JPS63201615U - - Google Patents

Info

Publication number
JPS63201615U
JPS63201615U JP9257187U JP9257187U JPS63201615U JP S63201615 U JPS63201615 U JP S63201615U JP 9257187 U JP9257187 U JP 9257187U JP 9257187 U JP9257187 U JP 9257187U JP S63201615 U JPS63201615 U JP S63201615U
Authority
JP
Japan
Prior art keywords
filtration device
safety circuit
motor
vacuum pump
filtration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9257187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353691Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9257187U priority Critical patent/JPH0353691Y2/ja
Publication of JPS63201615U publication Critical patent/JPS63201615U/ja
Application granted granted Critical
Publication of JPH0353691Y2 publication Critical patent/JPH0353691Y2/ja
Expired legal-status Critical Current

Links

JP9257187U 1987-06-16 1987-06-16 Expired JPH0353691Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9257187U JPH0353691Y2 (enExample) 1987-06-16 1987-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9257187U JPH0353691Y2 (enExample) 1987-06-16 1987-06-16

Publications (2)

Publication Number Publication Date
JPS63201615U true JPS63201615U (enExample) 1988-12-26
JPH0353691Y2 JPH0353691Y2 (enExample) 1991-11-25

Family

ID=30954392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9257187U Expired JPH0353691Y2 (enExample) 1987-06-16 1987-06-16

Country Status (1)

Country Link
JP (1) JPH0353691Y2 (enExample)

Also Published As

Publication number Publication date
JPH0353691Y2 (enExample) 1991-11-25

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