JPS632150B2 - - Google Patents

Info

Publication number
JPS632150B2
JPS632150B2 JP16533281A JP16533281A JPS632150B2 JP S632150 B2 JPS632150 B2 JP S632150B2 JP 16533281 A JP16533281 A JP 16533281A JP 16533281 A JP16533281 A JP 16533281A JP S632150 B2 JPS632150 B2 JP S632150B2
Authority
JP
Japan
Prior art keywords
voltage
power supply
circuit
voltages
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16533281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5867040A (ja
Inventor
Sadayuki Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP16533281A priority Critical patent/JPS5867040A/ja
Publication of JPS5867040A publication Critical patent/JPS5867040A/ja
Publication of JPS632150B2 publication Critical patent/JPS632150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
JP16533281A 1981-10-16 1981-10-16 半導体装置 Granted JPS5867040A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16533281A JPS5867040A (ja) 1981-10-16 1981-10-16 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16533281A JPS5867040A (ja) 1981-10-16 1981-10-16 半導体装置

Publications (2)

Publication Number Publication Date
JPS5867040A JPS5867040A (ja) 1983-04-21
JPS632150B2 true JPS632150B2 (enrdf_load_stackoverflow) 1988-01-18

Family

ID=15810318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16533281A Granted JPS5867040A (ja) 1981-10-16 1981-10-16 半導体装置

Country Status (1)

Country Link
JP (1) JPS5867040A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200051884A (ko) * 2018-11-05 2020-05-14 삼성디스플레이 주식회사 캐리어, 이를 포함하는 표시 장치의 제조장치 및 표시 장치의 제조방법
WO2020183552A1 (ja) * 2019-03-08 2020-09-17 シャープ株式会社 蒸着装置、および表示装置の製造方法
KR20230068066A (ko) * 2021-11-10 2023-05-17 주식회사 선익시스템 자력 발생 유닛이 적용된 마스크 합착 메커니즘을 구비하는 인라인 증착 시스템
KR20230068065A (ko) * 2021-11-10 2023-05-17 주식회사 선익시스템 자력 차폐 부재가 적용된 마스크 합착 메커니즘을 구비하는 인라인 증착 시스템

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200051884A (ko) * 2018-11-05 2020-05-14 삼성디스플레이 주식회사 캐리어, 이를 포함하는 표시 장치의 제조장치 및 표시 장치의 제조방법
WO2020183552A1 (ja) * 2019-03-08 2020-09-17 シャープ株式会社 蒸着装置、および表示装置の製造方法
KR20230068066A (ko) * 2021-11-10 2023-05-17 주식회사 선익시스템 자력 발생 유닛이 적용된 마스크 합착 메커니즘을 구비하는 인라인 증착 시스템
KR20230068065A (ko) * 2021-11-10 2023-05-17 주식회사 선익시스템 자력 차폐 부재가 적용된 마스크 합착 메커니즘을 구비하는 인라인 증착 시스템

Also Published As

Publication number Publication date
JPS5867040A (ja) 1983-04-21

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