the case, and the wafer is automatically inserted through both holes by inserting the wafer through the hole. It is inserted into the case in parallel with the steps facing each other, and the wafer is prevented from being inserted into the misaligned steps on both sides of the wafer case, which has an effect of preventing the cracking of the wafer in the wafer case.

[Brief description of drawings]

FIG. 1 is a diagram showing a state when a wafer is inserted into a wafer case using a wafer insertion adapter according to an embodiment of the present invention.

FIG. 2 is a diagram showing a state in which a conventional wafer is inserted into a wafer case.

FIG. 3 is a view showing a state in which a conventional wafer is inserted in a wafer case.

FIG. 4 is a diagram showing in more detail a wafer insertion adapter according to an embodiment of the present invention, FIG. 4 (a) is a perspective view showing a more detailed configuration of the adapter, and FIGS. 4 (b) and 4 (c) are FIG. It is sectional drawing which shows the usage method.

[Explanation of symbols]

 1 Wafer 2 Wafer Insertion Adapter 2a Base Body 3 Wafer Case 4 Steps on Both Sides of Wafer Case 5 Holes for Wafers in Adapter to Pass Through 6 Wafers Correctly Inserted in Case 7 Wafers Misaligned in Case 8 Adapter mounting device

Claims (1)

Claim: What is claimed is: 1. An adapter for inserting a wafer into a wafer case, wherein a plurality of guide grooves for inserting the wafer are provided on two opposite sides of the case. A wafer insertion adapter, characterized in that a hole through which it can pass is formed, and a mounting device for mounting the present adapter on the upper side of the wafer case is provided at the bottom of the base.