JPH0237342U - - Google Patents
Info
- Publication number
- JPH0237342U JPH0237342U JP11576988U JP11576988U JPH0237342U JP H0237342 U JPH0237342 U JP H0237342U JP 11576988 U JP11576988 U JP 11576988U JP 11576988 U JP11576988 U JP 11576988U JP H0237342 U JPH0237342 U JP H0237342U
- Authority
- JP
- Japan
- Prior art keywords
- silicon chip
- measurement fluid
- orifice
- substrate
- support base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図、第３図は第１図の要部構成説明図、第４
図は従来より一般に使用されている従来例の構成
説明図である。
１……オリフイス、１０１，１０２……封入液
、２……フランジ、３……測定流体取入れ口、３
１……取付けアダプタ、３１１……取付けブロツ
ク、３１２……ダイアフラムボデイ、３１３……
シールダイアフラム、４……キヤピラリチユーブ
、５１……支持台、５２……基板、５３……シリ
コンチツプ、５３１……ダイアフラム、５３２…
…第１測定室、５３３……センサ素子、５４……
凹部、５５……第２測定室、５６……ボデイ、５
７……シールダイアフラム、６……ニツプル。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figures 2 and 3 are explanatory diagrams of the main parts of Figure 1, and Figure 4
The figure is an explanatory diagram of the configuration of a conventional example that has been commonly used. 1... Orifice, 101, 102... Filled liquid, 2... Flange, 3... Measured fluid intake, 3
1...Mounting adapter, 311...Mounting block, 312...Diaphragm body, 313...
Seal diaphragm, 4... Capillary tube, 51... Support stand, 52... Substrate, 53... Silicon chip, 531... Diaphragm, 532...
...First measurement chamber, 533...Sensor element, 54...
Recessed portion, 55...Second measurement chamber, 56...Body, 5
7... Seal diaphragm, 6... Nipple.
Claims (1)
り機構と、該オリフイスあるいは絞り機構を挾持
するフランジと、該フランジのオリフイスあるい
は絞り機構の上流側あるいは下流側にそれぞれ設
けられ測定流体を取入れる測定流体取入れ口と、
該測定流体取入れ口の一方に一端が接続されたキ
ヤピラリーチユーブと、該キヤピラリーチユーブ
の他端に一端が連通されたパイプ状の支持台と、
該支持台の他端に一面が接続された基板と、該基
板の他面に一面が接続されたシリコンチツプと、
該シリコンチツプに設けられ該シリコンチツプに
ダイアフラムを形成するとともに前記支持台と連
通する第１測定室を前記基板と構成する凹部と、
前記ダイアフラムに設けられたセンサ素子と、前
記シリコンチツプの外側周囲に設けられ前記他方
の測定流体取入れ口に連通する第２測定室とを具
備してなる一体形差圧センサ。 An orifice or throttle mechanism disposed in the measurement fluid, a flange that clamps the orifice or throttle mechanism, and a measurement fluid intake port provided on the upstream side or downstream side of the orifice or throttle mechanism of the flange to take in the measurement fluid. and,
a capillary reach tube having one end connected to one end of the measurement fluid intake; a pipe-shaped support base having one end communicating with the other end of the capillary reach tube;
a substrate having one side connected to the other end of the support base; a silicon chip having one side connected to the other side of the substrate;
a recess provided in the silicon chip, forming a diaphragm in the silicon chip, and forming a first measurement chamber communicating with the support base with the substrate;
An integrated differential pressure sensor comprising: a sensor element provided on the diaphragm; and a second measurement chamber provided around the outside of the silicon chip and communicating with the other measurement fluid intake.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11576988U JPH073308Y2 (en) | 1988-09-02 | 1988-09-02 | Integrated differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11576988U JPH073308Y2 (en) | 1988-09-02 | 1988-09-02 | Integrated differential pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0237342U true JPH0237342U (en) | 1990-03-12 |
| JPH073308Y2 JPH073308Y2 (en) | 1995-01-30 |
Family
ID=31357718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11576988U Expired - Lifetime JPH073308Y2 (en) | 1988-09-02 | 1988-09-02 | Integrated differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073308Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015160A (en) * | 2011-06-30 | 2013-01-24 | Kitz Corp | Ball valve with flow rate measurement function and automatic ball valve thereof |
-
1988
- 1988-09-02 JP JP11576988U patent/JPH073308Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015160A (en) * | 2011-06-30 | 2013-01-24 | Kitz Corp | Ball valve with flow rate measurement function and automatic ball valve thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073308Y2 (en) | 1995-01-30 |