JPS6320443A - Ion plating - Google Patents

Abstract

PURPOSE:To prevent the roughening on the hearth side surfaces of articles to be treated by coating the hearth side outside surfaces of the articles to be treated by using wire nets for partial shielding of a metal or metal compd. and projecting the metal or metal compd. to the articles to be treated. CONSTITUTION:The hearth side outside surfaces of the articles 10 to be treated are coated with the wire nets 12. The metal or metal compd. (Ti) is captured by the wire nets 12, by which the amt. of the metal or metal compd. to be projected to the surfaces of the articles 10 is decreased. The thickness distribution of the films on the outside surfaces of the articles 10 and in the recesses 11 thereof are, therefore, uniformized even if the metal or metal compd. is concentrically projected near to the recesses 11 of the articles 10. The metal (Ti, etc.) from an evaporating source is evaporated to ions by a hollow cathode gun 1 which is the evaporating source in a vacuum vessel 4. The ions are projected together with the gaseous ions from a gas tube 6 to the articles 10. The roughening of the hearth side surfaces of the articles 10 is thereby prevented.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to ion plating, which forms a metal or ceramic film by steaming on the surface of an article to be treated, such as a mechanical component, particularly on the outer surface of the hearth side. This is related to preventing surface roughness.

[Prior Art] FIG. 3 is an explanatory diagram showing an ion plating apparatus. In the figure, 1 is a hollow cathode gun, and 2 is a part to be coated provided above the hollow cathode gun 1 (
Item to be processed) Support jig, 3 is hollow cathode gun 1
4 is a vacuum container surrounding the hollow cathode gun 1 and the jig 2; 5 is a plurality of preheaters provided inside the vacuum container 4; 6 is a vacuum container 4; This is a gas tube that introduces a reaction gas into the chamber. The hollow cathode gun 1, as shown in FIG. A voltage is applied between the tube 8 and the hearth 7 so that the voltage is positive and the Ta tube 8 is negative.

The ion plating apparatus is constructed as described above, and conventional ion plating was performed as follows. That is, the pressure inside the vacuum container 4 is set to 0.02, for example.
Maintaining an atmosphere of argon gas 7 at about ~0.005 Torr, a hollow cathode gun 1, which is a metal evaporation source, is placed above the hollow cathode gun 1.
When a part to be coated is set via jig 2 and a negative voltage is applied between the part and the evaporation source, glow discharge occurs between the part and the surroundings, causing a strong discharge around the part. An electric field is created. In this state, metal (Ti) is removed from the evaporation source.
When evaporated, the evaporated atoms are ionized in the plasma of the glow discharge and become ions, and these ionized evaporated atoms are accelerated by the electric field together with the gas ions and impinge on the target part.As a result, the target part A film was formed on the surface.

[Problems to be Solved by the Invention] In the conventional ion plating as described above, in order to coat the inside of the recessed part of the article to be treated with a metal or metal compound of a predetermined thickness, the ion plating is concentrated in the vicinity of the recessed part. When a metal or a metal compound is irradiated, there is a problem in that the outer surface of the object to be treated on the hearth side becomes rough due to the effect of sputtering.

This invention was made to solve this problem, and even if the metal or metal compound is intensively irradiated near the concave portion of the article to be treated, surface roughness occurs on the outer surface of the article on the hearth side. The aim is to obtain ion plating that does not.

[Means for Solving the Problems] Ion plating according to the present invention involves irradiating a positively charged gaseous metal or metal compound onto an article to be treated to which a negative voltage has been applied. In ion plating in which the surface of the article to be treated is coated with the metal or metal compound, the outer surface of the article to be treated on the hearth side is coated with a wire mesh that partially shields the metal or metal compound, and the metal or metal compound is coated on the outer surface of the article to be treated on the hearth side. It is characterized in that it irradiates.

[Function] In this invention, since the metal or metal compound is irradiated by covering the hearth side outer surface of the article to be treated with a wire mesh that partially shields the metal or metal compound, the wire mesh partially shields the metal. Alternatively, the metal compound is trapped, and the amount of metal or metal compound irradiated onto the hearth-side outer surface of the article to be treated is reduced.

[Example] FIG. 1 is an explanatory diagram showing an embodiment of the present invention. In the figure, 10 is an article to be treated, 11 is a concave portion of the article to be treated, and 12 is an outer surface on the hearth side of the article to be treated 10. This is a wire mesh that covers the The wire mesh 12 has a potential of O to positive.

In the ion plating performed with the arrangement as described above, the metal or metal compound (T i ) is captured by the wire mesh 12, and the amount of metal or metal compound irradiated onto the outer surface a of the hearth side of the article to be processed 10 is reduced. It becomes less. Therefore, even if the metal or metal compound is intensively irradiated near the recess 11 of the article 10 to be treated, surface roughness will not occur on the outer surface of the article 10 on the hearth side. As a result, the thickness distribution of the coating on the outer surface of the article to be treated and within the recesses becomes uniform.

Experimental Example An ion plating experiment was conducted under the conditions that the hole diameter of the concave part of the article to be treated was 30 mmφ, and the distance d≧10 between the outer surface of the article to be treated and the wire mesh. ) is now shown in Figure 342.

This experimental example shows that the method of the present invention enables more uniform vapor deposition and prevents surface roughening compared to the conventional method.

[Effects of the Invention] As explained above, the present invention covers the outer surface of the hearth side of the article to be treated with a wire mesh that partially shields the metal or metal compound, and irradiates the metal or metal compound. The effect is that the metal or metal compound is captured by the wire mesh, the amount of metal or metal compound irradiated to the outer surface of the hearth side of the article to be treated is reduced, and surface roughening of the outer surface of the hearth side of the article to be treated can be prevented. There is.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram showing an embodiment of the present invention, Fig. 2 is a graph showing the relationship between the coating position and the heat film thickness, Fig. 3 is an explanatory diagram of the ion plating device, and Fig. 4 is a hollow cathode. It is an explanatory view of a gun. In the figure, 1 is a hollow cathode gun, 2 is a jig, 3 is a shutter, 4 is a vacuum container, 5 is a preheater, 6 is a gas tube, 7 is a hearth, 8 is a Ta tube, 10 is an article to be processed, 11 is a recess, and 12 is a wire mesh Agent Patent Attorney Masashi Sato Figure 1 Ti″N Ti″N Figure 2 fil [position! Figure 3 J! ! ? ? ') Chart 4 procedural amendment (voluntary)

Claims (1)

[Claims] In ion plating, the surface of the treated article is coated with the metal or metal compound by irradiating a positively charged gaseous metal or metal compound onto the treated article to which a negative voltage has been applied, Ion plating characterized in that the metal or metal compound is irradiated by covering the hearth side outer surface of the article to be processed with a wire mesh that partially shields the metal or metal compound.