JPS632114Y2 - - Google Patents
Info
- Publication number
- JPS632114Y2 JPS632114Y2 JP11547284U JP11547284U JPS632114Y2 JP S632114 Y2 JPS632114 Y2 JP S632114Y2 JP 11547284 U JP11547284 U JP 11547284U JP 11547284 U JP11547284 U JP 11547284U JP S632114 Y2 JPS632114 Y2 JP S632114Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- nozzle
- tip
- main
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000009423 ventilation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- -1 ICs Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11547284U JPS6129862U (ja) | 1984-07-28 | 1984-07-28 | エア−ガン |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11547284U JPS6129862U (ja) | 1984-07-28 | 1984-07-28 | エア−ガン |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6129862U JPS6129862U (ja) | 1986-02-22 |
| JPS632114Y2 true JPS632114Y2 (enExample) | 1988-01-20 |
Family
ID=30674442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11547284U Granted JPS6129862U (ja) | 1984-07-28 | 1984-07-28 | エア−ガン |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6129862U (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003024830A (ja) * | 2001-07-11 | 2003-01-28 | Hugle Electronics Inc | イオン化エアーガン |
-
1984
- 1984-07-28 JP JP11547284U patent/JPS6129862U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6129862U (ja) | 1986-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4991780A (en) | Duocone spray nozzle | |
| CA2138409A1 (en) | Blast nozzle containing water atomizer for dust control | |
| EP0813897A3 (en) | Dust removing apparatus and dust removing method | |
| CN101414549A (zh) | 基板清洗设备 | |
| IT1249087B (it) | Dispositivo per la pulizia di filtri d'aria | |
| USD280125S (en) | Combined cap and spray tip for spray nozzle assembly | |
| JPS632114Y2 (enExample) | ||
| ZA200103013B (en) | Cold gas-dynamic spraying process. | |
| JPS6018233B2 (ja) | 塵埃除去装置 | |
| JP3173190B2 (ja) | パウダービーム加工機 | |
| HU207673B (en) | Nozzle of flat radius | |
| JPH09139421A (ja) | 内圧調整機構付き薄板収納容器 | |
| JP3002623U (ja) | 工作機械の主軸装置 | |
| JPH0641766Y2 (ja) | 円筒状ワークの内面加工用バイト | |
| JPH0738959B2 (ja) | 噴出流体を旋回させ得るノズル | |
| JPS6326196Y2 (enExample) | ||
| JPH11156130A (ja) | 集塵機用フイルターの再生装置 | |
| CN211536928U (zh) | 具有脉冲反压除灰功能的布袋除尘器 | |
| JP2606042Y2 (ja) | 分離装置 | |
| JPH0126355Y2 (enExample) | ||
| SU1445806A1 (ru) | Циклон | |
| JPS6026820Y2 (ja) | 気体噴射ノズル | |
| JPS6339416U (enExample) | ||
| JPH04505122A (ja) | ガス操作型スプレー装置用ノズル | |
| JPH03119415U (enExample) |