JPS6322012B2 - - Google Patents

Info

Publication number
JPS6322012B2
JPS6322012B2 JP56028107A JP2810781A JPS6322012B2 JP S6322012 B2 JPS6322012 B2 JP S6322012B2 JP 56028107 A JP56028107 A JP 56028107A JP 2810781 A JP2810781 A JP 2810781A JP S6322012 B2 JPS6322012 B2 JP S6322012B2
Authority
JP
Japan
Prior art keywords
electron beam
sample
circuit
detector
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56028107A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57143253A (en
Inventor
Hiroyasu Harada
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56028107A priority Critical patent/JPS57143253A/ja
Publication of JPS57143253A publication Critical patent/JPS57143253A/ja
Publication of JPS6322012B2 publication Critical patent/JPS6322012B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56028107A 1981-02-27 1981-02-27 Analytical electron microscope Granted JPS57143253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56028107A JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56028107A JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Publications (2)

Publication Number Publication Date
JPS57143253A JPS57143253A (en) 1982-09-04
JPS6322012B2 true JPS6322012B2 (enrdf_load_stackoverflow) 1988-05-10

Family

ID=12239580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56028107A Granted JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Country Status (1)

Country Link
JP (1) JPS57143253A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57143253A (en) 1982-09-04

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