JP2009076830A - Substrate storage guide tool and method of manufacturing glass substrate for recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage guide tool excellently and easily taking out a substrate from a substrate storing case, without generating scratch on a glass substrate. <P>SOLUTION: There is provided a substrate storage guide tool which serves a guide for substrates in storing the substrates in a substrate storing case including a partially bottomed first frame body with an upper side opened, and has a plurality of grooves on both sides of a pair of opposed faces of the first frame body so that approximately same disc-shaped substrates can be inserted into the grooves so as to be mounted on the substrate storing case in an upright state to be arranged in a thickness direction thereof. This substrate storage guide tool includes a second frame body being vertically opened, having a plurality of guide grooves on both sides of a pair of opposed faces of the second frame body for guiding the substrates to the grooves of the substrate storing case on which the substrates are mounted, with the upper end of the guide grooves set to be higher than the upper end of the outer periphery of the substrates stored in the substrate storing case on which the substrates are mounted. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate storage guide jig and a method for manufacturing a glass substrate for a recording medium.

  Conventionally, as a recording medium substrate, aluminum alloys are used for stationary information devices such as desktop computers and servers, and glass substrates are generally used for portable information devices such as notebook computers and mobile computers. It had been. Since the aluminum alloy is easily deformed and has insufficient hardness, the smoothness of the substrate surface after polishing cannot be said to be sufficient. Further, when the recording head mechanically contacts the magnetic disk, there is a problem that the magnetic film is easily peeled off from the substrate. Therefore, glass substrates with little deformation, good smoothness, and high mechanical strength will be widely used not only for portable devices but also for home-use devices such as stationary information devices and other televisions in the future. It is predicted.

  A glass substrate for a recording medium is manufactured by forming a disk-shaped glass plate called a blank material by a press molding method or the like and then performing several polishing steps. The work in progress while becoming a glass substrate for a recording medium completed as a product from such a blank material is hereinafter referred to as a glass substrate. In the manufacturing process of the glass substrate for recording media, there may be a case where a substrate storage case is used for efficiently moving and storing a plurality of glass substrates simultaneously.

  As an example of the substrate storage case, there is a so-called carrier or process cassette that is made of plastic and the like as shown in FIG. As shown in FIG. 5, the glass substrate 50 stands up and is stored in the process cassette in a state of being separated and arranged regularly.

  FIG. 5A is a top view schematically showing a state in which eight glass substrates 50 are held in the process cassette 100. FIG. 5B is a front view schematically showing the process cassette 100 from the flat surface side of the glass substrate 50 being held.

  As shown in FIG. 5, the process cassette 100 is open on the upper side so that a disk-shaped glass substrate 50 can be taken in and out freely. The outer periphery of the glass substrate 50 is guided to the pair of opposing surfaces of the frame 102 in the direction of the thickness of the glass substrate 50 so that the glass substrates 50 are arranged at equal intervals. A groove 105 is provided for holding the glass substrate 50 in an upright state during storage. The bottom portion 106 is positioned at the center between a pair of opposing surfaces of the frame body 102 and has a predetermined length across both ends of the frame body 102 along the direction in which the plurality of grooves 105 of the inner wall surface 103 are arranged. There is an opening 108 having a substantially rectangular width, and the glass substrate 50 is held so as not to fall.

As an example of a jig for taking in and out the glass substrate 50 from such a process cassette 100, there is the following glass substrate operation jig (see Patent Document 1). The glass substrate operating jig is provided on the support column, the foot unit that fixes the support column to the installation surface, the arm unit having the mounting unit for mounting the glass substrate, and the horizontal unit that moves the arm unit in the horizontal direction. A moving mechanism and a vertical moving mechanism that is provided on the support and moves the arm portion in the vertical direction are provided. That is, the process cassette is installed so that the flat portion of the glass substrate accommodated is in the horizontal direction. Next, the arm part of the glass substrate operating jig is horizontally moved and inserted into the gap between the glass substrates stored therein. Next, vertically move the arm part so that it floats from the support piece of the process cassette holding the glass substrate, and keep the glass substrate floating from the support piece so that the arm part is pulled out from the process cassette. The glass substrate is taken out from the process cassette.
JP 2002-255342 A

  In the process cassette 100 shown in FIG. 5, the interval in which the glass substrates 50 are accommodated is about 5 mm to 7 mm, although it depends on the process cassette to be used. For this reason, when the glass substrate 50 is accommodated in the process cassette 100, it may come into contact with the vicinity of the upper end of the outer periphery of the glass substrate 50 that is already accommodated, for example, and may be damaged. Further, depending on the process cassette 100, the depth of the facing groove 105 is too shallow, and the glass substrate 50 is mistakenly placed in the groove 105 adjacent to the facing groove 105 instead of the facing groove 105, and taken out. In some cases, it may take a long time or may be damaged during removal.

  The glass substrate operation jig described in Patent Document 1 is a jig that assumes a large glass substrate of 1 m × 1 m or the like, but the method of storing the glass substrate in a process cassette is a small recording medium glass substrate. You can do it in the same way. However, manual operation is complicated, and automatic control using a motor or the like results in an expensive and large-scale device.

  The present invention has been made in view of the above-mentioned problems, and its object is to easily and efficiently store a glass substrate in a substrate storage case (process cassette) without causing damage to the glass substrate. It is to provide a substrate storage guide jig that can be used, and a method for manufacturing a glass substrate for a recording medium using the substrate storage guide jig.

  Said subject is solved by the following structures.

1. Opened on the upper side, consisting of a partly bottomed first frame,
A plurality of grooves on both sides of a pair of opposing surfaces of the first frame,
The substantially identical disk-shaped substrate inserted into the groove is placed in a standing state on a substrate storage case arranged and stored in the thickness direction of the substrate, and the substrate is placed on the substrate A substrate storage guide jig that serves as a guide for the substrate when stored in a storage case,
It consists of a second frame that opens up and down,
A plurality of guide grooves for guiding the substrate to the groove of the substrate storage case to be placed on both surfaces of a pair of opposing surfaces of the second frame;
A substrate storage guide jig, wherein an upper end of the guide groove is higher than an upper end of an outer periphery of the substrate stored in the substrate storage case to be placed.

  2. 2. The substrate storage guide jig according to 1, wherein a width of the guide groove is wider on an opening side than on a bottom side of the guide groove.

  3. 3. The substrate storage guide jig according to claim 1 or 2, wherein the vertical length of the opposing side walls constituting the guide groove is shorter on the opening side than on the bottom side of the guide groove.

  4). The depth of the guide groove is a first groove group constituted by two adjacent guide grooves, and a second groove constituted by two adjacent guide grooves located at positions facing the first groove group. Any one of 1 to 3 characterized in that the substrate cannot pass through two obliquely opposite guide grooves that are not adjacent to each other or face each other among the four guide grooves included in the groove group. The substrate storage guide jig according to one.

  5). The substrate storage guide jig according to any one of 1 to 4, wherein the substrate storage guide jig is made of ABS resin or polyacetal.

  6). 6. The substrate storage guide jig according to any one of 1 to 5, wherein the substrate is a glass substrate made of glass.

7). In the method for producing a glass substrate for a recording medium, comprising the step of polishing the glass substrate,
A method for producing a glass substrate for a recording medium, wherein the substrate storage guide jig according to claim 6 is used.

  The substrate storage guide jig of the present invention is disposed on the substrate storage case, and the substrate inserted into the guide groove is guided into the groove of the substrate storage case. Therefore, the substrate is inserted into the groove of the substrate storage case and stored in the thickness direction. In addition, since the upper end position of the guide groove is located higher than the outer peripheral edge of the glass substrate stored in the substrate storage case, the outer peripheral edge of the substrate is exposed from the upper part of the substrate storage guide jig. Absent. Therefore, when the substrate is inserted into the guide groove of the substrate storage guide jig in order to store the substrate in the substrate storage case, the substrate is not in contact with the already stored substrate, and the substrate is damaged due to contact with each other. Etc. does not occur.

  Accordingly, a substrate storage guide jig capable of easily and efficiently storing a glass substrate in a substrate storage case (process cassette) without causing damage to the substrate, and a recording medium using the substrate storage guide jig A method for producing a glass substrate can be provided.

  Although the present invention will be described based on the illustrated embodiment, the present invention is not limited to the embodiment.

  In the manufacturing process of the glass substrate for recording medium, for example, the process cassette 100 shown in FIG. 5 described so far is used as a substrate storage case used for storage of the disk-shaped glass substrate and movement between the processes.

  When the glass substrate 50 is stored in such a process cassette 100, a substrate storage guide jig 1 according to the present invention as shown in FIG. 1 is used as an example. 1A is a top view, and FIG. 1B is a cross-sectional view taken along line A-A ′ of the top view of FIG.

  As shown in FIGS. 1A and 1B, the substrate storage guide jig 1 has a frame body that is open in the vertical direction, and a pair of opposing surfaces of the frame body 3 have predetermined intervals. There are guide grooves 7 arranged at d1 and facing each other. The interval at which the guide grooves 7 are arranged is the same interval as the grooves 105 in the process cassette 100.

  A method of using the substrate storage guide jig 1 will be described. For example, the process cassette 100 is installed on a workbench, and the substrate storage guide jig 1 is stacked thereon. At the time of installation, the groove 105 of the process cassette 100 and the guide groove 7 of the substrate storage guide jig 1 are set to overlap each other. This is shown in FIG. FIG. 2A is a top view showing a state in which the substrate storage guide jig 1 is overlaid on the process cassette 100 as viewed from above the substrate storage guide jig 1, and FIG. A sectional view taken along line BB ′ of the top view of FIG. A dotted line shown in FIG. 2A indicates the groove 105, the inner wall surface 103, and the like of the process cassette 100 located below the substrate storage guide jig 1. In FIG. 2, the glass substrate 50 is stored in the process cassette 100, and the glass substrate 51 is in the middle of entering the substrate storage guide jig 1.

  As shown in FIG. 2A, the substrate storage guide jig 1 is arranged on the process cassette 100 so that the positions of the groove 105 and the guide groove 7 coincide. In this manner, when the glass substrate 51 is inserted along the guide groove 7 from the upper part of the substrate storage guide jig 1, the glass substrate 51 enters the groove 105 of the process cassette 100 and is stored in an aligned manner. Further, as shown in FIG. 2B, the upper end of the guide groove 7 is positioned higher than the outer peripheral upper end of the glass substrate 50 stored in the substrate storage case 100. For this reason, when the glass substrate 51 is put into the guide groove of the substrate storage guide jig 1, the glass substrate 51 is not touched, and thus the glass substrate 51 is good without being damaged. It can be easily stored in the process cassette 100.

  As shown in FIGS. 1A and 2A, the groove width W of the guide groove 7 of the substrate storage guide jig 1 is preferably wider on the opening side than on the bottom side of the guide groove 7. In this case, when the glass substrate 51 is put into the substrate storage guide jig 1, the glass substrate 51 has a disk shape. Since the glass substrate 51 enters from the vicinity, the glass substrate 51 easily enters the substrate storage guide jig 1. Further, as the glass substrate 51 enters deeper into the substrate storage guide jig 1, the outer periphery of the glass substrate 51 goes toward the frame 3, and the position in the thickness direction of the glass substrate 51 is more at the center of the width of the guide groove 7. It is regulated to be positioned and can be easily stored in the groove 105 of the process cassette 100.

  The glass substrate when using the substrate storing and guiding jig 1 may be wet with a polishing liquid or the like after a polishing process, for example, as will be described later. When a wet glass substrate is stored in the process cassette 100 using the substrate storage guide jig 1, it adheres to the side wall of the guide groove 7 of the substrate storage guide jig 1 due to the surface tension of the liquid and does not fall. In some cases, the process cassette 100 cannot be efficiently stored. Therefore, as shown in FIGS. 1B and 2B, the length L in the vertical direction of the opposing side walls constituting the guide groove 7 is shorter on the opening side than the bottom side of the guide groove 7. It is preferable to do this. In this way, when the glass substrate 51 passes through the guide groove 7, the area where the glass substrate 51 and the side wall of the guide groove 7 face each other is so wide that the glass substrate 51 cannot adhere to the side wall of the guide groove 7 and fall. It can be avoided.

  It is also effective to provide openings such as slits on the side wall through which the glass passes to reduce the substantially opposing area. In any case, the area where the glass substrate 51 and the guide groove 7 face each other when the glass substrate 51 passes through the guide groove 7 (shaded portion 60 in FIG. 3) is 50% or less with respect to the area of the glass substrate 51. It is preferable to be in the range. If it exceeds 50%, the glass substrate 51 may stick to the side wall of the guide groove 7 and may not fall. The lower limit value is not particularly shown, but may be determined as appropriate within a range in which no problem deformation or the like occurs from the viewpoint of the rigidity of the substrate storage guide jig 1.

  FIG. 4 partially shows one glass substrate and the periphery of the guide groove in which the glass substrate is inserted. When the glass substrate can be inserted into the wrong guide groove (FIG. 4A), when it cannot be ( FIG. 4B) is shown. As shown in FIG. 4 (a), when the depth d2 of the opposing guide groove 7 is shallow, the glass substrate 51 is not located in the guide grooves 7a and 7b facing each other but is positioned diagonally opposite the guide groove 7a. There is a case where the guide groove 7c is adjacent to the groove 7b. In this case, one glass substrate occupies the storage space for two glass substrates of the process cassette 100, and there is a case where the glass substrate comes into contact with the glass substrate already stored. In addition, it may take a long time to remove a glass substrate that has entered incorrectly, or may be damaged in some cases.

  In order to prevent this, as shown in FIG. 4B, the depth d2 of the opposing guide groove 7 is increased so that the glass substrate 51 does not enter the opposing guide grooves 7a and 7c diagonally opposite to each other. Is preferred. In FIG. 1 and FIG. 2, the guide groove 7 is separated at the center, but the opposed guide grooves may be continuous.

  The material constituting the substrate storage guide jig 1 is preferably a material that is reasonably soft and has a low water absorption rate that does not cause deformation due to water absorption. For example, ABS resin and polyacetal (Delrin (registered trademark), Duracon (registered trademark), etc.) having a hardness of about 75 to 120 (Rockwell hardness M scale) and a low water absorption of about 0.5% or less are preferable materials. It is done.

  As described above, by using the substrate storage guide jig 1, the glass substrate 50 can be easily and efficiently stored in the process cassette 100 without causing scratches.

  The substrate to which the substrate storage guide jig is applied is not limited to a glass substrate as long as it is a disk-shaped substrate using the process cassette 100, and can be applied to, for example, a silicon wafer.

  Next, the usage example of the board | substrate storage guide jig 1 which concerns on this invention in the manufacturing process of a glass substrate is demonstrated.

(Manufacturing process)
The manufacturing method of the glass substrate for recording media is demonstrated. FIG. 6 is a flowchart showing an example of the manufacturing process of the recording medium glass substrate. First, a glass material is melted (glass melting step), molten glass is poured into a lower mold, and press molding is performed with an upper mold to obtain a disk-shaped glass substrate (precursor) (press molding process). Note that the disk-shaped glass substrate (precursor) may be produced by cutting a sheet glass formed by, for example, a downdraw method or a float method with a grinding stone, without using press molding.

  In the press-molded glass substrate (precursor), a hole is made in the center by a core drill or the like (coring step). Then, both surfaces of the glass substrate are polished, and the overall shape of the glass substrate, that is, the parallelism, flatness and thickness of the glass substrate are preliminarily adjusted (first lapping step).

  Next, after the outer peripheral end face and inner peripheral end face of the glass substrate are chamfered by grinding, the outer diameter and roundness of the glass substrate, the inner diameter of the hole, and the concentricity between the glass substrate and the hole are finely adjusted. (Inner / outer diameter processing step), the inner peripheral end surface of the glass substrate is polished to remove fine scratches (inner peripheral end surface processing step).

  Next, both surfaces of the glass substrate are polished again, and the parallelism, flatness, and thickness of the glass substrate are finely adjusted (second lapping step). And the outer periphery end surface of a glass substrate is grind | polished and a fine crack etc. are removed (outer periphery end surface processing process).

  Next, after the glass substrate is washed, the glass substrate is immersed in a chemical strengthening solution at about 280 ° C. to 660 ° C. to form a chemical strengthening layer on the glass substrate (chemical strengthening step). Thereafter, polishing is performed to precisely finish the surface of the glass substrate (polishing process). Then, cleaning and inspection are performed to obtain a glass substrate for a recording medium as a product.

  In the manufacturing process of the glass substrate for recording medium described above, if the glass substrate has a disk shape and does not need to be used in a high temperature environment such as a chemical strengthening process, the glass substrate is stored and moved between processes. The process cassette 100 shown in FIG. 5 can be used. Further, when the glass substrate is stored in the process cassette 100, the substrate storage guide jig 1 of the present invention can be used. Note that there may be no problem even if the glass substrates are stored and moved by directly stacking them at the initial stage of the manufacturing process, so that the process cassette 100 and the substrate storage guide jig of the present invention are considered in consideration of work efficiency. 1 may be used. In particular, the substrate storing and guiding jig 1 of the present invention is most effective in the polishing process after the chemical strengthening process. In this polishing process, by using the substrate storage guide jig 1 according to the present invention, after the polishing process, the glass substrate can be stored in the process cassette 100 in a good and simple manner so as not to cause scratches on its surface. The surface can be finished precisely and efficiently.

(About glass substrate)
The glass substrate for recording medium to be chemically strengthened is not particularly limited, but soda lime glass mainly composed of silicon dioxide, sodium oxide, calcium oxide; silicon dioxide, aluminum oxide, R ₂ O (R = K, Na, Li) -based aluminosilicate glass; borosilicate glass; lithium oxide-silicon dioxide glass; lithium oxide-aluminum oxide-silicon dioxide glass; R'O-aluminum oxide-silicon dioxide glass (R '= Mg) Ca, Sr or Ba) can be used, and these glass materials may be added with zirconium oxide, titanium oxide or the like.

  If the process cassette is prepared, the size of the glass substrate is not limited, and the substrate storage guide according to the present invention can be applied to a small-diameter disk of 2.5 inches, 1.8 inches, 1 inch, 0.85 inches or less. Tool 1 can be applied. Further, the present invention can be applied to a thin glass substrate having a thickness of 2 mm, 1 mm, 0.63 mm, or less.

(Recording medium manufacturing method)
A recording medium can be produced by forming at least a recording layer on the glass substrate for a recording medium of the present invention. The recording layer is not particularly limited, and various recording layers utilizing properties such as magnetism, light, and magnetomagnetism can be used, but particularly suitable for manufacturing a recording medium (magnetic disk) using a magnetic film as a recording layer. It is. FIG. 7 is a perspective view of the magnetic disk. In the magnetic disk 300, the magnetic film 200 is directly formed on the surface of the recording medium glass substrate 55 manufactured by the manufacturing method described in the above manufacturing process.

  There is no restriction | limiting in particular as a magnetic material used for the magnetic film 200, A well-known material can be selected suitably and can be used. Examples thereof include CoPt, CoCr, CoNi, CoNiCr, CoCrTa, CoPtCr, CoNiPt, CoNiCrPt, CoNiCrTa, CoCrPtTa, and CoCrPtSiO containing Co as a main component. Alternatively, the magnetic film 200 may be divided into non-magnetic films (for example, Cr, CrMo, CrV, etc.) to have a multilayer structure in which noise is reduced.

As the magnetic film 200, magnetic particles such as Fe, Co, CoFe, and CoNiPt are dispersed in a ferrite-based or iron-rare earth-based material, or a nonmagnetic film made of SiO ₂ BN, in addition to the above Co-based material. A granular structure having a different structure can also be used. The magnetic film 200 may be either an in-plane type or a vertical type.

  As a method for forming the magnetic film 200, a known method can be used. For example, a sputtering method, an electroless plating method, a spin coating method, and the like can be given.

The magnetic disk 300 may further be provided with an underlayer, a protective layer, a lubricating layer, and the like as necessary. Any of these layers can be used by appropriately selecting a known material. Examples of the material for the underlayer include Cr, Mo, Ta, Ti, W, V, B, Al, and Ni. Examples of the material for the protective layer include Cr, Cr alloy, C, ZrO ₂ , and SiO ₂ . Moreover, as a lubrication layer, the thing etc. which apply | coated the liquid lubricant which consists of perfluoro polyether (PFPE) etc., and heat-processed as needed are mentioned, for example.

It is a schematic diagram which shows one Embodiment of a board | substrate storage guide jig. It is a figure explaining the method of accommodating a glass substrate in a process cassette using a substrate accommodation guide jig. It is a figure explaining the state where the side wall of the guide groove of a board | substrate accommodation guide jig and a glass substrate oppose when accommodating a glass substrate. It is a figure explaining the depth of the guide groove which opposes in a board | substrate storage guide jig, and the insertion state of a glass substrate. It is a schematic diagram which shows the example of the process cassette used at the manufacturing process of a glass substrate. It is a flowchart which shows the example of the manufacturing process of the glass substrate for recording media. It is a perspective view containing the partial cross section of a magnetic disc.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate storage guide jig 3, 102 Frame 7 Guide groove 50, 51 Glass substrate 55 Glass substrate for recording medium 100 Process cassette 105 Groove 106 Bottom portion 108 Opening portion 200 Magnetic film 300 Magnetic disk d1 Interval d2 Depth L Length W Groove width

Claims (7)

Opened on the upper side, consisting of a partly bottomed first frame,
A plurality of grooves on both sides of a pair of opposing surfaces of the first frame,
The substantially identical disk-shaped substrate inserted into the groove is placed in a standing state on a substrate storage case arranged and stored in the thickness direction of the substrate, and the substrate is placed on the substrate A substrate storage guide jig that serves as a guide for the substrate when stored in a storage case,
It consists of a second frame that opens up and down,
A plurality of guide grooves for guiding the substrate to the groove of the substrate storage case to be placed on both surfaces of a pair of opposing surfaces of the second frame;
A substrate storage guide jig, wherein an upper end of the guide groove is higher than an upper end of an outer periphery of the substrate stored in the substrate storage case to be placed. 2. The substrate storage guide jig according to claim 1, wherein the width of the guide groove is wider on the opening side than on the bottom side of the guide groove. The substrate storage guide jig according to claim 1 or 2, wherein the length of the opposing side walls constituting the guide groove in the vertical direction is shorter on the opening side than on the bottom side of the guide groove. The depth of the guide groove is a first groove group constituted by two adjacent guide grooves, and a second groove constituted by two adjacent guide grooves located at positions facing the first groove group. 4. The depth according to claim 1, wherein, of the four guide grooves included in the groove group, the depth is such that the substrate cannot pass through the two obliquely opposite guide grooves that are not adjacent to each other and face each other. The substrate storage guide jig according to any one of the above. The substrate storage guide jig according to any one of claims 1 to 4, wherein the substrate storage guide jig is made of ABS resin or polyacetal. The substrate storage guide jig according to any one of claims 1 to 5, wherein the substrate is a glass substrate made of glass. In the method for producing a glass substrate for a recording medium, comprising the step of polishing the glass substrate,
A method for producing a glass substrate for a recording medium, wherein the substrate storage guide jig according to claim 6 is used.

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