JPS6321577Y2 - - Google Patents
Info
- Publication number
- JPS6321577Y2 JPS6321577Y2 JP1983063187U JP6318783U JPS6321577Y2 JP S6321577 Y2 JPS6321577 Y2 JP S6321577Y2 JP 1983063187 U JP1983063187 U JP 1983063187U JP 6318783 U JP6318783 U JP 6318783U JP S6321577 Y2 JPS6321577 Y2 JP S6321577Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- substrate
- ring
- holding ring
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 83
- 239000002994 raw material Substances 0.000 claims description 9
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318783U JPS59169370U (ja) | 1983-04-27 | 1983-04-27 | 液相エピタキシヤル膜成長用基板ホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318783U JPS59169370U (ja) | 1983-04-27 | 1983-04-27 | 液相エピタキシヤル膜成長用基板ホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59169370U JPS59169370U (ja) | 1984-11-13 |
| JPS6321577Y2 true JPS6321577Y2 (US20100056889A1-20100304-C00004.png) | 1988-06-14 |
Family
ID=30193379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6318783U Granted JPS59169370U (ja) | 1983-04-27 | 1983-04-27 | 液相エピタキシヤル膜成長用基板ホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59169370U (US20100056889A1-20100304-C00004.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015198213A (ja) * | 2014-04-03 | 2015-11-09 | 新日鐵住金株式会社 | エピタキシャル炭化珪素ウェハの製造方法及びそれに用いる炭化珪素単結晶基板のホルダー |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114051U (US20100056889A1-20100304-C00004.png) * | 1974-07-18 | 1976-02-02 |
-
1983
- 1983-04-27 JP JP6318783U patent/JPS59169370U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114051U (US20100056889A1-20100304-C00004.png) * | 1974-07-18 | 1976-02-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59169370U (ja) | 1984-11-13 |
