JPS63200757U - - Google Patents

Info

Publication number
JPS63200757U
JPS63200757U JP9321087U JP9321087U JPS63200757U JP S63200757 U JPS63200757 U JP S63200757U JP 9321087 U JP9321087 U JP 9321087U JP 9321087 U JP9321087 U JP 9321087U JP S63200757 U JPS63200757 U JP S63200757U
Authority
JP
Japan
Prior art keywords
oxygen sensor
sensor element
electrodes
oxide semiconductor
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9321087U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9321087U priority Critical patent/JPS63200757U/ja
Publication of JPS63200757U publication Critical patent/JPS63200757U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Description

【図面の簡単な説明】
第１図ａ，ｂ及びｃは其々本考案の一実施例の
酸素センサ素子を示す断面図、正面図及び背面図
、第２図は酸化物半導体型酸素センサ素子の一例
の検出回路図、第３図及び第４図は一実施例の素
子を用いた酸素センサの出力電圧と応答時間の関
係を、比較例のそれと対比して示すグラフであつ
て、第３図はリツチからリーンへの変化時を、第
４図はリーンからリツチへの変化時を示すグラフ
、第５図ａ及びｂは其々従来の酸素センサ素子の
一例を示す断面図及び正面図である。 図中、１……チタニア層、１ａ……電極間のチ
タニア層、２，３……電極、４……アルミナ基板
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 耐熱絶縁性基板上に間隔をあけて二本の電極を
    設けるとともに該電極を包覆するかたちで酸化物
    半導体層を設けてなる酸素センサ素子において、
    上記基板に、酸化物半導体層の電極間層部分に被
    測定ガスを直接接触させるための空間を設けたこ
    とを特徴とする酸素センサ素子。
JP9321087U 1987-06-17 1987-06-17 Pending JPS63200757U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9321087U JPS63200757U (ja) 1987-06-17 1987-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9321087U JPS63200757U (ja) 1987-06-17 1987-06-17

Publications (1)

Publication Number Publication Date
JPS63200757U true JPS63200757U (ja) 1988-12-23

Family

ID=30955596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9321087U Pending JPS63200757U (ja) 1987-06-17 1987-06-17

Country Status (1)

Country Link
JP (1) JPS63200757U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007017426A (ja) * 2005-06-06 2007-01-25 National Institute Of Advanced Industrial & Technology 大気中の一酸化炭素や炭化水素の濃度を検出するガスセンサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5722548A (en) * 1980-07-16 1982-02-05 Matsushita Electric Ind Co Ltd Gas sensing element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5722548A (en) * 1980-07-16 1982-02-05 Matsushita Electric Ind Co Ltd Gas sensing element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007017426A (ja) * 2005-06-06 2007-01-25 National Institute Of Advanced Industrial & Technology 大気中の一酸化炭素や炭化水素の濃度を検出するガスセンサ

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