JPS63199044U - - Google Patents
Info
- Publication number
- JPS63199044U JPS63199044U JP8952287U JP8952287U JPS63199044U JP S63199044 U JPS63199044 U JP S63199044U JP 8952287 U JP8952287 U JP 8952287U JP 8952287 U JP8952287 U JP 8952287U JP S63199044 U JPS63199044 U JP S63199044U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive part
- measuring passage
- diaphragm
- proximal end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000009972 noncorrosive effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案を実施せる液圧検出用の半導体
圧力センサの縦断側面図、第２図は同上の別の実
施例装置の縦断側面図である。
図面符号の説明、ａ……ボデイ、ｂ……受圧口
、ｃ……感圧部、ｄ……測圧通路、ｄ′…空室、
ｅ……ダイヤフラム、ｆ……配管、ｑ……液体ま
たは気体、１……接続管部、２……主体部、２０
……下端部、３……保持部、４０……ヘツダ、４
１……シリコン台座、４２……シリコンペレツト
、４３……ワイヤボンド、４４……リード、４５
……真空室、４６……軟質樹脂。
FIG. 1 is a longitudinal sectional side view of a semiconductor pressure sensor for detecting hydraulic pressure in which the present invention can be implemented, and FIG. 2 is a longitudinal sectional side view of another embodiment of the same device. Explanation of drawing symbols, a...Body, b...Pressure receiving port, c...Pressure sensing part, d...Pressure measuring passage, d'...Vacant room,
e...diaphragm, f...piping, q...liquid or gas, 1...connecting pipe section, 2...main body part, 20
...lower end, 3...holding section, 40...header, 4
1...Silicon pedestal, 42...Silicon pellet, 43...Wire bond, 44...Lead, 45
...Vacuum chamber, 46...Soft resin.
Claims (1)
に、基端側には受圧口を開放して他端側には半導
体よりなる感圧部を取付け、該ボデイ内には、受
圧口と感圧部の周囲とを連通するよう測圧通路を
形成し、その測圧通路の途中にダイヤフラムを設
け、その測圧通路の前記ダイヤフラムより感圧部
側に非腐蝕性の気体または液体を封入してなる液
圧検出用の半導体圧力センサ。 A cylindrical body is provided with a connecting tube on the proximal end, a pressure receiving port is open on the proximal end, and a pressure sensitive part made of a semiconductor is attached to the other end. A pressure measuring passage is formed to communicate with the surroundings of the pressure sensitive part, a diaphragm is provided in the middle of the pressure measuring passage, and a non-corrosive gas or liquid is supplied to the side of the pressure sensitive part from the diaphragm of the pressure measuring passage. A sealed semiconductor pressure sensor for detecting liquid pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8952287U JPS63199044U (en) | 1987-06-10 | 1987-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8952287U JPS63199044U (en) | 1987-06-10 | 1987-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63199044U true JPS63199044U (en) | 1988-12-21 |
Family
ID=30948581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8952287U Pending JPS63199044U (en) | 1987-06-10 | 1987-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63199044U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006528365A (en) * | 2003-05-16 | 2006-12-14 | ローズマウント インコーポレイテッド | Pressure sensor capsule |
| JP2013506841A (en) * | 2009-10-01 | 2013-02-28 | ローズマウント インコーポレイテッド | Pressure transmitter with pressure sensor mount |
| JP2017514138A (en) * | 2014-04-25 | 2017-06-01 | ローズマウント インコーポレイテッド | Corrosion resistant pressure module for process fluid pressure transmitter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56154638A (en) * | 1980-04-30 | 1981-11-30 | Toshiba Corp | Semiconductor pressure converter |
-
1987
- 1987-06-10 JP JP8952287U patent/JPS63199044U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56154638A (en) * | 1980-04-30 | 1981-11-30 | Toshiba Corp | Semiconductor pressure converter |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006528365A (en) * | 2003-05-16 | 2006-12-14 | ローズマウント インコーポレイテッド | Pressure sensor capsule |
| JP4815350B2 (en) * | 2003-05-16 | 2011-11-16 | ローズマウント インコーポレイテッド | Pressure sensor capsule |
| JP2013506841A (en) * | 2009-10-01 | 2013-02-28 | ローズマウント インコーポレイテッド | Pressure transmitter with pressure sensor mount |
| JP2017514138A (en) * | 2014-04-25 | 2017-06-01 | ローズマウント インコーポレイテッド | Corrosion resistant pressure module for process fluid pressure transmitter |