JPS63221878A - 超音波洗浄装置 - Google Patents
超音波洗浄装置Info
- Publication number
- JPS63221878A JPS63221878A JP5354387A JP5354387A JPS63221878A JP S63221878 A JPS63221878 A JP S63221878A JP 5354387 A JP5354387 A JP 5354387A JP 5354387 A JP5354387 A JP 5354387A JP S63221878 A JPS63221878 A JP S63221878A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- cleaning liquid
- ultrasonic
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 106
- 239000007788 liquid Substances 0.000 claims description 59
- 238000009835 boiling Methods 0.000 claims description 31
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 6
- 238000007872 degassing Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 5
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- -1 deposits Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5354387A JPS63221878A (ja) | 1987-03-09 | 1987-03-09 | 超音波洗浄装置 |
| US07/130,552 US4907611A (en) | 1986-12-22 | 1987-12-09 | Ultrasonic washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5354387A JPS63221878A (ja) | 1987-03-09 | 1987-03-09 | 超音波洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63221878A true JPS63221878A (ja) | 1988-09-14 |
| JPH0437754B2 JPH0437754B2 (enrdf_load_stackoverflow) | 1992-06-22 |
Family
ID=12945714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5354387A Granted JPS63221878A (ja) | 1986-12-22 | 1987-03-09 | 超音波洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63221878A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430686A (en) * | 1987-07-24 | 1989-02-01 | Otsuka Giken Kogyo Kk | Fleon ultrasonic washer |
| US5494063A (en) * | 1994-03-30 | 1996-02-27 | Nec Corporation | Ultrasonic degreasing apparatus |
| US5810037A (en) * | 1994-07-22 | 1998-09-22 | Daido Metal Company Ltd. | Ultrasonic treatment apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5066476U (enrdf_load_stackoverflow) * | 1973-10-18 | 1975-06-14 |
-
1987
- 1987-03-09 JP JP5354387A patent/JPS63221878A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5066476U (enrdf_load_stackoverflow) * | 1973-10-18 | 1975-06-14 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430686A (en) * | 1987-07-24 | 1989-02-01 | Otsuka Giken Kogyo Kk | Fleon ultrasonic washer |
| US5494063A (en) * | 1994-03-30 | 1996-02-27 | Nec Corporation | Ultrasonic degreasing apparatus |
| US5810037A (en) * | 1994-07-22 | 1998-09-22 | Daido Metal Company Ltd. | Ultrasonic treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437754B2 (enrdf_load_stackoverflow) | 1992-06-22 |
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