JPS6320442A - Ion plating - Google Patents

Abstract

PURPOSE:To easily control the color tones of films by ion plating by preliminarily forming the film of an oxide or carbide partially or fully on the surface of articles to be treated and projecting a gaseous metal or metal compd. thereto. CONSTITUTION:The film consisting of the carbide, etc., is preliminarily formed on the surface of the articles to be treated consisting of a carbon steel, etc. The above-mentioned articles to be treated are set by means of jigs 2 over a hollow cathode gun 1 and a negative voltage is impressed between the articles to be treated and an evaporating source 7. Positive-charged ions are generated when the metal such as Ti is evaporated in this state from the evaporating source 7. The gaseous Ti is thus projected together with the ions of the reactive gas from a tube 6 onto the articles to be treated. The Ti compd. having the prescribed color tones is thereby formed. The amt. of the film can be controlled simply by controlling the amt. of the carbide, etc.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to ion plating, which forms a metal or ceramic film by vapor deposition on the surface of an article to be processed, such as a mechanical part, and in particular, to improvements in its color tone control technology. It is.

[Prior Art] FIG. 1 is an explanatory diagram showing an ion plating apparatus. In the figure, 1 is a hollow cathode gun, 2 is a jig for supporting a processed article provided above the hollow cathode gun 1, and 3 is an explanatory diagram showing an ion plating apparatus. is a shutter provided between the hollow cathode gun 1 and the jig 2; 4 is a vacuum container surrounding the hollow cathode gun 1 and the jig 2; 5 is a plurality of preheaters provided inside the vacuum container 4; 6 is a gas tube that introduces a reaction gas into the vacuum container 4. The hollow cathode gun 1 is
As shown in the figure, it consists of a hearth 7 made of a water-cooled Cu crucible containing metal Ti inside, and a Ta tube 8 that sprays Ar gas onto the Ti inside the hearth. , voltage is applied so that the hearth 7 is positive and the Ta tube 8 is negative.

The ion plating apparatus is constructed as described above, and conventional ion plating was performed as follows. That is, the pressure inside the vacuum container 4 is set to 0.02, for example.
Maintaining an argon gas atmosphere of about ~0.005 Torr, a hollow cathode gun 1, which is a metal evaporation source, is
When the article to be treated is set via the jig 2 and a negative voltage is applied between the article to be IA and the evaporation source, glow discharge occurs between the article to be treated and the surroundings, A strong electric field is created around the article being treated. When the metal (T i ) is evaporated from the evaporation source in this state, the evaporated atoms are ionized in the plasma of the glow discharge and become ions, and these ionized evaporated atoms are ionized by the reaction gas introduced from the gas tube 6. Together with the ions, they are accelerated by the electric field and incident on the object to be processed, and as a result, a film is formed on the surface of the object to be processed. The color tone of this coating becomes reddish when the amount of N2 contained is large, whitish when the amount of Ti contained is large, and yellowish in the middle.

[Problems to be solved by the invention] In conventional ion plating as described above, the color tone of the film is controlled by the amount of reactant gas introduced, but this reactant gas is fed into the vacuum furnace by a large pressure difference. Since the exact amount of inflow is unknown and the amount of metal evaporated also varies depending on the shape of the hearth pool, it is not possible to precisely control the reaction conditions in the furnace, and therefore the color tone of the coating changes. The problem is that it is extremely difficult to control.

This invention was made to solve this problem, and aims to provide ion plating with easy color tone control.

[Means for Solving the Problems] Ion plating according to the present invention irradiates a positively charged gaseous metal or metal compound onto an article to be treated to which a negative voltage has been applied. In ion plating, in which the surface of an article to be treated is coated with the metal or metal compound, an oxide or carbide film is partially or completely formed on the surface of the article to be treated, and then the metal or metal compound is coated with the metal or metal compound. It is characterized in that it irradiates.

[Effect]

In this invention, since a film of oxide or carbide is partially or completely formed on the surface of the article to be treated before the metal or metal compound is irradiated, the amount of the oxide or carbide is When controlled, a predetermined amount of metal oxide or metal carbide is generated in the coating formed on the surface of the article to be treated.

[Example] An example of the ion plating according to the present invention is as follows. That is, a coating made of carbide is partially or completely formed on the surface of an article to be treated made of carbon steel, and a negative voltage is applied to the article to be treated, so that a positive charge is given to the article to be treated. A Ti compound having a predetermined color tone is formed on the surface of the article to be treated by irradiating gaseous Ti. Here, in order to form a coating made of carbide, the article to be treated is etched with acid, and Fe and C contained in carbon steel are left on the surface.The coating is partially formed in a pattern. For this purpose, tape may be partially attached to the surface of the article to be treated.

In the ion plating performed as described above, a film made of carbide is partially or completely formed on the surface of the object to be treated before Ti is irradiated, so the amount of carbide can be controlled. If this is done, a predetermined amount of metal carbide will be generated in the coating formed on the surface of the article to be treated. Since the amount of carbide is relatively easy to control, the color tone of the coating can be controlled in advance prior to irradiation.

In the above embodiments, a film made of carbide is formed on the surface of the article to be treated, but similar effects can be expected even if an oxide film is formed on the surface of the article to be treated.

[Effects of the Invention] As explained above, in this invention, an oxide or carbide film is partially or completely formed on the surface of an article to be treated, and the amount of oxide or carbide can be controlled relatively easily. Since it is easy to use, it has the effect that the color tone of the formed film can be easily controlled by controlling the amount of this oxide or carbide.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of an ion plating apparatus, and FIG. 2 is an explanatory diagram of a hollow cathode gun. In the figure, 1 is a hollow cathode gun, 2 is a jig, 3 is a shutter, 4 is a vacuum container, 5 is a preheater, 6 is a gas tube, 7 is a hearth, and 8 is a Ta tube. Figure 1 Figure 2

Claims (2)

[Claims] (1) Ion spraying that irradiates a positively charged gaseous metal or metal compound onto an article to be treated to which a negative voltage has been applied to coat the surface of the article with the metal or metal compound. In ion plating, an oxide or carbide film is partially or completely formed on the surface of the article to be treated before the metal or metal compound is irradiated. (2) The ion plating according to claim 1, wherein the metal is Ti.